Pipeline assembly and chemical vapor deposition equipment

Abstract

The utility model relates to the technical field of chemical vapor deposition equipment, in particular to a pipeline component and chemical vapor deposition equipment, which are characterized in that a fixing ring is arranged on the outer surface of a pipeline, a moving groove is formed in the side surface of the fixing ring, a moving plate is arranged in the moving groove, a connecting pipe is arranged on the surface of a vacuum pump body, and a sealing groove is formed in the surface of the connecting pipe. A positioning groove is formed in the side surface of the connecting pipe; the pipeline connecting device has the beneficial effects that firstly, the movable plate is pulled, then one end of a pipeline can be inserted into the sealing groove, the sealing performance of the pipeline and a connecting pipe is improved through extrusion of the pipeline on a sealing gasket in the sealing groove, and then one end of the movable plate is inserted into the positioning groove, so that the pipeline and the connecting pipe can be quickly connected; when the pipeline needs to be taken down, only the moving plate needs to be pulled to enable one end of the moving plate to be separated from the positioning groove, and then the pipeline can be separated from the connecting pipe.

Description

Technical Field

[0001] This utility model relates to the field of chemical vapor deposition equipment, specifically a pipeline assembly and a chemical vapor deposition device. Background Technology

[0002] Chemical vapor deposition (CVD) equipment is a device that deposits solid thin films on the surface of a substrate through a gas-phase chemical reaction. In the existing technology, CVD equipment is mainly connected to the vacuum pump body through pipes during use.

[0003] However, when connecting the pipe to the vacuum pump body, the connection is usually fixed by multiple sets of positioning bolts and sealing gaskets. But when it is necessary to separate the pipe from the vacuum pump body, it is time-consuming to find tools to rotate the multiple sets of positioning bolts. Therefore, this utility model proposes a pipe assembly and chemical vapor deposition equipment to solve the above-mentioned technical problems. Utility Model Content

[0004] The purpose of this invention is to provide a pipeline assembly and a chemical vapor deposition (CVD) device to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a pipe assembly, the pipe assembly comprising: a pipe, a fixing ring provided on the outer surface of the pipe, a movable groove provided on the side of the fixing ring, a movable plate provided in the movable groove, one end of the pipe being connected to a chemical vapor deposition device, and a vacuum pump body provided on the side of the chemical vapor deposition device;

[0006] The vacuum pump body has a connecting pipe on its surface, a sealing groove on its surface, a sealing gasket on its surface, and a positioning groove on its side.

[0007] Preferably, a limiting port is provided on the upper surface of the moving groove, a limiting block is provided in the limiting port, the limiting block is slidably connected to the limiting port, and the limiting block is fixedly connected to the surface of the moving plate.

[0008] Preferably, a positioning spring is provided on the end face of the movable groove, one end of the positioning spring is fixedly connected to the end face of the movable plate, the other end of the positioning spring is fixedly connected to the end face of the movable groove, and one end of the movable plate is inserted into the positioning groove.

[0009] Preferably, the pipe end face is provided with a fixing groove, an auxiliary spring is provided in the fixing groove, one end of the auxiliary spring is fixedly connected to the end face of the fixing groove, and the other end of the auxiliary spring is provided with a pressing plate.

[0010] Preferably, the pressing plate has an annular plate structure and is slidably connected to the fixing groove.

[0011] Preferably, the sealing gasket is fixedly connected to the surface of the sealing groove, and the sealing gasket has an annular plate structure.

