A high speed motor and apparatus

Abstract

This utility model discloses a high-speed motor and device, relating to the field of motor structure technology. The high-speed motor includes: a frame, which is a tubular structure, with an air outlet on the side of the frame and a sealing plate at the end of the frame away from the air outlet; a rotor, disposed within the frame; a stator, with a ventilation channel between the stator and the rotor; a rear end cover, fixed to the end of the frame with the air outlet, with a ventilation opening on the rear end cover and an exhaust port on the side of the rear end cover, the exhaust port communicating with the air outlet; and a cooling impeller, disposed on the side of the rear end cover away from the frame, the cooling impeller being used to blow air onto the stator and rotor. The high-speed motor and device provided in this application allows cooling air to pass through the ventilation opening and between the stator and rotor, then bend back through the sealing plate and exit the frame from the air outlet. This results in minimal pressure and flow loss, reducing wear on the cooling impeller and improving cooling efficiency.

Description

Technical Field

[0001] This utility model relates to the field of motor structure technology, and more specifically, to a high-speed motor. Furthermore, this utility model also relates to a device including the aforementioned high-speed motor. Background Technology

[0002] Air-bearing high-speed motors are a special type of motor. Their core technology lies in air-bearing, which utilizes a gas film (such as air) to form between the bearing and the rotor, achieving contactless support and rotation of the rotor. This allows the motor to operate at ultra-high speeds, offering numerous advantages such as low friction, high precision, high stability, and long lifespan. It can be widely used in many fields requiring extremely high rotational precision and speed, including industrial manufacturing, energy, aerospace, medical, and scientific research. Applications include semiconductor manufacturing equipment, precision machine tools, high-speed centrifuges, and aero-engine components, providing crucial power support for the development of modern high-tech industries.

[0003] When an electric motor is running, both the stator and rotor will generate heat. In order to ensure the normal operation of the motor, additional cooling air is needed to cool and dissipate heat from the stator and rotor. Through the circulation of cooling air, the heat generated by the stator and rotor during operation is exchanged to the outside of the motor, thereby ensuring that the motor operates reliably within a safe temperature range.

[0004] Currently, the most mature air bearing high-speed motor cooling air on the market enters from one end of the motor and exits from the other end. This design requires increasing the size of the cooling impeller, i.e., increasing the cooling air volume, which will make the overall structure of the machine larger, increase losses, reduce efficiency, and increase costs.

[0005] In summary, how to reduce the wear of the cooling impeller and improve the cooling efficiency is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0006] In view of this, the purpose of this utility model is to provide a high-speed motor whose cooling impeller can pass cooling air between the stator and the rotor, then return from the sealing plate, flow between the stator and the frame, and finally be discharged from the frame through the air outlet. The pressure and flow loss is small, reducing the wear of the cooling impeller and improving the cooling efficiency.

[0007] Another objective of this invention is to provide a semiconductor manufacturing apparatus including the aforementioned high-speed motor and a precision machine tool including the aforementioned high-speed motor.

[0008] To achieve the above objectives, this utility model provides the following technical solution:

[0009] A high-speed motor, comprising:

[0010] The base is a tubular structure, with an air outlet on the side and a sealing plate at the end of the base away from the air outlet.

[0011] The rotor is disposed within the machine base;

[0012] A stator is fitted around the outer periphery of the rotor, and a ventilation channel is provided between the stator and the rotor;

[0013] A rear end cover is fixed to one end of the base where the air outlet is located. The rear end cover has a ventilation opening and an exhaust port on its side. The exhaust port is connected to the air outlet.

[0014] A cooling impeller is located on the side of the rear end cover away from the machine base, and the cooling impeller is used to blow air onto the stator and the rotor.

[0015] Preferably, the stator includes two trumpet-shaped ends and a tubular middle section, with the two ends respectively located on both sides of the middle section, and the diameter of the two ends gradually increasing in the direction away from the middle section.

[0016] Preferably, both the rear end cover and the sealing plate are provided with perforations and tubular protrusions extending along the axial direction of the perforations. The two tubular protrusions are arranged opposite each other and are coaxial. The two ends of the rotor are respectively located in the two tubular protrusions.

