electrostatic chuck mechanism

Abstract

This utility model discloses an electrostatic chuck mechanism, relating to the field of electrostatic chuck technology. It includes an electrostatic chuck body with a collection ring box on its upper surface. A cleaning mechanism is located on the right side of the electrostatic chuck body for cleaning the chuck surface. The cleaning mechanism includes a sweeping unit and a swinging unit. The sweeping unit is located on the right side of the electrostatic chuck body. A motor drives a lead screw to rotate, causing a linkage block to move upward. The linkage block drives a linkage column to slide inside the track groove. Simultaneously, the sliding column slides synchronously inside the track groove. The sliding column moves above the track groove, and through the arc-shaped groove above the track groove, the base rotates around the linkage column as a pivot, making the base horizontal. The brush surface of the brush holder contacts the chuck surface. The swinging unit enables the mounting frame to rotate left and right, thereby cleaning the chuck surface.

Description

Technical Field

[0001] This utility model relates to the field of electrostatic chuck technology, specifically to an electrostatic chuck mechanism. Background Technology

[0002] In the dry etching process of wafers, the electrostatic chuck is the core component of the dry etching machine. It can not only be used to fix the wafer to be etched, but also as the lower electrode to realize the etching process.

[0003] According to the patent titled "Electrostatic Chuck Mechanism" (patent publication number: CN222233609U, patent publication date: 2024-12-24), it includes a support base, an electrostatic chuck, an annular protective component, a first driving assembly, and a ejector pin assembly. The support base has a support surface, and a first coolant flow channel is provided within the support base. The electrostatic chuck is disposed on the support surface. The annular protective component is located on the support surface and sleeved on the outer circumference of the electrostatic chuck. The first driving assembly is connected to and acts on the support base, and the first driving assembly can drive the support base to rotate around its own central axis. The ejector pin assembly includes an ejector pin that passes through the support base and can extend and retract relative to the electrostatic chuck, and a second driving assembly that drives the extension and retraction of the ejector pin. This mechanism can improve process repeatability, stability, uniformity, and the lifespan of the electrostatic chuck.

[0004] Based on the aforementioned existing technology, the current electrostatic chuck mechanism still has the following problems: in semiconductor etching, deposition and other processes, particulate matter, polymer residues or metal sputterings are easily accumulated on the chuck surface. These contaminants will disrupt the electric field distribution, resulting in uneven or weakened electrostatic adsorption force, causing wafer displacement, warping or even detachment. Therefore, this utility model provides an electrostatic chuck mechanism. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides an electrostatic chuck mechanism, which solves the following problems that existing electrostatic chuck mechanisms still have: In semiconductor etching, deposition and other processes, particulate matter, polymer residues or metal sputterings easily accumulate on the chuck surface. These contaminants will disrupt the electric field distribution, resulting in uneven or weakened electrostatic adsorption force, causing wafer displacement, warping or even detachment.

[0006] To achieve the above objectives, this utility model provides the following technical solution: an electrostatic chuck mechanism, comprising an electrostatic chuck body, a collection ring box disposed above the electrostatic chuck body, and a cleaning mechanism disposed on the right side of the electrostatic chuck body for cleaning the chuck surface, the cleaning mechanism comprising:

[0007] The cleaning unit is located on the right side of the electrostatic chuck body and includes a base. The base has a cross groove, and a brush holder is slidably installed inside the cross groove. The brush surface of the brush holder is in contact with the chuck surface. The brush holder is moved on the chuck surface by a swing unit to clean it.

[0008] The swing unit is located below the cleaning unit and is used to rotate the cleaning unit left and right.

[0009] Preferably, a set of sliding columns and a set of linkage columns are fixedly installed on both the front and rear sides of the right end of the base.

[0010] Preferably, a fixed base is fixedly installed on the right side of the electrostatic chuck body, and a mounting frame is rotatably installed above the fixed base. A linkage frame is fixedly installed at the bottom of the inner cavity of the mounting frame, and a track groove is opened inside the linkage frame, with the sliding column and the linkage column adapted to slide inside the track groove.

