A storage frame transfer device and a laser film opening device

Abstract

The application provides a storage frame transfer device and a laser film opening device. The storage frame transfer device comprises a first storage frame assembly and a second storage frame assembly; a first conveying line and a second conveying line are accommodated in a same first box body and are arranged in a spaced manner in an up-down direction; a third conveying line is installed in a second box body; a fourth conveying line is connected with a first lifting module; the fourth conveying line selectively abuts against the first conveying line, the second conveying line and the third conveying line; the fourth conveying line abuts against the first conveying line in an upper space of the first box body and abuts against the second conveying line in a lower space of the first box body through lifting, so that the silicon wafer storage frame conveyed by the first conveying line and the silicon wafer storage frame conveyed by the second conveying line are conveyed to the third conveying line through the fourth conveying line; meanwhile, the first conveying line and the second conveying line fully utilize the upper and lower spaces of the first box body, and the storage utilization rate of the first box body of the storage frame transfer device for the silicon wafer storage frame is improved.

Description

Technical Field

[0001] This utility model relates to the technical field of laser film-opening equipment, and in particular to a storage frame transfer device and a laser film-opening device. Background Technology

[0002] With the development of technology, laser wafer cutting equipment has become an industrial equipment. Laser wafer cutting equipment uses lasers to process silicon wafers, and some areas of the silicon wafer are gradually vaporized under the laser treatment. The memory frame transfer device is a part of the laser wafer cutting equipment.

[0003] In the prior art, existing memory frame transfer devices include a first housing, a first conveyor line, a second conveyor line, a second housing, a third conveyor line, and a fourth conveyor line. The first and second conveyor lines are connected to the first housing and are at the same horizontal level. The third and fourth conveyor lines are connected to the second housing and are respectively connected to the first and second conveyor lines. However, the first and second conveyor lines cannot fully utilize the vertical space of the first housing, resulting in poor storage utilization of the silicon wafer memory frames by the first housing in the existing memory frame transfer devices. Utility Model Content

[0004] The purpose of this utility model is to provide a memory frame transfer device and a laser film-opening device. The first memory frame assembly includes a first housing, a first conveyor line, and a second conveyor line. Both the first and second conveyor lines are housed within the same first housing and are arranged at intervals along the vertical direction. The first and second conveyor lines are used to transport corresponding silicon wafer memory frames. The second memory frame assembly includes a second housing, a third conveyor line, a fourth conveyor line, and a first lifting module. The second housing is located on one side of the first housing. The third conveyor line is installed in the second housing and is arranged along the front-rear direction with the first conveyor line. The fourth conveyor line is located within the second housing. The fourth conveyor line is connected to the first lifting module. Based on the first lifting module, the fourth conveyor line can move up and down inside the second housing to selectively connect to the first, second, and third conveyor lines. The fourth conveyor line connects to the first conveyor line located in the space above the first housing and the second conveyor line located in the space below the first housing through the lifting and lowering process. This facilitates the transfer of silicon wafer storage frames from the first and second conveyor lines to the third conveyor line via the fourth conveyor line. At the same time, the first and second conveyor lines make full use of the vertical space of the first housing, improving the storage utilization rate of the first housing of the storage frame transfer device for silicon wafer storage frames.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a storage frame transfer device, comprising:

[0006] The first memory frame assembly includes a first housing, a first conveyor line, and a second conveyor line. The first conveyor line and the second conveyor line are both housed in the same first housing and are arranged at intervals in the vertical direction. The first conveyor line and the second conveyor line are used to convey the corresponding silicon wafer memory frames.

[0007] The second storage box assembly includes a second housing, a third conveyor line, a fourth conveyor line, and a first lifting module; the second housing is disposed on one side of the first housing; the third conveyor line is installed in the second housing and is arranged in a front-rear direction with the first conveyor line; the fourth conveyor line is located inside the second housing and is connected to the first lifting module, and the fourth conveyor line can move up and down inside the second housing based on the first lifting module to selectively connect to the first conveyor line, the second conveyor line, and the third conveyor line.