[0017] Preferably, there are multiple ventilation openings, and the multiple ventilation openings are evenly distributed on the outer periphery of the perforation.

[0018] Preferably, it further includes a positioning shell, which is disposed on the rear end cover and is used to cover the cooling impeller. The positioning shell is provided with an air inlet.

[0019] Preferably, it further includes a drive device, which is connected to the cooling impeller and is used to drive the cooling impeller to rotate.

[0020] Preferably, a bearing is provided between the stator and the rotor, and the ventilation duct is located in the bearing.

[0021] Preferably, a bearing with a ventilation channel is also provided between the stator and the frame.

[0022] An apparatus comprising a high-speed motor, wherein the high-speed motor is any one of the high-speed motors described above.

[0023] This utility model provides a high-speed motor, in which a stator and a rotor are arranged inside a frame. The stator is sleeved on the outer periphery of the rotor, and a ventilation channel is provided between the two. An air outlet is provided on the side of the frame, and a rear end cover is provided at the end of the frame near the air outlet. A ventilation port and a cooling impeller are provided on the rear end cover. The rotation of the cooling impeller can guide the cooling air along the ventilation port into the ventilation channel between the stator and the rotor. After passing through the stator and the rotor, the cooling air changes direction at the sealing plate and flows between the stator and the frame until it is discharged from the frame through the air outlet. In the entire circulation process, the pressure and flow loss are small, and the cooling efficiency is high. Therefore, only a small cooling flow and pressure are needed to complete the cooling of the stator and the rotor, thereby reducing the size of the cooling impeller. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0025] Figure 1 This is a cross-sectional view of the high-speed motor provided by this utility model;

[0026] Figure 2 This is a front view of the rear end cover provided by this utility model;

[0027] Figure 3 This is a schematic diagram of the structure of the rear end cover provided by this utility model.

[0028] Figure label:

[0029] 1-Cooling impeller; 2-Rear end cover; 3-Base; 4-Stator; 5-Rotor; 6-Air outlet; 7-Ventilation port; 8-Exhaust port. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] The core of this invention is to provide a high-speed motor in which cooling air can pass between the stator and rotor, then turn back between the frame and the stator, and finally be discharged from the frame through the air outlet. This reduces the wear of the cooling impeller and improves the cooling efficiency, while also reducing the size of the cooling impeller.

[0032] Another core aspect of this invention is to provide a device that includes the aforementioned high-speed motor.

[0033] It should be noted that the orientation or positional relationship indicated by terms such as "upper", "lower", "front", and "rear" is based on the orientation or positional relationship shown in the accompanying drawings and is only for the purpose of facilitating the description of this application and simplifying the description. It is not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0034] This application provides a high-speed motor, comprising: a cooling impeller 1, a rear end cover 2, a frame 3, a stator 4, and a rotor 5;

[0035] Among them, the base 3 is a tubular structure, the side of the base 3 is provided with an air outlet 6, and the end of the base 3 away from the air outlet 6 is provided with a sealing plate.

[0036] Rotor 5 is housed within base 3;

[0037] The stator 4 is fitted around the outer periphery of the rotor 5, and a ventilation channel is provided between the stator 4 and the rotor 5;

[0038] The rear end cover 2 is fixed to one end of the base 3 where the air outlet 6 is located. The rear end cover 2 is provided with a ventilation opening 7 and an exhaust port 8 is provided on the side of the rear end cover 2. The exhaust port 8 is connected to the air outlet 6.

[0039] The cooling impeller 1 is located on the side of the rear end cover 2 away from the base 3. The cooling impeller 1 is used to blow air to the stator 4 and the rotor 5.

