A circular multi-chamber continuous coating device

Abstract

This utility model discloses a circular multi-chamber continuous coating device. The vacuum chamber contains circularly distributed workpiece entry / exit stations and multiple coating stations. A workpiece transmission mechanism connects the workpiece entry / exit stations to each coating station. Each coating station is equipped with a dual-axis moving magnetron sputtering target, which includes a target material, a magnetic field assembly, a translation mechanism, and a rotation mechanism. The target material is positioned above the coating station, and the magnetic field assembly is positioned above the target material. The magnetic field assembly is equipped with the translation and rotation mechanisms. This circular multi-chamber continuous coating device, by setting workpiece entry / exit stations and multiple coating stations within a circular vacuum chamber, can achieve multi-layer coating of workpieces. Simultaneously, by setting a target material with both rotating and translating magnetic fields at each coating station, it changes the traditional coating process where the magnetic field is stationary or can only move in one direction. This effectively improves the uniformity of workpiece coating while reducing target material consumption and avoiding significant waste of target material.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to a circular multi-chamber continuous coating device. Background Technology

[0002] In the field of vacuum coating technology, existing vacuum coating equipment typically employs a method where the workpiece moves while the target remains stationary. During the coating process, in addition to being sputtered onto the workpiece, the target material can easily sputter onto fixtures, workpiece holders, backing plates, and other mechanisms, leading to target material waste. This is especially true for components plated with precious metals (such as gold, silver, and platinum). Statistics show that only about 20% of the target material is actually sputtered onto the workpiece for coating, resulting in significant waste of precious metals and making it difficult to effectively control the cost of coating materials.

[0003] In addition, most existing circular vacuum coating chambers are single-station coating methods, which can only be used for coating a single film layer and are difficult to apply to multi-film layer (especially multiple film layers of different materials) coating, thus having a narrow range of applications. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the prior art and provide a circular multi-chamber continuous coating device that can realize multi-layer coating structure, and can also effectively improve the coating uniformity of the workpiece while reducing the consumption of the target material and avoiding a large amount of waste of the target material.

[0005] The technical solution of this utility model is as follows: a circular multi-chamber continuous coating device, wherein the vacuum chamber is provided with workpiece entry and exit stations arranged in a circle and multiple coating stations, and a workpiece transmission mechanism is provided between the workpiece entry and exit stations and each coating station; each coating station is provided with a dual-axis moving magnetic control target, the dual-axis moving magnetic control target including a target material, a magnetic field assembly, a translation mechanism and a rotation mechanism, the target material is located above the coating station, the magnetic field assembly is located above the target material, and the magnetic field assembly is provided with the translation mechanism and the rotation mechanism. The workpiece entry and exit stations are connected to a first set of vacuum pumping units (including entry and exit station air extraction valves and entry and exit station air extraction pumps, etc.), and all coating stations are interconnected and connected to a second set of vacuum pumping units (including high vacuum air extraction valves, molecular pumps and backing pumps, etc.). The dual-axis moving magnetron sputtering target generates a kinetic magnetic field that simultaneously translates and rotates. This magnetic field moves uniformly across the entire target surface, achieving uniform coating on the workpiece. Simultaneously, it reduces target sputtering onto external equipment structures (such as fixtures, workpiece holders, and backing plates), significantly minimizing target waste. Multiple coating stations are distributed within the vacuum chamber, enabling multi-layer coating of the workpiece. Multi-layer coating can be performed using a single-material target or multiple-material targets, making the equipment more flexible, convenient, and applicable to a wider range of situations.

[0006] In the dual-axis moving magnetron sputtering target, the target material is a planar target. The top surface of the planar target is provided with a water-cooling jacket. The outer periphery of the planar target is also provided with a protective liner, a support seat, an insulating sleeve, and a sealing seat. The support seat is installed on the outer wall of the vacuum chamber. The outer periphery of the planar target is provided with a protective liner. The protective liner extends to the inner wall of the vacuum chamber of the coating station. The top surface of the protective liner is also fixedly connected to the water-cooling jacket. The outer periphery of the water-cooling jacket is provided with an insulating sleeve. A sealing seat is provided above the water-cooling jacket. The sealing seat, the insulating sleeve, and the support seat are locked together.

