Film forming device

Abstract

The utility model discloses a film forming device, and belongs to the technical field of semiconductors, and the film forming device comprises a housing which is provided with a reaction chamber and a connecting hole communicated with the reaction chamber; the supporting assembly is arranged around the connecting hole and is positioned outside the reaction chamber; the bearing table comprises a bearing surface facing the reaction chamber; the adjusting assembly is connected with the supporting assembly and the bearing table and comprises a first adjusting piece, a second adjusting piece and a main body part, the first adjusting piece is connected with the main body part and the supporting assembly, and the second adjusting piece is connected with the main body part and the bearing table. The bearing table and the parts arranged on the bearing table can move in the first direction through the first adjusting piece, the inclination degree between the bearing face and the vertical face can be adjusted through the arranged second adjusting piece, so that the inclination angle of the bearing table is adjusted, and the positions of the parts arranged on the bearing table are further adjusted; and the use requirements of parts are met.

Description

Technical Field

[0001] This application belongs to the field of semiconductor technology, and specifically relates to a film forming apparatus. Background Technology

[0002] The film-forming apparatus uses nozzle structures, flow guiding structures, etc. to introduce the reaction gas into the reaction chamber, so that the organometallic compounds diluted in the carrier gas and the hydrides of group V or group VI elements decompose and react on the heated epitaxial substrate. The reaction products are then deposited on the epitaxial substrate to form an epitaxial thin film.

[0003] Once installed, the internal structures, nozzle structures, and flow guiding structures within the reaction chamber are generally immovable, making it inconvenient to adjust their positions as needed. Utility Model Content

[0004] Purpose of the utility model: The embodiments of this application provide a film-forming device, which aims to overcome the technical problem of difficulty in adjusting the position of components inside the reaction chamber.

[0005] Technical solution: A film-forming apparatus according to an embodiment of this application includes:

[0006] The housing has a reaction chamber and a connection hole communicating with the reaction chamber;

[0007] A support assembly is disposed around the connection hole and located outside the reaction chamber;

[0008] A support platform, including a support surface facing the reaction chamber;

[0009] An adjustment assembly is provided, connecting the support assembly and the support platform respectively. The adjustment assembly includes a first adjustment member, a second adjustment member, and a main body. The first adjustment member connects the main body and the support assembly, and the second adjustment member connects the main body and the support platform. The first adjustment member can drive the main body to move relative to the support assembly along a first direction, so that the support platform moves along the first direction. At least two second adjustment members are provided along a second direction for adjusting the inclination of the support surface relative to a vertical plane, where the vertical plane is a plane perpendicular to the first direction.

[0010] In some embodiments, the adjustment assembly includes a third adjustment member, the main body includes a first retaining plate and a second retaining plate, the first retaining plate is connected to the support assembly, the second retaining plate is connected to one side of the first retaining plate along the first direction, and the third adjustment member is used to adjust the connection position of the second retaining plate on the first retaining plate.

[0011] In some embodiments, the support platform has a central axis perpendicular to the support surface, and the second adjusting member connects the second retaining plate and the support platform;

[0012] The first retaining plate has multiple clearance holes, and the second retaining plate has multiple through holes; the second adjusting member includes:

[0013] Multiple straight rods are connected to the support platform and are arranged at intervals around the central axis. Each straight rod passes through a relief hole and a through hole and is spaced apart from the inner wall of the relief hole and the inner wall of the through hole.

[0014] Multiple locking parts, at least two of which lock the straight rod to the second retaining plate on both sides of the through hole.

[0015] In some embodiments, the second adjusting member further includes a spacer portion disposed between the second retaining plate and the locking portion, the spacer portion being configured as a spherical washer.

[0016] In some embodiments, on the side of the second retaining plate facing the support platform, at least two locking portions are provided on the straight rod portion;

[0017] On the side of the second retaining plate away from the bearing platform, at least two locking parts are provided on the straight rod portion.

[0018] In some embodiments, the first retaining plate has a mounting groove on one side along the first direction, and the second retaining plate is disposed in the mounting groove and is movable relative to the first retaining plate in a direction perpendicular to the first direction.

