A vacuum thermal evaporation coating device

Abstract

The utility model provides a kind of vacuum thermal evaporation coating equipment, including base, vacuum chamber, upper cover, box, connecting column, vacuum pipeline;The base is equipped with sample stage, first vacuum pipe mouth, mounting lug;The sample stage is equipped with through-hole;The first vacuum pipe mouth is passed through the base, and it is located below the sample stage;The mounting lug is located in one side of the base;The vacuum chamber is equipped on the base;The upper cover is equipped with thermal evaporation source, it is suitable to be buckled with the vacuum chamber and form airtight space;The box is equipped below the base, and second vacuum pipe mouth is equipped on side wall;The vacuum pipeline is located in the box, one end is connected with the first vacuum pipe mouth, and the other end is connected with the second vacuum pipe mouth;The connecting column is rotatably connected with the upper cover in one end, and is connected with the mounting lug in the other end.The vacuum thermal evaporation coating equipment of the utility model can efficiently and sufficiently discharge gas in the vacuum chamber.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to a vacuum thermal evaporation coating equipment. Background Technology

[0002] Vacuum thermal evaporation coating is a process in which a heating evaporation source is heated under vacuum conditions, causing the substances in the evaporation source to evaporate and escape, forming a vapor flow in the vacuum chamber and diffusing into space. Finally, the vapor is deposited on the surface of the part, either by adhesion, condensation, or by a chemical reaction to form a thin film.

[0003] To create a vacuum environment within the vacuum chamber of a vacuum thermal evaporation coating process, external vacuum pumps or other vacuum-evaporating equipment are typically required. For example, the vacuum-evaporating mechanism and vacuum coating equipment disclosed in Chinese patent document CN115466936A have a connecting pipe on one side wall of the vacuum chamber, through which a pump assembly is connected. However, a sample stage is usually required within the vacuum chamber. During vacuum evaporation, the placement of the sample stage and similar structures can easily create dead zones in areas far from the extraction port, resulting in varying vacuum levels at different locations within the vacuum chamber and making it difficult to efficiently and completely remove the gas from the chamber. Utility Model Content

[0004] The present invention aims to provide a vacuum thermal evaporation coating equipment to solve the problem that the sample stage and other structures in the vacuum chamber of the existing vacuum thermal evaporation coating equipment are prone to forming dead corners, making it difficult to efficiently and fully exhaust the gas in the vacuum chamber.

[0005] To solve the above-mentioned technical problems, the technical solution of this utility model is as follows:

[0006] A vacuum thermal evaporation coating apparatus, comprising:

[0007] The base includes a sample stage, a first vacuum port, and mounting ears. The sample stage has a through hole. The first vacuum port passes through the base and is located below the sample stage. The mounting ears are located on one side of the base.

[0008] A vacuum chamber, wherein the vacuum chamber is disposed on the base;

[0009] The upper cover is provided with a heat evaporation source and is adapted to be fastened with the vacuum chamber to form a sealed space;

[0010] The housing is located below the base, and a second vacuum tube port is provided on its side wall;

[0011] A vacuum pipe is located inside the box, with one end connected to the first vacuum port and the other end connected to the second vacuum port;

[0012] A connecting post, one end of which is rotatably connected to the upper cover, and the other end of which is connected to the mounting ear.

[0013] Preferably, the base has a lower sealing groove at its edge, which is adapted to engage with the lower edge of the vacuum chamber.

[0014] Preferably, the base is further provided with an electrical interface; the electrical interface is located on the line connecting the sample stage and the connecting column.

[0015] Preferably, the edge of the upper cover is provided with an upper sealing groove, which is adapted to fit into the upper edge of the vacuum chamber.

[0016] Preferably, the upper end of the connecting column is provided with a mounting part, the mounting part including a hinge and a mounting base;

[0017] The mounting base includes a base plate, support plates disposed on both sides of the base plate, and a bottom plate disposed at the bottom of the support plates;

[0018] The hinge includes a pivot, a first leaf, and a second leaf;

[0019] The upper edge of the support plate is arc-shaped and connected to the rotating shaft; the first leaf is connected to the substrate and / or bottom plate; the second leaf is adapted to be connected to the top cover.