[0007] A sealing sleeve is installed on the sealing seat, and the magnetic field assembly, magnetic field translation mechanism, and magnetic field rotation mechanism are installed in the sealing sleeve. Among them, the magnetic field rotation drive motor in the magnetic field rotation mechanism is installed on the top of the sealing sleeve through a motor support, and a sealing structure is formed between the motor support and the sealing sleeve. The sealing sleeve extends upward on the top surface of the vacuum chamber, and the space inside the sealing sleeve is connected to the space inside the vacuum chamber.

[0008] The magnetic field assembly has a translation nut on its top. The magnetic field translation mechanism includes a translation screw and a translation drive motor. The translation nut and the translation screw are connected in a cooperative manner, and the power output end of the translation drive motor is connected to the translation screw. In this structure, the translation nut and the translation screw cooperate to form a lead screw pair structure. The translation drive motor and the translation screw are connected using existing common power transmission components. After the translation drive motor outputs power, it drives the translation screw to rotate, thereby driving the translation nut to move. The translation nut drives the magnetic field assembly to perform translational motion, thereby forming a reciprocating translational magnetic field above the target material. The magnetic field assembly can use an existing common structure.

[0009] The magnetic field rotation mechanism includes a rotating support, a slip ring, a magnetic field rotation drive motor, and a motor support. The magnetic field translation mechanism is integrally mounted on the rotating support. The magnetic field rotation drive motor is mounted on a sealing sleeve via the motor support, and the power output end of the magnetic field rotation drive motor is connected to the rotating support via the slip ring. In this structure, the magnetic field rotation drive motor is fixedly mounted on the top of the sealing sleeve via the motor support. After the magnetic field rotation drive motor outputs power, it drives the rotating support to rotate through the slip ring. The rotating support drives the entire magnetic field translation mechanism and magnetic field assembly to rotate synchronously, thereby forming a rotating moving magnetic field above the target material. When the magnetic field rotation drive motor and the translation drive motor are both in operation, the magnetic field assembly simultaneously generates translational and rotational motion, thus forming a moving magnetic field that rotates and translates simultaneously above the target material. This allows the magnetic field to move and rotate uniformly and simultaneously across the entire target surface, achieving uniform workpiece coating and reducing target material waste.

[0010] The workpiece transmission mechanism includes a workpiece conversion frame, a conversion frame rotation mechanism, and a conversion frame lifting mechanism. The workpiece conversion frame has multiple conversion arms distributed in a divergent manner. The number of conversion arms is the same as the total number of workpiece entry and exit stations and coating stations. The bottom of the workpiece conversion frame is equipped with a conversion frame rotation mechanism and a conversion frame lifting mechanism.

[0011] The conversion frame rotation mechanism includes a conversion frame rotation drive motor and a positioning shaft. The center of the workpiece conversion frame is connected to one end of the positioning shaft, and the conversion frame rotation drive motor is connected to the other end of the positioning shaft. When the workpiece conversion frame needs to switch between different workstations, the conversion frame rotation drive motor drives the positioning shaft to rotate, and the positioning shaft drives the workpiece conversion frame to rotate, so that the conversion arm can switch the workpiece and workpiece tray between different workstations.

[0012] The lifting mechanism of the conversion frame includes a lifting motor, a lifting gear screw, and a lifting sleeve. The power output end of the lifting motor is equipped with a connecting gear, which meshes with the lifting gear screw. The outer circumference of the lifting gear screw is threaded into the inner wall of the lifting sleeve, and the top surface of the lifting sleeve is fixedly connected to the workpiece conversion frame. When the workpiece conversion frame needs to move up and down, the lifting motor drives the connecting gear to rotate. The connecting gear meshes with the lifting gear screw, causing the lifting gear screw to rotate. The lifting gear screw then drives the lifting sleeve to move up and down, thereby causing the workpiece conversion frame to move up and down.