[0019] In some embodiments, the outer periphery of the first retaining plate is provided with a plurality of spaced side holes, the side holes being in communication with the mounting groove;

[0020] The third adjusting member passes through the side hole and is connected to the first retaining plate. The third adjusting member abuts against the second retaining plate. The third adjusting member moves axially along the side hole so that the second retaining plate moves relative to the first retaining plate in a direction perpendicular to the first direction.

[0021] In some embodiments, the adjustment component further includes:

[0022] Multiple limiting members are provided, which are connected to the side of the first holding plate having the mounting groove and abut against the side of the second holding plate opposite to the first holding plate.

[0023] In some embodiments, the first retaining plate has a guide hole; the support assembly includes:

[0024] A first fixing member is connected to the housing, and the first fixing member has a fixing hole communicating with the connecting hole;

[0025] A guide member is connected to the side of the first fixing member opposite to the housing;

[0026] The second fixing member is connected to the end of the guide member that is away from the first fixing member, and the first adjusting member is connected to the main body and the second fixing member;

[0027] The guide hole is sleeved on the guide member and is slidably connected to the guide member.

[0028] In some embodiments, the film-forming device includes:

[0029] A sealing assembly is connected to the carrier platform and the support assembly respectively, and the sealing assembly and the carrier platform cover the connection hole.

[0030] Beneficial Effects: The film-forming apparatus of this application embodiment includes: a housing having a reaction chamber and a connection hole communicating with the reaction chamber; a support assembly disposed around the connection hole and located outside the reaction chamber; a support platform including a support surface facing the reaction chamber; and an adjustment assembly connecting the support assembly and the support platform respectively. The adjustment assembly includes a first adjustment member, a second adjustment member, and a main body. The first adjustment member connects the main body and the support assembly, and the second adjustment member connects the main body and the support platform. The first adjustment member can drive the main body to move relative to the support assembly along a first direction, thereby moving the support platform along the first direction. At least two second adjustment members are provided along a second direction for adjusting the angle between the support surface and a vertical plane, where the vertical plane is a plane perpendicular to the first direction. The first adjustment member allows the support platform and the components mounted on it to move in the first direction. The second adjustment members can adjust the inclination between the support surface and the vertical plane to adjust the inclination angle of the support platform, thereby further adjusting the position of the components mounted on the support platform to meet the needs of component use. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is a partial cross-sectional view of the film-forming apparatus according to an embodiment of this application;

[0033] Figure 2 This is a schematic diagram of the structure of the support component, the support platform, and the adjustment component according to an embodiment of this application;

[0034] Figure 3 This is a schematic diagram of the structure of the first and second retaining plates in the embodiments of this application;

[0035] Figure 4 This is a perspective view of the support component, the support platform, and the adjustment component according to an embodiment of this application;

[0036] Figure 5 This is a schematic diagram of the structure in which the bearing surface is inclined relative to the vertical plane according to an embodiment of this application;

[0037] Figure 6 This is a perspective view of the support components, support platform, and adjustment components from another angle, according to an embodiment of this application.

[0038] Figure 7 This is a schematic diagram of the structure of the second adjusting member and the main body in an embodiment of this application, wherein the straight rod is in a horizontal state;

[0039] Figure 8 This is a schematic diagram of the structure of the second adjusting member and the main body in an embodiment of this application, wherein the straight rod is in an inclined state;

[0040] Figure 9 This is a schematic diagram of the structure of the second adjusting member and the main body in an embodiment of this application, wherein the straight rod is inclined in another direction;

[0041] Figure 10 This is a schematic diagram of the structure of the second adjusting member and the main body in an embodiment of this application, wherein the second adjusting member includes a spacer portion.

[0042] Explanation of reference numerals in the attached drawings: 1-Shell; 10-Reaction chamber; 11-Connecting hole; 2-Support assembly; 20-First fixing member; 201-Fixing hole; 21-Guide member; 22-Second fixing member; 3-Bearing platform; 31-Bearing surface; 32-Central axis; 4-Adjusting assembly; 40-First adjusting member; 41-Second adjusting member; 411-Straight rod part; 412-Locking part; 413-Gap part; 42-Main body part; 421-Leaving hole; 422-First holding part; 423-Through hole; 424-Mounting groove; 425-Second holding part; 427-Side hole; 430-Guide hole; 44-Third adjusting member; 45-Limiting member; 5-Sealing assembly; 6-Vertical surface; X-First direction; Y-Second direction. Detailed Implementation

[0043] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0044] In the description of this application, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, and "at least one" can mean one, two, or more, unless otherwise explicitly specified.

