A vacuum processing device based on PVD coating technology

Abstract

This utility model discloses a vacuum treatment device based on PVD coating technology, including an equipment cabinet, a side cabinet shell, and a rotating motor. A coating mechanism for coating is provided on one side of the side cabinet shell. The coating mechanism includes a coating tank fixedly connected to the equipment cabinet, with a sun gear movably connected inside the coating tank. The output shaft of the rotating motor is fixedly connected to a planetary carrier via a rotating shaft. This device can remove impurities such as oil and oxide scale from the workpiece surface, increase the specific surface area, and improve the mechanical bonding ability between the coating material and the workpiece. It solves the problems of poor film adhesion and easy peeling caused by the lack of sandblasting treatment in traditional devices. Furthermore, it ensures that the film material adheres tightly to the workpiece, effectively reducing defects such as bubbles and pinholes, especially for workpieces made of special materials, significantly improving the bonding strength between the film and the workpiece, as well as the performance and service life of the coated product.

Description

Technical Field

[0001] This utility model relates to the field of PVD coating technology, specifically a vacuum processing device based on PVD coating technology. Background Technology

[0002] Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions, causing them to evaporate and condense onto the surface of the workpiece (metal, semiconductor, or insulator) to form a thin film. Physical vapor deposition (PVD) technology refers to a method of vaporizing the coating material into atoms or molecules or ionizing it into ions under vacuum conditions and depositing it directly onto the surface of the substrate.

[0003] In the existing technology, some PVD vacuum treatment devices cannot perform sandblasting on the workpiece before coating, making it difficult to completely remove residual oil, oxide scale, impurities and other contaminants from the workpiece surface. This results in poor adhesion between the coating material and the workpiece surface, leading to peeling and flaking.

[0004] To address these issues, this invention provides a vacuum processing device based on PVD coating technology. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides a vacuum treatment device based on PVD coating technology, which solves the problem mentioned above that the workpiece cannot be sandblasted before coating, making it difficult to completely remove residual oil, oxide scale, impurities, etc. on the workpiece surface. This results in poor adhesion between the coating material and the workpiece surface, leading to peeling and flaking.

[0006] To achieve the above objectives, this utility model provides the following technical solution: A vacuum processing device based on PVD coating technology, comprising an equipment cabinet, a side cabinet shell, and a rotating motor. A coating mechanism for coating is provided on one side of the side cabinet shell. The coating mechanism includes a coating tank fixedly connected to the equipment cabinet. A sun gear is movably connected inside the coating tank. The output shaft of the rotating motor is fixedly connected to a planetary carrier via a rotating shaft. Three planetary gears are rotatably connected to the planetary carrier, and the outer sides of the three planetary gears mesh with the sun gear. A workpiece fixing rod is fixedly connected to each of the three planetary gears. A rotating tank is also fixedly connected to the wheel. The inner wall of the rotating tank has a reciprocating groove, and a sandblasting disc is movably connected inside the rotating tank. The inner wall of the sandblasting disc has multiple sandblasting nozzles for sandblasting, and fixed blocks are fixedly connected to both ends of the sandblasting disc. The sides of the fixed blocks are rotatably connected to limit plugs through movable blocks, and the limit plugs match the reciprocating grooves. The sandblasting disc is movably connected to a limit rod so that when the rotating shaft rotates, it drives three planetary gears to rotate, which in turn causes the planetary carrier to rotate and drive the rotating tank to rotate. Because the limit plugs and the reciprocating grooves match, the sandblasting disc moves up and down reciprocally inside the rotating tank to sandblast the workpiece.

[0007] Preferably, a heating device is installed inside the side cabinet shell, a heating box is fixedly connected to one side of the heating device, an insulation box is installed outside the heating box, a heating pipe for heating is fixedly connected inside the heating box, and a conveying pipe for conveying coating materials is fixedly connected to the equipment cabinet near the rotating motor.

[0008] Preferably, the coating tank is rotatably connected to a sealing cap for sealing, and the side of the coating tank is provided with a viewing window for observation. The side of the coating tank is connected to a heating pipe, and the bottom of the coating tank is fixedly connected to a vacuum pump for evacuation. The other end of the delivery pipe extends into the interior of the coating tank.

[0009] Preferably, the bottom of the equipment cabinet is fixedly connected with casters for easy movement, and the top of the side cabinet shell is provided with an indicator light for displaying the working status of the equipment.