[0013] The workpiece entry / exit station is equipped with an upper sealing plate and a lower sealing plate on its upper and lower sides, respectively. The upper sealing plate is hinged to the outer wall of the vacuum chamber, and the bottom of the lower sealing plate is connected to a sealing plate lifting cylinder. In use, the upper sealing plate is opened or closed manually, while the lower sealing plate is driven to rise and close or fall and open by the sealing plate lifting cylinder. When both the upper and lower sealing plates are closed, an independent sealed cavity is formed at the workpiece entry / exit station, which can be vacuumed by the aforementioned first set of vacuum pumping units.

[0014] The coating station is equipped with a workpiece support plate, and a support plate lifting cylinder is located at the bottom of the workpiece support plate. The support plate lifting cylinder drives the workpiece support plate to move up and down, thereby cooperating with the workpiece transfer frame to pick up and put down workpieces and workpiece trays, realizing the transfer of workpieces and workpiece trays between various stations.

[0015] The working principle of the above-mentioned circular multi-chamber continuous coating device is as follows: The upper sealing plate of the workpiece entry / exit station is opened, and the workpiece to be coated is placed on the workpiece tray at the workpiece entry / exit station. After closing the upper sealing plate, a vacuum is drawn at the workpiece entry / exit station until the set vacuum level is reached, and the coating at each station is waited for completion. After coating at each station, the lower sealing plate of the workpiece entry / exit station is lowered. Simultaneously, the workpiece support plate in each coating station is also lowered. The conversion arms of the workpiece conversion frame rotate to each station (including the workpiece entry / exit station and the coating station), supporting and lifting the workpiece tray at each station, and then driving... The workpiece tray and workpiece are transferred to one station. Then the workpiece transfer frame descends, placing each workpiece tray and workpiece onto the support plate of each coating station and the lower sealing plate of the entry / exit station. The workpiece transfer frame then resets and rotates until each transfer arm is positioned between two adjacent stations. After that, each coating station coats the workpiece. At this time, the coated workpiece is in the workpiece entry / exit station. After the lower sealing plate rises, the workpiece entry / exit station forms an independent sealed space. After the atmosphere is released, the upper sealing plate can be opened and the coated workpiece can be taken out. At the same time, a new workpiece to be coated is placed in, thus completing one work cycle.

[0016] During the coating process at each station, above the target material, the translation drive motor outputs power, driving the translation screw to rotate, which in turn drives the translation nut to move. The translation nut then drives the magnetic field assembly to perform translational motion, thus forming a reciprocating translational motion magnetic field above the target material. Simultaneously, after the magnetic field rotation drive motor outputs power, it drives the rotating support to rotate through the slip ring. The rotating support drives the entire magnetic field translation mechanism and magnetic field assembly to rotate synchronously, thus forming a rotational motion magnetic field above the target material. Therefore, the magnetic field assembly simultaneously generates translational and rotational motion, forming a simultaneous rotating and translational motion magnetic field above the target material. This allows the magnetic field to move and rotate uniformly across the entire target surface, achieving uniform coating of the workpiece and reducing target material waste.

[0017] Compared with the prior art, this utility model has the following advantages:

[0018] This circular multi-chamber continuous coating apparatus enables multi-layer coating of workpieces by setting up workpiece entry and exit stations and multiple coating stations in a circular vacuum chamber. At the same time, a target material with both rotating and translating magnetic fields is set up at each coating station. This changes the traditional coating process where the magnetic field is stationary or can only move in one direction. It can effectively improve the uniformity of workpiece coating while reducing the consumption of target material and avoiding a large amount of waste of target material.

[0019] In this circular multi-chamber continuous coating device, the workpiece entry and exit station can also flexibly form a sealed space independent of the vacuum chamber, so that the workpiece entry and exit station and multiple coating stations can form independent sealed spaces, forming different vacuum levels required for the coating process. At the same time, the workpiece entry and exit station can be opened at any time during the coating process of each coating station for workpiece replacement. It is flexible in use and can also improve the overall working efficiency of the coating device. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structural principle of this circular multi-chamber continuous coating device.

