Placing table for parts of semiconductor processing equipment

Abstract

The utility model discloses a placing table for semiconductor processing equipment parts, which comprises a protection box, a table plate is arranged at a position close to the top in the protection box, a placing groove is arranged at the top of the table plate, a threaded column is arranged at a position close to the bottom in the protection box, a motor is arranged at the bottom of one side of the protection box, and a clamping groove is arranged at the bottom of the motor. Internal thread plates are arranged at the positions, close to the two sides, of the surface of the threaded column, and a sliding groove is formed in the center of the bottom of the table plate. According to the placement table for the parts of the semiconductor processing equipment, through the design of the protection box, the table plate, the threaded column, the motor, an internal threaded plate, a sliding groove, a sliding block, a first hinge seat, a second hinge seat, a movable cross rod, a winding roller and shielding cloth, the motor drives the threaded column to rotate and drives the internal threaded plate to move, so that the movable cross rod shrinks, and the table plate is pushed to descend into the protection box; parts are stored in a closed space, and pollution of external dust is isolated.

Description

Technical Field

[0001] This utility model relates to the field of placement stage technology, specifically a placement stage for semiconductor process equipment components. Background Technology

[0002] With continuous breakthroughs in semiconductor technology, the precision and complexity of chip manufacturing have greatly improved. Semiconductor process equipment is constantly developing towards refinement and integration. Its components are diverse in type and shape, and have high requirements for storage environment. In the semiconductor production process, the frequent use and storage efficiency of components directly affect the production progress. As the infrastructure for component storage, the placement table needs to be able to rationally plan the space, store various components in an orderly manner, and at the same time facilitate operators to quickly and accurately find and use the required parts, so as to ensure the smooth and efficient production process.

[0003] Existing placement stages typically lack effective protective structures for placed components. When the equipment is not in use, they fail to create a relatively isolated and stable environment for the components, leaving them directly exposed to the complex workshop environment. This makes them susceptible to contamination from airborne dust particles. Dust accumulation not only alters the microstructure of the component surface but can also affect its mating accuracy and motion performance, thereby reducing component reliability and lifespan. This increases the defect rate and equipment failure risk in semiconductor manufacturing due to component issues. Therefore, we propose a placement stage for semiconductor process equipment components. Utility Model Content

[0004] The purpose of this invention is to provide a placement stage for semiconductor manufacturing equipment components, in order to solve the problem mentioned in the background art that existing placement stages usually do not have an effective protective structure for the placed components. When the equipment is not in use, they cannot create a relatively isolated and stable environment for the components, which makes the components directly exposed to the complex environment of the workshop and susceptible to contamination by dust particles in the air. Dust accumulation not only changes the microstructure of the component surface, but may also affect its fitting accuracy and motion performance, thereby reducing the reliability and service life of the components and increasing the defect rate and equipment failure risk caused by component problems in the semiconductor manufacturing process.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a placement platform for semiconductor process equipment components, comprising a protective box, a platform plate disposed near the top of the protective box, a placement groove formed on the top of the platform plate, a threaded post disposed near the bottom of the protective box, a motor disposed on the bottom of one side of the protective box, internal threaded plates disposed on both sides of the surface of the threaded post, a sliding groove formed at the center of the bottom of the platform plate, sliding blocks slidably connected to both sides of the inner wall of the sliding groove, the bottoms of the two sliding blocks extending through to the outside of the sliding groove, a first hinge seat fixedly connected to the center of the bottom of the two sliding blocks, a second hinge seat fixedly connected to the center of the top of the two internal threaded plates, a movable cross rod disposed at the lower end of the platform plate, a bracket fixedly connected to the top of one side of the protective box, a take-up roller movably mounted on one side of the bracket, and a shielding cloth wound around the surface of the take-up roller.