[0010] Preferably, a pressure mechanism is provided at the center of the three planetary gears. The pressure mechanism includes gears that mesh with the three planetary gears, and the bottom of the gears is movably connected to the planet carrier. A rotating rod is fixedly connected to the gears, and a fixed disk is fixedly connected to the rotating rod via an elastic component. Three movable seats are fixedly connected to the fixed disk, and a telescopic arm is fixedly connected to the fixed disk. A movable arm is movably connected to the side of the telescopic arm via a connecting rod, and the other end of the movable arm is movably connected to the movable seat.

[0011] Preferably, the top end of the movable arm is movably connected to an elastic block via a spring, and a bonding roller for pressing and coating the workpiece is rotatably connected to the side of the elastic block, so that the telescopic arm extends and retracts when the gear rotates, and then the movable arm extends outward through the connecting rod, so that the bonding roller can get close to the surface of the workpiece, and the bonding roller can better adhere the film material to the workpiece through the up and down extension and retraction of the telescopic arm. Beneficial effects

[0012] This invention provides a vacuum processing device based on PVD coating technology. Compared with the prior art, it has the following advantages:

[0013] (1) The vacuum treatment device based on PVD coating technology drives the rotating shaft to rotate the planetary gears by rotating the motor. The planetary gears mesh with the planetary carrier to make the rotating tank revolve. The reciprocating groove on the inner wall of the rotating tank and the limiting plug of the sandblasting disc form a sliding pair, which forces the sandblasting disc to move up and down along the limiting rod. The sandblasting nozzle continuously sprays abrasive to remove impurities such as oil stains and oxide scale from the surface of the workpiece. At the same time, it coarsens the surface microstructure, increases the specific surface area, and improves the mechanical bonding ability between the coating material and the workpiece. This solves the problems of poor film adhesion and easy peeling caused by the lack of sandblasting treatment in traditional devices.

[0014] (2) This vacuum processing device based on PVD coating technology uses planetary gears to drive gears to rotate. The rotating rod drives the fixed disk to move through the elastic component. When the telescopic arm extends, it pushes the movable arm through the connecting rod, so that the bonding roller is close to the surface of the workpiece. The elastic component provides cushioning to avoid damage to the workpiece. The telescopic arm extends and retracts, driving the bonding roller to move along the workpiece axis. In conjunction with the rotation of the workpiece, the coating layer is rolled on the entire surface. This process can eliminate the pores and interface gaps inside the coating layer, so that the film material is tightly bonded to the workpiece. Especially for workpieces made of special materials, it can effectively reduce defects such as bubbles and pinholes, and significantly improve the bonding strength between the film and the workpiece, as well as the performance and service life of the coated product. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0016] Figure 2 This is a schematic diagram of the internal structure of the side cabinet shell of this utility model;

[0017] Figure 3 This is an exploded view of the coating mechanism structure of this utility model;

[0018] Figure 4 This is a three-dimensional cross-sectional view of the coating mechanism structure of this utility model;

[0019] Figure 5 This is the utility model Figure 4 Enlarged view of A in the image;

[0020] Figure 6 This is a three-dimensional view of the pressure mechanism structure of this utility model;

[0021] Figure 7 This is the utility model Figure 6 A magnified view of B in the image.

[0022] In the diagram: 1. Equipment cabinet; 2. Side cabinet shell; 3. Indicator light; 4. Fuma casters; 5. Rotary motor; 6. Conveying pipe; 7. Air pump; 8. Heating device; 9. Heating box; 10. Insulation box; 11. Heating pipe;

[0023] 12. Coating mechanism; 121. Coating tank; 122. Sealing cover; 123. Viewing window; 124. Rotating shaft; 125. Planetary carrier; 126. Planetary gear; 127. Workpiece fixing rod; 128. Rotating tank; 129. Reciprocating groove; 1210. Sandblasting disc; 1211. Sandblasting nozzle; 1212. Sun gear; 1213. Fixed block; 1214. Moving block; 1215. Limit plug; 1216. Limit rod;

[0024] 13. Pressure mechanism; 131. Gear; 132. Rotating rod; 133. Elastic component; 134. Fixed plate; 135. Telescopic arm; 136. Connecting rod; 137. Movable arm; 138. Movable seat; 139. Elastic block; 1310. Adhesive roller. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example