[0021] Figure 2 for Figure 1 AA section view.

[0022] Figure 3 for Figure 2 A magnified schematic diagram of a local structure of a dual-axis moving magnetically controlled target.

[0023] Figure 4 for Figure 3 View from direction B.

[0024] Figure 5 This is a schematic diagram illustrating the principle of magnetic field motion.

[0025] Figure 6 This is a schematic diagram illustrating the working principle of this circular multi-chamber continuous coating device.

[0026] Figure 7 for Figure 6 The image shown is a top view of this circular multi-chamber continuous coating apparatus.

[0027] The components indicated by the reference numerals in the above figures are as follows: 1 is the workpiece entry / exit station; 2 is the coating station; 3 is the workpiece transmission mechanism; 4 is the dual-axis moving magnetron target; 5 is the entry / exit station air extraction valve; 6 is the entry / exit station air extraction pump; 7 is the high vacuum air extraction valve; 8 is the molecular pump; 9 is the forepump; 10 is the target material; 11 is the water-cooling jacket; 12 is the protective liner; 13 is the support base; 14 is the insulating sleeve; 15 is the sealing seat; 16 is the sealing sleeve; 17 is the magnetic field assembly; 18 is the translation nut; 19 is... 20 is the translation screw, 21 is the translation drive motor, 22 is the rotary support, 23 is the slip ring, 24 is the magnetic field rotation drive motor, 25 is the motor support, 26 is the workpiece transfer frame, 27 is the transfer frame rotation drive motor, 28 is the positioning shaft, 29 is the transfer frame lifting motor, 30 is the lifting gear screw, 31 is the lifting sleeve, 32 is the connecting gear, 33 is the upper sealing plate, 34 is the lower sealing plate, 35 is the sealing plate lifting cylinder, 36 is the workpiece support plate, 37 is the workpiece pallet. Detailed Implementation

[0028] The present invention will be further described in detail below with reference to the embodiments, but the implementation of the present invention is not limited thereto.

[0029] Example

[0030] This embodiment describes a circular multi-chamber continuous coating device, such as... Figure 1 or Figure 2 As shown, the vacuum chamber has circularly distributed workpiece entry / exit stations 1 and multiple coating stations 2. A workpiece transmission mechanism 3 connects the workpiece entry / exit stations to each coating station. Each coating station is equipped with a dual-axis moving magnetron sputtering target 4. The dual-axis moving magnetron sputtering target includes a target material, a magnetic field assembly, a translation mechanism, and a rotation mechanism. The target material is positioned above the coating station, and the magnetic field assembly is positioned above the target material. The magnetic field assembly is equipped with the translation mechanism and the rotation mechanism. The workpiece entry / exit stations are connected to the first vacuum pumping unit (e.g., [missing information]). Figure 1 As shown, the system includes inlet / outlet station vacuum valves 5 and inlet / outlet station vacuum pumps 6, etc. All coating stations are interconnected and connected to a second vacuum unit (such as...) via a vacuum chamber. Figure 1 As shown, the system includes a high-vacuum pump valve 7, a molecular pump 8, and a backing pump 9. The dual-axis moving magnetron sputtering target generates a kinetic magnetic field that simultaneously translates and rotates. This magnetic field moves uniformly across the entire target surface, achieving uniform coating on the workpiece. Simultaneously, it reduces target sputtering onto external equipment structures (such as fixtures, workpiece holders, and liners), significantly minimizing target waste. Multiple coating stations are distributed within the vacuum chamber, enabling multi-layer coating of the workpiece. Multi-layer coating can be performed using a single-material target or targets of different materials, making the equipment more flexible, convenient, and applicable to a wider range of situations.

