Processing and positioning device for a base frame of a semiconductor production apparatus

Abstract

The utility model relates to a kind of processing positioning device for semiconductor production equipment bottom frame, including turnover support and positioning mechanism, turnover support includes support frame, and two rotating seats are arranged oppositely and set on support frame;Positioning mechanism includes the positioning bottom frame installed between two rotating seats, and several positioning seats are set on positioning bottom frame, positioning seat includes backing plate, and positioning block is set on backing plate, the upper surface of backing plate is provided with the assembly slot same with the arrangement direction of its upper positioning block, and positioning block is set in corresponding assembly slot and can adjust installation position.The utility model can realize the quick, accurate positioning of each component, improve the positioning and welding machine efficiency, while guarantee the processing quality of bottom frame.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment processing technology, specifically relating to a processing and positioning device for the bottom frame of semiconductor manufacturing equipment. Background Technology

[0002] Semiconductor manufacturing equipment, such as LPCVD furnaces for semiconductor oxidation, is primarily used to deposit solid thin films on wafer surfaces. During production, the outer frame of this equipment requires initial fabrication, followed by the attachment of corresponding sealing plates. The bottom frame of the outer frame is typically assembled and rotated manually during fabrication, which not only affects welding efficiency but also compromises the perpendicularity and positional accuracy of individual components. Furthermore, deformation during welding is uncontrollable, directly impacting the final quality of the bottom frame. Utility Model Content

[0003] The purpose of this invention is to provide a processing and positioning device for the bottom frame of semiconductor manufacturing equipment to solve the problem of poor positioning accuracy of the bottom frame.

[0004] The processing and positioning device for the bottom frame of a semiconductor manufacturing equipment according to this utility model is implemented as follows:

[0005] A processing and positioning device for the bottom frame of a semiconductor manufacturing equipment, comprising:

[0006] A flip-up bracket includes a support frame and two rotating seats disposed on the support frame and arranged opposite to each other;

[0007] The positioning mechanism includes a positioning base frame installed between the two rotating seats, and a plurality of positioning seats disposed on the positioning base frame. Each positioning seat includes a pad and a positioning block disposed on the pad. The upper surface of the pad is provided with an assembly groove having the same arrangement direction as the positioning block above it. The positioning block is disposed in the corresponding assembly groove and its installation position can be adjusted.

[0008] Furthermore, the positioning block is provided with a countersunk threaded hole, and a locking bolt is installed in the countersunk threaded hole. The positioning block is fixed in the corresponding assembly slot by the locking bolt.

[0009] Furthermore, the positioning block includes an outer positioning block distributed in an octagon, and an inner positioning block arranged inside the octagon formed by the outer positioning block, wherein the inner positioning block is arranged longitudinally or laterally.

[0010] Furthermore, the inner positioning block includes two sets of first inner positioning blocks arranged laterally, two sets of second inner positioning blocks, and three sets of third inner positioning blocks arranged longitudinally.

[0011] Furthermore, the positioning base frame includes a rectangular outer frame surrounded by outer side beams, and inner beams located within the rectangular outer frame and arranged horizontally or vertically.

[0012] Furthermore, the support frame includes a bottom support frame and triangular brackets disposed at both ends of the bottom support frame, and the rotating seat is mounted on the top of the triangular brackets.

[0013] Furthermore, a T-shaped bracket is provided inside the triangular bracket.

[0014] Furthermore, an external reinforcing bracket is provided on the outer side of the triangular bracket.

[0015] Furthermore, the rotating seat includes a fixed sleeve fixed on the support frame and a rotating shaft rotatably fitted inside the fixed sleeve. The inner end of the rotating shaft is provided with a connecting plate, and the connecting plate is connected to both ends of the positioning base frame.

[0016] Furthermore, a fixed plate is provided at the inner end of the fixed sleeve, and a rotating plate located inside the fixed plate is provided on the rotating shaft. The fixed plate and the rotating plate are provided with corresponding locking holes, and a locking pin is installed in the locking hole.