[0020] Preferably, the second leaf is connected to the top cover via a connecting seat;

[0021] One end of the connector is provided with a first fixing hole, which is suitable for connecting to the top cover, and the other end is connected to the second page.

[0022] Preferably, the connecting seat is rectangular in shape, and has a boss at one end of the first fixing hole and an arc-shaped surface at the other end.

[0023] Preferably, the bottom of the connecting column is provided with a bottom hole, which is suitable for installation and connection with the housing.

[0024] Preferably, the vacuum conduit includes a first conduit and a second conduit that are perpendicular to each other;

[0025] One end of the first pipe is connected to the first vacuum port, and the other end is connected to the second pipe; the end of the second pipe is connected to the second vacuum port.

[0026] Preferably, the vacuum conduit further includes a third conduit; the third conduit is located at the connection between the first conduit and the second conduit, and is located in the extending direction of the second conduit.

[0027] The above-described solution of this utility model has at least the following beneficial effects:

[0028] The vacuum thermal evaporation coating equipment of this utility model includes a base, a vacuum chamber, a top cover, a housing, a connecting column, and a vacuum pipe. The base is provided with a sample stage, a first vacuum port, and a mounting ear. The sample stage has a through hole. The first vacuum port penetrates the base and is located below the sample stage. The mounting ear is located on one side of the base. The vacuum chamber is located on the base. The top cover is provided with a thermal evaporation source, suitable for engaging with the vacuum chamber to form a sealed space. The housing is located below the base, and a second vacuum port is provided on its side wall. The vacuum pipe is located inside the housing, with one end connected to the first vacuum port and the other end connected to the second vacuum port. One end of the connecting column is rotatably connected to the top cover, and the other end is connected to the mounting ear. The vacuum thermal evaporation coating equipment of this utility model has a first vacuum port located below the sample stage, and the sample stage is provided with a through hole. When it is necessary to exhaust the gas in the vacuum chamber, the negative pressure field diffuses upward from the bottom. The negative pressure of the first vacuum port will cause some of the gas above the sample stage to flow downward through the through hole, forming a high-speed airflow that drives the surrounding dead corners, so that the gas around the sample stage can be extracted more fully, and the gas in the vacuum chamber can be discharged efficiently and fully.

[0029] In addition, the design of the base, vacuum chamber, top cover, box body, connecting column, and vacuum pipe is simple, reasonable in layout, and occupies little space. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the structure of the vacuum thermal evaporation coating equipment of this utility model;

[0031] Figure 2 This is a structural schematic diagram of the vacuum thermal evaporation coating equipment of this utility model without the housing installed;

[0032] Figure 3 This is a schematic diagram of the internal structure of the vacuum chamber of the vacuum thermal evaporation coating equipment of this utility model;

[0033] Figure 4 This is a perspective structural diagram of the vacuum thermal evaporation coating equipment of this utility model without the installed housing;

[0034] Figure 5 This is a schematic diagram of the internal structure of the vacuum thermal evaporation coating equipment of this utility model;

[0035] Figure 6 This is a schematic diagram showing the installation status of the connecting column and connecting seat of the vacuum thermal evaporation coating equipment of this utility model;

[0036] Figure 7 yes Figure 6 A structural schematic diagram of the connecting column and connecting seat from another perspective;

[0037] Figure 8 This is a schematic diagram showing the installation status of the base and connecting column of the vacuum thermal evaporation coating equipment of this utility model;

[0038] The components are as follows: 1. Base; 11. Sample stage; 12. First vacuum port; 13. Mounting ear; 14. Through hole; 15. Lower sealing groove; 16. Electrical interface; 17. Rotary motor; 2. Vacuum chamber; 3. Top cover; 31. Thermal evaporation source; 32. Upper sealing groove; 4. Box body; 41. Second vacuum port; 5. Vacuum pipe; 51. First pipe; 52. Second pipe; 53. Third pipe; 6. Connecting column; 61. Mounting part; 611. Base plate; 612. Support plate; 613. Base plate; 614. Rotating shaft; 615. First leaf; 616. Second leaf; 62. Bottom hole; 7. Connecting seat; 71. First fixing hole; 72. Boss. Detailed Implementation

[0039] Exemplary embodiments of the present invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this invention will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0040] An embodiment of this utility model proposes a vacuum thermal evaporation coating device, such as... Figure 1-8 As shown, it includes: base 1, vacuum chamber 2, top cover 3, box body 4, vacuum pipe 5, and connecting column 6.

