A graphite boat cleaning carrier and a cleaning tank

Abstract

This utility model belongs to the field of semiconductor cleaning equipment, and particularly relates to a graphite boat cleaning carrier and cleaning tank. This utility model provides a graphite boat cleaning carrier and cleaning tank, including a frame for supporting and fixing the graphite boat blades, and a pull-out plate for supporting the disassembled parts of the graphite boat. The pull-out plate includes a parts cleaning plate located at the top of the frame for cleaning ceramic components, and a parts recovery plate located at the bottom of the frame for recovering parts and supporting graphite components. This allows operators to place the entire graphite boat on the carrier for rapid disassembly and recovery, separating various components into two cleaning areas: one requiring acid washing and the other not resistant to acid washing. The carrier is then placed in the cleaning tank for cleaning, significantly improving the disassembly efficiency of the graphite boat, effectively solving the problem that existing graphite boats cannot be targeted for cleaning, and extending their service life.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor cleaning equipment, and in particular relates to a graphite boat cleaning carrier and cleaning tank. Background Technology

[0002] In semiconductor manufacturing, graphite boats are widely used in equipment such as diffusion furnaces and oxidation furnaces. As a wafer carrier and heating component, the graphite boat provides a uniform temperature distribution for the wafer, ensuring the performance and quality of semiconductor devices. After approximately 100 to 150 uses, silicon nitride residue may remain on the surface of the graphite boat, requiring cleaning. This is typically done using a 15-25% hydrofluoric acid solution, in three stages, each lasting 4-5 hours. After acid cleaning, the boat is rinsed with pure water for about 10 hours to ensure it is completely clean. To avoid silicon nitride residue remaining at the points where the graphite boat jams, at the wafer joints, and in other detailed areas, it is best to disassemble the graphite boat during cleaning; however, this introduces several inconveniences to the cleaning process.

[0003] Chinese utility model patent with patent publication number CN 210966276 U and publication date of July 10, 2020 discloses a graphite boat cleaning carrier, including a boat clip plate, a clip plate support plate, and a lifting handle. The boat clip plate has 22 teeth arranged horizontally and can hold 23 boat clips. Two boat clip plates on each cleaning carrier are connected to the clip plate support plate. The lifting handle is installed on the clip plate support plate.

[0004] The graphite boat cleaning carrier in this Chinese utility model patent has the following general usage method and advantages: It has a reasonable structural design and can be used to put the whole graphite boat into the graphite boat cleaning carrier. The boat pieces are just inserted into the boat piece clamping plate to realize the disassembly of the graphite boat. Finally, the whole carrier is put into the cleaning tank for cleaning, which improves the cleaning cleanliness.

[0005] However, the graphite boat cleaning carrier still has at least the following shortcomings in actual use, which are the technical problems that this utility model aims to solve: 1. The carrier only fixes the position of the boat pieces and does not process the disassembled ceramic rods, ceramic rings, nuts and other parts; 2. The graphite boat is not only composed of graphite sheets, but also of multiple ceramic components, and the hydrofluoric acid used for cleaning will corrode the ceramic components, which will easily reduce the service life of the graphite boat.

[0006] Therefore, in summary, it is necessary to develop a cleaning vehicle and cleaning tank that can take into account the overall cleaning effect of graphite boats to solve this problem. Utility Model Content

[0007] This utility model provides a graphite boat cleaning carrier and cleaning tank, including a frame for supporting and fixing the graphite boat blades, and a pull-out plate for supporting the disassembled parts of the graphite boat. The pull-out plate includes a parts cleaning plate located on the upper part of the frame for cleaning ceramic parts, and a parts recycling plate located on the lower part of the frame for recycling parts and supporting graphite parts. This allows operators to place the entire graphite boat on the carrier and complete rapid disassembly and recycling. It separates various components into two cleaning areas: one requiring acid washing and the other not resistant to acid washing. The carrier is then placed in the cleaning tank for cleaning, which greatly improves the disassembly efficiency of the graphite boat, effectively solves the problem that existing graphite boats cannot be cleaned in a targeted manner, and extends their service life.

