A eutectic assembly shaft with a replaceable nozzle

Abstract

The utility model relates to the technical field of integrated circuit chip processing especially relates to a eutectic mounting shaft of quick change suction nozzle. Including drive part, fixed base, sensor component, quick change seat and suction nozzle component. Drive part fixed mounting is in fixed base, and its output shaft is connected with sensor component, is used for driving sensor component rotation. One end of quick change seat is connected with sensor component, and the other end is connected through quick change connecting piece between suction nozzle component. Quick change seat and quick change connecting piece between are detachable connection. The eutectic mounting shaft of quick change suction nozzle provided by the utility model is detachable connection between quick change seat and quick change connecting piece, when the suction nozzle appears abrasion or other reasons need to replace, need not to take down the whole paster shaft, only need to replace the part below quick change seat, and such structure makes suction nozzle component can be quickly and conveniently replaced. The time needed for replacing suction nozzle component is greatly shortened, and production efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the technical field of integrated circuit chip processing, and in particular to a eutectic mounting shaft with a quick-change nozzle. Background Technology

[0002] Eutectic bonding typically involves placing an integrated circuit chip on a substrate chip holder that has been coated with a gold film, and then heating it to approximately 425°C. Gold and silicon inter-diffusion form a bond. Eutectic bonding is usually carried out in a hot nitrogen-protected environment to prevent silicon oxidation at high temperatures. Before the reaction, the substrate and chip need to be subjected to mutual friction to remove the silicon oxide layer, increase the wetting of the reaction liquid surface, reduce the thermal conductivity of the bond, and also avoid the integrated circuit chip from cracking and being damaged due to uneven stress distribution.

[0003] As chip integration becomes increasingly sophisticated, the precision of chip mounting also increases. Currently, several challenges remain in the mounting process: Continuous mounting often requires high-speed, high-frequency movement of the mounting axis, leading to rapid wear of the nozzle assembly. Each nozzle replacement necessitates disassembling the mounting axis, which is inconvenient and reduces processing efficiency. Furthermore, to ensure stable mounting and prevent damage to the substrate from excessive pressure, real-time pressure monitoring is necessary. This requires a pressure sensor that deforms along the mounting axis. The current problem is that excessive deformation of the pressure sensor can cause significant displacement of the nozzle mounting point, resulting in a substantial decrease in mounting accuracy. Utility Model Content

[0004] (a) Technical problems to be solved

[0005] This invention provides a eutectic mounting shaft with a quick-change nozzle, aiming to solve the problems of low efficiency caused by nozzle assembly replacement and excessive nozzle position variation caused by pressure sensor deformation.

[0006] (II) Technical Solution

[0007] To achieve the above objectives, this utility model proposes a eutectic bonding shaft with a quick-change nozzle. The eutectic bonding shaft includes a drive component, a fixed base, a sensor assembly, a quick-change base, and a nozzle assembly. The drive component is fixedly mounted on the fixed base, and its output shaft is connected to the sensor assembly to drive the sensor assembly to rotate. One end of the quick-change base is connected to the sensor assembly, and the other end is connected to the nozzle assembly via a quick-change connector. The quick-change base and the quick-change connector are detachably connected.

[0008] A further technical solution involves the sensor assembly comprising a flexible telescopic mechanism, a base plate, a sensor, and a sensor mounting bracket. The base plate is fixed to the bottom of the flexible telescopic mechanism and is fixedly connected to the top surface of the sensor. The flexible telescopic mechanism is capable of moving the base plate axially along the eutectic mounting axis. The sensor mounting plate is fixedly connected to the bottom surface of the sensor, and a gap exists between the mounting plate and the sensor, the gap providing space for sensor deformation.

[0009] A further technical solution is that the flexible telescopic mechanism includes a base, a sliding block, a first spring, and a second spring; the sliding block is disposed inside the base and connected to the base via a linear mechanism, and the sliding block can slide along the axial direction of the base. The base is connected to the output shaft of the driving member, which can drive the sliding block to rotate. The first spring is disposed between the base and the top surface of the sliding block, and the second spring is disposed between the base and the bottom surface of the sliding block.

