A kind of stable and convenient type vacuum coating machine evaporator boat

Abstract

The utility model discloses a kind of evaporation boat of stable convenient vacuum coating machine, including evaporation boat main body, the top end fixedly connected with heating electrode plate in evaporation boat main body both ends, its outside is wrapped with heat preservation cover, the top end of the evaporation boat main body is installed with cover plate, the surface of the cover plate is connected with anti-splashing exhaust mechanism, the both sides of the evaporation boat main body are installed with connecting mechanism;The anti-splashing exhaust mechanism includes anti-splashing pipe, first exhaust pipe and second exhaust pipe, the surface of the cover plate is evenly opened with exhaust hole, the utility model, by setting anti-splashing pipe, first exhaust pipe and second exhaust pipe in the top end of cover plate to reduce boiling liquid with hot gas to outwardly spread and splash, and by setting sealing ring, anti-overflowing groove and backflow hole between cover plate and evaporation boat main body to reduce the splash overflow of boiling liquid, so, the splash loss of boiling liquid can be prevented.

Description

Technical Field

[0001] This utility model relates to the field of evaporation boat technology, and in particular to an evaporation boat for a stable and convenient vacuum coating machine. Background Technology

[0002] A vacuum coating machine is a device that performs coating processing on workpieces under high vacuum conditions. A vacuum coating machine includes an evaporation source; existing evaporation-type vacuum coating machines typically use electrodes connected to both ends of an evaporation boat as the evaporation source. While evaporation boats vary in shape and form, they are essentially composed of two parts. A typical evaporation boat mainly consists of a deep groove with a concave center and electrodes that connect to an external power supply during heating. In use, the material to be evaporated is loaded into the groove, and then the electrodes are fixed to the electrode fixing end of the heating power supply. Because the materials used to make the evaporation boat are generally high-temperature resistant and high-resistivity metals, such as tungsten, tantalum, and molybdenum, the evaporation boat heats up significantly when a certain current is applied. When the required evaporation temperature for the material is reached, the material is evaporated and deposited onto the designated substrate.

[0003] In existing vacuum coating machines, the evaporation boat has a large internal space during the evaporation process. The liquid inside the evaporation boat boils and shakes, causing the evaporation boat to sway. The machine fails to restrict or intercept the flow of liquid inside the evaporation boat to reduce swaying. Furthermore, when the liquid inside the evaporation boat boils, it splashes out at the junction between the cover plate and the evaporation boat and is also dissipated outward with the hot air escaping from the exhaust port. The machine fails to intercept or allow the splashed liquid to flow back.

[0004] Therefore, an evaporation boat for a stable and convenient vacuum coating machine is provided. Utility Model Content

[0005] The purpose of this invention is to address the aforementioned technical problems by providing a stable and convenient evaporation boat for a vacuum coating machine. This reduces the flow and sloshing of liquid inside the evaporation boat body to maintain its stability and minimizes splashing and overflow of boiling liquid.

[0006] In view of this, the present invention provides an evaporation boat for a stable and convenient vacuum coating machine, comprising an evaporation boat body, heating electrode plates fixedly connected to the top ends of both ends of the evaporation boat body, and an insulation sleeve wrapped around the outside of the electrode plates, a cover plate installed at the top end of the evaporation boat body, an anti-splash exhaust mechanism connected to the surface of the cover plate, and connecting mechanisms installed on both sides of the evaporation boat body.

[0007] The anti-splash exhaust mechanism includes an anti-splash pipe, a first exhaust pipe, and a second exhaust pipe. The surface of the cover plate is evenly provided with exhaust holes. The first exhaust pipe is connected to the top of the exhaust holes. The anti-splash pipe is connected between the first exhaust pipe and the second exhaust pipe. The top of the evaporation boat body is provided with an anti-overflow groove. The inner side of the anti-overflow groove is provided with a return hole. The bottom edge of the cover plate is connected with a sealing ring that is tightly inserted into the anti-overflow groove.

[0008] The connecting mechanism includes a connecting frame and a snap-fit ​​post. The connecting frame is fixed on both sides of the cover plate, and the snap-fit ​​post is elastically installed on the outside of the insulation sleeve, with one end of the post being positioned and snap-fitted to the bottom end of the connecting frame.

[0009] Preferably, the top surface of the connecting frame is covered with a heat insulation sleeve, and the bottom surface of the connecting frame has a positioning hole, and one end of the snap-fit ​​post is slidably inserted into the positioning hole.