[0012] A chemical vapor deposition apparatus, including the aforementioned piping assembly.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] The pipeline assembly and chemical vapor deposition equipment proposed in this utility model, when connecting the pipeline to the vacuum pump body, first pull the movable plate, then insert one end of the pipeline into the sealing groove. The pipeline increases the sealing performance between the pipeline and the connecting pipe by squeezing the sealing gasket in the sealing groove. Then, insert one end of the movable plate into the positioning groove, so that the pipeline and the connecting pipe can be quickly connected, which facilitates the connection between the pipeline and the vacuum pump body. When it is necessary to remove the pipeline, simply pull the movable plate to detach one end of the movable plate from the positioning groove to separate the pipeline from the connecting pipe. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of this utility model;

[0016] Figure 2 This is a side view of the present invention;

[0017] Figure 3 This is a partial sectional view of the present invention;

[0018] Figure 4 for Figure 3 Enlarged structural diagram at point A in the middle.

[0019] In the diagram: 101. Chemical vapor deposition equipment; 1. Piping; 2. Fixing ring; 3. Moving tank; 4. Moving plate; 5. Vacuum pump body; 6. Connecting pipe; 7. Sealing tank; 8. Sealing gasket; 9. Positioning tank;

[0020] 10. Limiting port; 11. Limiting block; 12. Positioning spring; 13. Fixing groove; 14. Auxiliary spring; 15. Pressing plate. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this utility model clear and complete, the embodiments of this utility model will be further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only some, not all, embodiments of this utility model, and are merely used to explain the embodiments of this utility model. They are not intended to limit the embodiments of this utility model. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0022] Example 1: Please refer to Figures 1-4 This utility model provides a technical solution: a pipe assembly, the pipe assembly comprising: a pipe 1, a fixing ring 2 provided on the outer surface of the pipe 1, a moving groove 3 provided on the side of the fixing ring 2, a moving plate 4 provided in the moving groove 3, one end of the pipe 1 being connected to a chemical vapor deposition apparatus 101, a vacuum pump body 5 provided on the side of the chemical vapor deposition apparatus 101; a connecting pipe 6 provided on the surface of the vacuum pump body 5, a sealing groove 7 provided on the surface of the connecting pipe 6, a sealing gasket 8 provided on the surface of the sealing groove 7, and a positioning groove 9 provided on the side of the connecting pipe 6;

[0023] When it is necessary to connect pipe 1 to vacuum pump body 5, first pull the moving plate 4, and then insert one end of pipe 1 into the sealing groove 7. The sealing gasket 8 in the sealing groove 7 is squeezed by pipe 1 to increase the sealing performance between pipe 1 and connecting pipe 6. Then, insert one end of the moving plate 4 into the positioning groove 9, so that pipe 1 and connecting pipe 6 can be quickly connected. This makes it easy to connect pipe 1 to vacuum pump body 5. When it is necessary to remove pipe 1, simply pull the moving plate 4 to detach one end of the moving plate 4 from the positioning groove 9 to separate pipe 1 from connecting pipe 6.

[0024] Example 2: Based on Example 1, a movable plate 4 is provided to facilitate the connection between the connecting pipe 6 and the pipe 1. A limiting port 10 is opened on the upper surface of the movable groove 3. A limiting block 11 is provided in the limiting port 10. The limiting block 11 is slidably connected to the limiting port 10. The limiting block 11 is fixedly connected to the surface of the movable plate 4. A positioning spring 12 is provided on the end face of the movable groove 3. One end of the positioning spring 12 is fixedly connected to the end face of the movable plate 4, and the other end of the positioning spring 12 is fixedly connected to the end face of the movable groove 3. One end of the movable plate 4 is inserted into the positioning groove 9.

[0025] When in use, first pull the moving plate 4, then insert one end of the pipe 1 into the sealing groove 7, and then insert one end of the moving plate 4 into the positioning groove 9. The pulling force of the positioning spring 12 can prevent the moving plate 4 from shifting randomly. The cooperation between the limiting block 11 and the limiting port 10 can prevent the moving plate 4 from coming out of the moving groove 3. Then, by inserting one end of the moving plate 4 into the positioning groove 9, the connecting pipe 6 and the pipe 1 can be connected.