[0040] For details, please refer to the appendix. Figure 1The base 3 is a horizontally arranged tubular structure with openings on both its left and right sides. A sealing plate is installed at the opening on the right side of the base 3 to prevent air leakage. An air outlet 6 is located on the upper left side of the base 3, with its central axis perpendicular to the central axis of the base 3. A rear end cover 2 is located at the left opening of the base 3, and a ventilation port 7 is installed on the rear end cover 2. A cooling impeller 1 is located on the left side of the rear end cover 2. When the cooling impeller 1 rotates, it can direct cooling air through the ventilation port 7, through the rear end cover 2, and into the base 3. The rotor 5 has its two ends respectively located on the rear end cover 2 and the sealing plate. A stator 4 is located on the outer periphery of the rotor 5, and a ventilation channel is provided between the stator 4 and the rotor 5. After the cooling air passes through the ventilation port 7 and the rear end cover 2, it can... The cooling air flows from left to right through the ventilation channel between the stator 4 and the rotor 5. After reaching the sealing plate, the cooling air turns to flow through the inner wall of the base 3, through the ventilation channel between the inner wall of the base 3 and the outer surface of the stator 4, and flows towards the rear end cover 2. An exhaust port 8 corresponding to the air outlet 6 is provided on the rear end cover 2. The cooling air is discharged from the base 3 through the exhaust port 8 and the air outlet 6. Since the cooling air is guided by the ventilation channels on the rear end cover 2 and the base 3 from the cooling impeller 1, the pressure and flow loss is small and the cooling efficiency is high during the entire flow process. Therefore, only a small cooling flow and pressure are needed to cool the stator 4 and the rotor 5. Thus, the size of the cooling impeller 1 can be relatively reduced, saving costs.

[0041] Based on the above embodiment, the stator 4 includes two trumpet-shaped ends and a tubular middle section. The two ends are respectively located on both sides of the middle section, and the diameter of the two ends gradually increases in the direction away from the middle section.

[0042] Specifically, the structure of stator 4 can be found in the appendix. Figure 1 The middle part of the stator 4 is a tubular structure that fits perfectly around the outer circumference of the rotor 5. The inner diameter of the stator 4 should be larger than the outer diameter of the rotor 5 to ensure the ventilation channel between them. The middle part of the stator 4 has a horn-shaped end at each end. The diameter of the left end of the stator 4 gradually increases from right to left, and the diameter of the right end of the stator 4 gradually increases from left to right, forming horn-shaped structures. The horn-shaped end on the left side of the stator 4 can concentrate the cooling air entering the frame 3 from the ventilation port 7 between the stator 4 and the rotor 5, thus acting as a converging flow. The horn-shaped end on the right side of the stator 4 can guide the cooling air flowing out from between the stator 4 and the rotor 5 to the inner wall of the frame 3, thereby changing the direction of the cooling air flow.

[0043] In some embodiments, both the rear end cover 2 and the sealing plate are provided with perforations and tubular protrusions extending along the axial direction of the perforations. The two tubular protrusions are arranged opposite each other and are coaxial. The two ends of the rotor 5 are respectively located in the two tubular protrusions.

[0044] Specifically, both the rear end cover 2 and the sealing plate are provided with through holes that penetrate the plate surface. Both through holes are provided with tubular protrusions. The tubular protrusions on the rear end cover 2 extend to the right, and the tubular protrusions on the sealing plate extend to the left. The central axes of the two tubular protrusions are coaxially arranged. The arrangement of the tubular protrusions and through holes enables the installation of the rotor 5.

[0045] Optionally, bearings are installed inside both tubular protrusions to reduce friction during rotor 5 rotation and improve equipment lifespan.

[0046] Based on the above embodiment, multiple ventilation openings 7 are provided, and the multiple ventilation openings 7 are evenly distributed on the outer periphery of the perforation.

[0047] Specifically, the shape of the vent 7 can be an arc-shaped hole or a round hole. Its shape and size can be adjusted according to the actual situation. No further restrictions are made here. Since the rotor 5 is provided at the perforation on the rear cover 2, multiple vents 7 need to be evenly arranged around the perforation so that the cooling air can evenly enter between the stator 4 and the rotor 5 after passing through the vent 7.

[0048] Optional, vent 7 is attached Figure 1 In the process of moving from left to right, the airflow can gradually move towards the center to ensure that the cooling air can flow into the space between the stator 4 and the rotor 5 to the maximum extent, thereby improving the cooling effect.

[0049] In some embodiments, a positioning shell is also included, which is disposed on the rear end cover 2 and is used to cover the cooling impeller 1. An air inlet is provided on the positioning shell.

[0050] Specifically, a positioning shell is provided on the rear end cover 2. The positioning shell is installed on the base 3 by bolts. The rear end cover 2 is also provided with through holes. The bolts can pass through the through holes and can also be used to position the rear end cover 2. It should be noted that an air inlet is provided on the positioning shell to ensure that cooling air can be blown into the base 3 when the cooling impeller 1 rotates.