[0010] Preferably, a support plate is fixed to the side of the evaporation boat body, and a guide hole is opened on the surface of the support plate. The guide hole and the positioning hole are horizontally aligned. A tension spring is connected to one side of the support plate at the outer end of the guide hole. The snap-fit ​​post slides through the middle of the tension spring and the guide hole, and its outer end is connected to a limit plate. The inner side of the limit plate is fixedly connected to the outer end of the tension spring.

[0011] Preferably, a first heat-conducting plate is fixed in the middle of the interior of the evaporation boat body, and a first flow hole is uniformly opened at the bottom end of the first heat-conducting plate. A second heat-conducting plate perpendicular to the first heat-conducting plate is fixed inside the evaporation boat body, and a second flow hole is opened at the bottom end of the second heat-conducting plate. Both the first heat-conducting plate and the second heat-conducting plate are vertically arranged and are made of the same material as the evaporation boat body.

[0012] Preferably, the cover plate is horizontally arranged and has the same shape as the top of the evaporation boat body. The first exhaust pipe, the anti-splash pipe, the second exhaust pipe and the exhaust hole are interconnected. The anti-splash pipe has a circular tube structure and is vertically arranged.

[0013] Preferably, both the anti-overflow groove and the sealing ring are rectangular frame structures, and the reflux hole is connected between the anti-overflow groove and the interior of the evaporation boat body.

[0014] Preferably, the connecting frame has an L-shaped structure, with a gap at its bottom end located on the outside of the insulation sleeve, the snap-fit ​​post is horizontally positioned, and the support plate is horizontally positioned on one side of the connecting frame.

[0015] Compared with the prior art, this utility model provides an evaporation boat for a stable and convenient vacuum coating machine, which has the following beneficial effects:

[0016] 1. This utility model reduces the amount of boiling liquid that is released and splashed outward with the hot air by setting an anti-splash pipe, a first exhaust pipe and a second exhaust pipe at the top of the cover plate, and reduces the splashing and overflow of boiling liquid by setting a sealing ring, an anti-overflow groove and a return hole between the cover plate and the main body of the evaporation boat. In this way, the splashing and loss of boiling liquid can be prevented.

[0017] 2. This utility model reduces the flow and sloshing of boiling liquid inside the evaporation boat body by setting a first heat-conducting plate and a second heat-conducting plate perpendicular to each other inside the evaporation boat body, thereby maintaining the stable placement of the evaporation boat body. Moreover, the connecting frame, support plate and snap-fit ​​column can not only stably install the cover plate, but also facilitate the lifting of the evaporation boat body and the cover plate.

[0018] The parts of this device not covered herein are the same as or can be implemented using existing technologies. This utility model has a simple structure and is easy to operate. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the evaporation boat of a stable and convenient vacuum coating machine proposed in this utility model.

[0020] Figure 2 This is a schematic diagram of the structure of the first and second heat-conducting plates inside the evaporation boat of a stable and convenient vacuum coating machine proposed in this utility model.

[0021] Figure 3 This is a schematic diagram of the cover plate of the evaporation boat of a stable and convenient vacuum coating machine proposed in this utility model.

[0022] Figure 4 This is a schematic diagram of the tension spring and snap-fit ​​post structure of the evaporation boat of a stable and convenient vacuum coating machine proposed in this utility model.

[0023] In the diagram: 1. Insulation sleeve; 2. Heating electrode plate; 3. Limiting plate; 4. Tension spring; 5. Connecting frame; 6. Heat insulation sleeve; 7. Support plate; 8. Cover plate; 9. First exhaust pipe; 10. Anti-splash pipe; 11. Second exhaust pipe; 12. Guide hole; 13. Anti-overflow groove; 14. Evaporation boat body; 15. Second heat-conducting plate; 16. Second flow hole; 17. First heat-conducting plate; 18. First flow hole; 19. Positioning hole; 20. Sealing ring; 21. Exhaust hole; 22. Snap-fit ​​post; 23. Return hole. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0025] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0026] Example 1: An evaporation boat for a stable and convenient vacuum coating machine, such as... Figures 1-4 As shown, an evaporation boat for a stable and convenient vacuum coating machine includes an evaporation boat body 14. Heating electrode plates 2 are fixedly connected to the top ends of both ends of the evaporation boat body 14, and an insulation sleeve 1 is wrapped around the outside of the plate. A cover plate 8 is installed on the top end of the evaporation boat body 14, and an anti-splash exhaust mechanism is connected to the surface of the cover plate 8. Connecting mechanisms are installed on both sides of the evaporation boat body 14.