[0006] Compared with the prior art, the beneficial effects of this utility model are:

[0007] This semiconductor manufacturing equipment component placement table features a design incorporating a protective box, platform, threaded column, motor, internal threaded plate, sliding groove, sliding block, first hinge seat, second hinge seat, movable cross rod, take-up roller, and shielding cloth. The motor drives the threaded column to rotate, which in turn moves the internal threaded plate, causing the movable cross rod to retract and push the platform down into the protective box. This encloses the components in a sealed space, isolating them from external dust contamination. Simultaneously, the shielding cloth on the take-up roller can be pulled out and attached to the protective box via Velcro, enhancing protection, reducing cleaning and maintenance work, improving production efficiency and reliability, and ensuring the stable quality of components during placement. Attached Figure Description

[0008] Figure 1 This is a schematic diagram of the structure of this utility model;

[0009] Figure 2 This is a three-dimensional structural view of the internal threaded plate of this utility model;

[0010] Figure 3 This is a top view of the structure of the platform of this utility model;

[0011] Figure 4 This is the main view of the structure of this utility model.

[0012] In the diagram: 1. Protective box; 2. Platform; 3. Placement slot; 4. Threaded column; 5. Motor; 6. Internal threaded plate; 7. Guide column; 8. Guide block; 9. Sliding groove; 10. Sliding block; 11. First hinge seat; 12. Second hinge seat; 13. Movable cross bar; 14. Bracket; 15. Take-up roller; 16. Covering cloth. Detailed Implementation

[0013] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0014] Please see Figure 1-4 This utility model provides a technical solution: a placement platform for semiconductor process equipment components, including a protective box 1, a platform 2 is provided at the top of the protective box 1, a placement groove 3 is provided at the top of the platform 2, a threaded post 4 is provided at the bottom of the protective box 1, a motor 5 is provided at the bottom of one side of the protective box 1, internal thread plates 6 are provided on both sides of the surface of the threaded post 4, a sliding groove 9 is provided at the center of the bottom of the platform 2, sliding blocks 10 are slidably connected to both sides of the inner wall of the sliding groove 9, the bottom of the two sliding blocks 10 extends through to the outside of the sliding groove 9, a first hinge seat 11 is fixedly connected to the center of the bottom of the two sliding blocks 10, a second hinge seat 12 is fixedly connected to the center of the top of the two internal thread plates 6, a movable cross rod 13 is provided at the lower end of the platform 2, a bracket 14 is fixedly connected to the top of one side of the protective box 1, a take-up roller 15 is movably installed on one side of the bracket 14, and a shielding cloth 16 is wound around the surface of the take-up roller 15.

[0015] The number of placement slots 3 is set in several, and the inner wall of each placement slot 3 is fixedly connected with a sponge board. Setting multiple placement slots 3 can classify and place multiple semiconductor process equipment parts, which is convenient for management and retrieval. The sponge board fixedly connected to the inner wall of the placement slot 3 can play a buffering and protective role, preventing the parts from being damaged by collisions during placement or movement.

[0016] The motor 5 is housed in a casing, which is fixedly installed inside the casing. One side of the casing is fixedly connected to the outer wall of the protective box 1. The motor 5 is fixedly connected to a drive shaft through its output end on one side. One end of the drive shaft passes through the interior of the casing and the protective box 1 and is fixedly connected to one end of the threaded column 4. The other end of the threaded column 4 is movably connected to a bearing fixedly installed at the bottom of one side of the protective box 1. The casing provides installation space and protection for the motor 5, preventing the motor 5 from being affected or damaged by the external environment. The motor 5 is connected to the threaded column 4 through the drive shaft, which can transmit the rotational power of the motor 5 to the threaded column 4, driving the threaded column 4 to rotate. The other end of the threaded column 4 is movably connected to the bearing, ensuring the stability and flexibility of the rotation of the threaded column 4 and providing power support for the subsequent lifting and lowering of the platform 2.

[0017] The two internal threaded plates 6 are respectively connected to the positive and negative threaded teeth on both sides of the threaded column 4 through the positive and negative threaded grooves opened on their inner walls. When the threaded column 4 rotates, since the two internal threaded plates 6 are respectively connected to the positive and negative threaded teeth on the surface of the threaded column 4 and the thread directions are opposite, the two internal threaded plates 6 will make linear movements in opposite directions, thereby realizing the movement of the internal threaded plates 6 and providing a basis for the retraction or extension of the movable cross rod 13.

