Semiconductor electronic special material ultrasonic circulating cleaning device

Abstract

The utility model discloses a kind of semiconductor electronics special material ultrasonic circulation cleaning devices, belong to semiconductor cleaning device technical field, including for supporting and fixed mounting plate, first support plate and second support plate are installed on the mounting plate, ultrasonic cleaning tank is installed on the first support plate, circulation filtering device is installed on the second support plate and mounting plate, overturning storage assembly is movably installed in the ultrasonic cleaning tank, the circulation filtering device is connected with ultrasonic cleaning tank through;Lifting piece moves up and down, can drive storage piece one and the one end of storage piece two to move up and down, the back-and-forth movement of the article needing to be cleaned in leaky net, improve cleaning efficiency, accelerate pollutant diffusion to cleaning fluid.

Description

Technical Field

[0001] This utility model belongs to the technical field of semiconductor cleaning devices, and in particular relates to an ultrasonic cyclic cleaning device for semiconductor electronic materials. Background Technology

[0002] The surface cleanliness of semiconductor electronic materials directly affects the yield and performance of chip manufacturing. Ultrasonic circulating cleaning devices, through the combination of ultrasonic cavitation effect and circulating filtration system, achieve efficient removal of micron-level contaminants from material surfaces and are key equipment in the front-end processes of semiconductor manufacturing. However, during ultrasonic cleaning, some semiconductor materials (such as silicon wafers and photomasks) have uneven structures (such as trenches and through-holes) on their surfaces. In a static state, ultrasonic cavitation bubbles cannot fully penetrate into the gaps due to fluid resistance, resulting in low cleaning efficiency. Moreover, after the particles adsorbed on the semiconductor material surface are detached under ultrasonic cavitation impact, if the material remains stationary, the detached contaminants are prone to redeposit on the semiconductor material. Therefore, an ultrasonic circulating cleaning device for semiconductor electronic materials is proposed, which can agitate the semiconductor material during cleaning to improve cleaning efficiency and accelerate the diffusion of contaminants into the cleaning solution. Utility Model Content

[0003] In view of the above situation and to overcome the defects of the prior art, this utility model provides an ultrasonic cyclic cleaning device for semiconductor electronic materials, which at least partially solves the above technical problems.

[0004] The technical solution adopted by this utility model is as follows: an ultrasonic circulating cleaning device for semiconductor electronic materials, including a mounting plate for support and fixation, a first support plate and a second support plate are mounted on the mounting plate, an ultrasonic cleaning box is mounted on the first support plate, a circulating filter device is mounted on the second support plate and the mounting plate, a flipping storage component is movably installed inside the ultrasonic cleaning box, and the circulating filter device is connected in a through connection with the ultrasonic cleaning box.

[0005] The ultrasonic cleaning box is provided in two sets, namely ultrasonic cleaning box one and ultrasonic cleaning box two, both of which are located on the upper wall of the first support plate.

[0006] The flipping storage assembly includes a first mounting component, a second mounting component, a lifting component, and a hydraulic rod. The first mounting component is located on the upper wall of the first ultrasonic cleaning chamber, and the second mounting component is located on the upper wall of the second ultrasonic cleaning chamber, with the first and second mounting components facing each other. The fixed end of the hydraulic rod is located between the first and second ultrasonic cleaning chambers, and the lifting component is located on the movable end of the hydraulic rod, with the lifting component facing the first and second mounting components respectively.

[0007] The mounting component 1 and mounting component 2 are each provided with a slot 1, the lifting component is provided with a slot 2, the slot 2 is located between the two sets of slot 1, the flipping storage component includes storage component 1 and storage component 2, the storage component 1 is movably disposed in slot 1 and slot 2 on the mounting component 1, and the storage component 2 is movably disposed in slot 1 and slot 2 on the mounting component 2.

