Single crystal furnace

Abstract

The application relates to the technical field of single crystal silicon rod manufacturing, and provides a single crystal furnace, a first sub-chamber assembly of the single crystal furnace is used for pulling a crystal, a second cylinder body of a second sub-chamber assembly is movably connected with a furnace main body, the lower end of the second cylinder body can be sealingly docked with a furnace mouth, the diameter of the second cylinder body is greater than the outer diameter of a second crucible, the second crucible is arranged in the second cylinder body and is detachably hoisted on a crucible lifting mechanism, the outer diameter of the second crucible is smaller than the diameter of the furnace mouth, and the crucible lifting mechanism is configured to hoist and place the second crucible in the first crucible under the condition that the second cylinder body is docked with the furnace mouth. In this way, after the service life of the first crucible expires, the second cylinder body of the second sub-chamber assembly can be removed and docked with the furnace mouth of the furnace main body, then the second crucible containing silicon material can be placed in the first crucible through the crucible lifting mechanism, the replacement of the crucible can be realized, the production efficiency of a single crystal rod can be improved, and energy can be effectively saved and production cost can be reduced.

Description

Technical Field

[0001] This utility model relates to the field of single crystal silicon rod manufacturing technology, and in particular to a single crystal furnace. Background Technology

[0002] Currently, the production of monocrystalline ingots typically employs a method of pre-loading polycrystalline silicon material into high-purity quartz crucibles. Before heating the furnace, the crucible is hoisted into the monocrystalline furnace using tooling, and then the furnace is closed. After the silicon material in the crucible has completely melted, a quartz feeder is used to replenish the silicon material in the crucible.

[0003] However, when the quartz crucible reaches the end of its service life, tiny quartz particles detach from the crucible surface and escape, severely affecting the growth quality of single crystals. To solve this problem, the furnace must be shut down for cooling and cleaning, which is not only time-consuming but also significantly reduces the operating efficiency of the single crystal furnace. Furthermore, each time the furnace is shut down and restarted, the cooling and heating processes consume a large amount of heat energy, increasing production costs and wasting energy. Utility Model Content

[0004] This application provides a single crystal furnace.

[0005] This application is implemented as follows: the single crystal furnace in the embodiments of this application includes:

[0006] The furnace body has a furnace cavity and a furnace opening;

[0007] A first crucible is disposed inside the furnace cavity;

[0008] A furnace cover is disposed on the furnace opening and is movably connected to the furnace body. A throat is formed at the upper end of the furnace cover, and the diameter of the throat is smaller than the diameter of the furnace opening.

[0009] A first auxiliary chamber assembly, comprising a first cylindrical body and a crystal rod lifting mechanism, wherein the first cylindrical body is movably connected to the furnace body and located above the furnace cover, the lower end of the first cylindrical body is capable of sealingly engaging with the throat, and the crystal rod lifting mechanism is disposed on the first cylindrical body and used for lifting crystal rods; and

[0010] The second auxiliary chamber assembly includes a second cylinder, a crucible lifting mechanism, and at least one second crucible. The second cylinder is movably connected to the furnace body, and its lower end can dock with the furnace opening. The diameter of the second cylinder is larger than the outer diameter of the second crucible. The crucible lifting mechanism is disposed on the second cylinder, and the second crucible is disposed inside the second cylinder and detachably hoisted onto the crucible lifting mechanism. The outer diameter of the second crucible is smaller than the diameter of the furnace opening. The crucible lifting mechanism is configured to hoist the second crucible into the first crucible when the second cylinder docks with the furnace opening.

[0011] In some embodiments, the single crystal furnace includes a frame, the furnace body is mounted on the frame, the first cylinder is movably connected to the frame and can rotate or translate relative to the frame, and the second cylinder is also movably connected to the frame and can rotate or translate relative to the frame.

[0012] In some embodiments, the frame includes a base for mounting the furnace body and a support column disposed on the base, wherein both the first cylinder and the second cylinder are rotatably connected to the support column.

[0013] In some embodiments, the diameter of the second cylinder is larger than the diameter of the first cylinder.

[0014] In some embodiments, the crystal rod lifting mechanism includes a first drive assembly, a first reel, a first lifting rope, and a lifting head. The first drive assembly is mounted on the first cylinder, the first reel is connected to the first drive assembly, the first lifting rope is wound on the first reel, and the lifting head is suspended on the first lifting rope. The first drive assembly is used to drive the first reel to rotate, thereby driving the lifting head to move up and down within the first cylinder via the first lifting rope.

[0015] In some embodiments, the furnace body is provided with a first valve, which can selectively open or close the furnace opening, and the lower end of the first cylinder is provided with a second valve, which can selectively open or close the lower end of the first cylinder.

[0016] In some embodiments, the first valve includes a first valve seat and a first valve plate, the first valve seat is mounted on the furnace body, the first valve plate is movably mounted on the first valve seat, and the first valve plate is movable relative to the first valve seat to selectively open or close the furnace opening;

[0017] The second valve includes a second valve seat and a second valve plate. The second valve seat is mounted on the first cylinder, and the second valve plate is movably mounted on the second valve seat. The second valve plate can move relative to the second valve seat to selectively open or close the lower end of the first cylinder.

[0018] In some embodiments, the crucible lifting mechanism includes a second drive assembly, a second reel, a second lifting rope, and a hoisting component. The second drive assembly is mounted on the second cylinder, the second reel is connected to the second drive assembly, the second lifting rope is wound around the second reel, and the hoisting component is hoisted onto the second lifting rope. The hoisting component is used to hoist the second crucible, and the second drive assembly is used to drive the second reel to rotate, thereby driving the hoisting component and the second crucible to move up and down within the second cylinder via the second lifting rope.