[0010] A further technical solution is that the linear mechanism is a cross roller guide mechanism, which can restrict the rotation of the sliding block within the base.

[0011] A further technical solution is that the bottom surface of the quick-change seat is provided with a groove, and the quick-change connector has a fixing part above it. The fixing part is inserted into the groove and is fixed by a locking member located on the side of the quick-change seat.

[0012] A further technical solution is that the quick-change base has positioning holes at the four corners of its bottom surface, and a positioning pin is provided on the quick-change connector corresponding to the positioning holes to position the relative position between the quick-change base and the quick-change connector.

[0013] A further technical solution is that the nozzle assembly includes a heat insulation component and a nozzle; one end of the heat insulation component is connected to the quick-change connector, and the other end is connected to the nozzle, and the heat insulation component and the quick-change connector are detachably connected.

[0014] A further technical solution involves providing a first air pipe connector and a second air pipe connector on the side of the quick-change seat, both of which are connected to a negative pressure source. The heat insulation component internally has a first gas pipeline and a second gas pipeline. The two ends of the first gas pipeline are respectively connected to the suction hole of the nozzle and the first air pipe connector for absorbing the mounting material; the second gas pipeline is connected to the second air pipe connector for absorbing the nozzle and fixing it to the heat insulation component.

[0015] A further technical solution is that a heater is provided near the mounting position of the heat insulation component.

[0016] (III) Beneficial Effects

[0017] The beneficial effects of this invention are as follows: Through the detachable connection between the quick-change base and the quick-change connector, when the nozzle needs to be replaced due to wear or other reasons, it is not necessary to remove the entire patch shaft; only the part below the quick-change base needs to be replaced. This structure allows for quick and convenient replacement of the nozzle assembly, significantly reducing the time required for nozzle assembly replacement and improving production efficiency.

[0018] The mounting bracket is used to install the entire mounting shaft into the equipment. It can effectively provide support, ensure that the drive can accurately control the rotation of the sensor assembly, and facilitate the flipping of the material to be mounted during the chip mounting process.

[0019] The sensor assembly can detect the pressure during the placement process in real time, and adjust the stroke of the placement axis according to the detected pressure. This helps to improve placement accuracy and avoid the problem of increased scrap rate caused by excessive or insufficient pressure during the placement process. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of the eutectic mounting shaft with a quick-change nozzle in the embodiment.

[0021] Figure 2 This is a side view of the eutectic mounting shaft of the quick-change nozzle in the embodiment.

[0022] Figure 3 This is a schematic diagram of another side of the eutectic mounting shaft of the quick-change nozzle in the embodiment;

[0023] Figure 4 for Figure 1 Detailed diagram of the lower part.

[0024] [Explanation of Labels in the Attached Image]

[0025] 1: Driving component; 2: Fixing base; 3: Sensor assembly; 31: Flexible telescopic mechanism; 311: Base; 312: Sliding block; 313: First spring; 314: Second spring; 32: Base plate; 33: Sensor; 34: Sensor fixing component; 4: Quick-change seat; 41: Groove; 42: Second air pipe connector; 5: Nozzle assembly; 51: Heat insulation component; 52: Nozzle; 6: Quick-change connector; 61: Fixing part; 7: Locking component. Detailed Implementation

[0026] To better explain and facilitate understanding of this utility model, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0027] This embodiment provides a eutectic mounting shaft with a quick-change nozzle, such as... Figure 1As shown, the eutectic bonding shaft includes a drive unit 1, a mounting base 2, a sensor assembly 3, a quick-change mount 4, and a nozzle assembly 5. The drive unit 1 is fixedly mounted on the mounting base 2, and its output shaft is connected to the sensor assembly 3 to drive the sensor assembly 3 to rotate. One end of the quick-change mount 4 is connected to the sensor assembly 3, and the other end is connected to the nozzle assembly 5 via a quick-change connector 6. The quick-change mount 4 and the quick-change connector 6 are detachably connected.

