Cleaning device for a mask frame

Abstract

This utility model discloses a cleaning device for a protective film frame, including a base, a water pipe connected to the upper end of the base, a nozzle connected to the upper end of the water pipe, and a connecting pipe connected to the lower end of the water pipe through the base. A placement plate is provided above the base, and a through groove is formed on the placement plate. A support mechanism for rotating the placement plate is connected between the placement plate and the base. The support mechanism includes a sleeve connected to the lower part of the placement plate, and a gear two connected to the lower end of the sleeve. A motor is connected to the base, and a gear one is connected to the output end of the motor. Gear one and gear two mesh with each other. A rack is connected to the lower end of the placement plate. This utility model uses the placement plate to fix the frame structure. Then, by rotating the placement plate, the nozzle can rinse and clean the groove structure inside the frame. The uniform rotation allows the water jet to cover all angles inside the frame, improving the cleaning quality.

Description

Technical Field

[0001] This utility model relates to the field of protective film frame processing technology, and in particular to a cleaning device for protective film frames. Background Technology

[0002] The photomask frame plays a crucial role, supporting and fixing the photomask substrate to facilitate precise positioning and alignment in photolithography equipment, and providing protection. It is typically a surrounding frame, made of materials such as stainless steel and ceramic. As semiconductor technology advances, patents drive improvements in its precision and stability.

[0003] After the photomask's protective frame undergoes grinding, cutting, and polishing processes, it needs to be cleaned to remove debris and impurities from its surface. However, due to the recessed structure inside the frame, cleaning is inconvenient. Operators need to hold the cleaning nozzle and aim it at the recess, carefully cleaning along the recess. This cleaning operation is cumbersome, and with large frames, manually changing the cleaning position is inconvenient, leading to missed areas. Therefore, the cleaning quality of the recessed area inside the frame cannot be guaranteed.

[0004] Based on this, a cleaning device for the protective film frame is proposed. Utility Model Content

[0005] The purpose of this utility model is to provide a cleaning device for a protective film frame in order to solve the above-mentioned problems.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A cleaning device for a protective film frame includes a base, a water pipe connected to the upper end of the base, a nozzle connected to the upper end of the water pipe, a connecting pipe connected to the lower end of the water pipe through the base, a placement plate provided above the base, a through groove provided on the placement plate, and a support mechanism for rotating the placement plate connected between the placement plate and the base.

[0008] Preferably, the support mechanism includes a sleeve connected below the placement plate, a second gear connected to the lower end of the sleeve, a motor connected to the base, a first gear connected to the output end of the motor, and the first gear and the second gear meshing with each other.

[0009] Preferably, a rack is connected to the lower end of the placement plate, and a snap-fit ​​disc is connected to the upper end of the sleeve, with the rack and the snap-fit ​​disc snapping into each other.

[0010] Preferably, a limiting groove is formed on the through groove, a limiting plate is slidably connected in the limiting groove, and a spring is connected between the limiting plate and the locking plate.

[0011] Preferably, the placement plate is connected to a clamping edge and a connecting plate, and a screw is threadedly connected to the connecting plate, with a clamping claw rotatably connected to one end of the screw.

[0012] In summary, due to the adoption of the above technical solution, the beneficial effects of this utility model are:

[0013] 1. This application adopts a placement plate structure, which is used to fix the frame structure. Then, by rotating the placement plate, the nozzle can rinse and clean the groove structure inside the frame. The uniform rotation allows the water column to cover all angles inside the frame, thus improving the cleaning quality.

[0014] 2. By adopting a rack and pinion structure and utilizing the rack and pinion plate to cooperate, the rotation center of the placement plate can be changed at will. With the help of the clamping claws, it can clamp and clean frames of any size, thus improving the applicability of the cleaning device. Attached Figure Description

[0015] Figure 1 A schematic diagram of the overall structure of the cleaning device provided according to an embodiment of the present invention is shown;

[0016] Figure 2 A side view of the card slot connection provided according to an embodiment of the present invention is shown.

[0017] Figure 3 A schematic diagram of the rack and pinion connection provided according to an embodiment of the present invention is shown;

[0018] Figure 4 An exploded structural diagram of a spring connection provided according to an embodiment of the present invention is shown.

[0019] Legend:

[0020] 1. Base; 2. Connecting pipe; 3. Placement plate; 4. Clamping edge; 5. Connecting plate; 6. Screw; 7. Clamping claw; 8. Through groove; 9. Limiting groove; 10. Limiting plate; 11. Nozzle; 12. Rack; 13. Snap-fit ​​plate; 14. Sleeve; 15. Motor; 16. Gear 1; 17. Gear 2; 18. Spring; 19. Water pipe. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figures 1-4 This utility model provides a technical solution:

[0023] A cleaning device for a protective film frame includes a base 1, a water pipe 19 connected to the upper end of the base 1, a nozzle 11 connected to the upper end of the water pipe 19, a connecting pipe 2 connected to the lower end of the water pipe 19 through the base 1, a placement plate 3 provided above the base 1, a through groove 8 provided on the placement plate 3, and a support mechanism for driving the placement plate 3 to rotate connected between the placement plate 3 and the base 1.