[0027] The anti-splash exhaust mechanism includes an anti-splash pipe 10, a first exhaust pipe 9, and a second exhaust pipe 11. The surface of the cover plate 8 is evenly provided with exhaust holes 21. The first exhaust pipe 9 is connected to the top of the exhaust hole 21. The anti-splash pipe 10 is connected between the first exhaust pipe 9 and the second exhaust pipe 11. The top of the evaporation boat body 14 is provided with an anti-overflow groove 13. The inner side of the anti-overflow groove 13 is provided with a return hole 23. The bottom edge of the cover plate 8 is connected with a sealing ring 20 that is tightly inserted into the anti-overflow groove 13.

[0028] The cover plate 8 is horizontally arranged and has the same shape as the top of the evaporation boat body 14. The first exhaust pipe 9, the anti-splash pipe 10, the second exhaust pipe 11 and the exhaust hole 21 are interconnected. The anti-splash pipe 10 is a circular tube structure and is vertically arranged.

[0029] Both the overflow prevention groove 13 and the sealing ring 20 are rectangular frame structures, and the reflux hole 23 is connected between the overflow prevention groove 13 and the interior of the evaporation boat body 14.

[0030] In use, by setting an anti-splash pipe 10, a first exhaust pipe 9, and a second exhaust pipe 11 at the top of the cover plate 8, and by heating the internal liquid through the evaporation boat body 14 and the heating electrode plate 2, hot air is discharged from the boiling liquid through the exhaust hole 21, the second exhaust pipe 11, the anti-splash pipe 10, and the first exhaust pipe 9. The boiling liquid is intercepted by the second exhaust pipe 11, the anti-splash pipe 10, and the first exhaust pipe 9 to reduce the boiling liquid from splashing outward. This can reduce the boiling liquid from escaping and splashing outward with the hot air. Furthermore, by setting a sealing ring 20, an anti-overflow groove 13, and a return hole 23 between the cover plate 8 and the evaporation boat body 14, the splashing and overflow of the boiling liquid can be reduced. In this way, the loss of boiling liquid due to splashing can be prevented.

[0031] Example 2: An evaporation boat for a stable and convenient vacuum coating machine, such as... Figures 1-4 As shown, a first heat-conducting plate 17 is fixed in the middle of the interior of the evaporation boat body 14. The bottom end of the first heat-conducting plate 17 is uniformly provided with first flow holes 18. A second heat-conducting plate 15 is fixed inside the evaporation boat body 14 and is perpendicular to the first heat-conducting plate 17. The bottom end of the second heat-conducting plate 15 is provided with a second flow hole 16. Both the first heat-conducting plate 17 and the second heat-conducting plate 15 are vertically arranged and are made of the same material as the evaporation boat body 14.

[0032] By setting the first heat-conducting plate 17 and the second heat-conducting plate 15, the flow and sloshing of boiling liquid are reduced, thereby maintaining the stable placement of the evaporation boat body 14. At the same time, heat can be conducted to the liquid inside the evaporation boat body 14 to improve the uniform heating of the liquid.

[0033] The connecting mechanism includes a connecting frame 5 and a snap-fit ​​post 22. The connecting frame 5 is fixed on both sides of the cover plate 8, and the snap-fit ​​post 22 is elastically installed on the outside of the insulation sleeve 1, with one end of it being positioned and snap-fitted to the bottom end of the connecting frame 5.

[0034] The top surface of the connecting frame 5 is covered with a heat insulation sleeve 6, and the bottom surface of the sleeve has a positioning hole 19. One end of the snap-fit ​​post 22 is slidably inserted into the positioning hole 19.

[0035] A support plate 7 is fixed to the side of the evaporation boat body 14. A guide hole 12 is opened on the surface of the support plate 7. The guide hole 12 is horizontally aligned with the positioning hole 19. A tension spring 4 is connected to one side of the support plate 7 and at the outer end of the guide hole 12. The snap-fit ​​post 22 slides through the middle of the tension spring 4 and the guide hole 12. Its outer end is connected to a limiting plate 3. The inner side of the limiting plate 3 is fixedly connected to the outer end of the tension spring 4.

[0036] The connecting frame 5 has an L-shaped structure, with its bottom gap located on the outside of the insulation sleeve 1. The snap-fit ​​post 22 is horizontally positioned, and the support plate 7 is horizontally positioned on one side of the connecting frame 5.

[0037] In use, by setting a first heat-conducting plate 17 and a second heat-conducting plate 15 perpendicular to each other inside the evaporation boat body 14, the boiling liquid inside the evaporation boat body 14 is intercepted and its flow and sloshing are limited by the first heat-conducting plate 17 and the second heat-conducting plate 15, thereby reducing the flow and sloshing of the boiling liquid, and thus maintaining the stable placement of the evaporation boat body 14. At the same time, heat can be conducted to the liquid inside the evaporation boat body 14 to improve the uniform heating of the liquid.