[0008] Optionally, the first lifting module includes a first support base and a first lifting base;

[0009] The first support base is installed on the second housing, and the first lifting base is installed on the first support base in a vertically movable manner and can move up and down in the vertical direction;

[0010] The fourth conveyor line is installed on the first lifting seat and its height is adjusted by the first lifting seat.

[0011] Optionally, the third conveyor line is at the same height as the first conveyor line, and the lifting movement of the fourth conveyor line also includes connecting the fourth conveyor line to the positions of the third conveyor line and the first conveyor line respectively.

[0012] Optionally, the first box body has an upper space and a lower space; the upper space and the lower space are stacked in the vertical direction;

[0013] The first conveyor line is located in the upper space, and the second conveyor line is located in the lower space.

[0014] Optionally, the storage frame transfer device includes a first moving component, which is located in the upper space and drives the first conveyor line to move in the left-right direction;

[0015] The first moving component includes a first base and a first movable seat. The first base is mounted on the first housing and arranged in a left-right direction. The first movable seat is movably connected to the first base and supports the first conveyor line.

[0016] The storage frame transfer device also includes multiple fifth conveyor lines, all of which are located in the upper space and arranged side by side along the left-right direction;

[0017] The first conveyor line moves under the drive of the first movable seat and selectively connects with each of the fifth conveyor lines.

[0018] Optionally, the storage frame transfer device includes a second moving component, which is located in the lower space and drives the second conveyor line to move in the left-right direction;

[0019] The second moving component includes a second base and a second moving seat. The second base is mounted on the second housing and arranged in a left-right direction. The second moving seat is movably connected to the second base and supports the second conveyor line.

[0020] The storage frame transfer device also includes multiple sixth conveyor lines, all of which are located in the lower space and arranged side by side in the left-right direction;

[0021] The second conveyor line moves under the drive of the second movable seat and selectively connects with each of the sixth conveyor lines.

[0022] Optionally, the second storage frame assembly further includes a seventh conveyor line, which is movable within the second housing to selectively connect to the first conveyor line, the second conveyor line, and the fourth conveyor line.

[0023] Optionally, an eighth conveyor line is provided between the seventh conveyor line and the fourth conveyor line, and the eighth conveyor line is located inside the second housing;

[0024] When the eighth conveyor line, the seventh conveyor line, and the fourth conveyor line are at the same height, the eighth conveyor line will transport the silicon wafer storage frame output from the seventh conveyor line to the fourth conveyor line.

[0025] Optionally, the eighth conveyor line is installed in the second housing and is located in the upper or lower space of the second housing.

[0026] To achieve the above objectives, this utility model provides the following technical solution: a laser film-opening device, including the aforementioned storage frame transfer device.

[0027] Compared with the prior art, the beneficial effects of this utility model are:

[0028] This utility model provides a memory frame transfer device and a laser film-opening device. The first memory frame assembly includes a first housing, a first conveyor line, and a second conveyor line. Both the first and second conveyor lines are housed within the same first housing and are arranged at intervals along the vertical direction. The first and second conveyor lines are used to transport corresponding silicon wafer memory frames. The second memory frame assembly includes a second housing, a third conveyor line, a fourth conveyor line, and a first lifting module. The second housing is disposed on one side of the first housing. The third conveyor line is installed in the second housing, and the third conveyor line and the first conveyor line are arranged along the front-rear direction. The fourth conveyor line is located within the second housing, and the fourth conveyor line is connected to the first... A lifting module is connected to the first lifting module. The fourth conveyor line can move up and down inside the second box based on the first lifting module to selectively connect to the first, second and third conveyor lines. The fourth conveyor line connects to the first conveyor line located in the space above the first box and the second conveyor line located in the space below the first box through lifting. This facilitates the transfer of silicon wafer storage frames transported by the first and second conveyor lines to the third conveyor line via the fourth conveyor line. At the same time, the first and second conveyor lines make full use of the vertical space of the first box, improving the storage utilization rate of the first box of the storage frame transfer device for silicon wafer storage frames. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] To gain a more complete understanding of this application and its beneficial effects, the following description will be provided in conjunction with the accompanying drawings. In the following description, the same reference numerals denote the same parts.