[0026] Please see Figures 1 to 7A vacuum processing device based on PVD coating technology includes an equipment cabinet 1, a side cabinet shell 2, and a rotary motor 5. A coating mechanism 12 for coating is provided on one side of the side cabinet shell 2. The coating mechanism 12 includes a coating tank 121 fixedly connected to the equipment cabinet 1. A sun gear 1212 is movably connected inside the coating tank 121. The output shaft of the rotary motor 5 is fixedly connected to a planetary carrier 125 via a rotating shaft 124. Three planetary gears 126 are rotatably connected to the planetary carrier 125, and the outer sides of the three planetary gears 126 mesh with the sun gear 1212. Each of the components is fixedly connected to a workpiece fixing rod 127. A rotating tank 128 is also fixedly connected to the sun gear 1212. A reciprocating groove 129 is formed on the inner wall of the rotating tank 128, and a sandblasting disc 1210 is movably connected inside the rotating tank 128. Multiple sandblasting nozzles 1211 for sandblasting are formed on the inner wall of the sandblasting disc 1210, and fixing blocks 1213 are fixedly connected to both ends of the sandblasting disc 1210. Limiting plugs 1215 are rotatably connected to the sides of the fixing blocks 1213 via movable blocks 1214, and the limiting plugs 1215 match the reciprocating groove 129. The sandblasting disc 1210 is movably connected to... On the limiting rod 1216, when the rotating shaft 124 rotates, it drives the three planetary gears 126 to rotate, which in turn causes the planetary carrier 125 to rotate and drive the rotating tank 128 to rotate. Since the limiting plug 1215 and the reciprocating groove 129 match, the sandblasting disc 1210 moves up and down reciprocally inside the rotating tank 128 to sandblast the workpiece. The side cabinet shell 2 is equipped with a heating device 8. A heating box 9 is fixedly connected to one side of the heating device 8. An insulation box 10 is set on the outside of the heating box 9. A heating pipe 11 for heating is fixedly connected inside the heating box 9. The equipment cabinet 1 is close to the rotating motor. A conveying pipe 6 for conveying coating material is fixedly connected at position 5. A sealing cover 122 for sealing is rotatably connected to the coating tank 121. A viewing window 123 for observation is provided on the side of the coating tank 121. The side of the coating tank 121 is connected to the heating pipe 11. An air pump 7 for evacuation is fixedly connected to the bottom of the coating tank 121. The other end of the conveying pipe 6 passes through the interior of the coating tank 121. The bottom of the equipment cabinet 1 is fixedly connected to the caster wheels 4 for easy movement. An indicator light 3 for displaying the working status of the equipment is provided on the top of the side cabinet shell 2.

[0027] During operation, the workpiece is installed on the workpiece fixing rod 127, the sealing cover 122 is closed, the vacuum pump 7 is started, and the air inside the coating tank 121 is evacuated to the set vacuum level. The heating device 8 drives the heating pipe 11 to heat up, and the heat is conducted to the interior through the side wall of the coating tank 121. The heating box 9 and the heat preservation box 10 maintain a stable temperature field. The output shaft of the rotating motor 5 drives the rotating shaft 124 to rotate, driving the three planetary gears 126 to rotate synchronously. The outer tooth surface of the planetary gears 126 meshes with the inner tooth of the sun gear 1212, causing the planet carrier 125 to revolve around the central axis of the coating tank 121. At the same time, the internal components are driven to rotate through the fixedly connected rotating tank 128. The reciprocating grooves 129 on the inner wall of the rotating tank 128 are distributed in a double helix shape and are connected to the fixed blocks 1213 at both ends of the sandblasting disc 1210 through the movable block 12. The limiting plug 1215 connected to 14 forms a sliding pair. When the rotating tank 128 rotates, the limiting plug 1215 moves along the trajectory of the reciprocating groove 129, forcing the sandblasting disc 1210 to make up-down reciprocating linear motion along the limiting rod 1216. The sandblasting nozzle 1211 on the inner wall of the sandblasting disc 1210 is connected to the external sandblasting air source. During the reciprocating motion, abrasive is sprayed onto the surface of the workpiece to achieve surface cleaning and roughening treatment. One end of the conveying pipe 6 is connected to an external coating material supply source, such as an evaporation target or gas raw material, and the other end passes through the side wall of the coating tank 121 to convey the material to the area near the workpiece. In a vacuum environment, the coating material evaporates and adheres to the surface of the workpiece through the principle of physical vapor deposition to form a coating. The viewing window 123 is made of transparent vacuum sealing material, allowing external observation of the internal sandblasting and coating process. Example

