Vacuum degassing device
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI SHIYU SEMICON EQUIP CO LTD
- Filing Date
- 2025-05-29
- Publication Date
- 2026-06-26
Smart Images

Figure CN224404454U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of degassing equipment technology, and in particular to a vacuum degassing device. Background Technology
[0002] Degassing is the process of removing or reducing gases from a substance to a desired level. It is an essential step in many industrial and laboratory applications and is a widely used process across various fields. Vacuum degassing, thermal degassing, and gas displacement are common degassing methods. The working principles of degassing include diffusion, evaporation, and adsorption. Applications of degassing include chemical laboratories, electronics manufacturing, and the medical industry. Degassing can improve product quality and reliability and reduce the damage caused by gases to substances.
[0003] However, existing degassing devices still have many shortcomings and defects in actual use, making it difficult to meet the actual application needs of continuous liquid medium transportation. Utility Model Content
[0004] The vacuum degassing device provided by this utility model aims to solve the shortcomings of existing vacuum degassing devices that cannot meet the practical application needs of continuous liquid transportation.
[0005] In a first aspect, this utility model provides a vacuum degassing device. The vacuum degassing device includes: a device body, the device body having a liquid-containing cavity formed inside, the device body having a top and a bottom that are opposite to each other along an axial direction; a plurality of connection interfaces, the connection interfaces being disposed on the top; and a maintenance interface, the maintenance interface being disposed on the bottom; wherein the connection interfaces include: a liquid input interface, a liquid output interface, and a vacuum pump interface.
[0006] Optionally, the device body is cylindrical, and the top of the device body includes: a first circular flange and a second circular flange; wherein the first circular flange and the second circular flange are fixedly connected to form the movable end of the vacuum degassing device; the first circular flange protrudes from the device body in the radial direction; the connection interface protrudes from the end face of the second circular flange in the axial direction.
[0007] Optionally, a notch is provided on the outer peripheral wall of the device body; wherein the maintenance interface protrudes from the device body through the notch along the radial direction.
[0008] Optionally, there are two liquid input interfaces and two liquid output interfaces, and one vacuum pump interface.
[0009] Optionally, the vacuum pump interface is located at the center of the end face of the top, and the two liquid input interfaces and the two liquid output interfaces are symmetrically arranged along the vacuum pump interface.
[0010] Optionally, a liquid level detection port is also provided at the bottom.
[0011] The beneficial effects of the vacuum degassing device provided in this embodiment are as follows: By setting a liquid receiving chamber inside the device body and providing multiple connection interfaces at the top of the device, liquid can enter from the top and be degassed under vacuum, with the degassed liquid exiting from the top. This effectively avoids the deposition or disturbance of air bubbles in the liquid pipeline, improving degassing efficiency and liquid purity. Moreover, the centralized connection interface design at the top simplifies pipeline connection and reduces installation height requirements, making it suitable for modular integration into continuous liquid conveying equipment.
[0012] In addition, the maintenance interface at the bottom allows users to clean, empty, or perform maintenance operations on the inside of the cavity without disassembling the main structure, significantly improving the maintainability, structural compactness, and ease of use of the equipment. Attached Figure Description
[0013] One or more embodiments are illustrated by way of example with reference to the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements having the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.
[0014] Figure 1 This is a schematic diagram of the vacuum degassing device according to an embodiment of the present invention;
[0015] Figure 2 This is a front view of the vacuum degassing device according to an embodiment of the present invention;
[0016] Figure 3 This is a top view of the vacuum degassing device according to an embodiment of the present invention;
[0017] Figure 4 This is a bottom view of the vacuum degassing device according to an embodiment of the present invention. Detailed Implementation
[0018] The present invention will now be described in detail with reference to specific embodiments. It should be emphasized that the following description is merely exemplary and is not intended to limit the scope and application of the present invention.
[0019] It should be noted that, unless otherwise expressly specified and limited, the terms "center," "longitudinal," "lateral," "upper," "lower," "vertical," "horizontal," "inner," and "outer," etc., used in this specification to indicate the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this utility model. The terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features; thus, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature; "multiple" means two or more; and "and / or" includes any and all combinations of one or more related listed items. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0020] In the process of transporting liquid media (such as liquid chemicals) through supply pipelines, the supply status of the liquid media is usually controlled through pressure or flow control. However, in actual applications, due to insufficient supply conditions, liquid level fluctuations, and insufficient vacuum, the supply status of the liquid media may be unstable or experience continuous flow.
[0021] To ensure a continuous and stable supply of liquid media, a carrier gas source is introduced into the conveying system as an additional driving force to propel the liquid media to the downstream target equipment. However, this gas-liquid mixed conveying method inevitably introduces some gas into the conveying system, forming a gas-liquid entrainment phenomenon, which in turn affects the stable operation of downstream equipment and may even cause problems such as cavitation, measurement errors, or abnormal reactions.
[0022] Accordingly, the applicant provides a vacuum degassing device. This vacuum degassing device is installed at the end of a liquid chemical supply line, for example, near the liquid inlet of the target equipment. It can remove entrained or dissolved gases before the liquid medium enters the target equipment, thereby ensuring that the supplied liquid has good continuity, purity, and pressure stability, meeting the liquid delivery requirements of high-standard process environments.
[0023] Figures 1 to 4 This is a schematic diagram of a vacuum degassing device provided in an embodiment of this application. Figures 1 to 4As shown, the vacuum degassing device includes: a device body 10, several connection interfaces 20 and maintenance interfaces 30.
[0024] The device body 10 has a liquid-containing cavity inside to hold the liquid to be degassed. The device body has a top 11 and a bottom 12 that are opposite to each other along the axial direction x, and is generally elongated.