[0019] With the second cylinder sealed and connected to the furnace opening, the second drive assembly can place the second crucible into the first crucible via the second reel, the second lifting rope, and the hoisting component.

[0020] In some embodiments, the lifting component includes a suction cup connected to the second lifting rope, the suction cup having an exhaust port, the second cylinder having a vacuum device connected to the exhaust port via a pipe, and the suction cup being used to adsorb the second crucible under the action of the vacuum device.

[0021] In some embodiments, the suction cup is disposed on the second crucible to form a closed cavity with the second crucible, and the vacuum device is used to evacuate the closed cavity so that the suction cup is adsorbed onto the second crucible.

[0022] In some embodiments, the lifting device includes a metal lifting net for supporting the second crucible. The shape of the metal lifting net matches the shape of the second crucible. The metal lifting net is connected to the second lifting rope. When the second crucible is placed inside the first crucible, the metal lifting net is located between the first crucible and the second crucible.

[0023] In some embodiments, the shape of the second crucible matches the shape of the first crucible so that the second crucible can be stacked inside the first crucible.

[0024] In some embodiments, the furnace cover is fixedly connected to the first cylinder or the furnace cover is movably connected to the first cylinder.

[0025] In the single crystal furnace of this application embodiment, the single crystal furnace includes a first sub-chamber assembly and a second sub-chamber assembly. The first sub-chamber assembly is used for crystal pulling. The second sub-chamber assembly includes a second cylinder, a crucible lifting mechanism, and at least one second crucible. The second cylinder is movably connected to the furnace body. The lower end of the second cylinder can be sealed and connected with the furnace opening. The diameter of the second cylinder is larger than the diameter of the first cylinder. The crucible lifting mechanism is disposed on the second cylinder. The second crucible is disposed in the second cylinder and detachably hoisted on the crucible lifting mechanism. The outer diameter of the second crucible is smaller than the diameter of the furnace opening. The crucible lifting mechanism is configured to hoist the second crucible into the first crucible when the second cylinder is connected and engaged with the furnace opening. Thus, after the first crucible inside the furnace body reaches the end of its service life, the first auxiliary chamber assembly and furnace cover can be removed. Then, the second cylinder of the second auxiliary chamber assembly can be connected to the furnace opening of the furnace body. The second crucible containing silicon material can then be placed inside the first crucible through the crucible lifting mechanism, thereby replacing the crucible without stopping the furnace, cooling down, and removing the first crucible. This can improve the production efficiency of single crystal rods. At the same time, since the first crucible does not need to be removed, there is no need for a long time of cooling down and then heating up again, which can effectively save energy and reduce production costs.

[0026] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of the single crystal furnace provided in the embodiments of this application;

[0028] Figure 2 This is a schematic diagram of the structure of the single crystal furnace provided in the embodiments of this application when the first auxiliary chamber assembly is sealed and connected with the furnace body;

[0029] Figure 3 This is a schematic diagram of the structure of the single crystal furnace provided in this application embodiment when the second auxiliary chamber assembly is sealed and connected with the furnace body;

[0030] Figure 4 This is a schematic diagram of the connection structure between the second crucible and the suction cup provided in an embodiment of this application;

[0031] Figure 5 This is a schematic diagram of the stacked structure of the first crucible and the second crucible provided in the embodiments of this application.

[0032] Explanation of key component symbols:

[0033] Single crystal furnace 100, furnace body 10, furnace cavity 11, furnace opening 12, first crucible 20, furnace cover 30, throat 31, first auxiliary chamber assembly 40, first cylinder 41, crystal rod lifting mechanism 42, first drive assembly 421, first lifting rope 423, lifting head 424, second auxiliary chamber assembly 50, second cylinder 51, crucible lifting mechanism 52, second drive assembly 521, second lifting rope 523, hoisting component 524, suction cup 525, exhaust port 5251, sealed cavity 5250, second crucible 53, pipe 54, vacuum device 55, frame 60, base 61, support column 62, first valve 70, first valve seat 71, first valve plate 72, second valve 80, second valve seat 81, second valve plate 82. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. Furthermore, it should be understood that the specific embodiments described herein are merely for explaining this application and are not intended to limit this application.

[0035] In the description of this application, it should be understood that the terms "length", "width", "upper", "lower", "lateral", "longitudinal", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0036] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified.

[0037] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0038] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0039] The following disclosure provides numerous different embodiments or examples for implementing various structures of this application. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of this application. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, various specific examples of processes and materials are provided in this application, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0040] Please see Figures 1-4 The single crystal furnace 100 in this application embodiment may include a furnace body 10, a first crucible 20, a furnace cover 30, a first sub-chamber assembly 40, and a second sub-chamber assembly 50.

[0041] The furnace body 10 can form a furnace cavity 11 and a furnace opening 12. The furnace opening 12 is located at the upper end of the furnace body 10. A first crucible 20 is placed in the furnace cavity 11 and is used to hold silicon material. A furnace cover 30 is disposed above the furnace body 10 and covers the furnace opening 12. The furnace cover 30 is movably connected to the furnace body 10, that is, the furnace cover 30 can move relative to the furnace body 10 to cover the furnace opening 12 or be moved away from the furnace opening 12 to open the furnace opening 12. When the furnace cover 30 is covering the furnace opening 12, the furnace cover 30 can be sealed and connected to the furnace body 10. The upper end of the furnace cover 30 forms a throat 31, which is used to connect to the lower end of the first cylinder 41 of the first auxiliary chamber assembly 40. The diameter of the furnace opening 12 is smaller than the throat 31 of the furnace opening 12.

