A waste liquid cooling device
By integrating the cooling coils inside the collection tank with the process cooling water system, and combining temperature and level sensor control, the problem of equipment damage caused by direct discharge of high-temperature waste liquid without cooling is solved. This achieves efficient temperature control and safety monitoring, and improves the service life and heat exchange efficiency of the equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ULTRON SEMICON (SHANGHAI) CO LTD
- Filing Date
- 2025-05-14
- Publication Date
- 2026-06-23
AI Technical Summary
In existing technologies, direct discharge of high-temperature waste liquid without cooling will damage the plant's waste disposal system, and the limited temperature resistance range of PVC material will lead to equipment damage.
Design a cooling coil in the liquid collection tank that circulates with the process cooling water system, and combine a temperature sensor to control the drain valve to integrate liquid collection, cooling and draining functions. Use a polytetrafluoroethylene lining and a liquid level sensor for safety detection, and install an overflow tank and a leakage sensor to ensure temperature and liquid level control.
It achieves strict control over the cooling and discharge temperature of high-temperature waste liquid, avoids equipment damage, reduces equipment footprint, and improves heat exchange efficiency and safety.
Smart Images

Figure CN224398111U_ABST