[0031] Figure 1 A schematic diagram of a storage frame transfer device according to an embodiment of this application is shown.

[0032] Figure 2 A schematic diagram of the internal structure of a storage frame transfer device according to an embodiment of this application is shown.

[0033] Figure 3 A schematic diagram of a first memory frame assembly of a memory frame transfer apparatus according to an embodiment of this application is shown.

[0034] Figure 4 A schematic diagram of a second memory frame assembly of a memory frame transfer device according to an embodiment of this application is shown.

[0035] Figure 5 It shows Figure 4A magnified view of a portion of point A in the middle.

[0036] Figure 6 A schematic diagram of the first moving component of a storage frame transfer device according to an embodiment of this application is shown.

[0037] Figure 7 A schematic diagram of the second moving component of a storage frame transfer device according to an embodiment of this application is shown.

[0038] Figure Labels

[0039] 100. Storage frame transfer device;

[0040] 10. First storage frame assembly; 11. First housing; 11a. Upper space; 11b. Lower space; 12. First conveyor line; 13. Second conveyor line;

[0041] 20. Second storage frame assembly; 21. Second housing; 22. Third conveyor line; 23. Fourth conveyor line; 24. First lifting module; 241. First support base; 242. First lifting base; 243. Lifting module; 25. Seventh conveyor line; 26. Eighth conveyor line;

[0042] 30. First moving component; 31. First base; 32. First moving seat; 33. First motor; 34. First synchronous belt drive module;

[0043] 40. Fifth conveyor line;

[0044] 50. Second moving component; 51. Second base; 52. Second moving seat; 53. Second motor; 54. Second synchronous belt drive module;

[0045] 60. The sixth conveyor line. Detailed Implementation

[0046] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0047] Please refer to the attached document. Figures 1-7 This application provides a memory frame transfer device 100, which is applied to a laser film-forming device and is used to transfer silicon wafer memory frames.

[0048] Please refer to the attached document. Figures 1-7In this embodiment, the memory frame transfer device 100 includes a first memory frame assembly 10 and a second memory frame assembly 20. The first memory frame assembly 10 includes a first housing 11, a first conveyor line 12, and a second conveyor line 13. The first conveyor line 12 and the second conveyor line 13 are both housed in the same first housing 11 and are arranged at intervals along the vertical direction. The first conveyor line 12 and the second conveyor line 13 are used to transport the corresponding silicon wafer memory frames. The second memory frame assembly 20 includes a second housing 21, a third conveyor line 22, a fourth conveyor line 23, and a first lifting module 24. The second housing 21 is disposed on one side of the first housing 11. The third conveyor line 22 is installed in the second housing 21, and the third conveyor line 22 and the first conveyor line 12 are arranged along the front-back direction. The fourth conveyor line 23 is located in the second housing 21. Inside, the fourth conveyor line 23 is connected to the first lifting module 24. Based on the first lifting module 24, the fourth conveyor line 23 can move up and down within the second housing 21 to selectively connect to the first conveyor line 12, the second conveyor line 13, and the third conveyor line 22. The fourth conveyor line 23 connects to the first conveyor line 12 located in the space above the first housing 11 and the second conveyor line 13 located in the space below the first housing 11 through the lifting and lowering. This facilitates the transfer of silicon wafer storage frames from the first conveyor line 12 and the second conveyor line 13 to the third conveyor line 22 via the fourth conveyor line 23. At the same time, the first conveyor line 12 and the second conveyor line 13 make full use of the vertical space of the first housing 11, improving the storage utilization rate of the silicon wafer storage frames in the first housing 11 of the storage frame transfer device 100.

[0049] Please refer to the attached document. Figures 1-7 In this embodiment of the application, the first storage frame assembly 10 includes a first housing 11, a first conveying line 12 and a second conveying line 13. The first conveying line 12 and the second conveying line 13 are both housed in the same first housing 11 and are arranged at intervals in the vertical direction. The first conveying line 12 and the second conveying line 13 are used to convey the corresponding silicon wafer storage frames so that the silicon wafer storage frames can be arranged in the upper and lower layers relative to the first housing 11.