[0045] The film-forming apparatus uses nozzle structures, flow guiding structures, etc. to introduce the reaction gas into the reaction chamber, so that the organometallic compounds diluted in the carrier gas and the hydrides of group V or group VI elements decompose and react on the heated epitaxial substrate. The reaction products are then deposited on the epitaxial substrate to form an epitaxial thin film.

[0046] Once installed, the internal structures, nozzle structures, and flow guiding structures within the reaction chamber are generally immovable, making it inconvenient to adjust their positions as needed.

[0047] In view of the above, embodiments of this application provide a film-forming apparatus to overcome at least one of the above-mentioned technical problems.

[0048] Please see Figure 1 and Figure 2 In this embodiment of the application, the film-forming device includes a housing 1, a support assembly 2, a support platform 3, and an adjustment assembly 4.

[0049] The housing 1 has a reaction chamber 10 and a connection hole 11 communicating with the reaction chamber 10. A support assembly 2 is disposed around the connection hole 11 and located outside the reaction chamber 10. A support platform 3 includes a support surface 31 facing the reaction chamber 10. An adjustment assembly 4 connects the support assembly 2 and the support platform 3 respectively. The adjustment assembly 4 includes a first adjustment member 40, a second adjustment member 41, and a main body 42. The first adjustment member 40 connects the main body 42 and the support assembly 2, and the second adjustment member 41 connects the main body 42 and the support platform 3. The first adjustment member 40 can drive the main body 42 to move relative to the support assembly 2 along a first direction X, so that the support platform 3 moves along the first direction X. At least two second adjustment members 41 are provided along a second direction Y to adjust the inclination of the support surface 31 relative to the vertical plane 6 (inclination refers to the degree of inclination of the support surface 31 relative to the vertical plane 6, such as...). Figure 5 As shown, this can be represented by the included angle α between the two surfaces. The larger the included angle α, the greater the inclination of the bearing surface 31 relative to the vertical surface 6. The vertical surface 6 is a plane perpendicular to the first direction X. Here, the first direction X is the horizontal direction, and the second direction Y is the vertical direction. The first direction X and the second direction Y are perpendicular to each other.

[0050] Understandably, during use, the film-forming apparatus contains numerous components within its internal reaction chamber 10, such as nozzle structures, pipe structures, and flow guiding structures. Some of these components need to be mounted on the bearing surface 31 of the support platform 3. To adjust the position of these structures mounted on the support platform 3, an adjustment assembly 4 can be connected to the support platform 3, allowing for position adjustment. A connection hole 11 communicating with the reaction chamber 10 is provided on the housing 1 of the film-forming apparatus. The support platform 3 can be located either inside or outside the reaction chamber 10. When located outside the reaction chamber 10, the support platform 3 does not occupy space within the reaction chamber 10, improving space utilization. When the support platform 3 is located inside the reaction chamber 10, the adjustment assembly 4 can pass through the connection hole 11 to connect with the support platform 3 within the reaction chamber 10. If the support platform 3 is located outside the reaction chamber 10, some components mounted on the support platform 3 will be located within the connection hole 11.