[0041] The base 1 is provided with a sample stage 11, a first vacuum port 12, and a mounting ear 13; the sample stage 11 is provided with a through hole 14; the first vacuum port 12 penetrates the base 1 and is located below the sample stage 11; the mounting ear 13 is located on one side of the base 1; the vacuum chamber 2 is provided on the base 1; the upper cover 3 is provided with a thermal evaporation source 31, which is suitable for engaging with the vacuum chamber 2 to form a sealed space; the box body 4 is located below the base 1, and a second vacuum port 41 is provided on its side wall; the vacuum pipe 5 is located inside the box body 4, with one end connected to the first vacuum port 12 and the other end connected to the second vacuum port 41; one end of the connecting post 6 is rotatably connected to the upper cover 3, and the other end is connected to the mounting ear 13.

[0042] The vacuum thermal evaporation coating equipment described in this utility model, when it is necessary to exhaust the gas inside the vacuum chamber, such as... Figure 3 , 4As shown, the negative pressure field diffuses upward from the first vacuum port 12 of the base 1. The negative pressure of the first vacuum port 12 causes some of the gas above the sample stage 11 to flow downward through the through hole 14, forming a high-speed airflow that drives the surrounding dead corners, allowing the gas around the sample stage 11 to be extracted more fully, thus efficiently and completely discharging the gas in the vacuum chamber. In addition, the vacuum pipe 5 is located inside the housing 4 and does not occupy the space inside the vacuum chamber, and the second vacuum port 41 is located on the side wall of the housing 4, which facilitates the connection of the second vacuum port 41 to an external vacuum source (e.g., a vacuum pump).

[0043] The specific design of the sample stage 11 is not unique in order to achieve the purpose of this utility model. In this embodiment, the sample stage 11 can be designed as a hollow cylinder, with a sample tray for supporting the sample disposed on the top of the cylinder, and the through hole 14 disposed on the sample tray. The sample stage 11 can be a fixed sample stage or a movable sample stage. The hollow cylinder of the fixed sample stage is a fixed structure, fixed to the sample tray, and can serve to support and carry the sample. The movable sample stage can be equipped with a moving mechanism. For example, such as Figure 4 As shown, a rotary motor 17 can be installed inside the hollow structure of the cylinder. The rotary motor 17 is fixed inside the hollow structure of the cylinder, and its rotation axis is connected to the center position of the sample disk, so that the sample disk of the sample stage 11 can rotate under the drive of the rotary motor 17. In addition to the above-mentioned rotational movement method, multi-dimensional movement methods such as lifting and tilting can also be provided. Those skilled in the art can set up lifting mechanisms, tilt angle adjustment mechanisms, etc., according to actual needs.

[0044] In this embodiment, the specific design of the thermal evaporation source 31 is not unique, as long as it can heat the evaporation source material and cause it to evaporate and vaporize, it is acceptable. Those skilled in the art can design it according to actual needs. This embodiment provides a specific design method, such as... Figure 4 As shown, the thermal evaporation source 31 can be an electrode column. The evaporation source material is wound around the electrode column. By passing an electric current through the electrode column, the electrode column is heated, thereby causing the evaporation source material wound around the electrode column to evaporate and vaporize. The evaporation source material can be selected according to the material to be coated, including metallic and non-metallic materials. For example, when a carbon film is required, carbon rope is used as the evaporation source material.

[0045] It should be noted that the enclosure 4 can be a control box, used to install control panels and other structures. Those skilled in the art can also install other supporting structures inside the enclosure 4 as needed.

[0046] To ensure a tight seal between the base 1 and the vacuum chamber 2, in this embodiment, a lower sealing groove 15 is provided at the edge of the base 1, which is adapted to fit into the lower edge of the vacuum chamber 2. To ensure a tight seal between the upper cover 3 and the vacuum chamber 2, in this embodiment, an upper sealing groove 32 is provided at the edge of the upper cover 3, which is adapted to fit into the upper edge of the vacuum chamber 2. In this embodiment, the vacuum chamber 2 is cylindrical and is assembled with the base 1 and the upper cover 3 to form a sealed space.