[0024] Specifically, such as Figure 1 and Figure 4 As shown, the support mechanism includes a sleeve 14, which is connected to the bottom of the placement plate 3. A gear 17 is connected to the lower end of the sleeve 14. A motor 15 is connected to the base 1. A gear 16 is connected to the output end of the motor 15. The gear 16 and the gear 17 mesh with each other. The structure of the motor 15 allows the placement plate 3 to rotate evenly, thus achieving the effect of cleaning the frame structure evenly.

[0025] Specifically, such as Figure 2 As shown, a rack 12 is connected to the lower end of the placement plate 3, and a snap-fit ​​plate 13 is connected to the upper end of the sleeve 14. The rack 12 and the snap-fit ​​plate 13 are snapped together. Through the arrangement of the rack 12 and the snap-fit ​​plate 13, the rotation center of the placement plate 3 can be changed at will.

[0026] Specifically, such as Figure 4 As shown, a limiting groove 9 is provided on the through groove 8, and a limiting plate 10 is slidably connected in the limiting groove 9. A spring 18 is connected between the limiting plate 10 and the snap-fit ​​plate 13. The connection between the limiting plate 10 and the snap-fit ​​plate 13 is ensured by the connection of the spring 18. The structure of the limiting groove 9 can also store the limiting plate 10 well.

[0027] Specifically, such as Figure 1 As shown, a clamping edge 4 and a connecting plate 5 are connected to the placement plate 3. A screw 6 is threaded onto the connecting plate 5. A clamping claw 7 is rotatably connected to one end of the screw 6. By rotating the screw 6, the clamping claw 7 can move towards the clamping edge 4, thus completing the operation of clamping the frame set between the structures.

[0028] In summary, the cleaning device for a protective membrane frame provided in this embodiment allows the frame to be placed on the placement plate 3 when cleaning is required. The screw 6 is rotated, and the frame structure is fixed by the clamping claw 7 and the clamping edge 4. Then, the height of the sleeve 14 is controlled, and the placement plate 3 is raised. At this time, the spring 18 structure is stretched, and the snap-fit ​​plate 13 is separated from the rack 12. The snap-fit ​​plate 13 can then be re-snapped at different positions on the rack 12, and the snap-fit ​​plate 13 should be moved to the center of the frame as much as possible, so as to ensure that the water jet from the nozzle 11 can clean the inside of the frame evenly.

[0029] Reconnect the snap-fit ​​disc 13 to the rack 12, connect the connecting pipe 2 to the external pipeline for conveying cleaning water, then start the motor 15 to drive the placement plate 3 to rotate, and use the nozzle 11 to clean the inner structure of the frame. The outer structure of the frame is easy to clean, and the operator can simply clean this part using the cleaning equipment.

[0030] The above description of the embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A cleaning device for a protective film frame, comprising a base (1), characterized in that, The upper end of the base (1) is connected to a water pipe (19), the upper end of the water pipe (19) is connected to a nozzle (11), the lower end of the water pipe (19) passes through the base (1) and is connected to a connecting pipe (2), a placement plate (3) is provided above the base (1), a through groove (8) is provided on the placement plate (3), and a support mechanism for driving the placement plate (3) to rotate is connected between the placement plate (3) and the base (1). The support mechanism includes a sleeve (14) connected below the placement plate (3), a gear two (17) connected to the lower end of the sleeve (14), a motor (15) connected to the base (1), a gear one (16) connected to the output end of the motor (15), and the gear one (16) and gear two (17) meshing with each other.

2. The cleaning device for a protective film frame according to claim 1, characterized in that, The lower end of the placement plate (3) is connected to a rack (12), and the upper end of the sleeve (14) is connected to a snap-fit ​​plate (13). The rack (12) and the snap-fit ​​plate (13) are snapped together.

3. The cleaning device for a protective film frame according to claim 2, characterized in that, A limiting groove (9) is provided on the through groove (8), and a limiting plate (10) is slidably connected in the limiting groove (9). A spring (18) is connected between the limiting plate (10) and the locking plate (13).

4. The cleaning device for a protective film frame according to claim 1, characterized in that, The placement plate (3) is connected to a clamping edge (4) and a connecting plate (5). A screw (6) is threaded onto the connecting plate (5). A clamping claw (7) is rotatably connected to one end of the screw (6).

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