[0031] like Figure 3 or Figure 4As shown, in the dual-axis moving magnetron sputtering target, the target material 10 is a planar target. A water-cooling jacket 11 is provided on the top surface of the planar target. A protective liner 12, a support 13, an insulating sleeve 14, and a sealing seat 15 are also provided on the outer periphery of the planar target. The protective liner extends to the inner wall of the vacuum chamber at the coating station. The top surface of the protective liner is also fixedly connected to the water-cooling jacket. An insulating sleeve is provided on the outer periphery of the water-cooling jacket. A sealing seat is provided above the water-cooling jacket. The sealing seat, insulating sleeve, and support 15 are locked together. A sealing sleeve 16 is installed on the sealing seat. The magnetic field assembly, magnetic field translation mechanism, and magnetic field rotation mechanism are installed in the sealing sleeve. The magnetic field rotation drive motor in the magnetic field rotation mechanism is installed on the top of the sealing sleeve via a motor support. A sealing structure is formed between the motor support and the sealing sleeve. The sealing sleeve extends upwards on the top surface of the vacuum chamber, and the space inside the sealing sleeve is connected to the space inside the vacuum chamber. The magnetic field assembly 17 has a translation nut 18 on its top. The magnetic field translation mechanism includes a translation screw 19 and a translation drive motor 20. The translation nut and the translation screw are connected in a cooperative manner, and the power output end of the translation drive motor is connected to the translation screw. In this structure, the translation nut and the translation screw cooperate to form a lead screw pair structure. The translation drive motor and the translation screw are connected using existing common power transmission components. After the translation drive motor outputs power, it drives the translation screw to rotate, thereby driving the translation nut to move. The translation nut drives the magnetic field assembly to perform translational motion, thereby forming a reciprocating translational motion magnetic field above the target material. The magnetic field assembly can use existing common structures. The magnetic field rotation mechanism includes a rotating support 21, a slip ring 22, a magnetic field rotation drive motor 23, and a motor support 24. The magnetic field translation mechanism is mounted as a whole on the rotating support. The magnetic field rotation drive motor is mounted on the sealing sleeve through the motor support. The power output end of the magnetic field rotation drive motor is connected to the rotating support through the slip ring. In this structure, the magnetic field rotary drive motor is fixedly mounted on the top of the sealing sleeve via a motor support. After the magnetic field rotary drive motor outputs power, it drives the rotary support to rotate through the slip ring. The rotary support drives the entire magnetic field translation mechanism and magnetic field assembly to rotate synchronously, thereby forming a rotating moving magnetic field above the target material. When the magnetic field rotary drive motor and the translation drive motor are both working, the magnetic field assembly simultaneously generates translational and rotational motion, thus forming a moving magnetic field above the target material that rotates and translates simultaneously (its direction of motion is as follows). Figure 5 (As shown by the arrow in the image), the magnetic field moves and rotates uniformly and simultaneously across the entire target surface, thereby achieving uniform coating on the workpiece and reducing target waste.

[0032] like Figure 2As shown, the workpiece transmission mechanism includes a workpiece transfer frame 25, a transfer frame rotation mechanism, and a transfer frame lifting mechanism. The workpiece transfer frame has multiple transfer arms distributed in a divergent pattern. The number of transfer arms is the same as the total number of workpiece entry / exit stations and coating stations. The bottom of the workpiece transfer frame is equipped with a transfer frame rotation mechanism and a transfer frame lifting mechanism. The transfer frame rotation mechanism includes a transfer frame rotation drive motor 26 and a positioning shaft 27. The center of the workpiece transfer frame is connected to one end of the positioning shaft, and the transfer frame rotation drive motor is connected to the other end of the positioning shaft. When the workpiece transfer frame needs to switch between stations, the transfer frame rotation drive motor drives the positioning shaft to rotate, which in turn drives the workpiece transfer frame to rotate, allowing the transfer arms to move the workpiece and workpiece tray between different stations. The transfer frame lifting mechanism includes a transfer frame lifting motor 28, a lifting gear screw 29, and a lifting screw sleeve 30. The power output end of the transfer frame lifting motor is equipped with a connecting gear 31, which is connected to the lifting gear screw. The outer circumference of the lifting gear screw is threadedly engaged with the inner wall of the lifting screw sleeve, and the top surface of the lifting screw sleeve is fixedly connected to the workpiece transfer frame. When the workpiece transfer frame needs to be lifted, the lifting motor of the transfer frame drives the connecting gear to rotate. The connecting gear meshes with the lifting gear screw, which in turn drives the lifting gear screw to rotate. The lifting gear screw drives the lifting sleeve to move up and down, thereby driving the workpiece transfer frame to move up and down.

