Physical vapor deposition winding device suitable for flexible base material
By introducing a negative pressure system and activated carbon filter into the winding device, the problem of dust and impurities floating during the processing of flexible substrates was solved, enabling the production of higher quality products.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIANGSU XUYU TENG SEMICON TECH CO LTD
- Filing Date
- 2025-04-27
- Publication Date
- 2026-05-19
AI Technical Summary
In existing winding equipment, dust and small particulate impurities around the flexible substrate are prone to float and fall during the processing of flexible substrates, affecting product quality.
A winding device with a negative pressure system was designed, including a negative pressure fan, an activated carbon filter, and an air vent. By using negative pressure to draw in air and filter, the deposition of dust and impurities on the flexible substrate is reduced.
It effectively reduces the settling of dust and impurities on flexible substrates, thus improving product processing quality.
Smart Images
Figure CN224258767U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of physical vapor deposition, specifically a physical vapor deposition winding device suitable for flexible substrates. Background Technology
[0002] Physical vapor deposition (PVD) is a technique that uses physical methods under vacuum conditions to vaporize a material source (solid or liquid) into gaseous atoms or molecules, or partially ionize them into ions, and then deposits a thin film with specific functions on a substrate surface through a low-pressure gas (or plasma) process. PVD is one of the main surface treatment technologies. PVD is frequently used to produce flexible substrates, and the production process often involves winding equipment. However, with existing winding equipment, dust and small particulate impurities from the surrounding air may float and settle on the substrate during winding, thus reducing the quality of the finished product. Utility Model Content
[0003] The purpose of this invention is to provide a physical vapor deposition winding apparatus suitable for flexible substrates to solve the problems mentioned in the background art.
[0004] To achieve the above objectives, this utility model provides the following technical solution: a physical vapor deposition winding device suitable for flexible substrates, comprising a base, an mounting frame mounted on one side of the top of the base, a substrate roller rotatably mounted in the middle of the mounting frame, a winding mechanism mounted on the other side of the top of the base, a support plate connected to the top of the back of the base, a top plate mounted on the top of the support plate, an electric telescopic rod mounted on the bottom of the top plate, a lifting frame connected to the output end of the electric telescopic rod, a negative pressure pipe installed inside the lifting frame, several vents at the bottom of the negative pressure pipe, a bottom groove at the bottom of the base, a bottom plate connected inside the bottom groove, a bottom box mounted on the top of the bottom plate, a negative pressure fan installed inside the bottom box, an activated carbon filter installed inside the negative pressure fan, an air inlet pipe connected to one end of the negative pressure shell, and a switch panel mounted on one side of the front of the base.
[0005] Preferably, the negative pressure fan and the electric telescopic rod are both electrically connected to an external power source via a switch panel. A middle frame is installed at the center of the top of the base, and several guide rollers are rotatably installed in the middle of the middle frame. The winding mechanism includes a fixed frame, a winding roller rotatably installed in the middle of the fixed frame, and a winding motor installed on one side of the fixed frame. The output end of the winding motor is connected to the winding roller, and the winding motor is electrically connected to the switch panel. The switch panel facilitates the control of the electrical components.
[0006] Preferably, the bottom of the lifting frame is open, the ventilation openings are evenly distributed, the top of the base box is covered with a cover plate, the bottom of the negative pressure fan is connected to a bracket, and the bracket is connected to the bottom of the inner wall of the negative pressure fan.
[0007] Preferably, the output end of the negative pressure fan is connected to a discharge pipe, which extends to the outside of the bottom box. One end of the air inlet pipe is connected to the inside of the negative pressure shell, and the end of the air inlet pipe away from the negative pressure shell is connected to one end of the negative pressure pipe. The air inlet pipe facilitates the air extraction operation of the negative pressure fan.