[0042] The first auxiliary chamber assembly 40 may include a first cylindrical body 41 and a crystal rod lifting mechanism 42. The first cylindrical body 41 is movably connected to the furnace body 10 and located above the furnace cover 30. The first cylindrical body 41 can be sealed and connected with the throat 31. The crystal rod lifting mechanism is disposed on the first cylindrical body 41 and is used for lifting the crystal rod. Specifically, when the furnace cover 30 is sealed and connected with the furnace opening 12 of the furnace body 10 and the lower end of the first cylindrical body 41 is sealed and connected with the throat 31, the crystal rod lifting mechanism 42 can lift the crystal rod to realize the production of single crystal silicon rods.

[0043] The second auxiliary chamber assembly 50 may include a second cylinder 51, a crucible lifting mechanism 52, and at least one second crucible 53. The second cylinder 51 is movably connected to the furnace body 10, and its lower end can be sealed and connected to the furnace opening 12. That is, when the furnace cover 30 is not connected to the furnace opening 12 and the first cylinder 41 is moved to one side relative to the furnace body 10, the second cylinder 51 can move relative to the furnace body 10 to the top of the furnace body 10 to connect with it. The diameter of the second cylinder 51 is larger than the outer diameter of the second crucible 53 so that the second crucible 53 can move smoothly up and down in the second cylinder 51. The crucible lifting mechanism 52 is disposed on the second cylinder 51, and the second crucible 53 is disposed inside the second cylinder 51 and detachably suspended on the crucible lifting mechanism 52. The outer diameter of the second crucible 53 is smaller than the diameter of the furnace opening 12. The crucible lifting mechanism 52 is configured to suspend and place the second crucible 53 inside the first crucible 20 when the second cylinder 51 is connected to the furnace opening 12. That is to say, when the second cylinder 51 is connected to the furnace opening 12 of the furnace body 10, the crucible lifting mechanism 52 can drive the second crucible 53 to move downward so as to place the second crucible 53 containing silicon material into the first crucible 20 without removing the first crucible 20.

[0044] In the single crystal furnace 100 of this application embodiment, the single crystal furnace 100 includes a first sub-chamber assembly 40 and a second sub-chamber assembly 50. The first sub-chamber assembly 40 is used for crystal pulling. The second sub-chamber assembly 50 includes a second cylinder 51, a crucible lifting mechanism 52, and at least one second crucible 53. The second cylinder 51 is movably connected to the furnace body 10. The lower end of the second cylinder 51 can be sealed and connected with the furnace opening 12. The diameter of the second cylinder 51 is larger than the outer diameter of the second crucible 53. The crucible lifting mechanism 52 is disposed on the second cylinder 51. The second crucible 53 is disposed inside the second cylinder 51 and detachably hoisted on the crucible lifting mechanism 52. The outer diameter of the second crucible 53 is smaller than the diameter of the furnace opening 12. The crucible lifting mechanism 52 is configured to hoist the second crucible 53 into the first crucible 20 when the second cylinder 51 is connected and engaged with the furnace opening 12. Thus, after the service life of the first crucible 20 inside the furnace body 10 is exhausted, the first auxiliary chamber assembly 40 and the furnace cover 30 can be removed. Then, the second cylinder 51 of the second auxiliary chamber assembly 50 is connected to the furnace opening 12 of the furnace body 10. Then, the second crucible 53 containing silicon material is placed inside the first crucible 20 through the crucible lifting mechanism 52, thereby realizing the replacement of the crucible without stopping the furnace, cooling down and removing the first crucible 20. This can improve the production efficiency of single crystal rods. At the same time, since the first crucible 20 does not need to be removed, there is no need for long-term cooling and cooling followed by long-term heating, which can effectively save energy and reduce production costs.

[0045] In the embodiments of this application, both the first crucible 20 and the second crucible 53 can be quartz crucibles, and the furnace body 10, furnace cover 30, first cylinder 41, and second cylinder 51 can all be made of metal. The throat 31 on the furnace cover 30 refers to the narrowed channel formed at the upper end of the furnace cover 30, which is used to establish a sealed connection channel between the first auxiliary chamber assembly 40 and the furnace cavity 11. In this application, the first cylinder 41 can be fixedly connected to the furnace cover 30 or movably connected. That is to say, in some embodiments, the first cylinder 41 and the furnace cover 30 can be movably connected to the furnace body 10 independently, while in other embodiments, the first cylinder 41 and the furnace cover 30 can be fixedly connected together and both can be movably connected to the furnace body 10 simultaneously. No specific limitations are imposed here.

[0046] The first auxiliary chamber assembly 40 refers to an independent cavity structure with crystal pulling and ingot pulling functions. Specifically, the first cylinder 41 can be a cylindrical cavity, and the relative position of the first cylinder 41 and the furnace body 10 can be switched through a movable connecting mechanism. The ingot lifting mechanism 42 is installed on the first cylinder 41 and can move relative to the furnace body 10. The ingot lifting mechanism 42 can lift the ingot to completely lift the crystal formed by crystal pulling into the first cylinder 41.