[0051] Based on the above embodiments, a driving device is also included, which is connected to the cooling impeller 1 and is used to drive the cooling impeller 1 to rotate.

[0052] Specifically, the driving device is generally an electric motor, which can drive the rotation of the cooling impeller 1, providing power to the cooling impeller 1, thereby blowing cooling air into the base 3.

[0053] Based on the above embodiment, a bearing is provided between the stator 4 and the rotor 5, and a ventilation duct is provided in the bearing.

[0054] Specifically, a bearing should be installed between the stator 4 and the rotor 5 to significantly reduce friction when they rotate relative to each other. Ventilation channels should be installed on the bearing, and the ventilation channels should be evenly distributed on the bearing to ensure that the cooling air can pass evenly between the stator 4 and the rotor 5, thereby achieving a cooling effect.

[0055] Based on the above embodiment, a bearing with a ventilation channel is also provided between the stator 4 and the base 3.

[0056] Specifically, a bearing is also provided between the inner wall of the stator 4 and the base 3, and a ventilation channel is also provided on the bearing. Cooling air flowing from the sealing plate to the air outlet 6 can pass through the ventilation channel to cool the outer periphery of the stator 4 and improve the cooling effect.

[0057] In addition to the high-speed motor described above, this utility model also provides a device that includes the high-speed motor disclosed in the above embodiments. For the structure of other parts of the device, please refer to the prior art, which will not be repeated here.

[0058] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0059] The high-speed motor and device provided by this utility model have been described in detail above. Specific examples have been used to illustrate the principle and implementation of this utility model. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core idea of ​​this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principle of this utility model, and these improvements and modifications also fall within the protection scope of the claims of this utility model.

Claims

1. A high-speed motor, characterized in that, include: The base (3) is a tubular structure. An air outlet (6) is provided on the side of the base (3). A sealing plate is provided at the end of the base (3) away from the air outlet (6). The rotor (5) is located inside the base (3); A stator (4) is fitted around the outer periphery of the rotor (5), and a ventilation channel is provided between the stator (4) and the rotor (5); The rear end cover (2) is fixed to one end of the base (3) where the air outlet (6) is located. The rear end cover (2) is provided with a ventilation opening (7). The side of the rear end cover (2) is provided with an exhaust port (8). The exhaust port (8) is connected to the air outlet (6). A cooling impeller (1) is provided on the side of the rear end cover (2) away from the base (3), and the cooling impeller (1) is used to blow air to the stator (4) and the rotor (5).

2. The high-speed motor according to claim 1, characterized in that, The stator (4) includes two trumpet-shaped ends and a tubular middle section. The two ends are respectively located on both sides of the middle section, and the diameter of the two ends gradually increases in the direction away from the middle section.

3. The high-speed motor according to claim 1, characterized in that, Both the rear end cover (2) and the sealing plate are provided with perforations and tubular protrusions extending along the axial direction of the perforations. The two tubular protrusions are arranged opposite each other and are coaxial. The two ends of the rotor (5) are respectively located in the two tubular protrusions.

4. The high-speed motor according to claim 3, characterized in that, The ventilation openings (7) are provided in multiple ways, and the multiple ventilation openings (7) are evenly distributed on the outer periphery of the perforation.

5. The high-speed motor according to claim 1, characterized in that, It also includes a positioning shell, which is located on the rear end cover (2) and is used to cover the cooling impeller (1). The positioning shell is provided with an air inlet.

6. The high-speed motor according to claim 5, characterized in that, It also includes a drive device, which is connected to the cooling impeller (1) and is used to drive the cooling impeller (1) to rotate.

7. The high-speed motor according to any one of claims 1 to 6, characterized in that, A bearing is provided between the stator (4) and the rotor (5), and the ventilation duct is located in the bearing.

8. The high-speed motor according to claim 7, characterized in that, The bearing with ventilation channels is also provided between the stator (4) and the base (3).

9. A device comprising a high-speed motor, characterized in that, The high-speed motor is the high-speed motor as described in any one of claims 1 to 8.

Images