An adjustable multi-angle cooling water spray cover for a dicing machine

Abstract

This utility model relates to the field of wafer dicing machine technology and discloses an adjustable multi-angle cooling spray cover for a dicing machine. It includes a base and a fixed spray base mounted on the base. The fixed spray base includes a first spray pipe for direct spraying onto the blade edge and a second spray pipe for spraying onto the front and rear end faces of the blade. A movable spray assembly is provided on the end face of the base near the fixed spray base, capable of moving away from the fixed spray base. The movable spray assembly includes an inner spray pipe and an outer spray pipe. This utility model, by employing a differentiated cooling layout on both sides of the blade, provides targeted cooling to the blade side and the material-blade interface, forming a comprehensive, three-dimensional cooling system without dead angles, effectively improving cooling efficiency and processing quality. The movable spray assembly facilitates quick blade installation and removal, and allows for adjustment of the optimal spray cooling position according to new blades.

Description

Technical Field

[0001] This utility model relates to the field of wafer dicing machine technology, specifically to an adjustable multi-angle cooling water spray cover for a dicing machine. Background Technology

[0002] With the rapid growth in demand for processing hard and brittle materials such as semiconductors, optoelectronics, ceramics, and precision ceramic devices, the requirements for processing accuracy, efficiency, and reliability of dicing machines, as key cutting equipment, are increasing daily. During the dicing process, the high-speed rotating diamond wheel generates intense frictional heat and cutting stress when it comes into contact with the workpiece. If heat dissipation is not timely, problems such as thermal damage to the blade, thermal breakage of the workpiece, and reduced processing accuracy may occur. In current mainstream dicing machines, the water spray shroud integrated at the front end of the spindle is a core functional component for achieving efficient cutting.

[0003] The existing blade cooling spray shroud mechanism of the dicing machine is relatively simple, with few spray heads in fixed positions, which is not ideal for cooling and rinsing the blades. In addition, the entire mechanism needs to be manually opened to replace the blades and maintain the module, making the blade replacement operation cumbersome and inefficient. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides an adjustable multi-angle cooling water spray cover for dicing machines. This solves the problems of existing dicing machine blade cooling water spray cover mechanisms being relatively simple, having few spray heads in fixed positions, resulting in insufficient cooling and rinsing capabilities for the blades, and requiring manual opening of the entire mechanism for blade replacement and maintenance, leading to low daily processing efficiency.

[0005] To achieve the above objectives, this utility model is implemented through the following technical solution: an adjustable multi-angle cooling water spray cover for a dicing machine, comprising a base and a fixed water spray seat disposed on the base, the fixed water spray seat comprising a first water spray pipe for direct spraying onto the blade edge and a second water spray pipe for spraying onto the front and rear end face edges of the blade; a movable water spray assembly is disposed on the end face of the base near the fixed water spray seat, which can move away from the fixed water spray seat, the movable water spray assembly comprising an inner water spray pipe and an outer water spray pipe, the inner water spray pipe being symmetrically arranged on the front and rear sides of the blade, and the outer water spray pipe being symmetrically arranged with its outlet facing downwards towards the blade.

[0006] Preferably, the first water spray pipe is detachably installed on one side of the fixed water spray base via an adjustable fixing component. The adjustable fixing component includes a fixing base fixedly connected to the fixed water spray base and a water inlet connector fixedly connected to the opening of the fixing base by a compression bolt. The water inlet connector is connected and fixedly connected to the first water spray pipe.

[0007] Preferably, the movable water spray assembly further includes a drive cylinder fixedly mounted on the end face of the base, a main mounting base driven by the drive cylinder, and a connecting plate and an adjusting plate symmetrically arranged on the main mounting base. The connecting plate and the adjusting plate are fixed together by bolts, and bolt holes that cooperate with the bolts are provided on the connecting plate.

[0008] Preferably, the drive cylinder is equipped with a magnetic switch, which is used to monitor and determine the position of the cylinder piston rod.

[0009] Preferably, the piston end of the drive cylinder is fixedly connected to a connecting seat via a connecting cover, and the main mounting seat is fixedly connected to the end face of the connecting seat.

[0010] Preferably, a height measuring air pipe is vertically arranged on the side of the base near the main mounting seat.

