Diaphragm valve high-pressure test system
By utilizing a high-pressure diaphragm valve testing system, which employs pipeline connections and solenoid valve control, the problems of high-pressure nitrogen consumption and safety hazards have been solved, enabling low-cost and safe high-pressure diaphragm valve testing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 星奇(上海)半导体有限公司
- Filing Date
- 2025-04-28
- Publication Date
- 2026-05-26
AI Technical Summary
Existing high-pressure diaphragm valve testing methods consume large amounts of high-pressure nitrogen, resulting in high testing costs and safety hazards. Furthermore, many manufacturers are unable to conduct their own testing, increasing research and development cycles and costs.
A high-pressure testing system for diaphragm valves was designed. The system connects a test gas source, a pressure regulating valve, a solenoid valve, and an unloading valve through pipelines. High-pressure gas is stored in the pipeline at the rear end of the diaphragm valve under test. After the test, the gas is discharged through the solenoid valve and the unloading valve, reducing high-pressure nitrogen emissions, lowering costs, and improving safety.
It effectively reduces the emission of high-pressure nitrogen, lowers testing costs, improves testing safety, and allows manufacturers to conduct tests themselves, shortening the R&D cycle.
Smart Images
Figure CN224286373U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of valve testing, specifically to a high-pressure testing system for diaphragm valves. Background Technology
[0002] High-pressure diaphragm valves are widely used in high-cleanliness and specialized semiconductor manufacturing processes due to their high pressure resistance and high cleanliness. Therefore, it is essential to conduct reliability testing on high-pressure diaphragm valves, determine their technical parameters, and prevent unnecessary economic losses due to leakage.
[0003] Current high-pressure testing methods involve connecting the inlet of the high-pressure diaphragm valve to a high-pressure gas source and directly venting the outlet into the air. This method consumes a large amount of high-pressure nitrogen, increasing testing costs, and the emitted high-pressure gas could pose a safety hazard if it comes into direct contact with the human body. Furthermore, many manufacturers are limited by production conditions and lack the necessary safety qualifications for high-pressure gas sources at their facilities, making it impossible to conduct direct testing of high-pressure diaphragm valves using high-pressure gas sources. They must outsource testing, which is time-consuming, labor-intensive, and increases the development cycle and costs. Utility Model Content
[0004] Therefore, in order to overcome the shortcomings of the prior art, this utility model provides a diaphragm valve high-pressure testing system that reduces the emission of high-pressure gas during the testing process and saves testing costs.
[0005] To achieve the above objectives, this utility model provides a high-pressure testing system for diaphragm valves, used for high-pressure testing of diaphragm valves. The system includes: a test gas source, providing a pressure range of 1-2 MPa; a pressure regulating valve, adjusting the gas pressure in the test gas source to the required test pressure and outputting test gas; a first solenoid valve, controlling the test gas, which flows through the diaphragm valve under test via a pipeline and is then fed back to the control system by a gas detection device, displaying the current test pressure in the test pipeline; when the pressure in the test pipeline reaches a preset working pressure value, the first solenoid valve begins a predetermined lifespan test to determine whether the diaphragm valve under test has failed; a second solenoid valve, located in two pipelines at the rear end of the diaphragm valve under test, used to discharge the test gas from the test pipeline after the test; and an unloading valve, located between the first and second solenoid valves, used to release the pressure between the pressure regulating valve and the first solenoid valve in the pipeline.
[0006] In one embodiment, the test gas source includes: a gas source for providing gas; a CDA pipeline for compressing the gas and removing moisture and impurities therein to provide a dry, clean gas supply; a booster pump for compressing the gas to a pressure range of 24-34 MPa; and a gas storage cylinder for storing gas with a pressure range of 24-34 MPa.
[0007] In one embodiment, the gas is either nitrogen or an inert gas.
[0008] In one embodiment, the gas detection device is a pressure sensor.
[0009] In one embodiment, the control system is any one of a computer, a microcontroller, or an industrial control computer.
[0010] Compared with the prior art, the advantages of this utility model are as follows: During the test, the high-pressure gas is stored in two pipelines at the rear end of the diaphragm valve under test and locked by the second solenoid valve. After the test is completed, the pressure regulating valve and the first solenoid valve are closed, and the second solenoid valve is opened to release the high-pressure gas in the test pipeline. Then, the pressure between the pressure regulating valve and the solenoid valve is released through the unloading valve. This setting reduces the emission of high-pressure nitrogen during the test and saves the test cost. In addition, the unloading can be performed through the operation control system, which further improves the safety of the test. Attached Figure Description
[0011] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0012] Figure 1 This is a schematic diagram of the diaphragm valve high-pressure test system in an embodiment of this utility model. Detailed Implementation
[0013] The embodiments of this application will now be described in detail with reference to the accompanying drawings.