[0028] Please see Figures 1 to 7 This embodiment provides a technical solution based on Embodiment 1: a pressure mechanism 13 is provided at the center of the three planetary gears 126. The pressure mechanism 13 includes a gear 131 that meshes with the three planetary gears 126, and the bottom of the gear 131 is movably connected to the planet carrier 125. A rotating rod 132 is fixedly connected to the gear 131, and a fixed disk 134 is fixedly connected to the rotating rod 132 through an elastic component 133. Three movable seats 138 are fixedly connected to the fixed disk 134, and a telescopic arm 135 is fixedly connected to the fixed disk 134. A connecting rod 1 is connected to the side of the telescopic arm 135. 36 is movably connected to a movable arm 137, and the other end of the movable arm 137 is movably connected to a movable seat 138. The top end of the movable arm 137 is movably connected to an elastic block 139 via a spring, and a bonding roller 1310 for pressing and coating workpieces is rotatably connected to the side of the elastic block 139. When the gear 131 rotates, the telescopic arm 135 extends and retracts, and then the movable arm 137 extends outward through the connecting rod 136, so that the bonding roller 1310 can be close to the surface of the workpiece. And through the up and down extension and retraction of the telescopic arm 135, the bonding roller 1310 can better adhere the film material to the workpiece.

[0029] During operation, gear 131 at the center of planetary gear 126 meshes with the external teeth of planetary gear 126 and rotates synchronously with planetary gear 126. Gear 131 drives rotating rod 132 to rotate. Rotating rod 132 is connected to fixed disk 134 through elastic component 133 (such as compression spring assembly). When telescopic arm 135 is energized, telescopic arm 135 extends or retracts, driving fixed disk 134 to move axially. Fixed disk 134 is connected to connecting rod 136 through telescopic arm 135. The other end of connecting rod 136 is hinged to the middle of movable arm 137. The end of movable arm 137 is hinged to movable seat 138. When gear 131 rotates, it drives fixed disk 134 to move downward through telescopic arm 135. 6. The movable arm 137 is pushed to rotate around the movable seat 138, causing the elastic block 139 at the top of the movable arm 137 to move towards the workpiece until the bonding roller 1310 contacts the workpiece surface. The elastic component 133 provides buffer damping to avoid rigid contact damage to the workpiece. The internal spring of the elastic block 139 allows it to swing slightly to adapt to the curvature change of the workpiece surface. The telescopic arm 135 performs telescopic movement in sync, driving the bonding roller 1310 to move along the workpiece axis. In conjunction with the rotation of the workpiece with the planetary gear 126, the entire surface of the coating layer is rolled. During the rolling process, the bonding roller 1310 reduces frictional resistance by rotating itself, ensuring uniform pressing of the coating layer and eliminating internal pores and interface gaps.

[0030] Furthermore, any content not described in detail in this specification is existing technology known to those skilled in the art.

[0031] Working principle: During operation, the workpiece is first installed on the workpiece fixing rod 127, the sealing cover 122 is closed, and the vacuum pump 7 evacuates the inside of the coating tank 121 to the set vacuum level. The heating device 8 drives the heating pipe 11 to heat up and conducts heat through the side wall of the coating tank 121. The heating box 9 and the heat preservation box 10 maintain a stable temperature field. The output shaft of the rotating motor 5 drives the rotating shaft 124 to rotate, driving the three planetary gears 126 to rotate synchronously. The outer tooth surface of the planetary gears 126 meshes with the inner tooth of the sun gear 1212, causing the planet carrier 125 to revolve around the central axis of the coating tank 121. At the same time, the rotating tank 128 drives the internal components to rotate. The reciprocating groove 129 on the inner wall of the rotating tank 128 and the limiting plugs 1215 at both ends of the sandblasting disc 1210 form a sliding pair. When the rotating tank 128 rotates, it forces the sandblasting disc 1210 to move along the limiting groove 129. Position rod 1216 makes up-and-down reciprocating linear motion, sandblasting nozzle 1211 sprays abrasive onto the workpiece surface, and conveying pipe 6 transports coating material to the vicinity of the workpiece. In a vacuum environment, the coating layer is formed by evaporation and adhesion to the workpiece surface through the principle of physical vapor deposition. Planetary gear 126 drives gear 131 to rotate synchronously. Gear 131 drives fixed disk 134 to move through rotating rod 132 and elastic component 133. Telescopic arm 135 causes the contact roller 1310 on the elastic block 139 at the top of movable arm 137 to contact the workpiece surface through connecting rod 136. Telescopic arm 135 extends and retracts, causing contact roller 1310 to move along the workpiece axis. In conjunction with the workpiece rotation, the coating layer is rolled on the entire surface. Viewing window 123 allows observation of the internal process. Casters 4 facilitate equipment movement. Indicator light 3 displays the working status.