[0050] The second storage box assembly 20 includes a second housing 21, a third conveyor line 22, a fourth conveyor line 23, and a first lifting module 24. The second housing 21 is located outside the first housing 11. The third conveyor line 22 is installed in the second housing 21, and the third conveyor line 22 and the first conveyor line 12 are arranged in a front-to-back direction. The fourth conveyor line 23 is located inside the second housing 21 and is connected to the first lifting module 24. The fourth conveyor line 23 can move up and down within the second housing 21 based on the first lifting module 24 to selectively connect to the first conveyor line 12 and the second conveyor line 13. The third conveyor line 22 and the fourth conveyor line 23 are respectively connected to the first conveyor line 12 located in the space above the first housing 11 and the second conveyor line 13 located in the space below the first housing 11 by lifting and lowering. This facilitates the transfer of silicon wafer storage frames transported by the first conveyor line 12 and the second conveyor line 13 to the third conveyor line 22 via the fourth conveyor line 23. At the same time, the first conveyor line 12 and the second conveyor line 13 make full use of the vertical space of the first housing 11, thereby improving the storage utilization rate of the silicon wafer storage frames in the first housing 11 of the storage frame transfer device 100.

[0051] Please refer to the attached document. Figure 1 , 2 In embodiments of this application, the first lifting module 24 includes a first support base 241 and a first lifting base 242; the first support base 241 is installed on the second housing 21, and the first lifting base 242 is installed on the first support base 241 in a vertically detachable manner and moves up and down in the vertical direction to adjust the position of the first lifting base 242 relative to the first support base 241.

[0052] The fourth conveyor line 23 is installed on the first lifting seat 242 and its height is adjusted under the drive of the first lifting seat 242 so that the fourth conveyor line 23 can selectively connect to the first conveyor line 12, the second conveyor line 13 and the third conveyor line 22 during the height adjustment process.

[0053] The first lifting module 24 also includes a lifting module 243, which is arranged vertically. The fixed end of the lifting module 243 is connected to the first support base 241, and the lifting end of the lifting module 243 is connected to the first lifting seat 242, thereby driving the first lifting seat 242 to lift and lower. This ensures that the first lifting seat 242 can lift and lower under the action of the lifting module 243, thus guaranteeing the lifting effect of the fourth conveyor line 23.

[0054] Please refer to the attached document. Figure 1 , 2In embodiments of this application, the third conveyor line 22 is at the same height as the first conveyor line 12, and the lifting and lowering movement of the fourth conveyor line 23 also includes connecting the fourth conveyor line 23 to the positions of the third conveyor line 22 and the first conveyor line 12 respectively, so that the silicon wafer storage frame conveyed by the first conveyor line 12 can be conveyed to the third conveyor line 22 via the fourth conveyor line 23.

[0055] Please refer to the attached document. Figures 1-3 In this embodiment of the application, the first housing 11 is provided with an upper space 11a and a lower space 11b; the upper space 11a and the lower space 11b are stacked in the vertical direction; the first conveyor line 12 is located in the upper space 11a and the second conveyor line 13 is located in the lower space 11b, so that the first conveyor line 12 and the second conveyor line 13 can respectively convey the silicon wafer storage frame in the upper space 11a and the silicon wafer storage frame in the lower space 11b.

[0056] Please refer to the attached document. Figures 1-3 6. In this embodiment of the application, the storage frame transfer device 100 includes a first moving component 30, which is located in the upper space 11a and drives the first conveyor line 12 to move in the left and right direction so as to adjust the left and right position of the first conveyor line 12 relative to the first box 11.

[0057] The first moving component 30 includes a first base 31 and a first moving seat 32. The first base 31 is mounted on the first housing 11 and arranged in the left-right direction so that the first moving component 30 can be connected to the first housing 11 through the first moving seat 32. The first moving seat 32 is movably connected to the first base 31 so as to adjust the position of the first moving seat 32 relative to the first base 31. The first moving seat 32 supports the first conveyor line 12 so that the first conveyor line 12 moves with the movement of the first moving seat 32.