[0008] Therefore, this utility model overcomes the shortcomings of the prior art and provides a graphite boat cleaning carrier, including a frame and a pull-out plate slidably disposed on the frame; the frame includes a frame formed by multiple connecting rods as edges to form a rectangle, a bracket disposed at the corner of the frame for supporting the pull-out plate, a support plate disposed on the bottom surface of the frame between the transverse connecting rods, and multiple clamping plates disposed on the support plate for limiting the boat blades; the pull-out plate includes a parts cleaning plate disposed on the lower surface of the connecting rod on the top surface of the frame and slidably connected to the bracket, and a parts recycling plate disposed on the lower surface of the connecting rod on the bottom surface of the frame and slidably connected to the bracket.

[0009] A further preferred technical solution is that: the parts recycling plate includes a first plate body disposed on the bracket and slidably connected to the frame, a recycling trough disposed on the first plate body for recycling parts that fall naturally after the graphite boat is disassembled, and a buffer layer disposed on the bottom surface of the recycling trough.

[0010] A further preferred technical solution is that: the parts cleaning plate includes a second plate body that is slidably connected to the frame and the bracket, a water washing tank for carrying ceramic parts is disposed on the second plate body, and a drain outlet is disposed on the side wall of the cleaning tank and connected to the outside.

[0011] A further preferred technical solution is that the thickness of the clamping plate is set to 10~12mm.

[0012] A further preferred technical solution is that a corrosion-resistant buffer layer is provided on the outer surface of the clamping plate.

[0013] A further preferred technical solution is that the inner bottom surface of the recycling tank is inclined at one corner.

[0014] A further preferred technical solution is that: the lower end of the pull-out plate is provided with a protrusion that cooperates with the bracket, and the side end is provided with a handle for sliding the pull-out plate.

[0015] A graphite boat cleaning tank is also provided, including any of the graphite boat cleaning carriers described above, and a slot disposed on the bottom surface of the tank body for mounting the bracket.

[0016] A further preferred technical solution includes a spray pipe disposed above the tank, the spray pipe being located above the parts cleaning plate.

[0017] The beneficial effects of this invention are at least as follows: 1. By placing the graphite boat as a whole on the carrier, disassembly can be completed conveniently and quickly without repeatedly moving the boat pieces, and the parts can be recycled at once, greatly reducing the workload of disassembly and improving efficiency; 2. After disassembly, the multiple parts are separated, and the carrier can place the parts in sections according to their acid-resistant / non-acid-resistant properties, and place them in the cleaning tank for section cleaning. In the acid washing step, the lower graphite parts are acid-washed, while the upper ceramic parts are not acid-washed. In the water washing step, pure water is used to clean the upper ceramic parts and then to clean the lower graphite parts, which achieves a good cleaning effect and extends the service life. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a three-dimensional schematic diagram of the cleaning carrier in this utility model;

[0020] Figure 2 This is a front sectional view of the cleaning carrier in this utility model;

[0021] Figure 3 This is a side sectional view of the cleaning vehicle in this utility model;

[0022] Figure 4 This is a three-dimensional schematic diagram of the cleaning tank in this utility model;

[0023] Figure 5 This is a front sectional view of the cleaning tank in this utility model.

[0024] The meanings of the various reference numerals in the figure are as follows:

[0025] Frame 1, pull-out panel 2, slot 3, sprinkler pipe 4;

[0026] Frame 11, bracket 12, support plate 13, clamping plate 14, parts cleaning plate 21, parts recycling plate 22, protruding strip 23, handle 24;

[0027] Second plate 211, washing tank 212, drain outlet 213, first plate 221, recycling tank 222, buffer layer 223. Detailed Implementation

[0028] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following description is only a preferred embodiment of the present invention and is not intended to limit the scope of the present invention.

[0029] The directional terms such as up, down, left, right, front, back, front, back, top, bottom, etc., mentioned or possibly mentioned in this specification are defined relative to the structure shown in the accompanying drawings. The terms "inner" and "outer" refer to the direction toward or away from the geometric center of a specific component, respectively. These are relative concepts and may therefore vary depending on their location and usage. Therefore, these or other directional terms should not be interpreted as restrictive terms.