[0011] Preferably, a limiting rod is fixedly installed inside the mounting frame, a lead screw is rotatably installed inside the mounting frame, a motor is fixedly installed on the top of the mounting frame, and the output end of the motor passes through the mounting frame and is fixedly connected to the top end of the lead screw. A linkage block is slidably installed on the surface of the limiting rod, and the linkage block is threaded onto the surface of the lead screw. The left end of the linkage block is movably connected to the base through a linkage column.

[0012] Preferably, a number of springs are installed inside the cross groove to ensure that the brush surface of the brush holder is in close contact with the chuck surface.

[0013] Preferably, the swing unit includes a rotating shaft inside the rotating mounting base, and the bottom end of the mounting base is fixedly connected to the bottom end of the mounting frame to realize the rotation of the mounting frame. A gear is fixedly installed at the bottom end of the rotating shaft. A fixing plate is fixedly installed at the bottom of the mounting base, and an electric push rod is fixedly installed on the right side of the fixing plate. A rack is fixedly installed through the fixing plate at the output end of the electric push rod, and the rack meshes with the gear. A convex groove is opened inside the rack. A convex limiting block is fixedly installed at the bottom of the mounting base, and the lower end of the convex limiting block slides inside the convex groove.

[0014] This invention provides an electrostatic chuck mechanism. Compared with the prior art, it has the following advantages:

[0015] 1. This electrostatic chuck mechanism uses a motor to drive a lead screw to rotate, causing the linkage block to move upward. The linkage block drives the linkage column to slide inside the track groove. At the same time, the sliding column slides synchronously inside the track groove. As the sliding column moves above the track groove, it passes through the arc groove above the track groove, enabling the base to rotate around the linkage column as a pivot, making the base horizontal. The brush surface of the brush holder contacts the chuck surface. The swing unit enables the mounting frame to rotate back and forth, thereby cleaning the chuck surface.

[0016] 2. The electrostatic chuck mechanism has multiple springs installed inside the cross groove. The springs push the brush seat downwards through their own elasticity, so that the brush surface at the bottom of the brush seat is in close contact with the chuck surface, thereby enhancing the cleaning effect of the brush seat on the chuck surface. Attached Figure Description

[0017] Figure 1 This is a right-side perspective view of the structure of this utility model;

[0018] Figure 2 This is a left-side perspective view of the cleaning mechanism of this utility model.

[0019] Figure 3 This is a partial cross-sectional perspective view of the cleaning mechanism of this utility model;

[0020] Figure 4 This is a bottom-view, three-dimensional structural diagram of the cleaning mechanism of this utility model.

[0021] In the diagram: 1-Electrostatic chuck body, 2-Cleaning mechanism, 21-Cleaning unit, 211-Fixed base, 212-Mounting bracket, 213-Screw, 214-Limit rod, 215-Motor, 216-Linkage block, 217-Linkage frame, 218-Railway groove, 219-Base, 2110-Sliding column, 2111-Linkage column, 2112-Cross groove, 2113-Brush holder, 2114-Spring, 22-Swing unit, 221-Rotating shaft, 222-Gear, 223-Fixed plate, 224-Electric push rod, 225-Rack, 226-Convex groove, 227-Convex limit block, 3-Collection ring box. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figures 1-4This utility model provides a technical solution:

[0024] An electrostatic chuck mechanism includes an electrostatic chuck body 1, a collection ring box 3 disposed above the electrostatic chuck body 1, and a cleaning mechanism 2 disposed on the right side of the electrostatic chuck body 1 for cleaning the chuck surface. The cleaning mechanism 2 includes:

[0025] The cleaning unit 21 is located on the right side of the electrostatic chuck body 1 and includes a base 219. A cross groove 2112 is provided inside the base 219, and a brush holder 2113 is slidably installed inside the cross groove 2112. The brush surface of the brush holder 2113 is in contact with the chuck surface. The brush holder 2113 is moved on the chuck surface by the swing unit 22 to clean it.

[0026] The swing unit 22 is located below the cleaning unit 21 and is used to perform left-right reciprocating rotational motion on the cleaning unit 21.