[0058] The first moving component 30 also includes a first motor 33 and a first synchronous belt drive module 34. The fixed end of the first motor 33 is connected to the first base 31, and the output end of the first motor 33 is connected to the synchronous pulley of the first synchronous belt drive module 34, thereby driving the first synchronous belt drive module 34 to rotate. The first moving seat 32 is connected to the synchronous belt of the first synchronous belt drive module 34 so that the first moving seat 32 can move with the rotation of the first synchronous belt drive module 34, thus ensuring the moving effect of the first conveyor line 12.

[0059] The memory frame transfer device 100 also includes multiple fifth conveyor lines 40, all located in the upper space 11a and arranged side-by-side in the left-right direction. A first conveyor line 12 moves under the drive of a first movable seat 32 and selectively connects to each of the fifth conveyor lines 40, facilitating the transfer of silicon memory frames output from each of the fifth conveyor lines 40 to the first conveyor line 12, thereby improving the transfer efficiency of the silicon memory frames in the upper space 11a. Optionally, there may be two fifth conveyor lines 40.

[0060] Please refer to the attached document. Figures 1-3 7. In this embodiment of the application, the storage frame transfer device 100 includes a second moving component 50, which is located in the lower space 11b and drives the second conveyor line 13 to move in the left and right direction so as to adjust the left and right position of the second conveyor line 13 relative to the second box 21.

[0061] The second moving component 50 includes a second base 51 and a second moving seat 52. The second base 51 is mounted on the second housing 21 and arranged in the left-right direction so that the second moving component 50 can be connected to the second housing 21 through the second moving seat 52. The second moving seat 52 is movably connected to the second base 51 so as to adjust the position of the second moving seat 52 relative to the second base 51. The second moving seat 52 supports the second conveyor line 13 so that the second conveyor line 13 moves with the movement of the second moving seat 52.

[0062] The second moving component 50 also includes a second motor 53 and a second synchronous belt drive module 54. The fixed end of the second motor 53 is connected to the second base 51, and the output end of the second motor 53 is connected to the synchronous pulley of the second synchronous belt drive module 54, thereby driving the second synchronous belt drive module 54 to rotate. The second moving seat 52 is connected to the synchronous belt of the second synchronous belt drive module 54 so that the second moving seat 52 moves with the rotation of the second synchronous belt drive module 54, thus ensuring the moving effect of the second conveyor line 13.

[0063] The memory frame transfer device 100 also includes a plurality of sixth conveyor lines 60, all located in the lower space 11b and arranged side by side in the left-right direction; the second conveyor line 13 moves under the drive of the second movable seat 52 and selectively connects to each of the sixth conveyor lines 60, so that the silicon wafer memory frames output from each of the sixth conveyor lines 60 are transported to the second conveyor line 13. Optionally, there are two sixth conveyor lines 60.

[0064] Please refer to the attached document. Figures 1-3In this embodiment, the second storage frame assembly 20 further includes a seventh conveyor line 25. The seventh conveyor line 25 is movable within the second housing 21 to adjust its height relative to the second housing 21, selectively connecting to the first conveyor line 12, the second conveyor line 13, and the fourth conveyor line 23. The seventh conveyor line 25 connects to the first conveyor line 12 located above the first housing 11 and the second conveyor line 13 located below the first housing 11, thereby facilitating the transport of silicon wafer storage frames transported by the first conveyor line 12 and the second conveyor line 13 to the fourth conveyor line 23 via the seventh conveyor line 25. Optionally, the lifting structure of the seventh conveyor line 25 is consistent with the lifting structure of the fourth conveyor line 23.

[0065] Please refer to the attached document. Figures 1-3 In this embodiment, an eighth conveyor line 26 is provided between the seventh conveyor line 25 and the fourth conveyor line 23, and the eighth conveyor line 26 is located inside the second housing 21. When the eighth conveyor line 26, the seventh conveyor line 25 and the fourth conveyor line 23 are at the same height, the eighth conveyor line 26 conveys the silicon wafer storage frame output from the seventh conveyor line 25 to the fourth conveyor line 23, so that the silicon wafer storage frame output from the seventh conveyor line 25 can be transferred to the fourth conveyor line 23 through the eighth conveyor line 26, thereby facilitating the fourth conveyor line 23 to convey the silicon wafer storage frame output from the seventh conveyor line 25 to the third conveyor line 22.