[0018] Guide posts 7 are fixedly installed at the front and rear ends of the bottom of the protective box 1. Guide blocks 8 are slidably connected to the center of the surface of the two guide posts 7. The top of the guide block 8 is fixedly connected to the bottom of the internal thread plate 6, which restricts the internal thread plate 6 to only move in a straight line along the guide posts 7, preventing the internal thread plate 6 from deviating or rotating during the movement, ensuring the stability and accuracy of the movement of the internal thread plate 6, and thus ensuring the normal operation of the movable cross rod 13.

[0019] The movable cross bar 13 has an X-shaped structure. The two ends of the top of the movable cross bar 13 are respectively hinged to the two first hinge seats 11, and the two ends of the bottom of the movable cross bar 13 are respectively hinged to the two second hinge seats 12. The X-shaped movable cross bar 13 has good telescopic performance. When the internal thread plate 6 moves, the two ends of the bottom of the movable cross bar 13 will change position with the movement of the internal thread plate 6, thereby causing the movable cross bar 13 to retract or extend, thereby pushing or pulling the platform 2 to perform lifting and lowering movements, so as to realize the storage or removal of parts.

[0020] The shielding cloth 16 is bonded to the hook and loop fasteners fixed to the top of the protective box 1 on the other side by the hook and loop fasteners fixed to one side of its lower end. When the placement table is not in use, the shielding cloth 16 on the take-up roller 15 is pulled out and the top of the protective box 1 is sealed by the bonding of the hook and loop fasteners, which further enhances the sealing of the protective box 1, prevents dust from entering the interior of the protective box 1 and causing contamination or damage to the parts, and provides more reliable protection for the parts.

[0021] When it is necessary to store the parts placed on the platform 2, the motor 5 is started. The motor 5 runs stably under the protection of the chassis. Its output end drives the drive shaft to rotate, and the drive shaft in turn drives the threaded column 4 to rotate inside the protective box 1. Since the two internal threaded plates 6 are threaded to the positive and negative thread teeth on the surface of the threaded column 4 through the positive and negative thread grooves on their inner walls, respectively, under the guidance of the guide post 7 and the guide block 8, the internal threaded plates 6 can only move in a straight line along the guide post 7. Therefore, the two internal threaded plates 6 will move in a straight line towards each other as the threaded column 4 rotates. At this time, the two ends of the bottom of the movable cross rod 13, which is hinged to the second hinge seat 12 at the top of the internal threaded plate 6, will move closer to each other as the internal threaded plate 6 moves, causing the X-shaped movable cross rod 13 to contract and deform. The two ends of the top of the movable cross rod 13 are hinged to the first hinge seat 11 at the bottom of the sliding block 10 in the sliding groove 9 at the bottom of the platform 2. As the movable cross rod 13 moves in a straight line, the two ends of the movable cross rod 13 will move in a straight line towards each other. The retraction mechanism pushes the sliding block 10 to slide within the sliding groove 9, thereby causing the platform 2 to descend smoothly into the protective box 1. This stores the parts placed in the placement groove 3 within the protective box 1, providing initial protection. When the placement platform is not in use, the shielding cloth 16 wrapped around the take-up roller 15 can be manually pulled out. The Velcro side of the lower end of the shielding cloth 16 is then bonded to the Velcro side of the top of the other side of the protective box 1, thus sealing the top of the protective box 1 and further enhancing its airtightness. This prevents external dust and moisture from entering the protective box 1 and contaminating or damaging the parts. When it is necessary to remove the parts, the motor 5 is started in reverse. The motor 5 drives the threaded column 4 to rotate in the opposite direction, causing the two internal threaded plates 6 to move in opposite directions. The two ends of the movable cross rod 13 move away from each other, and the movable cross rod 13 extends, pulling the platform 2 upward, exposing the parts in the placement groove 3 within the protective box 1 for easy access by the operator.