[0047] The second auxiliary chamber assembly 50 is an independent cavity structure that has the function of placing the second crucible 53 on the first crucible 20. Specifically, the second cylinder 51 can also be a cylindrical cavity. The second cylinder 51 needs to accommodate the second crucible 53. Therefore, the diameter of the second cylinder 51 needs to be greater than the maximum outer diameter of the second crucible 53, so that the second crucible 53 can move freely up and down in the second cylinder 51 under the action of the crucible lifting mechanism 52, and can be accurately placed into the first crucible 20 when the second cylinder 51 corresponds to the furnace opening 12.

[0048] In this application, since the first auxiliary chamber assembly 40 is used for crystal pulling, when the furnace cover 30 is placed on the furnace opening 12, the furnace cover 30 needs to be sealed and connected with the furnace body. In some possible embodiments, a sealing ring can be used to achieve the sealed connection between the two. When the first cylinder 41 is connected with the throat 31, the two are also sealed and connected. In some possible embodiments, a sealing ring can also be used to achieve the sealed connection between the two.

[0049] In some embodiments, the diameter of the second cylinder 51 is larger than the diameter of the first cylinder 41. Thus, setting the first cylinder 41 to be smaller allows for offset crystal pulling, while setting the second cylinder 51 to be larger facilitates the entry and movement of the second crucible 53.

[0050] Specifically, when the furnace chamber 11 is in continuous operation, the first auxiliary chamber assembly 40 maintains a sealed environment through the throat 31 and performs conventional crystal pulling operations. When the service life of the first crucible 20 expires, the first auxiliary chamber assembly 40 can be removed and the second auxiliary chamber assembly 50 can be moved to the docking position at the furnace opening 12. Then, the prepared second crucible 53 is lowered into the first crucible 20 through the crucible lifting mechanism 52. Then, the second auxiliary chamber assembly 50 is removed and the first auxiliary chamber assembly 40 is moved to the docking position at the furnace opening 12 to continue crystal pulling.

[0051] Because the outer diameter of the second crucible 53 is smaller than that of the furnace opening 12, the second crucible 53 can smoothly pass through the furnace opening 12 into the furnace chamber 11 and finally be stacked inside the first crucible 20. This process can be completed with the second cylinder 51 and the furnace opening 12 in a sealed connection, preventing the furnace chamber 11 from being exposed to the external environment. It is easy to understand that in this application, the independent operation mode of the two sets of auxiliary chamber components allows the equipment to achieve continuous crystal pulling without the need for long-term cooling or replacement of the first crucible 20, without the need for long-term shutdown and cooling. Compared with the prior art, traditional single crystal furnaces are only equipped with a single pulling auxiliary chamber, and after the crucible reaches the end of its service life, the furnace needs to be shut down and cooled for a long time before the crucible needs to be replaced. However, by adding a dedicated crucible replacement chamber (i.e., the second chamber assembly 50), after the service life of the first crucible 20 has expired, the second crucible 53 can be directly placed inside the first crucible 20 through the second chamber assembly 50 without the need for a long furnace shutdown cooling and a long reheating process. This can improve crystal pulling efficiency, effectively increase equipment uptime, and avoid heat waste to save production costs.

[0052] Please see Figure 5 In the embodiments of this application, the shape of the second crucible 53 matches the shape of the first crucible 20 so that the second crucible 53 can be stacked inside the first crucible 20. This ensures the stability of the second crucible 53 within the first crucible 20 and effectively prevents excessive tilting of the second crucible 53.

[0053] Furthermore, it is easy to understand that in this application, multiple second crucibles 53 can be stacked inside the first crucible 20. That is, when the first crucible 20 reaches its lifespan limit, a second crucible 53 can be placed on the first crucible 20 via the second auxiliary chamber assembly 50 for continued crystal pulling. Subsequently, after the previous second crucible 53 reaches its lifespan limit, another second crucible 53 can be placed on top of the previous second crucible 53 via the second auxiliary chamber assembly 50 (e.g., ...). Figure 5 As shown in the figure, this forms a crucible-within-a-crucible scheme to achieve continuous crystal pulling.

[0054] Please see Figure 1 In some embodiments, the single crystal furnace 100 includes a frame 60, the furnace body 10 is fixedly installed on the frame 60, the first cylinder 41 is movably connected to the frame 60 and can rotate or translate relative to the frame 60, and the second cylinder 51 is also movably connected to the frame 60 and can rotate or translate relative to the frame 60.

[0055] In this way, the two auxiliary chamber components can be quickly switched with the furnace body 10, avoiding the traditional process of having to completely shut down the furnace for cooling, effectively shortening equipment maintenance time and reducing heat loss caused by furnace shutdown.

[0056] Specifically, the frame 60 refers to the supporting structure that carries the furnace body 10 and the auxiliary chamber assembly, and its function is to provide a stable installation foundation for the furnace body 10 and the auxiliary chamber assembly. The movable connection refers to a connection method that allows the auxiliary chamber assembly to change position relative to the frame 60. This can be achieved using a rotating hinge mechanism or a sliding rail mechanism, and its function is to achieve rapid docking or disengagement of the auxiliary chamber assembly with the furnace opening 12 through rotation or translation. The independent movable connection design of the first cylinder 41 and the second cylinder 51 allows the two sets of auxiliary chamber assemblies to be adjusted in position independently, avoiding operational interference.