[0066] Please refer to the attached document. Figures 1-3 In this embodiment of the application, the eighth conveyor line 26 is installed on the second housing 21 and is located in the upper or lower space of the second housing 21. When the eighth conveyor line 26 is located in the upper space of the second housing 21, the seventh conveyor line 25 is conveyed to the fourth conveyor line 23 via the eighth conveyor line 26 in the upper space of the second housing 21.

[0067] When the eighth conveyor line 26 is in the lower space of the second housing 21, the seventh conveyor line 25 can be conveyed to the fourth conveyor line 23 via the eighth conveyor line 26 in the lower space of the second housing 21.

[0068] Workflow: Each silicon wafer storage frame is stored in the upper space 11a and lower space 11b of the first housing 11. Silicon wafer storage frames transported by each fifth conveyor line 40 and each sixth conveyor line 60 are respectively transported to the first conveyor line 12 and the second conveyor line 13. When the seventh conveyor line 25 connects to the first conveyor line 12, the silicon wafer storage frames transported by the first conveyor line 12 sequentially pass through the seventh conveyor line 25, the eighth conveyor line 26, the fourth conveyor line 23, and the third conveyor line 22. When the fourth conveyor line 23 connects to the second conveyor line 13, the silicon wafer storage frames transported by the second conveyor line 13 sequentially pass through the fourth conveyor line 23 and the third conveyor line 22.

[0069] In a second application embodiment, a laser wafer forming device includes a memory frame transfer device 100, which is part of the laser wafer forming device. The laser wafer forming device uses a laser to process the silicon wafer.

[0070] The laser film-forming equipment also includes a silicon wafer conveying line, which is located on one side of the third conveying line 22 of the storage frame transfer device 100. The silicon wafer conveying line is used to transport the silicon wafers of the silicon wafer storage frame to realize the transfer of the silicon wafers of the silicon wafer storage frame.

[0071] The laser wafer opening equipment also includes a laser mold opening module, which is set on one side of the silicon wafer conveyor line and is used to perform laser mold opening on the silicon wafers conveyed by the silicon wafer conveyor line.

[0072] Compared with the prior art, the beneficial effects of this utility model are:

[0073] This utility model provides a memory frame transfer device 100 and a laser film-opening device. The first memory frame assembly 10 includes a first housing 11, a first conveyor line 12, and a second conveyor line 13. Both the first and second conveyor lines 12 and 13 are housed within the same first housing 11 and are arranged at intervals along the vertical direction. The first and second conveyor lines 12 and 13 are used to transport corresponding silicon wafer memory frames. The second memory frame assembly 20 includes a second housing 21, a third conveyor line 22, a fourth conveyor line 23, and a first lifting module 24. The second housing 21 is disposed on one side of the first housing 11. The third conveyor line 22 is installed in the second housing 21, and the third conveyor line 22 and the first conveyor line 12 are arranged along the front-to-back direction. The fourth conveyor line 23 is located inside the second housing 21. 3. Connected to the first lifting module 24, the fourth conveyor line 23 can move up and down within the second housing 21 based on the first lifting module 24, so as to selectively connect to the first conveyor line 12, the second conveyor line 13 and the third conveyor line 22. The fourth conveyor line 23 connects to the first conveyor line 12 located in the space above the first housing 11 and the second conveyor line 13 located in the space below the first housing 11 through the lifting and lowering, so as to facilitate the silicon wafer storage frame conveyed by the first conveyor line 12 and the silicon wafer storage frame conveyed by the second conveyor line 13 to be conveyed to the third conveyor line 22 via the fourth conveyor line 23. At the same time, the first conveyor line 12 and the second conveyor line 13 make full use of the vertical space of the first housing 11, thereby improving the storage utilization rate of the silicon wafer storage frame in the first housing 11 of the storage frame transfer device 100.