[0017] After adopting the above technical solution, the beneficial effects of this utility model are as follows:

[0018] (1) By setting up an adjustable positioning block on the positioning mechanism, this utility model can achieve rapid and accurate positioning of various parts, improve positioning and welding efficiency, and ensure the processing quality of the bottom frame. (2) By setting up a flip bracket, this utility model can position the parts on the positioning mechanism and then rotate them as needed, so as to facilitate welding operations in various directions of the product, further improving welding efficiency. Attached Figure Description

[0019] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0020] Figure 1 This is a structural diagram of a processing and positioning device for the bottom frame of a semiconductor manufacturing equipment according to a preferred embodiment of the present invention;

[0021] Figure 2 This is a structural diagram from a first-view perspective of the positioning mechanism of the processing positioning device for the bottom frame of a semiconductor manufacturing equipment according to a preferred embodiment of this utility model;

[0022] Figure 3 This is a structural diagram from a second perspective of the positioning mechanism of the processing positioning device for the bottom frame of a semiconductor manufacturing equipment according to a preferred embodiment of this utility model;

[0023] Figure 4A structural diagram of the flip-up bracket of the processing positioning device for the bottom frame of semiconductor manufacturing equipment according to a preferred embodiment of the present invention;

[0024] Figure 5 A positioning diagram of the processing and positioning device for the bottom frame of a semiconductor manufacturing equipment according to a preferred embodiment of the present invention; In the diagram: flip bracket 1, bottom support frame 11, triangular bracket 12, T-shaped bracket 13, outer reinforcing bracket 14, fixing sleeve 15, rotating shaft 16, connecting plate 17, positioning pin 18, fixing plate 19, rotating plate 110, locking hole 111, locking pin 112, positioning mechanism 2, pad 21, assembly groove 22, positioning block 23, reinforcing support plate 24, countersunk threaded hole 25, rectangular outer frame 26, inner beam 27, connecting plate 28, bottom frame 3, outer rod 31, first inner rod 32, second inner rod 33, long inner rod 34, wide inner rod 35, short inner rod 36. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0026] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0027] like Figure 1-5 As shown, a processing positioning device for the bottom frame of a semiconductor manufacturing equipment includes a flipping bracket 1 and a positioning mechanism 2. The flipping bracket 1 includes a support frame and two rotating seats arranged opposite to each other on the support frame. The positioning mechanism 2 includes a positioning bottom frame installed between the two rotating seats and a plurality of positioning seats arranged on the positioning bottom frame. Each positioning seat includes a pad 21 and a positioning block 23 arranged on the pad 21. The upper surface of the pad 21 is provided with an assembly groove 22 with the same arrangement direction as the positioning block 23 above it. The positioning block 23 is arranged in the corresponding assembly groove 22 and its installation position can be adjusted.

[0028] The bottom frame 3 of this embodiment includes an octagonal outer frame surrounded by outer rods 31, and inner rods arranged horizontally or vertically within the octagonal outer frame. The inner rods include two first inner rods 32 arranged horizontally, two second inner rods 33 arranged horizontally, and three sets of third inner rods arranged vertically. One long inner rod 34 is provided among the third inner rods and is located between the first inner rods 32 and the second inner rods 33. Three wide inner rods 35 are provided among the third inner rods and are respectively located between the second inner rods 33 and the octagonal outer frame and between the two second inner rods 33. Two short inner rods 36 are provided among the third inner rods and are respectively located between the two second inner rods 33 and the octagonal outer frame.

[0029] The positioning block 23 is set on the side of the corresponding inner rod or outer rod 31 for positioning. The angle of the positioning block 23 is designed according to the direction of the object being positioned, and the direction of the assembly groove 22 is the same as the direction of the positioning block 23 inside it. This allows the positioning block 23 to be moved in the assembly groove 22 as needed to move the positioning block 23 to the most suitable positioning position. During this process, the assembly groove 22 plays a guiding and limiting role for the positioning block 23, thereby ensuring the accuracy of the positioning of the parts.

[0030] Preferably, in order to ensure the support strength of the pad 21, a reinforcing support plate 24 can be provided at the bottom of the pad 21.

[0031] After the positioning block 23 is moved into place, a countersunk threaded hole 25 is provided on the positioning block 23 to fix it. A locking bolt (not shown in the figure) is installed in the countersunk threaded hole 25. The positioning block 23 is fixed in the corresponding assembly slot 22 by the locking bolt.