[0057] Specifically, the frame 60 serves as the core support structure for fixing the furnace body 10. The first cylinder 41 and the second cylinder 51 are movably connected to the frame 60, forming a movable fit. Since both the furnace cover 30 and the first cylinder 41 can move independently relative to the furnace body 10, when the first crucible 20 reaches the end of its service life, both the first cylinder 41 and the furnace cover 30 move or rotate away from their working positions. The second cylinder 51, carrying the second crucible 53, moves or rotates to dock with the furnace opening 12, and then the crucible lifting mechanism 52 places the second crucible 53 into the first crucible 20. After the second cylinder 51 has placed the second crucible 53, it moves in the opposite direction away from the docking position. Then, the furnace cover 30 and the first cylinder 41 move in the opposite direction to return to their original state (the furnace cover 30 is sealed to the furnace opening 12, and the first cylinder 41 is sealed to the throat 31). During this process, the temperature inside the furnace chamber 11 does not need to be completely cooled, and the movable mechanical structure allows the switching action of the sub-chamber components to be performed quickly in a high-temperature environment. It is understandable that when the furnace cover 30 is fixedly connected to the first cylinder 41, the furnace cover 30 moves along with the first cylinder 41.

[0058] like Figure 1 As shown, in some embodiments, the frame 60 includes a base 61 for mounting the furnace body 10 and a support column 62 disposed on the base 61, and the first cylinder 41 and the second cylinder 51 are both rotatably connected to the support column 62.

[0059] Thus, the first cylinder 41 and the second cylinder 51 are respectively mounted on the support column 62 via a rotatable connection, allowing them to rotate independently around the axis of the support column 62. When it is necessary to switch the sub-chamber assembly, the target sub-chamber assembly is moved to the working position by rotation, while the other sub-chamber assembly is rotated to the non-working position, which can optimize the space utilization of the equipment.

[0060] Specifically, the base 61 refers to the basic structure that supports the furnace body 10. The base 61 provides fixed support for the furnace body 10 and distributes the load. The support column 62 refers to the column structure perpendicular to the base 61, which provides independent support points for the first cylinder 41 and the second cylinder 51. The rotatable connection refers to the connection between the first cylinder 41 and the second cylinder 51 and the support column 62 through bearings or rotating hinges. For example, in some embodiments, the first cylinder 41 and the second cylinder 51 and the support column 62 can be rotatably connected by a rotating shaft, allowing the auxiliary chamber assembly to rotate around the axis of the support column 62.

[0061] Please see Figure 2 In some embodiments, the crystal rod lifting mechanism 42 may include a first drive assembly 421, a first reel (not shown), a first lifting rope 423, and a lifting head 424. The first drive assembly 421 is mounted on the first cylinder 41, the first reel is connected to the first drive assembly 421, the first lifting rope 423 is wound on the first reel, and the lifting head 424 is suspended on the first lifting rope 423. The first drive assembly 421 is used to drive the first reel to rotate, thereby driving the lifting head 424 to move up and down within the first cylinder 41 via the first lifting rope 423.

[0062] Thus, the first drive component 421 can drive the lifting head 424 to move up and down within the first cylinder 41, thereby achieving automatic crystal pulling.

[0063] Specifically, in such embodiments, the first drive assembly 421 refers to a device that provides lifting power. For example, in some embodiments, the first drive assembly 421 can be implemented by a drive motor and a transmission assembly. The transmission assembly can be a gear reduction mechanism or other transmission structures, which are not limited here. The first drive assembly 421 can be directly fixed to the outer wall of the upper end of the first cylinder 41. The first reel refers to a rotating component that winds the lifting rope, such as a metal roller, which is coaxially connected to the output shaft of the first drive assembly 421 to realize the linear winding and unwinding of the first lifting rope 423. That is to say, the first reel can be installed on the output shaft of the first drive assembly 421, so that it is driven by the first drive assembly 421 to rotate and wind or unwind the first lifting rope 423. The first lifting rope 423 can be a high-temperature resistant rope such as a steel wire rope. The first lifting rope 423 refers to a flexible traction component that carries the lifting head 424, which can be implemented by a high-temperature resistant metal wire braided rope or carbon fiber rope, such as a steel wire rope, whose tensile strength matches the weight of the crystal rod.

[0064] In addition, in order to ensure the sealing during the crystal pulling process, the upper end of the first cylinder 41 is provided with a cylinder cover, and the first lifting rope 423 can pass through the cylinder cover and enter the first cylinder 41. The first lifting rope 423 and the cylinder cover can be sealed with magnetic fluid to ensure the sealing during the crystal pulling process.

[0065] In this embodiment, during the crystal pulling process, the first drive component 421 drives the first reel to rotate via the output shaft, causing the first lifting rope 423 wound on it to be wound up and down, thereby driving the lifting head 424 to move upward along the axis of the first cylinder 41. The lifting trajectory of the lifting head 424 is precisely adjusted by the speed control of the drive component to ensure that the crystal rod is pulled at a uniform speed during the growth process.

[0066] Please see Figure 3 In some embodiments, the crucible lifting mechanism 52 includes a second drive assembly 521, a second reel (not shown), a second lifting rope 523, and a hoisting member 524. The second drive assembly 521 is mounted on the second cylinder 51, the second reel is connected to the second drive assembly 521, the second lifting rope 523 is wound around the second reel, and the hoisting member 524 is hoisted on the second lifting rope 523. The hoisting member 524 is used to hoist the second crucible 53. The second drive assembly 521 is used to drive the second reel to rotate, thereby driving the hoisting member 524 and the second crucible 53 to move up and down in the second cylinder 51 through the second lifting rope 523. When the second cylinder 51 is sealed and connected to the furnace opening 12, the second drive assembly 521 can place the second crucible 53 in the first crucible 20 through the second reel, the second lifting rope 523, and the hoisting member 524.

[0067] Thus, the second crucible 53 can be driven up and down inside the second cylinder 51 by the second drive component 521 and placed inside the first crucible 20.