[0011] This utility model has the following beneficial effects:

[0012] (1) The adjustable multi-angle cooling water spray cover of the dicing machine uses a first water spray pipe, a second water spray pipe, an inner water spray pipe and an outer water spray pipe arranged on the side of the blade to provide targeted cooling to the side of the blade and the junction of the material to be processed and the blade, forming a three-dimensional cooling system with all-round and no dead angles, which effectively improves cooling efficiency and processing quality. The movable water spray component can adjust the distance between the whole and the blade as needed, which is convenient for quick disassembly and assembly of the blade. At the same time, the optimal spray cooling position of the inner water spray pipe and the outer water spray pipe can be adjusted according to the new blade, which improves the applicability of the entire water spray cover. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall main structure of this utility model;

[0014] Figure 2 This is a schematic diagram of the overall rear view structure of this utility model;

[0015] Figure 3 This is a schematic diagram of the actual application structure of this utility model;

[0016] Figure 4 This is a schematic diagram of the layout structure of the movable water spray component of this utility model;

[0017] Figure 5 This is a schematic diagram showing the disassembled structure of the main components of this utility model.

[0018] In the diagram: 1. Base; 2. Fixed water spray base; 21. First water spray pipe; 22. Second water spray pipe; 23. Adjustable fixing component; 231. Fixing base; 232. Press bolt; 233. Water inlet connector; 3. Drive cylinder; 31. Magnetic switch; 32. Connecting cover; 4. Connecting base; 5. Movable water spray component; 51. Main mounting base; 52. Inner water spray pipe; 53. Connecting plate; 54. Adjusting plate; 55. Outer water spray pipe; 56. Bolt hole; 6. Height measuring air pipe. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] Please see Figure 1 This utility model provides a technical solution: an adjustable multi-angle cooling water spray cover for a dicing machine, including a base 1 and a fixed water spray seat 2 disposed on the base 1. The fixed water spray seat 2 includes a first water spray pipe 21 for direct spraying onto the blade edge and a second water spray pipe 22 for spraying onto the front and rear end face edges of the blade. A movable water spray assembly 5 is disposed on the end face of the base 1 near the fixed water spray seat 2, which can move away from the fixed water spray seat 2. The movable water spray assembly 5 includes an inner water spray pipe 52 and an outer water spray pipe 55. The inner water spray pipe 52 is symmetrically arranged on the front and rear sides of the blade, and the outer water spray pipe 55 is symmetrically arranged with its outlet facing downwards and spraying towards the blade.

[0021] In this technical solution, by arranging a first water spray pipe 21, a second water spray pipe 22, an inner water spray pipe 52, and an outer water spray pipe 55 on the side of the blade, targeted cooling is provided to the side of the blade and the junction between the material to be processed and the blade, forming a comprehensive, three-dimensional cooling system without dead angles, which effectively improves cooling efficiency and processing quality. The movable water spray component 5 can be set to adjust the distance between the whole and the blade as needed, which facilitates quick disassembly and assembly of the blade. At the same time, the optimal spray cooling positions of the inner water spray pipe 52 and the outer water spray pipe 55 can be adjusted according to the new blade, improving the applicability of the entire water spray cover.

[0022] like Figure 1 and 2As shown, in this embodiment, the first water spray pipe 21 is detachably installed on one side of the fixed water spray base 2 via an adjustable fixing component 23. The adjustable fixing component 23 includes a fixing base 231 fixedly connected to the fixed water spray base 2 and a water inlet connector 233 fixedly connected to the opening of the fixing base 231 via a compression bolt 232. The water inlet connector 233 is connected and fixedly connected to the first water spray pipe 21.

[0023] In this technical solution, in order to facilitate the adjustment of the spray angle of the first water spray pipe 21, the installation angle of the water inlet connector 233 and the first water spray pipe 21 on it is changed by loosening the squeeze bolt 232, so as to better spray and cool the blade, and at the same time, it can be adapted to blades of different sizes.

[0024] In practical applications, other linear drive structures such as moving modules and lead screw-nut-slider assemblies can be used to achieve directional movement of the movable water spray assembly 5. In this embodiment, the movable water spray assembly 5 also includes a drive cylinder 3 fixedly mounted on the end face of the base 1, a main mounting base 51 driven by the drive cylinder 3, and a connecting plate 53 and an adjusting plate 54 symmetrically arranged on the main mounting base 51. The connecting plate 53 and the adjusting plate 54 are fixed together by bolts, and bolt holes 56 that mate with the bolts are provided on the connecting plate 53.