[0032] It should be noted that all standard parts used in this utility model can be purchased from the market, and irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art. In addition, the circuit connection adopts conventional connection methods in the prior art, which will not be described in detail here. The contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0033] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vacuum processing device based on PVD coating technology, comprising a device cabinet (1), a side cabinet shell (2) and a rotating motor (5), characterized in that: A coating mechanism (12) for coating is provided on one side of the side cabinet shell (2). The coating mechanism (12) includes a coating tank (121) fixedly connected to the equipment cabinet (1). A sun gear (1212) is movably connected inside the coating tank (121). The output shaft of the rotating motor (5) is fixedly connected to a planetary carrier (125) through a rotating shaft (124). Three planetary gears (126) are rotatably connected to the planetary carrier (125), and the outer sides of the three planetary gears (126) mesh with the sun gear (1212). A workpiece fixing rod (127) is fixedly connected to each of the three planetary gears (126). The sun gear (1212) A rotating tank (128) is fixedly connected to the upper part of the rotating tank (128). A reciprocating groove (129) is provided on the inner wall of the rotating tank (128). A sandblasting disc (1210) is movably connected inside the rotating tank (128). A plurality of sandblasting nozzles (1211) for sandblasting are provided on the inner wall of the sandblasting disc (1210). Fixed blocks (1213) are fixedly connected to both ends of the sandblasting disc (1210). A limit plug (1215) is rotatably connected to the side of the fixed block (1213) through a movable block (1214). The limit plug (1215) matches the reciprocating groove (129). The sandblasting disc (1210) is movably connected to the limit rod (1216).

2. The vacuum processing device based on PVD coating technology according to claim 1, characterized in that: The side cabinet shell (2) is equipped with a heating device (8) inside. A heating box (9) is fixedly connected to one side of the heating device (8). An insulation box (10) is provided on the outside of the heating box (9). A heating pipe (11) for heating is fixedly connected inside the heating box (9). A conveying pipe (6) for conveying coating materials is fixedly connected to the equipment cabinet (1) near the rotating motor (5).

3. The vacuum processing device based on PVD coating technology according to claim 1, characterized in that: The coating tank (121) is rotatably connected to a sealing cap (122) for sealing, and a viewing window (123) for observation is provided on the side of the coating tank (121). The side of the coating tank (121) is connected to a heating pipe (11). A vacuum pump (7) for evacuating air is fixedly connected to the bottom of the coating tank (121), and the other end of the conveying pipe (6) penetrates into the interior of the coating tank (121).

4. The vacuum processing device based on PVD coating technology according to claim 1, characterized in that: The bottom of the equipment cabinet (1) is fixedly connected with Foma casters (4) for easy movement, and the top of the side cabinet shell (2) is provided with an indicator light (3) for displaying the working status of the equipment.

5. The vacuum processing device based on PVD coating technology according to claim 1, characterized in that: A pressure mechanism (13) is provided at the center of the three planetary gears (126). The pressure mechanism (13) includes a gear (131) that meshes with the three planetary gears (126). The bottom of the gear (131) is movably connected to the planet carrier (125). A rotating rod (132) is fixedly connected to the gear (131). A fixed disk (134) is fixedly connected to the rotating rod (132) through an elastic component (133). Three movable seats (138) are fixedly connected to the fixed disk (134). A telescopic arm (135) is fixedly connected to the fixed disk (134). A movable arm (137) is movably connected to the side of the telescopic arm (135) through a connecting rod (136). The other end of the movable arm (137) is movably connected to the movable seat (138).

6. The vacuum processing device based on PVD coating technology according to claim 5, characterized in that: The top of the movable arm (137) is movably connected to an elastic block (139) via a spring, and a bonding roller (1310) for pressing and coating workpieces is rotatably connected to the side of the elastic block (139).

Images