[0074] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a specific posture. If the specific posture changes, the directional indicator will also change accordingly.

[0075] It should also be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or may be connected to an intermediary component. When a component is referred to as being "connected to" another component, it can be directly connected to the other component or indirectly connected to the other component through an intermediary component.

[0076] Furthermore, the use of terms such as "first" and "second" in this utility model is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.

[0077] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A storage frame transfer device, characterized in that, include: The first memory frame assembly includes a first housing, a first conveyor line, and a second conveyor line. The first conveyor line and the second conveyor line are both housed in the same first housing and are arranged at intervals in the vertical direction. The first conveyor line and the second conveyor line are used to convey the corresponding silicon wafer memory frames. The second storage box assembly includes a second housing, a third conveyor line, a fourth conveyor line, and a first lifting module; the second housing is disposed on one side of the first housing; the third conveyor line is installed in the second housing and is arranged in a front-rear direction with the first conveyor line; the fourth conveyor line is located inside the second housing and is connected to the first lifting module, and the fourth conveyor line can move up and down inside the second housing based on the first lifting module to selectively connect to the first conveyor line, the second conveyor line, and the third conveyor line.

2. The storage frame transfer device according to claim 1, characterized in that, The first lifting module includes a first support base and a first lifting base; The first support base is installed on the second housing, and the first lifting base is installed on the first support base in a vertically movable manner and can move up and down in the vertical direction; The fourth conveyor line is installed on the first lifting seat and its height is adjusted by the first lifting seat.

3. The storage frame transfer device according to claim 1, characterized in that, The third conveyor line is at the same height as the first conveyor line, and the lifting and lowering movement of the fourth conveyor line also includes connecting the fourth conveyor line to the positions of the third conveyor line and the first conveyor line respectively.

4. The storage frame transfer device according to claim 1, characterized in that, The first box has an upper space and a lower space; the upper space and the lower space are stacked in the vertical direction; The first conveyor line is located in the upper space, and the second conveyor line is located in the lower space.

5. The storage frame transfer device according to claim 4, characterized in that, The storage frame transfer device includes a first moving component, which is located in the upper space and drives the first conveyor line to move in the left-right direction. The first moving component includes a first base and a first movable seat. The first base is mounted on the first housing and arranged in a left-right direction. The first movable seat is movably connected to the first base and supports the first conveyor line. The storage frame transfer device also includes multiple fifth conveyor lines, all of which are located in the upper space and arranged side by side along the left-right direction; The first conveyor line moves under the drive of the first movable seat and selectively connects with each of the fifth conveyor lines.

6. The storage frame transfer device according to claim 4, characterized in that, The storage frame transfer device includes a second moving component, which is located in the lower space and drives the second conveyor line to move in the left-right direction; The second moving component includes a second base and a second moving seat. The second base is mounted on the second housing and arranged in a left-right direction. The second moving seat is movably connected to the second base and supports the second conveyor line. The storage frame transfer device also includes multiple sixth conveyor lines, all of which are located in the lower space and arranged side by side in the left-right direction; The second conveyor line moves under the drive of the second movable seat and selectively connects with each of the sixth conveyor lines.

7. The storage frame transfer device according to claim 6, characterized in that, The second storage frame assembly also includes a seventh conveyor line, which is movable within the second housing to selectively connect to the first conveyor line, the second conveyor line, and the fourth conveyor line.

8. The storage frame transfer device according to claim 7, characterized in that, An eighth conveyor line is provided between the seventh conveyor line and the fourth conveyor line, and the eighth conveyor line is located inside the second box. When the eighth conveyor line, the seventh conveyor line, and the fourth conveyor line are at the same height, the eighth conveyor line will transport the silicon wafer storage frame output from the seventh conveyor line to the fourth conveyor line.

9. The storage frame transfer device according to claim 8, characterized in that, The eighth conveyor line is installed in the second housing and is located in the upper or lower space of the second housing.

10. A laser film-opening device, characterized in that, Includes the storage frame transfer device as described in any one of claims 1 to 9.

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