[0025] Specifically, such as Figure 3 and 4 As shown, when a tool change is required, the drive cylinder 3 is activated, driving the main mounting base 51 and its inner water spray pipe 52 and outer water spray pipe 55 away from the blade, so that personnel can quickly change the tool. At the same time, the distance between the inner water spray pipe 52 and the outer water spray pipe 55 and the blade can be finely adjusted according to the size of the blade, thereby improving the overall spray cooling effect on the blade.

[0026] Specifically, by loosening the bolts on the connecting plate 53, the operator can manually adjust the spray angle of the outer water spray pipe 55 according to the blade diameter, so that the outer water spray pipe 55 can concentrate the spray onto the junction of the material to be processed and the blade. When cutting thicker materials, it can effectively improve the cooling effect.

[0027] Since there is a certain distance between the right water spray pipe and the outer water spray pipe 55 and the blade, in order to ensure the spraying effect, the outlet ends of the right water spray pipe and the outer water spray pipe 55 adopt a tapered nozzle, thereby ensuring that the nozzle can spray in a concentrated manner and further ensuring the cooling effect.

[0028] In this embodiment, a magnetic switch 31 is provided on the drive cylinder 3. The magnetic switch 31 is used to monitor and determine the position of the cylinder piston rod. With the magnetic switch 31, when the drive cylinder 3 drives the connecting cover 32 and the movable water spray assembly 5 on it to move, the position of the piston rod can be accurately monitored and determined, thereby determining the position of the movable water spray assembly 5.

[0029] In this embodiment, the piston end of the drive cylinder 3 is fixedly connected to the connecting seat 4 via the connecting cover 32, and the main mounting seat 51 is fixedly connected to the end face of the connecting seat 4.

[0030] In this embodiment, a height measuring air pipe 6 is vertically arranged on the side of the base 1 near the main mounting base 51.

[0031] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, the phrase "comprising an element defined as..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0032] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An adjustable multi-angle cooling water spray cover of a dicing machine, comprising a base and a fixed water spray seat arranged on the base, characterized in that: The fixed water spray base includes a first water spray pipe that sprays directly onto the blade edge and a second water spray pipe that sprays onto the front and rear end face edges of the blade. A movable water spray assembly is provided on the end face of the base near the fixed water spray base, which can move away from the fixed water spray base. The movable water spray assembly includes an inner water spray pipe and an outer water spray pipe. The inner water spray pipe is symmetrically arranged on the front and rear sides of the blade, and the outer water spray pipe is symmetrically arranged with its outlet facing downwards towards the blade.

2. The adjustable multi-angle cooling water spray cover for a dicing machine according to claim 1, characterized in that: The first water spray pipe can be detachably installed on one side of the fixed water spray base via an adjustable fixing component. The adjustable fixing component includes a fixing base fixedly connected to the fixed water spray base and a water inlet connector fixedly connected to the opening of the fixing base by a compression bolt. The water inlet connector is connected and fixedly connected to the first water spray pipe.

3. The adjustable multi-angle cooling water spray cover for a dicing machine according to claim 1 or 2, characterized in that: The movable water spray assembly also includes a drive cylinder fixedly mounted on the end face of the base, a main mounting base driven by the drive cylinder, and a connecting plate and an adjusting plate symmetrically arranged on the main mounting base. The connecting plate and the adjusting plate are fixed together by bolts, and bolt holes that cooperate with the bolts are provided on the connecting plate.

4. The adjustable multi-angle cooling water spray cover for the dicing machine according to claim 3, characterized in that: A magnetic switch is provided on the drive cylinder, which is used to monitor and determine the position of the cylinder piston rod.

5. The adjustable multi-angle cooling water spray cover for a dicing machine according to claim 4, characterized in that: The piston end of the drive cylinder is fixedly connected to a connecting seat via a connecting cover, and the main mounting seat is fixedly connected to the end face of the connecting seat.

6. The adjustable multi-angle cooling water spray cover for a dicing machine according to claim 4 or 5, characterized in that: A height measuring air pipe is vertically arranged on the side of the base near the main mounting seat.

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