[0051] The support assembly 2 is connected to the outside of the housing 1 and to the adjustment assembly 4. The support assembly 2 supports and fixes the adjustment assembly 4, ensuring a stable operating state. The first adjustment member 40 and the second adjustment member 41 on the adjustment assembly 4 are connected to the support assembly 2 and the support platform 3, respectively. The first adjustment member 40 and the second adjustment member 41 are connected to each other via the main body 42. The first adjustment member 40 can be a screw structure, connected to the support assembly 2 via threads or a nut, allowing it to move along the first direction X. This, in turn, drives the support platform 3 to move along the first direction X via the main body 42 and the second adjustment member 41, enabling the components mounted on the support platform 3 to move and adjust their positions in the first direction X. There are at least two second adjustment members 41, arranged along the second direction Y, ensuring that the connection points between the second adjustment members 41 and the support platform 3 are also arranged along the second direction Y. By adjusting each second adjustment member 41, the portion of each second adjustment member 41 located between the main body 42 and the support platform 3 maintains a different length (e.g., ...). Figure 8 and Figure 9 As shown, a certain angle will be formed between the bearing surface 31 on the bearing platform 3 and the vertical surface 6 (the vertical surface 6 is a plane perpendicular to the first direction X), which means adjusting the tilt of the bearing platform 3 relative to the vertical state. The bearing platform 3 can tilt in various directions, such as tilting upwards or downwards, or tilting to the left or right, thereby changing the horizontal or verticality of the components set on the bearing platform 3, so as to further adjust the position of the components.

[0052] Please see Figure 3In conjunction with the above embodiments, in some embodiments, the adjusting component 4 includes a third adjusting member 44, the main body 42 includes a first retaining plate 422 and a second retaining plate 425, the first retaining plate 422 is connected to the support component 2, the bearing platform 3 is connected to the second retaining plate 425, and the second retaining plate 425 is connected to one side of the first retaining plate 422 along the first direction X, and the third adjusting member 44 is used to adjust the connection position of the second retaining plate 425 on the first retaining plate 422.

[0053] Understandably, the second retaining plate 425 of the main body 42 is disposed on the first retaining plate 422. The second retaining plate 425 can be disposed on the side of the first retaining plate 422 facing the support platform 3, or it can be disposed on the side of the first retaining plate 422 away from the support platform 3. A third adjusting member 44 is also disposed on the adjusting assembly 4. The third adjusting member 44 is connected to the main body 42, and the position of the second retaining plate 425 of the main body 42 on the first retaining plate 422 can be adjusted by the third adjusting member 44. Since the support platform 3 is connected to the second retaining plate 425 through multiple second adjusting members 41, the third adjusting member 44 can drive the second retaining plate 425 to move in a direction perpendicular to the first direction X, adjusting the position of the second retaining plate 425 on the first retaining plate 422. This can drive the second adjusting member 41, the support platform 3, and the components disposed on the support platform 3 to move in a direction perpendicular to the first direction X, adjusting the position of the components.

[0054] Please see Figure 2 , Figure 4 , Figure 6 and Figure 7 In some embodiments, in conjunction with the above embodiments, the support platform 3 has a central axis 32 perpendicular to the support surface 31, and the second adjusting member 41 connects the second holding plate 425 and the support platform 3. The first holding plate 422 has a plurality of clearance holes 421, and the second holding plate 425 has a plurality of through holes 423; the second adjusting member 41 includes a plurality of straight rod portions 411 and a plurality of locking portions 412. The plurality of straight rod portions 411 are connected to the support platform 3 and are arranged at intervals around the central axis 32. Each straight rod portion 411 passes through a clearance hole 421 and a through hole 423, and is spaced apart from the inner wall of the clearance hole 421 and the inner wall of the through hole 423. At least two locking portions 412 lock the straight rod portions 411 to the second holding plate 425 on both sides of the through hole 423.

[0055] Understandably, the first retaining plate 422 of the main body 42 is provided with a plurality of clearance holes 421, the number of clearance holes 421 being the same as the number of the second adjusting member 41, and their positions corresponding to each other. The second retaining plate 425 is provided with a plurality of through holes 423, each corresponding one-to-one with a clearance hole 421, facilitating the insertion of the straight rod portion 411 on the second adjusting member 41. When the second adjusting member 41 is connected to the main body 42, if the second retaining plate 425 is located on the side of the first retaining plate 422 facing the support platform 3, the straight rod portion 411 first passes through the corresponding through hole 423 on the second retaining plate 425, and then passes through the corresponding clearance hole 421 on the first retaining plate 422; if the second retaining plate 425 is located on the side of the first retaining plate 422 away from the support platform 3, the straight rod portion 411 first passes through the corresponding clearance hole 421 on the first retaining plate 422, and then passes through the corresponding through hole 423 on the second retaining plate 425. Multiple straight rods 411 are arranged at intervals around the central axis 32 of the support platform 3, which allows the multiple straight rods 411 to better drive the support platform 3 to adjust its tilt.