[0008] Compared with the prior art, the beneficial effects of this utility model are:
[0009] During use, the flexible substrate is wound and rolled up by the winding mechanism. During the winding process, the lifting frame can be lowered by activating the electric telescopic rod, so that the bottom of the lifting frame is close to the mounting frame, the guide roller, and the top of the winding mechanism. The negative pressure fan is activated to generate negative pressure, and air is drawn in through the negative pressure shell, the air inlet pipe, and the negative pressure pipe. During the winding process, the air is drawn away through several vents, and some dust floating in the air is also drawn away. Then, it is filtered and adsorbed by the activated carbon filter inside the negative pressure shell. The entire device can continuously draw in the air above the winding substrate during the winding operation, reducing dust falling on the flexible substrate and improving the quality of product processing. Attached Figure Description
[0010] Figure 1 This is a schematic diagram of the structure of this utility model;
[0011] Figure 2 This is a structural diagram of the winding mechanism of this utility model;
[0012] Figure 3 This is a diagram showing the internal structure of the base box of this utility model;
[0013] Figure 4 This is a diagram showing the internal structure of the lifting frame of this utility model.
[0014] In the diagram: 1. Base; 2. Mounting frame; 3. Substrate roller; 4. Middle frame; 5. Guide roller; 6. Winding mechanism; 7. Support plate; 8. Top plate; 9. Electric telescopic rod; 10. Lifting frame; 11. Base plate; 12. Base box; 13. Fixing frame; 14. Winding roller; 15. Winding motor; 16. Negative pressure fan; 17. Discharge pipe; 18. Negative pressure shell; 19. Air inlet pipe; 20. Activated carbon filter element; 21. Negative pressure pipe; 22. Vent; 23. Bracket; 24. Cover plate; 25. Bottom groove. Detailed Implementation
[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0016] Please see Figure 1-4 This utility model provides a physical vapor deposition winding device suitable for flexible substrates, including a base 1, an mounting frame 2 installed on one side of the top of the base 1, a substrate roller 3 rotatably installed in the middle of the mounting frame 2, a winding mechanism 6 installed on the other side of the top of the base 1, a support plate 7 connected to the top of the back of the base 1, a top plate 8 installed on the top of the support plate 7, an electric telescopic rod 9 installed at the bottom of the top plate 8, a lifting frame 10 connected to the output end of the electric telescopic rod 9, a negative pressure pipe 21 installed inside the lifting frame 10, a plurality of vents 22 provided at the bottom of the negative pressure pipe 21, a bottom groove 25 provided at the bottom of the base 1, a bottom plate 11 connected inside the bottom groove 25, a bottom box 12 installed on the top of the bottom plate 11, a negative pressure fan 16 installed inside the bottom box 12, a negative pressure shell 18 connected to the input end of the negative pressure fan 16, an activated carbon filter element 20 installed inside the negative pressure shell 18, an air inlet pipe 19 connected to one end of the negative pressure shell 18, and a switch panel installed on one side of the front of the base 1.
[0017] See Figure 1-4 Negative pressure fan 16 and electric telescopic rod 9 are both electrically connected to an external power supply through a switch panel. A middle frame 4 is installed in the middle of the top of the base 1. Several guide rollers 5 are rotatably installed in the middle of the middle frame 4. The winding mechanism 6 includes a fixed frame 13, a winding roller 14 rotatably installed in the middle of the fixed frame 13, and a winding motor 15 installed on one side of the fixed frame 13. The output end of the winding motor 15 is connected to the winding roller 14, and the winding motor 15 is electrically connected to the switch panel.
[0018] In this embodiment, the winding motor 15 of the winding mechanism 6 operates until the winding roller 14 rotates, and performs winding operation on the substrate. The flexible substrate is guided by several guide rollers 5, which continuously pull the flexible substrate on the substrate roller 3.
[0019] See Figure 1-4 The bottom of the lifting frame 10 is open, with several vents 22 evenly distributed. The top of the base box 12 is covered with a cover plate 24. The bottom of the negative pressure fan 16 is connected to a bracket 23, which is connected to the bottom of the inner wall of the negative pressure fan 16. The output end of the negative pressure fan 16 is connected to an exhaust pipe 17, which extends to the outside of the base box 12. One end of the air inlet pipe 19 is connected to the inside of the negative pressure shell 18, and the end of the air inlet pipe 19 away from the negative pressure shell 18 is connected to one end of the negative pressure pipe 21.
[0020] In this embodiment, the lifting frame 10 can be lowered by activating the electric telescopic rod 9, so that the bottom of the lifting frame 10 is close to the upper position of the mounting frame 2, the guide roller 5 and the winding mechanism 6. The negative pressure fan 16 is activated to generate negative pressure, and air is drawn in through the negative pressure shell 18, the air inlet pipe 19 and the negative pressure pipe 21. During the winding process, the air will be drawn away through several vents 22, reducing the fall of dust and impurities.