[0008] Preferably, the storage component one and the storage component two have the same structure. Only one set will be described here. The storage component one includes a connecting rod one. The connecting rod one has two sets, which are respectively movably engaged in slot one and slot two. A strainer is installed between the connecting rods one. The strainer is a hollow structure with an open top. The strainer is movably installed in the ultrasonic cleaning box one. The items to be cleaned are placed in the strainer.

[0009] Furthermore, the upper wall of the mounting plate is also provided with a mounting base, on which a water pump is mounted. The output end of the water pump is connected to a delivery pipe, and the upper end of the delivery pipe is respectively connected to the bottom wall of ultrasonic cleaning box one and ultrasonic cleaning box two.

[0010] The circulating filtration device includes a filter element and a storage box. The storage box is located on the upper wall of the mounting plate, and the filter element is located on the upper wall of the second support plate. The filter element and the storage box are connected by a connecting pipe. A recovery pipe is installed at the inlet of the filter element. The upper end of the recovery pipe is connected to the bottom wall of ultrasonic cleaning box one and ultrasonic cleaning box two, respectively. The extraction end of the water pump is connected to the storage box.

[0011] The mounting plate has supporting feet on its bottom wall.

[0012] After adopting the above structure, the beneficial effects of this utility model are as follows: the lifting member moves up and down, which can drive one end of storage member one and storage member two to move up and down, and the items to be cleaned in the strainer move back and forth, which improves the cleaning efficiency and accelerates the diffusion of pollutants into the cleaning liquid.

[0013] Water from ultrasonic cleaning chambers 1 and 2 enters the filter element through the recovery pipe for filtration. The filtered water then enters the storage tank through the connecting pipe. The water pump draws water from the storage tank and delivers it to the ultrasonic cleaning chamber through the delivery pipe, facilitating the ultrasonic cleaning chamber to clean items that have leaked through the screen. Attached Figure Description

[0014] The accompanying drawings are provided to further understand the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation thereof.

[0015] Figure 1 This is a schematic diagram of the structure of an ultrasonic cyclic cleaning device for semiconductor electronic materials proposed in this utility model;

[0016] Figure 2 This is a perspective view of an ultrasonic cyclic cleaning device for semiconductor electronic materials proposed in this utility model;

[0017] Figure 3 This is a schematic diagram of the structure of the flipping storage component proposed in this utility model;

[0018] Figure 4 This is a schematic diagram of the installation of the hydraulic rod and lifting component proposed in this utility model.

[0019] In the attached diagram: 1. Mounting plate, 2. First support plate, 3. Second support plate, 4. Ultrasonic cleaning box one, 5. Ultrasonic cleaning box two, 6. Mounting component one, 7. Mounting component two, 8. Lifting component, 9. Hydraulic rod, 10. Slot one, 11. Slot two, 12. Storage component one, 13. Storage component two, 14. Connecting rod one, 15. Strainer, 16. Mounting base, 17. Water pump, 18. Delivery pipe, 19. Filter, 20. Storage box, 21. Recovery pipe, 22. Support foot. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0021] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0022] like Figures 1-4 As shown, an ultrasonic circulating cleaning device for semiconductor electronic materials includes a mounting plate 1 for support and fixation. A first support plate 2 and a second support plate 3 are mounted on the mounting plate 1. An ultrasonic cleaning chamber is mounted on the first support plate 2. A circulating filter device is mounted on the second support plate 3 and the mounting plate 1. A flipping storage assembly is movably installed inside the ultrasonic cleaning chamber. The circulating filter device is connected in communication with the ultrasonic cleaning chamber.

[0023] The ultrasonic cleaning chamber is provided in two sets, namely ultrasonic cleaning chamber one 4 and ultrasonic cleaning chamber two 5, both of which are located on the upper wall of the first support plate 2.