[0047] As another embodiment of this utility model, such as Figure 8 As shown, the base 1 is also provided with an electrical interface 16; the electrical interface 16 is located on the connection line between the sample stage 11 and the connecting post 6. The electrical interface 16 refers to the mounting hole for an electrical connector. This design reduces wiring length and connection failures caused by vibration, improving connection stability. For example, when the sample stage 11 is a movable sample stage and a rotary motor is installed within the hollow structure of the cylinder, the wiring of the rotary motor 17 can be routed through the electrical interface 16.

[0048] For achieving the purpose of this utility model, the design of the connecting post 6 is not unique, as long as it can achieve a rotatable connection with the upper cover 3. In this embodiment, as shown... Figure 6-8 As shown, the upper end of the connecting column 6 is provided with a mounting part 61, which includes a hinge and a mounting base. The mounting base includes a base plate 611, support plates 612 disposed on both sides of the base plate 611, and a bottom plate 613 disposed at the bottom of the support plates 612. The hinge includes a pivot 614, a first leaf 615, and a second leaf 616. The upper edge of the support plate 612 is arc-shaped and connected to the pivot 614. The first leaf 615 is connected to the base plate 611 and / or the bottom plate 613. The second leaf 616 is adapted to be connected to the upper cover 3. With this configuration, the upper cover 3 and the connecting column 6 are rotatably connected by opening and closing the hinge. When the operator needs to take samples into the vacuum chamber 2, the vacuum chamber 2 can be opened by flipping the upper cover 3.

[0049] As a specific design method in this embodiment, the connection between the second page 616 and the upper cover 3 can be as follows: the second page 616 and the upper cover 3 are connected by a connecting seat 7; one end of the connecting seat 7 is provided with a first fixing hole 71, which is suitable for connecting with the upper cover 3, and the other end is connected with the second page 616.

[0050] The design of the connecting seat 7 is not unique in order to achieve the purpose of this utility model. In this embodiment, the connecting seat 7 is cuboid in shape, with a boss 72 at one end located at the first fixing hole 71, and an arc-shaped surface at the other end. This design makes the structure of the connecting seat 7 smaller and more compact, preventing the upper cover 3 from colliding with the connecting post 6 during the flipping process.

[0051] To facilitate the installation and connection of the connecting column 6 and the housing 4, the bottom of the connecting column 6 is provided with a bottom hole 62, which is suitable for installation and connection with the housing 4.

[0052] As a preferred design in this embodiment, such as Figure 5 As shown, the vacuum pipe 5 includes a first pipe 51 and a second pipe 52 that are perpendicular to each other; one end of the first pipe 51 is connected to the first vacuum port 12, and the other end is connected to the second pipe 52; the end of the second pipe 52 is connected to the second vacuum port 41. This layout is reasonable and can shorten the pipe path inside the vacuum thermal evaporation coating equipment without occupying space inside the vacuum chamber 2.

[0053] To facilitate functional expansion of the vacuum conduit 5, the vacuum conduit 5 further includes a third conduit 53; the third conduit 53 is located at the connection between the first conduit 51 and the second conduit 52, and is located in the extending direction of the second conduit 52. Figure 5 As shown, the first pipe 51, the second pipe 52, and the third pipe 53 are in an inverted T shape. The port of the third pipe 53 can be used as a functional interface to install monitoring instruments (such as vacuum gauges) on the pipe, or it can be used to connect with other equipment, such as a vacuum pump to form a dual pump system with the second vacuum port 41, or to connect to an inert gas generator.

[0054] The working process of the vacuum thermal evaporation coating equipment described in this utility model is as follows:

[0055] Before the coating process begins, the operator opens the cover 3, places the sample to be coated on the sample stage 11, closes the cover 3, and evacuates the vacuum chamber 2 by drawing a vacuum through the second vacuum port 41 connected to the vacuum pump. The air in the vacuum chamber 2 is then discharged sequentially through the first vacuum port 12, the first pipe 51, and the second pipe 52, thus creating a vacuum condition in the vacuum chamber 2.