[0056] like Figure 7 As shown, to fix the straight rod portion 411 penetrating the main body portion 42, multiple locking portions 412 can be provided on each straight rod portion 411. Locking portions 412 are provided on the side of the second holding plate 425 facing the support platform 3, and also on the side of the second holding plate 425 away from the support platform 3. By providing locking portions 412 on both sides of the second holding plate 425 along the first direction X, the straight rod portion 411 penetrating the second holding plate 425 can be locked, preventing the straight rod portion 411 from easily moving and improving its stability during use. The locking portion 412 can be a nut structure, and the straight rod portion 411 can be a screw structure. The locking portion 412 and the straight rod portion 411 can be connected by threads, so that the corresponding locking portion 412 abuts against both sides of the second holding plate 425 along the first direction X, preventing the straight rod portion 411 from moving relative to the second holding plate 425. Preferably, the size of the clearance hole 421 is larger than the size of the through hole 423, and the size of the locking part 412 is located between the two, so that part of the locking part 412 can be set inside the corresponding clearance hole 421, thereby connecting with the second retaining plate 425, which makes it easier to adjust the position and length of the straight rod part 411.

[0057] like Figure 8 and Figure 9As shown, in order for the straight rod portion 411 on the second adjusting member 41 to drive the bearing platform 3 to adjust its tilt, a certain distance needs to be maintained between the straight rod portion 411 and the inner wall of the clearance hole 421 and the inner wall of the through hole 423, so that the straight rod portion 411 can tilt relative to the first direction X. When multiple straight rod portions 411 are tilted, the dimensions of the portion located between the bearing platform 3 and the second retaining plate 425 may be different. Figure 8 In the middle section, the upper straight rod portion 411 between the bearing platform 3 and the second retaining plate 425 is shorter, while the lower straight rod portion 411 between the bearing platform 3 and the second retaining plate 425 is longer. Figure 9 The situation of the straight rod section 411 and Figure 8 The opposite is true. By adjusting the length of the portion of the straight rod 411 between the support platform 3 and the second retaining plate 425, the support platform 3 can be tilted in a specific direction as needed, thus adjusting its position. After adjusting the length of the portion of each straight rod 411 between the support platform 3 and the second retaining plate 425, the straight rod 411 can be fixed by the locking part 412.

[0058] Please see Figure 10 In conjunction with the above embodiments, in some embodiments, the second adjusting member 41 further includes a spacer portion 413, which is disposed between the second retaining plate 425 and the locking portion 412, and the spacer portion 413 is configured as a spherical washer.

[0059] It is understood that a spacer 413 can be provided between the locking part 412 and the second retaining plate 425, with the spacer 413 surrounding the corresponding straight rod part 411. The spacer 413 can be a spherical washer with curved surfaces on both sides. By connecting the curved surfaces on both sides to the locking part 412 and the second retaining plate 425 respectively, the friction at the connection can be increased, thereby improving the anti-loosening performance of the locking part 412 and preventing the locking part 412 from loosening due to vibration. The spherical washer can also improve the uniformity of contact stress distribution. Its curved surfaces on both sides can distribute the load to a wider area, avoiding local stress concentration and thus improving the reliability of the connection.

[0060] Please see Figure 7 In conjunction with the above embodiments, in some embodiments, at least two locking portions 412 are provided on the straight rod portion 411 on the side of the second retaining plate 425 facing the support platform 3. On the side of the second retaining plate 425 away from the support platform 3, at least two locking portions 412 are provided on the straight rod portion 411.

[0061] Understandably, to further improve the reliability of the connection between the locking part 412 and the straight rod part 411, at least two locking parts 412 can be provided on the portion of the straight rod part 411 located on the side of the second retaining plate 425 facing the support platform 3, and at least two locking parts 412 can also be provided on the portion of the straight rod part 411 located on the side of the second retaining plate 425 away from the support platform 3. For each straight rod part 411, by providing multiple locking parts 412 on the same side of the second retaining plate 425, a self-locking structure can be formed between these locking parts 412, which can reduce the dependence of the locking degree between the locking part 412 and the second retaining plate 425, ensure that the locking part 412 has a better locking effect on the straight rod part 411, and avoid the locking part 412 from loosening or changing its locking position due to vibration.