[0027] In this embodiment, a set of sliding columns 2110 and a set of linkage columns 2111 are fixedly installed on both the front and rear sides of the right end of the base 219. A fixed seat 211 is fixedly installed on the right side of the electrostatic chuck body 1. A mounting bracket 212 is rotatably installed above the fixed seat 211. A linkage bracket 217 is fixedly installed at the bottom of the inner cavity of the mounting bracket 212. A track groove 218 is opened inside the linkage bracket 217, and the sliding columns 2110 and linkage columns 2111 are adapted to slide inside the track groove 218. A limiting rod 214 is fixedly installed inside the mounting frame 212. A lead screw 213 is rotatably installed inside the mounting frame 212. A motor 215 is fixedly installed on the top of the mounting frame 212, and the output end of the motor 215 passes through the mounting frame 212 and is fixedly connected to the top end of the lead screw 213. A linkage block 216 is slidably installed on the surface of the limiting rod 214, and the linkage block 216 is threaded onto the surface of the lead screw 213. The left end of the linkage block 216 is movably connected to the base 219 through a linkage column 2111.

[0028] The motor 215, model KV3SF-8521F-WR, is electrically connected to an external power source and is operated via a human-controlled control panel. The motor 215 drives the lead screw 213 to rotate, causing the linkage block 216 to move upwards. The linkage block 216 then drives the linkage column 2111 to slide inside the track groove 218. Simultaneously, the sliding column 2110 slides within the track groove 218. As the sliding column 2110 moves above the track groove 218, it passes through the arc-shaped groove above the track groove 218, causing the base 219 to rotate around the linkage column 2111 as a pivot, making the base 219 horizontal. The brush surface of the brush holder 2113 contacts the chuck surface. The swing unit 22 causes the mounting bracket 212 to reciprocate left and right, thereby cleaning the chuck surface.

[0029] In this embodiment, several springs 2114 are installed inside the cross groove 2112 to ensure that the brush surface of the brush holder 2113 is in close contact with the chuck surface.

[0030] Multiple springs 2114 are installed inside the cross groove 2112. The springs 2114 push the brush holder 2113 downward through their own elasticity, so that the brush surface at the bottom of the brush holder 2113 is in close contact with the chuck surface, thereby enhancing the cleaning effect of the brush holder 2113 on the chuck surface.

[0031] In this embodiment, the swing unit 22 includes a rotating shaft 221 inside the rotating mounting base 211, and the bottom end of the mounting base 211 is fixedly connected to the bottom end of the mounting frame 212 to realize the rotation of the mounting frame 212. A gear 222 is fixedly installed at the bottom end of the rotating shaft 221. A fixing plate 223 is fixedly installed at the bottom of the mounting base 211, and an electric push rod 224 is fixedly installed on the right side of the fixing plate 223. A rack 225 is fixedly installed through the fixing plate 223 at the output end of the electric push rod 224. The rack 225 meshes with the gear 222. A convex groove 226 is opened inside the rack 225. A convex limiting block 227 is fixedly installed at the bottom of the mounting base 211, and the lower end of the convex limiting block 227 slides inside the convex groove 226.

[0032] The electric push rod 224, model SLEL205, is electrically connected to an external power source and is operated by a human-controlled control panel. When the electric push rod 224 operates, it pushes and pulls the rack 225, causing the rack 225 to move linearly back and forth. The rack 225 drives the gear 222 to rotate left and right. The gear 222 drives the mounting bracket 212 to rotate synchronously through the rotating shaft 221, causing the brush holder 2113 to swing left and right on the chuck surface for cleaning. The cleaned particles and contaminants enter the collection ring box 3. The user cleans the contents of the collection ring box 3 through the brush and the discharge port of the collection ring box 3.

[0033] Furthermore, any content not described in detail in this specification is existing technology known to those skilled in the art.