[0056] During the coating process, the thermal evaporation source 31 heats the evaporation source material to evaporate and vaporize, and diffuses it into the vacuum chamber 2, depositing it onto the surface of the sample to be coated to form a thin film.

[0057] After the coating is completed, the vacuum chamber 2 is vented back to air until the pressure inside the vacuum chamber 2 is close to or reaches atmospheric pressure. Then, the cover 3 is opened and the coated sample is taken out.

[0058] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. A vacuum thermal evaporation coating equipment, characterized in that, include: A base (1) is provided with a sample stage (11), a first vacuum port (12), and a mounting ear (13); the sample stage (11) is provided with a through hole (14); the first vacuum port (12) passes through the base (1) and is located below the sample stage (11); the mounting ear (13) is located on one side of the base (1); Vacuum chamber (2), the vacuum chamber (2) is disposed on the base (1); The upper cover (3) is provided with a heat evaporation source (31) and is suitable for fastening with the vacuum chamber (2) to form a sealed space; Box (4), the box (4) is located below the base (1), and a second vacuum tube port (41) is provided on the side wall; Vacuum pipe (5), the vacuum pipe (5) is located inside the box (4), one end is connected to the first vacuum port (12), and the other end is connected to the second vacuum port (41); A connecting post (6) is provided, one end of which is rotatably connected to the upper cover (3), and the other end of which is connected to the mounting ear (13).

2. The vacuum thermal evaporation coating equipment according to claim 1, characterized in that, The base (1) is provided with a lower sealing groove (15) at its edge, and the lower sealing groove (15) is adapted to fit into the lower edge of the vacuum chamber (2).

3. The vacuum thermal evaporation coating equipment according to claim 1, characterized in that, The base (1) is also provided with an electrical interface (16); the electrical interface (16) is located on the line connecting the sample stage (11) and the connecting column (6).

4. The vacuum thermal evaporation coating equipment according to claim 1, characterized in that, The upper cover (3) is provided with an upper sealing groove (32) on its edge, and the upper sealing groove (32) is adapted to fit into the upper edge of the vacuum chamber (2).

5. The vacuum thermal evaporation coating equipment according to claim 4, characterized in that, The upper end of the connecting column (6) is provided with a mounting part (61), which includes a hinge and a mounting base; The mounting base includes a base plate (611), support plates (612) disposed on both sides of the base plate (611), and a bottom plate (613) disposed at the bottom of the support plates (612). The hinge includes a pivot (614), a first leaf (615), and a second leaf (616); The upper edge of the support plate (612) is arc-shaped and connected to the rotating shaft (614); the first leaf (615) is connected to the substrate (611) and / or the bottom plate (613); the second leaf (616) is adapted to be connected to the upper cover (3).

6. The vacuum thermal evaporation coating equipment according to claim 5, characterized in that, The second leaf (616) is connected to the upper cover (3) via a connecting seat (7); One end of the connecting seat (7) is provided with a first fixing hole (71) suitable for connecting with the upper cover (3), and the other end is connected with the second leaf (616).

7. The vacuum thermal evaporation coating equipment according to claim 6, characterized in that, The connecting seat (7) is rectangular in shape, and has a boss (72) at one end of the first fixing hole (71) and an arc-shaped surface at the other end.

8. The vacuum thermal evaporation coating equipment according to claim 1, characterized in that, The bottom of the connecting column (6) is provided with a bottom hole (62), which is suitable for installation and connection with the box body (4).

9. The vacuum thermal evaporation coating equipment according to claim 1, characterized in that, The vacuum conduit (5) includes a first conduit (51) and a second conduit (52) that are perpendicular to each other; One end of the first pipe (51) is connected to the first vacuum port (12), and the other end is connected to the second pipe (52); the end of the second pipe (52) is connected to the second vacuum port (41).

10. The vacuum thermal evaporation coating equipment according to claim 9, characterized in that, The vacuum conduit (5) further includes a third conduit (53); the third conduit (53) is located at the connection between the first conduit (51) and the second conduit (52), and is located in the extension direction of the second conduit (52).

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