[0022] In summary, this semiconductor manufacturing equipment component placement platform, through the design of a protective box 1, a platform 2, a threaded column 4, a motor 5, an internal threaded plate 6, a sliding groove 9, a sliding block 10, a first hinge seat 11, a second hinge seat 12, a movable cross rod 13, a take-up roller 15, and a shielding cloth 16, allows the motor 5 to drive the threaded column 4 to rotate, which in turn moves the internal threaded plate 6, causing the movable cross rod 13 to retract and push the platform 2 down into the protective box 1. This encloses the components in a sealed space, isolating them from external dust contamination. Simultaneously, the shielding cloth 16 on the take-up roller 15 can be pulled out and attached to the protective box 1 via Velcro, enhancing protection, reducing cleaning and maintenance work, improving production efficiency and reliability, and ensuring the stable quality of components during placement.

[0023] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0024] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A placement stage for semiconductor process equipment components, comprising a protective case (1), characterized in that: A platform (2) is provided near the top of the protective box (1). A placement groove (3) is provided on the top of the platform (2). A threaded column (4) is provided near the bottom of the protective box (1). A motor (5) is provided on the bottom of one side of the protective box (1). Internal threaded plates (6) are provided on both sides of the surface of the threaded column (4). A sliding groove (9) is provided at the center of the bottom of the platform (2). Sliding blocks (10) are slidably connected to both sides of the inner wall of the sliding groove (9). Two sliding blocks (10) The bottom of each of the two sliding blocks (10) extends to the outside of the sliding groove (9). The center of the bottom of each of the two sliding blocks (10) is fixedly connected to a first hinge seat (11). The center of the top of each of the two internal thread plates (6) is fixedly connected to a second hinge seat (12). The lower end of the platform (2) is provided with a movable cross rod (13). The top of one side of the protective box (1) is fixedly connected to a bracket (14). A take-up roller (15) is movably installed on one side of the bracket (14). A shielding cloth (16) is wrapped around the surface of the take-up roller (15).

2. The placement stage for semiconductor process equipment components according to claim 1, characterized in that: The number of placement slots (3) is several, and the inner walls of the several placement slots (3) are all fixedly connected with sponge boards.

3. The placement stage for semiconductor process equipment components according to claim 1, characterized in that: The motor (5) is provided with a housing on the outside. The motor (5) is fixedly installed inside the housing. One side of the housing is fixedly connected to the outer wall of the protective box (1). The motor (5) is fixedly connected to a drive shaft through its output end on one side. One end of the drive shaft passes through the interior of the housing and the protective box (1) in sequence and is fixedly connected to one end of the threaded column (4). The other end of the threaded column (4) is movably connected to a bearing fixedly installed on one side of the protective box (1) near the bottom.

4. A placement stage for semiconductor process equipment components according to claim 1, characterized in that: The two internal threaded plates (6) are respectively connected to the positive thread and the negative thread on both sides of the surface of the threaded column (4) through the positive thread groove and the negative thread groove opened on their inner walls.

5. A placement stage for semiconductor process equipment components according to claim 1, characterized in that: The protective box (1) has guide posts (7) fixedly installed at the front and rear ends of the bottom. The center of the surface of the two guide posts (7) is slidably connected to guide blocks (8). The top of the guide blocks (8) is fixedly connected to the bottom of the internal thread plate (6).

6. A placement stage for semiconductor process equipment components according to claim 1, characterized in that: The movable cross rod (13) is configured with an X-shaped structure. The two ends of the top of the movable cross rod (13) are respectively hinged to two first hinge seats (11), and the two ends of the bottom of the movable cross rod (13) are respectively hinged to two second hinge seats (12).

7. A placement stage for semiconductor process equipment components according to claim 1, characterized in that: The shielding cloth (16) is bonded to the hook and loop side of the protective box (1) by the hook and loop side fixedly connected to one side of its lower end.

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