[0030] As attached Figures 1-3 As shown, a graphite boat cleaning carrier includes a frame 1 and a pull-out plate 2 slidably mounted on the frame 1. The frame 1 includes a frame 11 formed by multiple connecting rods as edges to form a rectangle, a bracket 12 located at the corner of the frame 11 to support the pull-out plate 2, a support plate 13 located on the bottom surface of the frame 11 between the transverse connecting rods, and multiple clamping plates 14 located on the support plate 13 to limit the boat blades. The pull-out plate 2 includes a parts cleaning plate 21 located on the lower surface of the connecting rod on the top surface of the frame 11 and slidably connected to the bracket 12, and a parts recycling plate 22 located on the lower surface of the connecting rod on the bottom surface of the frame 11 and slidably connected to the bracket 12. The lower end of the pull-out plate 2 is provided with a protrusion 23 that cooperates with the bracket 12, and its side end is provided with a handle 24 for sliding the pull-out plate 2.

[0031] To ensure good cleaning results, the graphite boat is usually disassembled and transported before cleaning. The graphite boat cleaning carrier described in this utility model integrates the functions of both. First, the entire graphite boat is inserted between the clamping plates 14. Each pair of adjacent clamping plates forms a limiting clamp on a single boat blade, ensuring that the boat blade remains fixed on the support plate 13 even after components such as ceramic rods, nuts, and pads are disassembled, effectively preventing displacement and damage during the cleaning process. A parts recovery plate 22 is provided on the bracket 12 below the support plate 13. When the operator removes the components connecting the boat blade, the multiple pads, ceramic rings, and other components placed between the boat blades will naturally fall onto the parts recovery plate 22, eliminating the need for repeated collection by the operator. After disassembly is complete, the parts recovery plate 22 can be pulled out using the handle 24, transferring acid-sensitive components inside the plate to the parts cleaning plate. 21. The parts cleaning plate 21 is inserted into the upper bracket 12. The bracket 12 is a horizontal plate extending from the corner to the opposite direction to support the pull-out plate 2. Furthermore, the tail end of the extended end of the bracket 12 is provided with an upwardly extending fixed section, which, together with the protrusions 23 on both sides of the lower end of the pull-out plate 2, improves the support stability of the bracket. At this time, the disassembly of the graphite boat has been completed, and the parts are arranged in sections. The graphite boat cleaning carrier is moved to the cleaning tank of the cleaning equipment for cleaning. During the cleaning process, the height of the upper parts cleaning plate 21 is always higher than the liquid surface during acid washing to avoid corrosion of ceramic parts by hydrofluoric acid. During the later pure water cleaning, the liquid level should be above the parts cleaning plate 21, or the cleaning path should be set to flow into the tank after passing through the parts cleaning plate 21 to ensure that both types of parts can be washed with water.

[0032] As a preferred embodiment, the parts recycling plate 22 includes a first plate 221 disposed on the bracket 12 and slidably connected to the frame 11, a recycling trough 222 disposed on the first plate 221 for recycling parts that fall naturally after disassembly of the graphite boat, and a buffer layer 223 disposed on the bottom surface of the recycling trough 222.

[0033] In this embodiment, the recycling tank 222 is provided so that the recycling of parts will not be affected by the support plate 13, and the buffer layer 223 prevents the parts from being damaged by their own weight during the recycling process. The buffer layer 223 is preferably a neoprene rubber layer, which has low density, light weight, and certain softness and cushioning performance. In addition, if some of the disassembled parts need to be acid-washed, the parts recycling plate 22 also needs to enter the cleaning tank together with the carrier. Neoprene rubber can withstand 50%-60% of acid below 65°C and also has good acid resistance.

[0034] As a preferred embodiment, the parts cleaning plate 21 includes a second plate 211 slidably connected to the frame 11 and the bracket 12, a water washing tank 212 disposed on the second plate 211 for carrying ceramic parts, and a drain outlet 213 disposed on the side wall of the water washing tank 212 and connected to the outside.

[0035] In this embodiment, when the pure water cleaning process uses an upper spray or injection method, the parts cleaning plate, as the necessary path for the water flow, needs to flow into the cleaning tank of the cleaning equipment after cleaning the water washing tank 212. A drain outlet 213 is provided on the side of the water washing tank 212 to facilitate the flow of cleaning water. The drain outlet 213 needs to be located at a position slightly higher than the bottom surface of the water washing tank 212 to prevent upper parts from falling under the influence of the water flow.

[0036] As a preferred embodiment, the thickness of the clamping plate 14 is set to 10~12mm.