[0014] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0015] It should be noted that the following description covers various aspects of embodiments within the scope of protection of this utility model. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.
[0016] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.
[0017] Furthermore, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that the described aspects can be practiced without these specific details.
[0018] like Figure 1 As shown in the illustration, this application provides a high-pressure testing system for diaphragm valves, used for high-pressure testing of diaphragm valves. The system includes a test gas source connected via pipelines, a pressure regulating valve 5, a first solenoid valve 7, second solenoid valves (9 and 11), and an unloading valve 8. The pipelines are made of any suitable material capable of withstanding high pressures in the range of 40 MPa, such as stainless steel.
[0019] The test gas source provides a low-pressure gas source with a pressure range of 1-2 MPa. In one embodiment, the test gas source is a low-pressure nitrogen source capable of providing low-pressure nitrogen gas at 1-2 MPa. In another embodiment, other types of low-pressure gases may also be used as the test medium.
[0020] Pressure regulating valve 5 adjusts the gas pressure in the test gas source to the required test pressure and outputs the test gas. The test pressure can be between 24 MPa and 34 MPa.
[0021] The first solenoid valve 7 controls the test gas. The controlled test gas flows through the pipeline to the diaphragm valve 8 under test, and then through the gas detection device 10 to the control system 12, displaying the current test pressure in the test pipeline. When the pressure in the test pipeline reaches the preset working pressure value, the first solenoid valve 7 begins a predetermined life test to determine whether the diaphragm valve under test has failed. After the diaphragm valve under test repeats the opening and closing action a predetermined number of times, it is removed from the test system and connected to a helium detector for helium leak detection.
[0022] There are two second solenoid valves, namely second solenoid valve 9 and second solenoid valve 11. The two second solenoid valves are respectively installed in two pipelines at the rear end of the diaphragm valve under test, and are used to discharge the test gas in the test pipeline after the test is completed.
[0023] The power of the first solenoid valve and the second solenoid valve can be the same or different. When there is a difference, the test range of the first solenoid valve is greater than that of the second solenoid valve.
[0024] The unloading valve 8 is located between the first solenoid valve 7 and the second solenoid valves (9 and 11) to release the pressure between the pressure regulating valve and the first solenoid valve in the pipeline.
[0025] In the above system, during the test, high-pressure gas is stored in two pipelines at the rear end of the diaphragm valve under test and locked by the second solenoid valve. After the test is completed, the pressure regulating valve and the first solenoid valve are closed, and the second solenoid valve is opened to release the high-pressure gas in the test pipeline. Then, the pressure between the pressure regulating valve and the solenoid valve is released through the unloading valve. This setting reduces the emission of high-pressure nitrogen during the test and saves test costs. In addition, unloading can be performed through the operation control system, further improving the safety of the test.
[0026] In one embodiment, the test gas source includes a gas source 2, a CDA pipeline 1, a booster pump 3, and a gas storage cylinder 4.
[0027] Gas source 2 is used to provide gas.
[0028] CDA (clean dry air) line 1 is used to compress gas and remove moisture and impurities to provide a dry, clean gas supply.
[0029] Booster pump 3 is used to compress gas to a pressure range of 24-34 MPa.
[0030] Gas cylinder 4 is used to store gases with a pressure range of 24-34 MPa.
[0031] In one embodiment, the gas is either nitrogen or an inert gas.
[0032] In one embodiment, the gas detection device is a pressure sensor. The gas detection device can be any type of sensor or instrument that measures the presence of gas, such as a pressure sensor and a precision barometer, which can be connected to a pipeline via a connecting tube or other connecting device.
[0033] In one embodiment, the control system 12 is any one of a computer, a microcontroller, or an industrial control computer. The control system 12 is connected to the gas detection device 10 and receives signals representing the outlet gas (e.g., pressure) collected by the gas detection device 10. The control system 12 can employ a computer, microcontroller, industrial control computer, or other devices with control functions, as known to those skilled in the art.
[0034] Example 1
[0035] A high-pressure testing system for diaphragm valves is used to perform high-pressure testing on diaphragm valves. The system includes a gas source 2, a CDA pipeline 1, a booster pump 3 and a gas storage cylinder 4 connected by pipelines, a pressure regulating valve 5, a first solenoid valve 7, a second solenoid valve (9 and 11), and an unloading valve 8.
[0036] Gas source 2 is used to provide inert gas, such as low-pressure nitrogen.