[0068] Specifically, in such embodiments, the second drive assembly 521 can be the same as the first drive assembly 421, which refers to a mechanical device that provides lifting power. For example, in some embodiments, the second drive assembly 521 can also be implemented by a drive motor and a transmission assembly. The transmission assembly can be a gear reduction mechanism or other transmission structures, which are not limited here. The second drive assembly 521 can be directly fixed to the outer wall of the upper end of the second cylinder 51.

[0069] The second reel refers to the rotating component, such as a metal roller, that winds the second lifting rope 523. It is coaxially connected to the output shaft of the second drive assembly 521, enabling the linear winding and unwinding of the second lifting rope 523. In other words, the second reel can be mounted on the output shaft of the second drive assembly 521, and thus driven by the second drive assembly 521 to rotate, thereby winding or unwinding the second lifting rope 523. The second lifting rope 523 is a flexible connecting component that bears the weight of the lifting component 524 and the crucible. Specifically, it can be implemented using a steel cable made of multiple strands of stainless steel wire, whose tensile strength must meet the load requirements under high-temperature environments. The second lifting rope 523 can be, for example, a steel wire rope.

[0070] Specifically, after the second cylinder 51 is sealed and connected with the furnace opening 12, the second drive assembly 521 is activated and drives the second reel to rotate. The vertical position of the lifting component 524 inside the second cylinder 51 is controlled by the raising and lowering of the lifting rope. During descent, the lifting component 524 carries the second crucible 53 through the furnace opening 12 into the furnace chamber 11, and finally places it precisely inside the first crucible 20. During this process, the sealed connection between the second cylinder 51 and the furnace opening 12 maintains an inert gas environment inside the furnace chamber 11, preventing outside air from entering. After placement, the lifting component 524 separates from the second crucible 53 and returns to the second cylinder 51 with the second lifting rope 523. At this time, the second cylinder 51 can detach from the furnace opening 12, freeing up space for subsequent operations.

[0071] In addition, to ensure the sealing during the crystal pulling process, the upper end of the second cylinder 51 is provided with a cylinder cover, and the second lifting rope 523 can pass through the cylinder cover and enter the second cylinder 51. The second lifting rope 523 and the cylinder cover can be sealed with magnetic fluid to ensure the sealing during the crystal pulling process.

[0072] Please see Figure 3 and Figure 4 In some embodiments, the lifting component 524 may include a suction cup 525, which is connected to the second lifting rope 523. The suction cup 525 is provided with an exhaust port 5251. The second cylinder 51 may be provided with a vacuum device 55, which is connected to the exhaust port 5251 through a pipe 54. The suction cup 525 is used to adsorb the second crucible under the action of the vacuum device 55.

[0073] Thus, by setting up the vacuum device 55 and the suction cup 525, the second crucible 53 can be fixed and adsorbed, thereby ensuring the stability of the second crucible 53 and the suction cup 525. After the second crucible 53 is stably placed in the first crucible 20, the vacuum can be broken by introducing air or inert gas through the vacuum device 55, so that the suction cup 525 can be separated from the second crucible 53.

[0074] Specifically, the suction cup 525 can be made of high-temperature resistant silicone material to form a ring-shaped hollow structure. This structure generates adsorption force through vacuum negative pressure, avoiding damage to the crucible surface caused by mechanical contact. The exhaust port 5251 refers to a connecting channel located inside the suction cup 525, which can be implemented as a through hole penetrating the body of the suction cup 525. This through hole is connected to the vacuum device 55 via a flexible pipe 54, establishing the airflow path required for negative pressure adsorption. The vacuum device 55 is a mechanical device that generates negative pressure. This device is independently mounted on a platform on the outer wall of the cylinder and can operate continuously and stably in high-temperature environments.

[0075] The pipe 54 can pass through the side wall or cover of the second cylinder 51 to connect with the external vacuum device 55. The pipe 54 and the second cylinder 51 can be sealed using magnetohydrodynamic sealing technology to ensure the sealing performance of the second cylinder 51. The pipe 54 can be a high-temperature resistant flexible pipe, and there are no specific restrictions here.

[0076] Further, please refer to Figure 4 In some embodiments, the suction cup 525 may be placed over the second crucible 53 to form a closed cavity 5250 with the second crucible 53, and the vacuum device 55 is used to evacuate the closed cavity 5250 so that the suction cup 525 is adsorbed onto the second crucible 53.

[0077] Thus, when the second crucible 53 needs to be placed, the vacuum device 55 is activated, creating a negative pressure within the sealed cavity 5250, thereby allowing the suction cup 525 to firmly hold the second crucible 53. Then, the second drive assembly 521 drives the second crucible 53 to gradually descend. During the descent, the vacuum device 55 continues to operate to maintain the suction force, preventing it from falling off due to pressure changes. Once the second crucible 53 reaches the target position, the vacuum is slowly released by controlling the valve, achieving a smooth detachment. This process requires no physical clamping device and is particularly suitable for crucibles made of easily damaged ceramic or quartz materials.

[0078] Of course, in some embodiments, the lifting member 524 may not employ the suction cup 525. For example, in some possible embodiments, the lifting member 524 includes a metal lifting net (not shown) for supporting the second crucible 53. The shape of the metal lifting net matches the shape of the second crucible 53, and the metal lifting net is connected to the second lifting rope 523. When the second crucible 53 is placed inside the first crucible 20, the metal lifting net is located between the first crucible 20 and the second crucible 53.

[0079] In this way, the second crucible 53 can also be hoisted and precisely placed using a metal hoisting net.