[0062] Please see Figure 6 and Figure 7 In conjunction with the above embodiments, in some embodiments, the first retaining plate 422 has a mounting groove 424 on one side along the first direction X, and the second retaining plate 425 is disposed in the mounting groove 424 and can move relative to the first retaining plate along a direction perpendicular to the first direction X.

[0063] It is understood that the mounting groove 424 is located on one side of the first retaining plate 422 along the first direction X, that is, the mounting groove 424 is located on the side of the first retaining plate 422 facing the support platform 3, or the mounting groove 424 is located on the side of the first retaining plate 422 away from the support platform 3. At least a portion of the second retaining plate 425 is disposed within the mounting groove 424, which can reduce the space occupied by the second retaining plate 425. The second retaining plate 425 is spaced apart from the side wall of the mounting groove 424, so that the second retaining plate 425 can move inside the mounting groove 424 in a direction perpendicular to the first direction X, thereby driving the support platform 3 to move in the same direction through the second adjusting member 41, so that the position of the components mounted on the support platform 3 can be adjusted as needed. Figure 3 As shown, the mounting groove 424 and the second retaining plate 425 can be configured as a circular structure, and the second retaining plate 425 can move better inside the mounting groove 424.

[0064] Please see Figure 3 , Figure 6 and Figure 7 In conjunction with the above embodiments, in some embodiments, the outer periphery of the first retaining plate 422 is provided with a plurality of spaced side holes 427, which communicate with the mounting groove 424. The third adjusting member 44 passes through the side hole 427 and is connected to the first retaining plate 422. The third adjusting member 44 is connected to the second retaining plate 425. The third adjusting member 44 moves axially along the side hole 427 so that the second retaining plate 425 moves relative to the first retaining plate 422 in a direction perpendicular to the first direction X.

[0065] Understandably, the third adjusting member 44 allows the second retaining plate 425 to move within the mounting groove 424. Multiple side holes 427, formed around the outer periphery of the first retaining plate 422, surround the second retaining plate 425. Each side hole 427 has a third adjusting member 44 inserted inside it, and the third adjusting member 44 is threadedly connected to the inner wall of the side hole 427. One end of the third adjusting member 44 extends into the mounting groove 424 and abuts against the second retaining plate 425, or is rotatably connected to the second retaining plate 425 via a pivot. The other end of the third adjusting member 44 extends to the outside of the first retaining plate 422. The other end of the third adjusting member 44 can be rotated. Under the action of the thread, the third adjusting member 44 can move along the axial direction of the corresponding side hole 427 (the axial direction of the side hole 427 is perpendicular to the first direction X). The length of one end of the third adjusting member 44 in the mounting groove 424 can be controlled, thereby driving the second retaining plate 425 to move in the mounting groove 424. The direction of movement is perpendicular to the first direction X. The second retaining plate 425 then drives the bearing platform 3 to move through the second adjusting member 41 to achieve the purpose of adjusting the position.

[0066] Please see Figure 6 and Figure 7 In conjunction with the above embodiments, in some embodiments, the adjustment component 4 further includes a plurality of limiting members 45, which are connected to the side of the first holding plate 422 having the above-mentioned mounting groove 424. At least a portion of the limiting members 45 are disposed on the side of the second holding plate 425 away from the first holding plate 422 and abut against the second holding plate 425.

[0067] It is understood that multiple limiting members 45 can be provided on the first retaining plate 422. The positions of the multiple limiting members 45 correspond to the positions of the mounting groove 424 or the second retaining plate 425. If the mounting groove 424 or the second retaining plate 425 is located on the side of the first retaining plate 422 facing the support platform 3, then the multiple limiting members 45 are also located on the side of the first retaining plate 422 facing the support platform 3. If the mounting groove 424 or the second retaining plate 425 is located on the side of the first retaining plate 422 away from the support platform 3, then the multiple limiting members 45 are located on the side of the first retaining plate 422 away from the support platform 3. At least a portion of the limiting members 45 is located on the side of the second retaining plate 425 away from the first retaining plate 422, which can block the second retaining plate 425 and prevent the second retaining plate 425 from falling out of the mounting groove 424. The limiting member 45 can be abutted against the second retaining plate 425, so that the second retaining plate 425 can move in a direction perpendicular to the first direction X under the action of the third adjusting member 44, but cannot move in the first direction X inside the mounting groove 424.