[0026] Example 3: Based on Example 2, in order to increase the sealing of the connection between the connecting pipe 6 and the pipe 1, a pressing plate 15 is provided. A fixing groove 13 is opened on the end face of the pipe 1. An auxiliary spring 14 is provided in the fixing groove 13. One end of the auxiliary spring 14 is fixedly connected to the end face of the fixing groove 13. The other end of the auxiliary spring 14 is provided with the pressing plate 15. The pressing plate 15 has an annular plate structure. The pressing plate 15 is slidably connected to the fixing groove 13. The sealing gasket 8 is fixedly connected to the surface of the sealing groove 7. The sealing gasket 8 has an annular plate structure.

[0027] In use, the sealing gasket 8 can be pressed against the end of the pipe 1 to increase the sealing performance between the pipe 1 and the connecting pipe 6. Then, the pressing plate 15 is pressed down by multiple sets of auxiliary springs 14 to further increase the sealing performance between the connecting pipe 6 and the pipe 1.

[0028] In actual use, when connecting pipe 1 to vacuum pump body 5, first pull the moving plate 4, then insert one end of pipe 1 into the sealing groove 7. The compression of the sealing gasket 8 in the sealing groove 7 by pipe 1 increases the sealing performance between pipe 1 and connecting pipe 6. Then, insert one end of the moving plate 4 into the positioning groove 9, so that pipe 1 and connecting pipe 6 can be quickly connected. This makes it easy to connect pipe 1 to vacuum pump body 5. When pipe 1 needs to be removed, simply pull the moving plate 4 to detach one end of the moving plate 4 from the positioning groove 9 to separate pipe 1 from connecting pipe 6. In addition, the pulling force of the positioning spring 12 can prevent the moving plate 4 from shifting arbitrarily, and the cooperation between the limiting block 11 and the limiting port 10 can prevent the moving plate 4 from detaching from the moving groove 3.

[0029] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A pipe assembly, characterized in that: The pipeline assembly includes: a pipeline (1), a fixing ring (2) is provided on the outer surface of the pipeline (1), a moving groove (3) is provided on the side of the fixing ring (2), a moving plate (4) is provided in the moving groove (3), one end of the pipeline (1) is connected to a chemical vapor deposition equipment (101), and a vacuum pump body (5) is provided on the side of the chemical vapor deposition equipment (101). The vacuum pump body (5) has a connecting pipe (6) on its surface, a sealing groove (7) on its surface, a sealing gasket (8) on its surface, and a positioning groove (9) on its side.

2. A pipe assembly according to claim 1, characterized in that: A limiting port (10) is provided on the upper surface of the moving groove (3), and a limiting block (11) is provided in the limiting port (10). The limiting block (11) is slidably connected to the limiting port (10), and the limiting block (11) is fixedly connected to the surface of the moving plate (4).

3. A pipe assembly according to claim 1, characterized in that: A positioning spring (12) is provided on the end face of the moving groove (3). One end of the positioning spring (12) is fixedly connected to the end face of the moving plate (4), and the other end of the positioning spring (12) is fixedly connected to the end face of the moving groove (3). One end of the moving plate (4) is inserted into the positioning groove (9).

4. A pipe assembly according to claim 1, characterized in that: The pipe (1) has a fixed groove (13) on its end face. An auxiliary spring (14) is installed in the fixed groove (13). One end of the auxiliary spring (14) is fixedly connected to the end face of the fixed groove (13), and the other end of the auxiliary spring (14) is provided with a pressing plate (15).

5. A pipe assembly according to claim 4, characterized in that: The pressing plate (15) has an annular plate structure and is slidably connected to the fixing groove (13).

6. A pipe assembly according to claim 1, characterized in that: The sealing gasket (8) is fixedly connected to the surface of the sealing groove (7), and the sealing gasket (8) has an annular plate structure.

7. A chemical vapor deposition apparatus, characterized in that: Includes the pipe assembly described in any one of claims 1-6 above.

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