[0032] Tighten the locking bolt downwards so that its lower end abuts against the bottom of the assembly groove 22, and the positioning block 23 is fixed by the friction between the two.

[0033] The number of countersunk threaded holes 25 on each positioning block 23 can be set according to the length of the positioning block 23. The longer the length, the more countersunk threaded holes 25 there are, which can better ensure the fixing effect of the positioning block 23.

[0034] In order to position the outer rod 31 and the inner rod respectively, the positioning block 23 includes an outer positioning block distributed in an octagon, and an inner positioning block arranged inside the octagon formed by the outer positioning block. The inner positioning block is arranged longitudinally or laterally.

[0035] The outer positioning block is set on the outside of the corresponding outer rod 31 to position the outer rod 31, and the inner positioning block is set on either side of the corresponding inner rod to position the inner rod.

[0036] In order to achieve the positioning of different inner rods, the inner positioning blocks include two sets of first inner positioning blocks arranged laterally, two sets of second inner positioning blocks, and three sets of third inner positioning blocks arranged longitudinally.

[0037] The first inner positioning block is located on the side of the first inner rod 32 to position the first inner rod 32; the second positioning block 23 is located on the side of the second inner rod 33 to position the second inner rod 33; and the third inner positioning blocks are respectively located on one side of the long inner rod 34, the wide inner rod 35 and the short inner rod 36 to position the three types of inner rods respectively.

[0038] To facilitate the arrangement of the pad 21 and various positioning blocks 23, the positioning base frame includes a rectangular outer frame 26 surrounded by outer beams, and inner beams 27 located within the rectangular outer frame 26 and arranged horizontally or vertically.

[0039] The inner beam 27 is arranged in a fishbone shape. The inner beam 27 includes a middle inner crossbeam and an end inner longitudinal beam located between the middle inner crossbeam and the rectangular outer frame 26. A side inner crossbeam is provided between the two end inner longitudinal beams on the same side. Multiple side inner longitudinal beams are provided between the side inner crossbeam and the rectangular outer frame 26 on both sides and the middle inner crossbeam. An end inner crossbeam is provided between the end inner longitudinal beam at one end and the rectangular outer frame 26.

[0040] To facilitate the support and fixation of the entire positioning mechanism 2, the support frame includes a bottom support frame 11 and triangular brackets 12 set at both ends of the bottom support frame 11, with a rotating seat installed on the top of the triangular brackets 12.

[0041] To increase the structural strength of the triangular bracket 12, a T-shaped bracket 13 is provided inside the triangular bracket 12.

[0042] To increase the stability of the entire support frame, an outer reinforcing bracket 14 is provided on the outside of the triangular bracket 12.

[0043] In order to enable the positioning mechanism 2 to rotate via the rotating seat to achieve welding of different positions of the parts, the rotating seat includes a fixed sleeve 15 fixed on the support frame and a rotating shaft 16 rotatably fitted inside the fixed sleeve 15. The inner end of the rotating shaft 16 is provided with a connecting plate 17, which is connected to both ends of the positioning base frame.

[0044] Specifically, the positioning base frame is provided with connecting plates 28 at both ends, and the connecting plate 17 and the connecting plate 28 are provided with corresponding mounting holes. By installing fastening bolts in the corresponding mounting holes, the positioning base frame and the entire positioning mechanism 2 can be fixed on the two rotating seats.

[0045] Preferably, the outer end of the rotating shaft 16 extends from the outer end of the fixed sleeve 15 and is fitted with a positioning pin 18, which can prevent the rotating shaft 16 from coming out of the fixed sleeve 15.

[0046] After the positioning mechanism 2 is rotated into place, a fixing plate 19 is provided at the inner end of the fixing sleeve 15 in order to fix it. A rotating plate 110 located inside the fixing plate 19 is provided on the rotating shaft 16. The fixing plate 19 and the rotating plate 110 are provided with corresponding locking holes 111, and a locking pin 112 is installed in the locking hole 111.