[0037] In this embodiment, the thickness of the boat blade spacing of the graphite boat usually varies depending on the specific application and design. The boat blade spacing of a conventional 19-blade graphite boat is usually 11mm. In some gradient structures, the boat blade spacing of the graphite boat adopts a gradient structure, which decreases from the outside to the center. Therefore, in order to ensure that the clamping plate can provide a stable limiting effect on the boat blades, the thickness of the clamping plate should be consistent with the boat blade spacing of the graphite boat to be supported.

[0038] As a preferred embodiment, a corrosion-resistant buffer layer is provided on the outer surface of the clamping plate 14.

[0039] In this embodiment, to prevent damage caused by direct contact between the clamping plate 14 and the boat blade, a corrosion-resistant buffer layer is provided on the surface of the clamping plate, preferably a neoprene rubber layer, which has a certain elasticity and can flexibly adapt to situations with certain spacing errors, and ensures the stability of the support.

[0040] As a preferred embodiment, the inner bottom surface of the recycling tank 222 is inclined at one corner.

[0041] In this embodiment, the inner bottom surface of the recycling tank 222 is tilted to one corner, which can improve the efficiency of recycling parts and facilitate rapid recycling after disassembly.

[0042] As attached Figures 4-5 As shown, this utility model also provides at least one graphite boat cleaning tank, including any of the above-mentioned graphite boat cleaning carriers, a slot 3 disposed on the bottom surface of the tank body for installing the bracket 12, and a spray pipe 4 disposed above the tank body, the spray pipe 4 being located above the part cleaning plate 21.

[0043] In this embodiment, the slot 3 provided on the bottom surface of the graphite boat cleaning tank can cooperate with the bracket 12, so that the carrier can be stably supported in the cleaning tank. Furthermore, the pure water is guided to the part cleaning plate by the spray pipe 4 to clean the ceramic parts, thereby improving the cleaning efficiency.

[0044] The spray pipe is existing technology well known to those skilled in the art, and will not be described in detail in this embodiment.

[0045] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of this utility model.

Claims

1. A graphite boat cleaning carrier, characterized in that: The system includes a frame (1) and a pull-out plate (2) slidably mounted on the frame (1); the frame (1) includes a frame (11) formed by multiple connecting rods as edges to form a rectangle, a bracket (12) at the corner of the frame (11) for supporting the pull-out plate (2), a support plate (13) on the bottom surface of the frame (11) located between the transverse connecting rods, and multiple clamps (14) on the support plate (13) for limiting the boat blade; the pull-out plate (2) includes a parts cleaning plate (21) on the lower surface of the connecting rod on the top surface of the frame (11) and slidably connected to the bracket (12), and a parts recycling plate (22) on the lower surface of the connecting rod on the bottom surface of the frame (11) and slidably connected to the bracket (12).

2. The graphite boat cleaning carrier according to claim 1, characterized in that: The parts recycling plate (22) includes a first plate (221) disposed on the bracket (12) and slidably connected to the frame (11), a recycling trough (222) disposed on the first plate (221) for recycling parts that fall naturally after disassembly of the graphite boat, and a buffer layer (223) disposed on the bottom surface of the recycling trough (222).

3. The graphite boat cleaning carrier according to claim 1, characterized in that: The parts cleaning plate (21) includes a second plate (211) that is slidably connected to the frame (11) and the bracket (12), a water washing tank (212) for carrying ceramic parts disposed on the second plate (211), and a drain outlet (213) disposed on the side wall of the water washing tank (212) and connected to the outside.

4. The graphite boat cleaning carrier according to claim 1, characterized in that: The thickness of the clamp (14) is set to 10~12mm.

5. A graphite boat cleaning carrier according to claim 1, characterized in that: A corrosion-resistant buffer layer is provided on the outer surface of the clamp (14).

6. A graphite boat cleaning carrier according to claim 2, characterized in that: The inner bottom of the recycling tank (222) is inclined at one corner.

7. A graphite boat cleaning carrier according to claim 1, characterized in that: The lower end of the pull-out plate (2) is provided with a protrusion (23) that cooperates with the bracket (12), and the side end is provided with a handle (24) for sliding the pull-out plate (2).

8. A graphite boat cleaning tank, comprising a graphite boat cleaning carrier according to any one of claims 1 to 7, and a slot (3) disposed on the bottom surface of the tank body for mounting the bracket (12).

9. A graphite boat cleaning tank according to claim 8, characterized in that: It also includes a spray pipe (4) disposed above the tank, the spray pipe (4) being located above the parts cleaning plate (21).

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