[0033] like Figure 2 As shown, an upper sealing plate 32 and a lower sealing plate 33 are respectively provided on the upper and lower sides of the workpiece entry / exit station. The upper sealing plate is hinged to the outer wall of the vacuum chamber, and the bottom of the lower sealing plate is connected to a sealing plate lifting cylinder 34. In use, the upper sealing plate is opened or closed manually, and the lower sealing plate is driven to rise and close or fall and open by the sealing plate lifting cylinder. When both the upper and lower sealing plates are closed, an independent sealed cavity can be formed at the workpiece entry / exit station, which can be vacuumed by the first set of vacuum pumping units. A workpiece support plate 35 is provided on the coating station, and a support plate lifting cylinder 36 is provided at the bottom of the workpiece support plate. The support plate lifting cylinder drives the workpiece support plate to move up and down, thereby cooperating with the workpiece transfer frame to pick up and put down the workpiece and workpiece tray 37, realizing the transfer of workpieces and workpiece trays between various stations.

[0034] The working principle of the above-mentioned circular multi-chamber continuous coating device is as follows: Figure 6 or Figure 7As shown, the upper sealing plate of the workpiece entry / exit station opens, and the workpiece to be coated is placed on the workpiece tray at the workpiece entry / exit station. After closing the upper sealing plate, a vacuum is drawn at the workpiece entry / exit station until the set vacuum level is reached, and the coating at each coating station is waited for to complete. After the coating at each coating station is completed, the lower sealing plate of the workpiece entry / exit station is lowered. At the same time, the workpiece support plate in each coating station is also lowered. The conversion arms of the workpiece conversion frame rotate to each station (including the workpiece entry / exit station and the coating station), supporting and lifting the workpiece tray at each station, and then driving the workpiece tray and workpiece conversion frame... Each workstation then lowers its workpiece transfer frame, placing the workpiece trays and corresponding workpieces onto the support plates of each coating station and the lower sealing plates of the entry / exit stations. The workpiece transfer frame then resets and rotates until each transfer arm is positioned between two adjacent workstations. Afterward, each coating station coats the workpieces. Meanwhile, in the workpiece entry / exit station, the lower sealing plate rises, creating an independent sealed space for the workpieces. Once the atmosphere is released, the upper sealing plate can be opened to remove the coated workpieces, and new workpieces to be coated can be placed in, thus completing one work cycle.

[0035] During the coating process at each station, above the target material, the translation drive motor outputs power, driving the translation screw to rotate, which in turn drives the translation nut to move. The translation nut then drives the magnetic field assembly to perform translational motion, thus forming a reciprocating translational motion magnetic field above the target material. Simultaneously, after the magnetic field rotation drive motor outputs power, it drives the rotating support to rotate through the slip ring. The rotating support drives the entire magnetic field translation mechanism and magnetic field assembly to rotate synchronously, thus forming a rotational motion magnetic field above the target material. Therefore, the magnetic field assembly simultaneously generates translational and rotational motion, forming a simultaneous rotating and translational motion magnetic field above the target material. This allows the magnetic field to move and rotate uniformly across the entire target surface, achieving uniform coating of the workpiece and reducing target material waste.

[0036] As described above, the present invention can be well implemented. The above embodiments are only preferred embodiments of the present invention and are not intended to limit the scope of implementation of the present invention. That is, all equivalent changes and modifications made in accordance with the content of the present invention are covered by the scope of protection claimed by the claims of the present invention.