[0068] Please see Figure 2 and Figure 3 In conjunction with the above embodiments, in some embodiments, the first retaining plate has a guide hole 430; the support component 2 includes a first fixing member 20, a guide member 21, and a second fixing member 22.

[0069] A first fixing member 20 is connected to the housing 1, and the first fixing member 20 has a fixing hole 201 communicating with the connecting hole 11. A guide member 21 is connected to the side of the first fixing member 20 away from the housing 1. A second fixing member 22 is connected to the end of the guide member 21 away from the first fixing member 20, and is connected to the first adjusting member 40. The first adjusting member 40 connects the main body 42 and the second fixing member 22. The guide hole 430 of the first holding plate 422 is sleeved on the guide member 21 and is slidably connected to the guide member 21.

[0070] It is understood that the first fixing member 20 on the support assembly 2 is connected to the housing 1. The first fixing member 20 has a ring structure and a fixing hole 201 is formed on its inner side. The fixing hole 201 is connected to the connecting hole 11 on the housing 1, which facilitates the installation of some structures. If the support platform 3 is located inside the reaction chamber 10, the second adjusting member 41 can pass through the fixing hole 201 and the connecting hole 11 to connect with the support platform 3. If the support platform 3 is located outside the reaction chamber 10, the fixing hole 201 can allow the support platform 3 and the components installed on it to pass through. At least one guide member 21 is provided on the side of the first fixing member 20 away from the housing 1. The guide member 21 extends along the first direction X. When there are multiple guide members 21, they can be arranged in a ring. Each guide member 21 is respectively inserted through a corresponding guide hole 430 on the first retaining plate 422, allowing the first retaining plate 422 to slide along the first direction X on the guide member 21. The guide member 21 and the guide hole 430 provide a certain guiding effect for the movement of the first retaining plate 422, improving its stability during movement. A second fixing member 22 is provided at the end of the guide member 21 opposite to the first fixing member 20. The second fixing member 22 can be a circular plate structure, which facilitates connection with the annularly arranged guide members 21. The first adjusting member 40 passes through the interior of the second fixing member 22, and the two are connected by threads, allowing the first adjusting member 40 to drive the main body 42 and the second adjusting member 41 to move along the first direction X.

[0071] Please see Figure 1 In conjunction with the above embodiments, in some embodiments, the film-forming device includes a sealing component 5, which is connected to the support platform 3 and the support component 2 respectively, and the sealing component 5 and the support platform 3 cover the connection hole 11.

[0072] Understandably, to isolate the internal space of the housing 1 from the external environment, a sealing component 5 can be installed between the support platform 3 and the first fixing member 20 on the support assembly 2. One end of the sealing component 5 is connected to the support platform 3, and the other end is connected to the first fixing member 20. Regardless of whether the support platform 3 is located inside or outside the reaction chamber 10, both the sealing component 5 and the support platform 3 can seal the connection hole 11, thus isolating the reaction chamber 10 from the external environment and preventing the external environment from affecting the normal operation of the structure in the reaction chamber 10. The sealing component 5 can be a bellows structure with a certain degree of flexibility to adapt to changes in the position of the support platform 3.

[0073] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0074] The film-forming apparatus provided in the embodiments of this application has been described in detail above, and specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the technical solutions and core ideas of this application. Those skilled in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A film-forming apparatus, characterized in that, include: The housing (1) has a reaction chamber (10) and a connection hole (11) communicating with the reaction chamber (10); A support assembly (2) is disposed around the connection hole (11) and located outside the reaction chamber (10); The support platform (3) includes a support surface (31) facing the reaction chamber (10); An adjustment component (4) is connected to the support component (2) and the support platform (3) respectively. The adjustment component (4) includes a first adjustment member (40), a second adjustment member (41) and a main body (42). The first adjustment member (40) is connected to the main body (42) and the support component (2). The second adjustment member (41) is connected to the main body (42) and the support platform (3). The first adjustment member (40) can drive the main body (42) to move relative to the support component (2) along a first direction (X) so that the support platform (3) moves along the first direction (X). At least two second adjustment members (41) are provided along a second direction (Y) to adjust the inclination of the support surface (31) relative to the vertical surface (6). The vertical surface (6) is a plane perpendicular to the first direction (X).