[0038] Moreover, the connecting frame 5, the support plate 7 and the snap-fit ​​post 22 can not only stably install the cover plate 8 and prevent the cover plate 8 from being pushed and shaken by the boiling hot air, but also facilitate the lifting of the evaporation boat body 14 and the cover plate 8 for opening, closing and transfer.

[0039] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. An evaporation boat for a stable and convenient vacuum coating machine, comprising an evaporation boat body (14), characterized in that: Heating electrode plates (2) are fixedly connected to the top ends of the two ends of the evaporation boat body (14), and the outer side is wrapped with a heat insulation sleeve (1). A cover plate (8) is installed on the top end of the evaporation boat body (14), and an anti-splash exhaust mechanism is connected to the surface of the cover plate (8). A connecting mechanism is installed on both sides of the evaporation boat body (14). The anti-splash exhaust mechanism includes an anti-splash pipe (10), a first exhaust pipe (9), and a second exhaust pipe (11). The surface of the cover plate (8) is evenly provided with exhaust holes (21). The first exhaust pipe (9) is connected to the top of the exhaust hole (21). The anti-splash pipe (10) is connected between the first exhaust pipe (9) and the second exhaust pipe (11). The top of the evaporation boat body (14) is provided with an anti-overflow groove (13). The inner side of the anti-overflow groove (13) is provided with a return hole (23). The bottom edge of the cover plate (8) is connected with a sealing ring (20) that is tightly inserted into the anti-overflow groove (13). The connecting mechanism includes a connecting frame (5) and a snap-fit ​​post (22). The connecting frame (5) is fixed on both sides of the cover plate (8). The snap-fit ​​post (22) is elastically installed on the outside of the insulation sleeve (1), and one end of it is positioned and snap-fitted to the bottom end of the connecting frame (5).

2. The evaporation boat of a stable and convenient vacuum coating machine according to claim 1, characterized in that, The top surface of the connecting frame (5) is covered with a heat insulation sleeve (6), and a positioning hole (19) is opened on its bottom surface. One end of the snap-fit ​​post (22) is slidably inserted into the interior of the positioning hole (19).

3. The evaporation boat of a stable and convenient vacuum coating machine according to claim 2, characterized in that, A support plate (7) is fixed to the side of the main body (14) of the evaporation boat. A guide hole (12) is opened on the surface of the support plate (7). The guide hole (12) is horizontally aligned with the positioning hole (19). A tension spring (4) is connected to one side of the support plate (7) and at the outer end of the guide hole (12). The snap-fit ​​post (22) slides through the middle of the tension spring (4) and the guide hole (12). Its outer end is connected to a limiting plate (3). The inner side of the limiting plate (3) is fixedly connected to the outer end of the tension spring (4).

4. The evaporation boat of a stable and convenient vacuum coating machine according to claim 1, characterized in that, A first heat-conducting plate (17) is fixed in the middle of the interior of the evaporation boat body (14). A first flow hole (18) is uniformly opened at the bottom end of the first heat-conducting plate (17). A second heat-conducting plate (15) is fixed inside the evaporation boat body (14) and is perpendicular to the first heat-conducting plate (17). A second flow hole (16) is opened at the bottom end of the second heat-conducting plate (15). The first heat-conducting plate (17) and the second heat-conducting plate (15) are both vertically arranged and are made of the same material as the evaporation boat body (14).

5. The evaporation boat of a stable and convenient vacuum coating machine according to claim 1, characterized in that, The cover plate (8) is horizontally arranged and has the same shape as the top of the evaporation boat body (14). The first exhaust pipe (9), the anti-splash pipe (10), the second exhaust pipe (11) and the exhaust hole (21) are interconnected. The anti-splash pipe (10) is a circular tube structure and is vertically arranged.

6. The evaporation boat of a stable and convenient vacuum coating machine according to claim 1, characterized in that, Both the overflow prevention groove (13) and the sealing ring (20) are rectangular frame structures, and the reflux hole (23) is connected between the overflow prevention groove (13) and the interior of the evaporation boat body (14).

7. The evaporation boat of a stable and convenient vacuum coating machine according to claim 3, characterized in that, The connecting frame (5) has an L-shaped structure, with its bottom gap located on the outside of the insulation sleeve (1). The snap-fit ​​post (22) is horizontally positioned, and the support plate (7) is horizontally positioned on one side of the connecting frame (5).

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