[0024] The flipping and storage assembly includes mounting component 6, mounting component 7, lifting component 8, and hydraulic rod 9. Mounting component 6 is located on the upper wall of ultrasonic cleaning chamber 4, and mounting component 7 is located on the upper wall of ultrasonic cleaning chamber 5. Mounting component 6 and mounting component 7 are placed opposite each other. The fixed end of the hydraulic rod 9 is located between ultrasonic cleaning chamber 4 and ultrasonic cleaning chamber 5. The lifting component 8 is located on the movable end of the hydraulic rod 9. The lifting component 8 is placed opposite to mounting component 6 and mounting component 7, respectively.

[0025] Both mounting component 6 and mounting component 7 are provided with slot 10, and lifting component 8 is provided with slot 21. Slot 211 is located between two sets of slot 10. The flipping storage assembly includes storage component 12 and storage component 23. Storage component 12 is movably disposed in slot 10 and slot 21 on mounting component 6, and storage component 23 is movably disposed in slot 10 and slot 21 on mounting component 7.

[0026] The storage component 12 and storage component 2 13 have the same structure. Only one set is described here. The storage component 12 includes a connecting rod 14. There are two sets of connecting rods 14, which are respectively movably engaged in slot 10 and slot 2 11. A strainer 15 is installed between the connecting rods 14. The strainer 15 is a cavity structure with an open top. The strainer 15 can be movably installed in the ultrasonic cleaning box 4. The items to be cleaned are placed in the strainer 15.

[0027] It should be noted that after the two ends of storage component 12 are movably connected to mounting component 6 and lifting component 8, and the two ends of storage component 2 13 are movably connected to mounting component 2 7 and lifting component 8, the ultrasonic cleaning box contains cleaning liquid, and the items to be cleaned in the strainer 15 are placed in the ultrasonic cleaning box. During the cleaning process, the hydraulic rod 9 can work, driving the lifting component 8 to move up and down. The lifting component 8 drives one end of storage component 12 and storage component 2 13 to move up and down, and the items to be cleaned in the strainer 15 move back and forth, improving the cleaning efficiency.

[0028] The upper wall of the mounting plate 1 is also provided with a mounting base 16, on which a water pump 17 is installed. The output end of the water pump 17 is connected to a delivery pipe 18, and the upper end of the delivery pipe 18 is connected to the bottom wall of ultrasonic cleaning box 4 and ultrasonic cleaning box 5 respectively.

[0029] The circulating filtration device includes a filter element 19 and a storage box 20. The storage box 20 is located on the upper wall of the mounting plate 1, and the filter element 19 is located on the upper wall of the second support plate 3. The filter element 19 and the storage box 20 are connected by a connecting pipe. A recovery pipe 21 is installed at the inlet of the filter element 19. The upper end of the recovery pipe 21 is connected to the bottom wall of the ultrasonic cleaning box 4 and the ultrasonic cleaning box 5 respectively. The extraction end of the water pump 17 is connected to the storage box 20.

[0030] It should be noted that a control valve is installed on the recovery pipe 21 to control whether the water in the ultrasonic cleaning box is filtered. When the control valve is opened, the water in ultrasonic cleaning box 4 and ultrasonic cleaning box 5 enters the filter element 19 through the recovery pipe 21 for filtration. The filtered water enters the storage box 20 through the connecting pipe. The water pump 17 draws water from the storage box 20 and delivers it to the ultrasonic cleaning box through the delivery pipe 18. The ultrasonic cleaning box cleans the items in the strainer 15.

[0031] The mounting plate 1 has support feet 22 on its bottom wall.

[0032] In practical use, the two ends of storage component 12 are movably connected to mounting component 6 and lifting component 8, and the two ends of storage component 2 13 are movably connected to mounting component 2 7 and lifting component 8. The ultrasonic cleaning box contains cleaning liquid, and the items to be cleaned in the strainer 15 are placed in the ultrasonic cleaning box. During the cleaning process, the hydraulic rod 9 can work to drive the lifting component 8 to move up and down. The lifting component 8 drives one end of storage component 12 and storage component 2 13 to move up and down, and the items to be cleaned in the strainer 15 move back and forth, which improves the cleaning efficiency.