[0021] In practical use, this utility model provides a physical vapor deposition winding device suitable for flexible substrates. During use, the flexible substrate is wound and rolled up by the winding mechanism 6. The winding motor 15 of the winding mechanism 6 operates to rotate the winding roller 14, performing the winding operation on the substrate. The flexible substrate is guided by several guide rollers 5, continuously pulling the flexible substrate on the substrate roller 3. During the material winding process, the lifting frame 10 can be lowered by activating the electric telescopic rod 9, so that the bottom of the lifting frame 10 is close to the mounting frame 2, the guide roller 5, and the upper position of the winding mechanism 6. The negative pressure fan 16 is activated to generate negative pressure, and air is drawn in through the negative pressure shell 18, the air inlet pipe 19, and the negative pressure pipe 21. The air during the winding process is drawn away through several vents 22, and some dust floating in the air is also drawn away. Then, it is filtered and adsorbed by the activated carbon filter element 20 inside the negative pressure shell 18. The entire device can continuously draw in air above the winding substrate during the winding operation, reducing dust falling on the flexible substrate and improving the quality of product processing.
[0022] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. A physical vapor deposition winding apparatus suitable for flexible substrates, comprising a base (1), characterized in that: A mounting frame (2) is installed on one side of the top of the base (1). A substrate roller (3) is rotatably mounted in the middle of the mounting frame (2). A winding mechanism (6) is installed on the other side of the top of the base (1). A support plate (7) is connected to the top of the back of the base (1). A top plate (8) is installed on the top of the support plate (7). An electric telescopic rod (9) is installed at the bottom of the top plate (8). A lifting frame (10) is connected to the output end of the electric telescopic rod (9). A negative pressure pipe (21) is installed inside the lifting frame (10). The bottom is provided with several vents (22), the bottom of the base (1) is provided with a bottom groove (25), the bottom plate (11) is connected inside the bottom groove (25), the bottom box (12) is installed on the top of the bottom plate (11), the negative pressure fan (16) is installed inside the bottom box (12), the input end of the negative pressure fan (16) is connected to the negative pressure shell (18), the activated carbon filter (20) is installed inside the negative pressure shell (18), one end of the negative pressure shell (18) is connected to the air inlet pipe (19), and a switch panel is installed on one side of the front of the base (1).
2. The physical vapor deposition winding apparatus for flexible substrates according to claim 1, characterized in that: The negative pressure fan (16) and the electric telescopic rod (9) are both electrically connected to an external power source via a switch panel.
3. The physical vapor deposition winding apparatus for flexible substrates according to claim 1, characterized in that: A middle frame (4) is installed at the middle of the top of the base (1), and several guide rollers (5) are rotatably installed in the middle of the middle frame (4).
4. The physical vapor deposition winding apparatus for flexible substrates according to claim 1, characterized in that: The winding mechanism (6) includes a fixed frame (13), a winding roller (14) rotatably mounted in the middle of the fixed frame (13), and a winding motor (15) mounted on one side of the fixed frame (13). The output end of the winding motor (15) is connected to the winding roller (14), and the winding motor (15) is electrically connected to the switch panel.
5. The physical vapor deposition winding apparatus for flexible substrates according to claim 1, characterized in that: The bottom of the lifting frame (10) is open, and several of the ventilation openings (22) are evenly distributed.
6. The physical vapor deposition winding apparatus for flexible substrates according to claim 1, characterized in that: The top of the base box (12) is equipped with a cover plate (24), and the bottom of the negative pressure fan (16) is connected to a bracket (23), which is connected to the bottom of the inner wall of the negative pressure fan (16).
7. The physical vapor deposition winding apparatus for flexible substrates according to claim 1, characterized in that: The output end of the negative pressure fan (16) is connected to the discharge pipe (17), which extends to the outside of the bottom box (12). One end of the air inlet pipe (19) is connected to the inside of the negative pressure shell (18), and the end of the air inlet pipe (19) away from the negative pressure shell (18) is connected to one end of the negative pressure pipe (21).