[0037] CDA (clean dry air) line 1 is used to compress gas and remove moisture and impurities to provide a dry, clean gas supply.
[0038] Booster pump 3 is used to increase the pressure of low-pressure nitrogen gas from gas source 2 to the range of 24-34 MPa.
[0039] Gas storage cylinder 4 is used to store high-pressure nitrogen with a pressure range of 24 to 34 MPa.
[0040] Pressure regulating valve 5 adjusts the pressure of the high-pressure nitrogen gas output from gas cylinder 4 to the required test pressure and outputs the test gas. The test pressure is within the range of 24 MPa to 34 MPa.
[0041] The first solenoid valve 7 controls the test gas. The controlled test gas flows through the pipeline, passes through the diaphragm valve 8 under test, and then passes through the gas detection device 10, which feeds back to the control system to display the current test pressure in the test pipeline. When the pressure in the test pipeline reaches the preset working pressure value, the first solenoid valve 7 begins its predetermined cycle operation. The gas detection device 10 is a pressure sensor.
[0042] There are two second solenoid valves: solenoid valve 9 and solenoid valve 11. These two solenoid valves are respectively installed in two pipelines at the rear end of the diaphragm valve under test, and are used to discharge the test gas from the test pipeline after the test. Solenoid valve 9 controls the opening and closing of diaphragm valve 8, opening and closing periodically. Solenoid valve 11 is normally closed.
[0043] The unloading valve 8 is located between the first solenoid valve 7 and the second solenoid valves (9 and 11) to release the pressure between the pressure regulating valve and the first solenoid valve in the pipeline.
[0044] Work process:
[0045] The compressed gas in CDA pipeline 1 drives the booster pump 3 to pressurize low-pressure nitrogen into high-pressure nitrogen, which is then stored in the gas cylinder 4 as the gas source for testing. Solenoid valve 9 is opened, causing the tested diaphragm valve 8 to open. Solenoid valve 7 is opened, and the pressure regulating valve 5 is adjusted to the required test pressure. The high-pressure nitrogen passes through the pipeline and the tested diaphragm valve 8, and then is fed back to the control system 12 via sensor 10, displaying the current test pressure in the test pipeline. When the pressure in the test pipeline reaches the preset working pressure value, solenoid valve 9 begins its periodic opening and closing action. After solenoid valve 9 reaches the set opening and closing value, depending on the model, the test can be performed 100,000 to 1,000,000 times. At the end of the test, pressure regulating valve 5 and solenoid valve 7 are closed, and solenoid valves 9 and 11 are opened to release the high-pressure nitrogen from the test pipeline. The unloading valve 6 is opened to release the pressure between pressure regulating valve 5 and solenoid valve 7. After the diaphragm valve 8 under test is removed from the test system, it is connected to a helium detector for helium leak detection. If the diaphragm valve 8 under test does not leak, it is determined that the diaphragm valve 8 under test is qualified; if the diaphragm valve 8 under test leaks, it is determined that the diaphragm valve 8 under test is unqualified.
[0046] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application.
Claims
1. A diaphragm valve high pressure testing system for high pressure testing of a diaphragm valve, characterized by, Including those connected via pipes: Test air source, providing air pressure in the range of 1-2 MPa; The pressure regulating valve adjusts the gas pressure in the test gas source to the required test pressure and outputs the test gas. The first solenoid valve controls the test gas. The controlled test gas flows through the pipeline through the diaphragm valve under test and is then fed back to the control system by the gas detection device, which displays the test pressure in the current test pipeline. When the pressure in the test pipeline reaches the preset working pressure value, the first solenoid valve starts the predetermined life test to determine whether the diaphragm valve under test has failed. The second solenoid valve is installed in two pipelines at the rear end of the diaphragm valve under test, and is used to discharge the test gas in the test pipeline after the test is completed. An unloading valve is installed between the first solenoid valve and the second solenoid valve to release the pressure between the pressure regulating valve and the first solenoid valve in the pipeline.
2. The diaphragm valve high pressure test system of claim 1, wherein, The test gas source includes: Gas source, used to provide gas; CDA lines are used to compress gases and remove moisture and impurities to provide a dry, clean gas supply. A booster pump is used to compress the gas to a pressure range of 24-34 MPa; Gas cylinders are used to store gases with pressures ranging from 24 to 34 MPa.
3. The diaphragm valve high pressure test system of claim 2, wherein, The gas is either nitrogen or an inert gas.
4. The diaphragm valve high pressure testing system of claim 1, wherein, The gas detection device is a pressure sensor.
5. The diaphragm valve high pressure testing system of claim 1, wherein, The control system can be any one of a computer, a microcontroller, or an industrial control computer.