[0033] A control valve is installed on the recovery pipe 21 to control whether the water in the ultrasonic cleaning box is filtered. When the control valve is opened, the water in ultrasonic cleaning box 4 and ultrasonic cleaning box 5 enters the filter element 19 through the recovery pipe 21 for filtration. The filtered water enters the storage box 20 through the connecting pipe. The water pump 17 draws water from the storage box 20 and delivers it to the ultrasonic cleaning box through the delivery pipe 18. The ultrasonic cleaning box cleans the items in the strainer 15.

[0034] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions, and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents. In conclusion, if those skilled in the art, inspired by this description, design similar structural methods and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. An ultrasonic circulating cleaning device for semiconductor electronic materials, characterized in that, It includes a mounting plate for support and fixation, on which a first support plate and a second support plate are mounted. An ultrasonic cleaning box is mounted on the first support plate, and a circulating filter device is mounted on the second support plate and the mounting plate. A flipping storage assembly is movably installed inside the ultrasonic cleaning box, and the circulating filter device is connected in communication with the ultrasonic cleaning box.

2. The ultrasonic cyclic cleaning device for semiconductor electronic materials according to claim 1, characterized in that, The ultrasonic cleaning chamber is provided in two sets, namely ultrasonic cleaning chamber one and ultrasonic cleaning chamber two, both of which are mounted on the upper wall of the first support plate.

3. The ultrasonic circulating cleaning device for semiconductor electronic materials according to claim 2, characterized in that, The flipping and storage assembly includes mounting component one, mounting component two, lifting component, and hydraulic rod. Mounting component one is located on the upper wall of ultrasonic cleaning chamber one, and mounting component two is located on the upper wall of ultrasonic cleaning chamber two, with mounting component one and mounting component two placed opposite each other. The fixed end of the hydraulic rod is located between ultrasonic cleaning chamber one and ultrasonic cleaning chamber two, and the lifting component is located on the movable end of the hydraulic rod, with the lifting component placed opposite to mounting component one and mounting component two respectively.

4. The ultrasonic circulating cleaning device for semiconductor electronic materials according to claim 3, characterized in that, Both mounting component one and mounting component two are provided with slot one, and the lifting component is provided with slot two. The slot two is located between the two sets of slot one. The flipping storage component includes storage component one and storage component two. Storage component one is movably disposed in slot one and slot two on mounting component one, and storage component two is movably disposed in slot one and slot two on mounting component two.

5. The ultrasonic circulating cleaning device for semiconductor electronic materials according to claim 4, characterized in that, The storage component one and storage component two have the same structure. The storage component one includes a connecting rod one, which has two sets and is respectively movably engaged in slot one and slot two. A mesh is installed between the connecting rods one. The mesh is a hollow structure with an open top and can be movably installed in the ultrasonic cleaning box one.

6. The ultrasonic circulating cleaning device for semiconductor electronic materials according to claim 2, characterized in that, The upper wall of the mounting plate is also provided with a mounting base, on which a water pump is installed. The output end of the water pump is connected to a delivery pipe, and the upper end of the delivery pipe is connected to the bottom wall of ultrasonic cleaning box one and ultrasonic cleaning box two respectively.

7. The ultrasonic circulating cleaning device for semiconductor electronic materials according to claim 6, characterized in that, The circulating filtration device includes a filter element and a storage box. The storage box is located on the upper wall of the mounting plate, and the filter element is located on the upper wall of the second support plate. The filter element and the storage box are connected by a connecting pipe. A recovery pipe is installed at the inlet of the filter element. The upper end of the recovery pipe is connected to the bottom wall of ultrasonic cleaning box one and ultrasonic cleaning box two, respectively. The extraction end of the water pump is connected to the storage box.

8. The ultrasonic circulating cleaning device for semiconductor electronic materials according to claim 1, characterized in that, The mounting plate has supporting feet on its bottom wall.

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