[0080] Specifically, the metal lifting mesh refers to a mesh structure made of metal materials, such as stainless steel or high-temperature alloys, with mesh sizes adjustable according to the crucible size. This structure evenly distributes the crucible's weight through a grid distribution. The "shape matching" refers to the metal lifting mesh's outline conforming to the shape of the second crucible 53. This can be achieved through a contour-following design, such as a ring-shaped support mesh at the bottom of the second crucible 53 and an arc-shaped covering mesh on the side walls. This design simultaneously supports the crucible's bottom and side walls, preventing tilting due to a shift in the center of gravity during lifting.

[0081] In such an embodiment, the second lifting rope 523 can be connected to the metal hoisting net via an automatic release device. After the second crucible 53 is in place, the automatic release device can automatically detach from the metal hoisting net as the second lifting rope 523 is released, thereby achieving accurate placement of the second crucible 53.

[0082] Please see Figure 2 In some embodiments, the furnace body 10 is provided with a first valve 70, which can selectively open or close the furnace opening 12, and the lower end of the first cylinder 41 is provided with a second valve 80, which can selectively open or close the lower end of the first cylinder 41.

[0083] Thus, when it is necessary to switch the sub-chamber assembly, the opening can be closed by the first valve 70 to prevent external air from entering the furnace chamber 11. After the second crucible 53 is placed, when further crystal pulling is to be performed, the lower end of the first cylinder 41 can be closed by the second valve 80 to evacuate the first cylinder 41 and fill it with inert gas.

[0084] Specifically, the first valve 70 refers to a sealing control device installed at the furnace opening 12 of the furnace body 10. It can be implemented using a structure where a movable valve plate and valve seat cooperate. The opening and closing of the furnace opening 12 is achieved through the translation or rotation of the valve plate relative to the valve seat. This first valve 70 can maintain the main furnace chamber 11 in a sealed state when the auxiliary chamber components are connected, preventing heat loss and the intrusion of external contaminants. For example, as... Figure 2 and Figure 3 As shown, in some embodiments, the first valve 70 may include a first valve seat 71 and a first valve plate 72. The first valve seat 71 is mounted on the furnace body 10, and the first valve plate 72 is movably mounted on the first valve seat 71. The first valve plate 72 can move relative to the first valve seat 71 to selectively open or close the furnace opening 12.

[0085] The second valve 80 refers to the isolation device located at the end of the second cylinder 51 of the first auxiliary chamber assembly 40. It can also be implemented using a structure where a movable valve plate and valve seat cooperate, opening and closing the lower end of the first cylinder 41 through the translation or rotation of the valve plate. This valve can close after the crystal is pulled into the second cylinder 51, thus creating an independent sealed space within the second cylinder 51. For example, as... Figure 2 As shown, in some embodiments, the second valve 80 includes a second valve seat 81 and a second valve plate 82. The second valve seat 81 is mounted on the first cylinder 41, and the second valve plate 82 is movably mounted on the second valve seat 81. The second valve plate 82 can move relative to the second valve seat 81 to selectively open or close the lower end of the first cylinder 41.

[0086] In some embodiments, the first valve seat 71 can be sealed to the lower end of the furnace cover 30, the second valve seat 81 can be sealed to the throat 31 of the furnace cover 30, and the lower end of the second cylinder 51 can be sealed to the first valve seat 71.

[0087] In this application, both the first valve 70 and the second valve 80 can be valves of the type of gate valve or rotary valve, and no specific limitation is made here.

[0088] The working principle of the single crystal furnace 100, including the first valve 70 and the second valve 80, will be introduced below:

[0089] When crystal pulling begins, the first crucible 20 contains silicon material, and the first auxiliary chamber assembly 40 and furnace cover 30 are in the working position (e.g., Figure 2 As shown, the furnace cover 30 is sealed to the furnace opening 12, and the first cylinder 41 is sealed to the throat 31 of the furnace cover 30. The single crystal furnace 100 is started, the first valve 70 and the second valve 80 are opened to perform vacuuming, the silicon material is heated to melt, and crystal pulling is performed continuously through the crystal rod lifting mechanism 42. When each crystal rod is pulled into the first cylinder 41, the first valve 70 and the second valve 80 are closed, the crystal rod is taken out, and when crystal pulling is performed again, the first cylinder 41 is first evacuated. When the pressure inside the first cylinder 41 is controlled to be basically consistent with the pressure inside the furnace body 10, the first valve 70 and the second valve 80 are opened, and then the second crystal pulling is performed, and so on.

[0090] After the first crucible 20 has reached the end of its service life, the second auxiliary chamber assembly 50 prepares for operation. The first valve 70 is closed, the furnace cover 30 and the first auxiliary chamber assembly 40 are moved from their working positions, and the second auxiliary chamber assembly 50 is moved to its working position so that the lower end of the second cylinder 51 is sealed and connected to the furnace opening 12 (e.g., Figure 3 As shown), the second cylinder 51 is evacuated (the second cylinder 51 is equipped with a vacuuming device for evacuating the second cylinder 51). When the pressure in the second cylinder 51 is basically consistent with the pressure inside the furnace body 10, the first valve 70 is opened. Then, the second crucible 53 is lowered from the furnace opening 12 and placed inside the first crucible 20 by the crucible lifting mechanism 52 and the second crucible 53 is released. Subsequently, the crucible lifting mechanism 52 is reset, the first valve 70 is closed, the second auxiliary chamber assembly 50 is moved from the working position, the furnace cover 30 and the first auxiliary chamber assembly 40 are reset to the working position so that the furnace cover 30 is sealed and connected with the furnace opening 12, the first cylinder 41 is sealed and connected with the throat 31, the second valve 80 is opened, the first cylinder 41 is evacuated, and when the pressure inside the first cylinder 41 is basically consistent with the pressure inside the furnace body 10, the first valve 70 is opened, and then the crystal pulling stage is entered again.