[0025] The connection interface 20 is located on the top 11 of the device body. The connection interface 20 is an interface for connecting to the supply line, and it includes a liquid inlet interface 21, a liquid outlet interface 22, and a vacuum pump interface 23.
[0026] The maintenance interface 30 is located at the bottom 12 of the device body. It is used for the maintenance of the vacuum degassing device and for discharging the remaining waste gas and waste liquid after degassing.
[0027] Specifically, the device body 10 is cylindrical, with the top 11 being the movable end, protruding from the device body 10 in the radial direction.
[0028] The movable end is composed of a first circular flange 111 and a second circular flange 112 connected together. The first circular flange 111 protrudes outward from the outer periphery of the device body 10 by a certain distance.
[0029] The second circular flange 112 is fixedly connected to the first circular flange 111 by screws or other movable connecting parts. The aforementioned plurality of connection interfaces 20 are provided on the second circular flange 112, and protrude from the end face of the second circular flange 112 along the axial direction x.
[0030] This movable end structure design ensures a reliable sealed connection between the device body and external interface components, while also providing excellent disassembly and maintainability. When cleaning or maintenance is required, the device body can be easily removed from the second circular flange simply by loosening the flange connection, greatly improving maintenance efficiency and ease of operation.
[0031] In other embodiments, such as Figure 1 As shown, a notch 13 is provided on the outer peripheral wall of the device body 10. For example... Figure 2 As shown, the maintenance interface 30 protrudes from the device body via a notch 13 in the radial direction y. This protruding bottom interface 30 makes operation more convenient.
[0032] Preferably, a liquid level detection port can also be provided at the bottom of the device body 10 to detect and determine the liquid status in the liquid containment chamber of the device body, so as to ensure the stability and safety of the degassing process.
[0033] In some embodiments, such as Figure 3 As shown, there are two liquid input interfaces 21 and two liquid output interfaces 22, and one vacuum pump interface 23.
[0034] By setting two liquid input interfaces 21 and two liquid output interfaces 22, the functions of the vacuum degassing device are enriched, making it suitable for switching between the main channel and the bypass path, and also flexibly configured under different operating conditions or flow directions.
[0035] For example, one pair of liquid inlet ports 21 and liquid outlet ports 21 is used for degassing the liquid medium supplied to the main channel of the pipeline. Another pair of liquid inlet ports 21 and liquid outlet ports 21 is used as a bypass passage or for degassing the liquid medium supplied to another channel of the pipeline.
[0036] Alternatively, the other pair of liquid input ports 21 and liquid output ports 21 can also serve as a circulation return path or be used for maintenance operations such as device evacuation and flushing.
[0037] Specifically, these five connection interfaces are symmetrically arranged on the second circular flange. The vacuum pump interface 23 is located at the center of the second circular flange. A set of liquid inlet interfaces 21 and liquid outlet interfaces 22 are located on the same diameter of the second circular flange and are symmetrically arranged along the center.
[0038] Two liquid inlet ports 21 are symmetrically arranged along the diameter of the second circular flange, and two liquid outlet ports 22 are arranged along another diameter of the second circular flange. These two diameters are perpendicular to each other on the end face of the second circular flange.
[0039] The aforementioned connection interfaces form a "cross-shaped symmetrical" distribution structure on the end face of the second circular flange, which is beneficial for improving the adaptability to the supply pipeline layout and providing additional functional configurations.
[0040] In the actual vacuum degassing process, the liquid to be degassed enters the liquid containment chamber inside the device body through one of the liquid inlet ports 21.
[0041] Vacuum pump interface 23 is connected to a vacuum pump and operates continuously to create a vacuum environment within the cavity. As the cavity pressure decreases, the gas originally dissolved or entrained in the liquid in the liquid containment cavity gradually precipitates out.
[0042] The released gases are continuously extracted by the vacuum pump through vacuum pump interface 23 until degassing is complete. After degassing, the liquid is output from the corresponding liquid output interface 22 and enters the downstream target equipment.
[0043] In addition, during the vacuum degassing process, the detection equipment can also monitor the airtightness and positive pressure of the liquid container in real time through the aforementioned connection interface to ensure the smooth progress of vacuum degassing.
[0044] The above description, in conjunction with specific / preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. Those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and all of these fall within the protection scope of the present invention.
Claims
1. A vacuum degassing device, characterized in that, include: The device body has a liquid-containing cavity formed inside, and the device body has a top and a bottom that are opposite to each other along the axial direction; Several connection interfaces are located on the top. Maintenance interface, which is located at the bottom; The connection interfaces include: a liquid input interface, a liquid output interface, and a vacuum pump interface.
2. The vacuum degassing device according to claim 1, characterized in that, The device body is cylindrical, and the top of the device body includes: a first circular flange and a second circular flange; The first circular flange and the second circular flange are fixedly connected to form the movable end of the vacuum degassing device. The first circular flange protrudes from the device body in the radial direction; the connection interface protrudes from the end face of the second circular flange in the axial direction.
3. The vacuum degassing device according to claim 2, characterized in that, The outer peripheral wall of the device body has a notch; the maintenance interface protrudes from the device body through the notch along the radial direction.
4. The vacuum degassing device according to claim 3, characterized in that, There are two liquid input interfaces and two liquid output interfaces, and one vacuum pump interface.
5. The vacuum degassing device according to claim 4, characterized in that, The vacuum pump interface is located at the center of the end face of the second circular flange, and the two liquid input interfaces and the two liquid output interfaces are symmetrically arranged along the vacuum pump interface.
6. The vacuum degassing device according to claim 1, characterized in that, The bottom is also equipped with a liquid level detection port.