[0047] The locking holes 111 are arranged in a ring. After the product is rotated to an angle that is convenient for welding operation, the locking pin 112 is inserted into the corresponding locking holes 111 on the fixed plate 19 and the rotating plate 110 to lock the angle of the positioning mechanism 2, thereby facilitating the welding operation.

[0048] When welding the bottom frame 3, first rotate the positioning mechanism 2 to the horizontal direction and fix it with the locking pin 112. Then, place each component in the corresponding position and move the corresponding positioning block 23 for positioning. After the positioning block 23 is moved, fix its position with the locking bolt. At this time, welding can be performed on the connection points of each component. When welding the side, the angle of the positioning mechanism 2 can be rotated to rotate the side to be welded to the upward direction, which facilitates the welding operation.

[0049] This utility model has a simple overall structure and can achieve precise positioning of each component of the base frame 3, ensuring positioning accuracy and welding quality while improving welding efficiency. Based on the above-described ideal embodiment of this utility model, and through the above description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A processing and positioning device for the bottom frame of a semiconductor manufacturing equipment, characterized in that, include The flipping bracket (1) includes a support frame and two rotating seats disposed on the support frame and arranged opposite to each other; The positioning mechanism (2) includes a positioning base frame installed between the two rotating seats and a plurality of positioning seats set on the positioning base frame. The positioning seat includes a pad (21) and a positioning block (23) set on the pad (21). The upper surface of the pad (21) is provided with an assembly groove (22) with the same arrangement direction as the positioning block (23) above it. The positioning block (23) is set in the corresponding assembly groove (22) and can be adjusted in position.

2. The processing and positioning device for the bottom frame of semiconductor manufacturing equipment according to claim 1, characterized in that, The positioning block (23) is provided with a countersunk threaded hole (25), and a locking bolt is installed in the countersunk threaded hole (25). The positioning block (23) is fixed in the corresponding assembly slot (22) by the locking bolt.

3. The processing and positioning device for the bottom frame of semiconductor manufacturing equipment according to claim 1, characterized in that, The positioning block (23) includes an outer positioning block distributed in an octagon, and an inner positioning block arranged inside the octagon formed by the outer positioning block, wherein the inner positioning block is arranged longitudinally or laterally.

4. The processing and positioning device for the bottom frame of semiconductor manufacturing equipment according to claim 3, characterized in that, The inner positioning blocks include two sets of first inner positioning blocks arranged horizontally, two sets of second inner positioning blocks, and three sets of third inner positioning blocks arranged vertically.

5. The processing and positioning device for the bottom frame of semiconductor manufacturing equipment according to claim 1, characterized in that, The positioning base frame includes a rectangular outer frame (26) surrounded by outer side beams, and an inner beam (27) located within the rectangular outer frame (26) and arranged in a horizontal or vertical manner.

6. The processing and positioning device for the bottom frame of semiconductor manufacturing equipment according to claim 1, characterized in that, The support frame includes a bottom support frame (11) and triangular brackets (12) disposed at both ends of the bottom support frame (11), and the rotating seat is mounted on the top of the triangular brackets (12).

7. The processing and positioning device for the bottom frame of semiconductor manufacturing equipment according to claim 6, characterized in that, The triangular bracket (12) is provided with a T-shaped bracket (13) inside.

8. The processing and positioning device for the bottom frame of semiconductor manufacturing equipment according to claim 6, characterized in that, An external reinforcing bracket (14) is provided on the outside of the triangular bracket (12).

9. The processing and positioning device for the bottom frame of semiconductor manufacturing equipment according to claim 1, characterized in that, The rotating seat includes a fixed sleeve (15) fixed on the support frame and a rotating shaft (16) rotatably fitted inside the fixed sleeve (15). The inner end of the rotating shaft (16) is provided with a connecting plate (17), which is connected to both ends of the positioning base frame.

10. The processing and positioning device for the bottom frame of semiconductor manufacturing equipment according to claim 9, characterized in that, The inner end of the fixed sleeve (15) is provided with a fixed plate (19), and the rotating shaft (16) is provided with a rotating plate (110) located inside the fixed plate (19). The fixed plate (19) and the rotating plate (110) are provided with corresponding locking holes (111), and a locking pin (112) is installed in the locking hole (111).

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