[0091] In the description of this specification, the use of terms such as "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., refers to specific features, structures, materials, or characteristics described in connection with the embodiments or examples, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0092] Furthermore, the above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A single crystal furnace characterized by comprising: include: The furnace body has a furnace cavity and a furnace opening; A first crucible is disposed inside the furnace cavity; A furnace cover is disposed on the furnace opening and is movably connected to the furnace body. A throat is formed at the upper end of the furnace cover, and the diameter of the throat is smaller than the diameter of the furnace opening. A first auxiliary chamber assembly, comprising a first cylindrical body and a crystal rod lifting mechanism, wherein the first cylindrical body is movably connected to the furnace body and located above the furnace cover, the lower end of the first cylindrical body is capable of sealingly engaging with the throat, and the crystal rod lifting mechanism is disposed on the first cylindrical body and used for lifting crystal rods; and The second auxiliary chamber assembly includes a second cylinder, a crucible lifting mechanism, and at least one second crucible. The second cylinder is movably connected to the furnace body, and its lower end can dock with the furnace opening. The diameter of the second cylinder is larger than the outer diameter of the second crucible. The crucible lifting mechanism is disposed on the second cylinder, and the second crucible is disposed inside the second cylinder and detachably hoisted onto the crucible lifting mechanism. The outer diameter of the second crucible is smaller than the diameter of the furnace opening. The crucible lifting mechanism is configured to hoist the second crucible into the first crucible when the second cylinder docks with the furnace opening.

2. The single crystal furnace of claim 1, wherein The single crystal furnace includes a frame, the furnace body is mounted on the frame, the first cylinder is movably connected to the frame and can rotate or translate relative to the frame, and the second cylinder is also movably connected to the frame and can rotate or translate relative to the frame.

3. The single crystal furnace of claim 2, wherein The frame includes a base for mounting the furnace body and a support column disposed on the base, wherein both the first cylinder and the second cylinder are rotatably connected to the support column.

4. The single crystal furnace according to claim 1, characterized in that, The diameter of the second cylinder is larger than the diameter of the first cylinder.

5. The single crystal furnace according to claim 1, characterized in that, The crystal rod lifting mechanism includes a first drive assembly, a first reel, a first lifting rope, and a lifting head. The first drive assembly is mounted on the first cylinder, the first reel is connected to the first drive assembly, the first lifting rope is wound on the first reel, and the lifting head is suspended on the first lifting rope. The first drive assembly is used to drive the first reel to rotate, thereby driving the lifting head to move up and down in the first cylinder through the first lifting rope.

6. The single crystal furnace according to claim 1, characterized in that, The furnace body is provided with a first valve, which can selectively open or close the furnace opening. The lower end of the first cylinder is provided with a second valve, which can selectively open or close the lower end of the first cylinder.

7. The single crystal furnace according to claim 6, characterized in that, The first valve includes a first valve seat and a first valve plate. The first valve seat is mounted on the furnace body, and the first valve plate is movably mounted on the first valve seat. The first valve plate can move relative to the first valve seat to selectively open or close the furnace opening. The second valve includes a second valve seat and a second valve plate. The second valve seat is mounted on the first cylinder, and the second valve plate is movably mounted on the second valve seat. The second valve plate can move relative to the second valve seat to selectively open or close the lower end of the first cylinder.

8. The single crystal furnace according to claim 1, characterized in that, The crucible lifting mechanism includes a second drive assembly, a second reel, a second lifting rope, and a hoisting component. The second drive assembly is mounted on the second cylinder, the second reel is connected to the second drive assembly, the second lifting rope is wound around the second reel, and the hoisting component is hoisted onto the second lifting rope. The hoisting component is used to hoist the second crucible, and the second drive assembly is used to drive the second reel to rotate, thereby driving the hoisting component and the second crucible to move up and down within the second cylinder via the second lifting rope. With the second cylinder sealed and connected to the furnace opening, the second drive assembly can place the second crucible into the first crucible via the second reel, the second lifting rope, and the hoisting component.

9. The single crystal furnace according to claim 8, characterized in that, The lifting component includes a suction cup connected to the second lifting rope. The suction cup has an exhaust port. The second cylinder has a vacuum pumping device connected to the exhaust port via a pipe. The suction cup is used to adsorb the second crucible under the action of the vacuum pumping device.

10. The single crystal furnace according to claim 9, characterized in that, The suction cup is placed on the second crucible to form a closed cavity with the second crucible, and the vacuum device is used to evacuate the closed cavity so that the suction cup is adsorbed on the second crucible.

11. The single crystal furnace according to claim 8, characterized in that, The lifting device includes a metal lifting net for supporting the second crucible. The shape of the metal lifting net matches the shape of the second crucible. The metal lifting net is connected to the second lifting rope. When the second crucible is placed inside the first crucible, the metal lifting net is located between the first crucible and the second crucible.

12. The single crystal furnace according to claim 1, characterized in that, The shape of the second crucible matches the shape of the first crucible so that the second crucible can be stacked inside the first crucible.

13. The single crystal furnace according to claim 1, characterized in that, The furnace cover is either fixedly connected to the first cylinder or movably connected to the first cylinder.

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