2. The film-forming apparatus according to claim 1, characterized in that, The adjustment component (4) includes a third adjustment member (44), and the main body (42) includes a first retaining plate (422) and a second retaining plate (425). The first retaining plate (422) is connected to the support component (2), and the second retaining plate (425) is connected to one side of the first retaining plate (422) along the first direction (X). The third adjustment member (44) is used to adjust the connection position of the second retaining plate (425) on the first retaining plate (422).

3. The film-forming apparatus according to claim 2, characterized in that, The support platform (3) has a central axis (32) perpendicular to the support surface (31), and the second adjusting member (41) connects the second retaining plate (425) and the support platform (3); The first retaining plate (422) has a plurality of clearance holes (421), and the second retaining plate (425) has a plurality of through holes (423); the second adjusting member (41) includes: Multiple straight rods (411) are connected to the support platform (3) and are arranged at intervals around the central axis (32). Each straight rod (411) passes through a relief hole (421) and a through hole (423) and is spaced apart from the inner wall of the relief hole (421) and the inner wall of the through hole (423). Multiple locking parts (412), at least two of the locking parts (412) lock the straight rod part (411) to the second retaining plate (425) on both sides of the through hole (423).

4. The film-forming apparatus according to claim 3, characterized in that, The second adjusting member (41) further includes a spacer (413) disposed between the second retaining plate (425) and the locking part (412), and the spacer (413) is configured as a spherical washer.

5. The film-forming apparatus according to claim 3, characterized in that, On the side of the second retaining plate (425) facing the support platform (3), at least two locking parts (412) are provided on the straight rod part (411); On the side of the second retaining plate (425) away from the bearing platform (3), at least two locking parts (412) are provided on the straight rod part (411).

6. The film-forming apparatus according to claim 2, characterized in that, The first retaining plate (422) has a mounting groove (424) on one side along the first direction (X), and the second retaining plate (425) is disposed in the mounting groove (424) and is movable relative to the first retaining plate (422) in a direction perpendicular to the first direction (X).

7. The film-forming apparatus according to claim 6, characterized in that, The outer periphery of the first retaining plate (422) is provided with a plurality of spaced side holes (427), and the side holes (427) are connected to the mounting groove (424); The third adjusting member (44) passes through the side hole (427) and is connected to the first retaining plate (422). The third adjusting member (44) abuts against the second retaining plate (425). The third adjusting member (44) moves along the axial direction of the side hole (427) so that the second retaining plate (425) moves relative to the first retaining plate (422) in a direction perpendicular to the first direction (X).

8. The film-forming apparatus according to claim 6, characterized in that, The adjustment component (4) further includes: Multiple limiting members (45) are connected to the side of the first retaining plate (422) having the mounting groove (424) and abut against the side of the second retaining plate (425) opposite to the first retaining plate (422).

9. The film-forming apparatus according to claim 2, characterized in that, The first retaining plate (422) has a guide hole (430); the support assembly (2) includes: A first fixing member (20) is connected to the housing (1), and the first fixing member (20) has a fixing hole (201) that communicates with the connecting hole (11); A guide member (21) is connected to the side of the first fixing member (20) away from the housing (1); The second fixing member (22) is connected to the end of the guide member (21) opposite to the first fixing member (20), and the first adjusting member (40) is connected to the main body (42) and the second fixing member (22); The guide hole (430) is sleeved on the guide member (21) and is slidably connected to the guide member (21).

10. The film-forming apparatus according to claim 1, characterized in that, The film-forming device includes: The sealing assembly (5) is connected to the carrier platform (3) and the support assembly (2) respectively, and the sealing assembly (5) and the carrier platform (3) cover the connection hole (11).

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