[0034] During operation, firstly, the motor 215 drives the lead screw 213 to rotate, causing the linkage block 216 to move upward. The linkage block 216 drives the linkage column 2111 to slide inside the track groove 218. At the same time, the sliding column 2110 slides synchronously inside the track groove 218. The sliding column 2110 moves above the track groove 218 through the groove shape of the track groove 218. When the sliding column 2110 moves above the track groove 218, it passes through the arc groove above the track groove 218, so that the base 219 rotates around the linkage column 2111 as the pivot, making the base 219 horizontal and the brush surface of the brush seat 2113 in contact with the chuck surface.

[0035] Then, the electric push rod 224 operates, pushing and pulling the rack 225, causing the rack 225 to move linearly back and forth. The rack 225 drives the gear 222 to rotate left and right back and forth. The gear 222 drives the mounting bracket 212 to rotate synchronously through the rotating shaft 221, causing the brush holder 2113 to swing left and right on the chuck surface for cleaning. The cleaned particles and contaminants enter the inside of the collection ring box 3. The user cleans the contents of the collection ring box 3 through the brush and the outlet of the collection ring box 3.

[0036] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0037] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An electrostatic chuck mechanism comprising an electrostatic chuck body (1), an upper portion of the electrostatic chuck body (1) being provided with a collecting ring box (3), characterized in that: The electrostatic chuck body (1) is provided with a cleaning mechanism (2) on the right side for cleaning the chuck surface. The cleaning mechanism (2) includes: The cleaning unit (21) is located on the right side of the electrostatic chuck body (1) and includes a base (219). The base (219) has a cross groove (2112) inside, and a brush holder (2113) is slidably installed inside the cross groove (2112). The brush surface of the brush holder (2113) is in contact with the chuck surface. The brush holder (2113) is moved on the chuck surface by the swing unit (22) to clean it. The swing unit (22) is located below the cleaning unit (21) and is used to perform left-right reciprocating rotational motion on the cleaning unit (21).

2. The electrostatic chuck mechanism of claim 1, wherein: A set of sliding columns (2110) and a set of linkage columns (2111) are fixedly installed on both the front and rear sides of the right end of the base (219).

3. The electrostatic chuck mechanism of claim 2, wherein: A fixed base (211) is fixedly installed on the right side of the electrostatic chuck body (1). A mounting bracket (212) is rotatably installed above the fixed base (211). A linkage bracket (217) is fixedly installed at the bottom of the inner cavity of the mounting bracket (212). A track groove (218) is opened inside the linkage bracket (217), and the sliding column (2110) and the linkage column (2111) are adapted to slide inside the track groove (218).

4. The electrostatic chuck mechanism of claim 3, wherein: The mounting bracket (212) has a fixed limit rod (214) inside, and a lead screw (213) is rotatably mounted inside the mounting bracket (212). A motor (215) is fixedly mounted on the top of the mounting bracket (212), and the output end of the motor (215) passes through the mounting bracket (212) and is fixedly connected to the top end of the lead screw (213). A linkage block (216) is slidably mounted on the surface of the limit rod (214), and the linkage block (216) is threaded onto the surface of the lead screw (213). The left end of the linkage block (216) is movably connected to the base (219) through a linkage column (2111).

5. The electrostatic chuck mechanism of claim 1, wherein: The cross groove (2112) is equipped with several springs (2114) to ensure that the brush surface of the brush holder (2113) is in close contact with the chuck surface.

6. The electrostatic chuck mechanism of claim 2, wherein: The swing unit (22) includes a rotating shaft (221) inside a rotating mounting base (211), and the bottom end of the mounting base (211) is fixedly connected to the bottom end of the mounting frame (212) to realize the rotation of the mounting frame (212). A gear (222) is fixedly installed at the bottom end of the rotating shaft (221). A fixing plate (223) is fixedly installed at the bottom of the mounting base (211), and an electric push rod (224) is fixedly installed on the right side of the fixing plate (223). A rack (225) is fixedly installed through the fixing plate (223) at the output end of the electric push rod (224). The rack (225) meshes with the gear (222), and a convex groove (226) is opened inside the rack (225). A convex limiting block (227) is fixedly installed at the bottom of the mounting base (211), and the lower end of the convex limiting block (227) slides inside the convex groove (226).

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