Claims

1. A circular multi-chamber continuous coating apparatus, characterized by, The vacuum chamber is equipped with workpiece entry and exit stations arranged in a circle and multiple coating stations. A workpiece transmission mechanism is provided between the workpiece entry and exit stations and each coating station. Each coating station is equipped with a dual-axis moving magnetic control target. The dual-axis moving magnetic control target includes a target material, a magnetic field assembly, a translation mechanism and a rotation mechanism. The target material is located above the coating station, and the magnetic field assembly is located above the target material. The magnetic field assembly is equipped with a translation mechanism and a rotation mechanism.

2. The circular multi-chamber continuous coating apparatus according to claim 1, wherein In the dual-axis moving magnetron sputtering target, the target material is a planar target. The top surface of the planar target is provided with a water-cooling jacket. The outer periphery of the planar target is also provided with a protective liner, a support seat, an insulating sleeve, and a sealing seat. The support seat is installed on the outer wall of the vacuum chamber. The outer periphery of the planar target is provided with a protective liner. The protective liner extends to the inner wall of the vacuum chamber of the coating station. The top surface of the protective liner is also fixedly connected to the water-cooling jacket. The outer periphery of the water-cooling jacket is provided with an insulating sleeve. A sealing seat is provided above the water-cooling jacket. The sealing seat, the insulating sleeve, and the support seat are locked together.

3. The circular multi-chamber continuous coating apparatus of claim 2, wherein, A sealing sleeve is installed on the sealing seat, and the magnetic field assembly, magnetic field translation mechanism and magnetic field rotation mechanism are installed in the sealing sleeve.

4. The circular multi-chamber continuous coating apparatus according to claim 3, characterized in that, The magnetic field assembly is provided with a translation nut on the top. The magnetic field translation mechanism includes a translation screw and a translation drive motor. The translation nut is connected to the translation screw, and the power output end of the translation drive motor is connected to the translation screw.

5. The circular multi-chamber continuous coating apparatus according to claim 3, characterized in that, The magnetic field rotation mechanism includes a rotating support, a slip ring, a magnetic field rotation drive motor, and a motor support. The magnetic field translation mechanism is mounted on the rotating support as a whole. The magnetic field rotation drive motor is mounted on the sealing sleeve through the motor support. The power output end of the magnetic field rotation drive motor is connected to the rotating support through the slip ring.

6. The circular multi-chamber continuous coating apparatus according to claim 1, characterized in that, The workpiece transmission mechanism includes a workpiece conversion frame, a conversion frame rotation mechanism, and a conversion frame lifting mechanism. The workpiece conversion frame has multiple conversion arms distributed in a divergent manner. The number of conversion arms is the same as the total number of workpiece entry and exit stations and coating stations. The bottom of the workpiece conversion frame is equipped with a conversion frame rotation mechanism and a conversion frame lifting mechanism.

7. The circular multi-chamber continuous coating apparatus according to claim 6, characterized in that, The conversion frame rotation mechanism includes a conversion frame rotation drive motor and a positioning shaft. The center of the workpiece conversion frame is connected to one end of the positioning shaft, and the conversion frame rotation drive motor is connected to the other end of the positioning shaft.

8. The circular multi-chamber continuous coating apparatus according to claim 7, characterized in that, The conversion frame lifting mechanism includes a conversion frame lifting motor, a lifting gear screw, and a lifting screw sleeve. The power output end of the conversion frame lifting motor is provided with a connecting gear, which is connected to the lifting gear screw. The outer periphery of the lifting gear screw is threadedly engaged with the inner wall of the lifting screw sleeve, and the top surface of the lifting screw sleeve is fixedly connected to the workpiece conversion frame.

9. The circular multi-chamber continuous coating apparatus according to claim 1, characterized in that, The upper and lower sealing plates are respectively provided on the upper and lower sides of the workpiece entry and exit station. The upper sealing plate is hinged to the outer wall of the vacuum chamber, and the bottom of the lower sealing plate is connected to a sealing plate lifting cylinder.

10. The circular multi-chamber continuous coating apparatus according to claim 1, characterized in that, The coating station is equipped with a workpiece support plate, and the bottom of the workpiece support plate is equipped with a support plate lifting cylinder.

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