[0028] The aforementioned drive component 1 is a rotary component, preferably a servo motor. Its main function is to drive the mounting shaft to rotate, thereby rotating the material to be mounted. The mounting base 2 is used to install the entire mounting shaft into the machine. Its main function is to provide support and load-bearing for all components of the mounting shaft. The sensor assembly 3 can detect the pressure during the mounting process in real time and adjust the stroke of the mounting shaft according to the detected pressure, which helps to improve mounting accuracy and avoid the problem of increased scrap rate caused by excessive or insufficient pressure during the mounting process. Through the detachable connection between the quick-change base 4 and the quick-change connector 6, when the nozzle 52 needs to be replaced due to wear or other reasons, it is not necessary to remove the entire mounting shaft. Only the part under the quick-change base 4 needs to be replaced. This structure allows the nozzle assembly 5 to be replaced quickly and conveniently, greatly shortening the time required to replace the nozzle assembly 5 and improving production efficiency.

[0029] Reference Figure 2 As shown, in this embodiment, the sensor assembly 3 includes a flexible telescopic mechanism 31, a base plate 32, a sensor 33, and a sensor fixing member 34. The base plate 32 is fixed to the bottom of the flexible telescopic mechanism 31 and is fixedly connected to the top surface of the sensor 33. The flexible telescopic mechanism 31 can drive the base plate 32 to move along the axial direction of the eutectic mounting axis. The sensor fixing plate is fixedly connected to the bottom surface of the sensor 33, and there is a gap between the fixing plate and the base plate 32. The gap is used to provide deformation space for the sensor 33.

[0030] Because the mounting axis needs a certain amount of vertical movement in the mounting direction during the mounting process, the flexible telescopic mechanism 31 provides flexible telescopic functionality, effectively compensating for minor changes in the mounting position. The base plate 32 is fixedly connected to the top surface of the sensor 33, and the sensor fixing member 34 is also fixedly connected to the bottom surface of the sensor 33. The sensor 33 is fixed using double screws. This dual fixing method ensures the stability of the sensor 33 during operation, preventing displacement or loosening of the sensor 33 due to external factors, thereby improving the positioning accuracy and measurement accuracy of the sensor 33. A gap exists between the base plate 32 and the sensor fixing member 34, providing necessary deformation space for the sensor 33. When the sensor 33 is subjected to external force causing deformation, this gap allows the sensor 33 to deform to a certain extent without being damaged due to excessive deformation, thus extending the service life of the sensor 33. With the assistance of the flexible telescopic mechanism 31, the sensor 33 can maintain stable performance over a wider operating range. This ensures high measurement accuracy and stability in various complex environments, thereby optimizing the working performance of the sensor 33.

[0031] Specifically, the flexible telescopic mechanism 31 includes a base 311, a sliding block 312, a first spring 313, and a second spring 314. The sliding block 312 is disposed inside the base 311 and connected to the base 311 via a linear mechanism, allowing the sliding block 312 to slide along the axial direction of the base 311. The base 311 is connected to the output shaft of the drive member 1, enabling it to rotate the sliding block 312. The first spring 313 is disposed between the top surface of the base 311 and the top surface of the sliding block 312, and the second spring 314 is disposed between the base 311 and the bottom of the sliding block 312. The linear mechanism is preferably a crossed roller guide mechanism, which can restrict the rotation of the sliding block 312 within the base 311.

[0032] Through the linear connection between the base 311 and the sliding block 312, and the connection between the base 311 and the output shaft of the drive member 1, the flexible telescopic mechanism 31 not only allows the sliding block 312 to slide along the axial direction of the base 311, but also allows it to rotate under the drive of the drive member 1. A cross roller guide provides linear guidance for vertical floating, and together with the first spring 313 and the second spring 314, they form a flexible mechanism in the height direction. It should be noted that the second spring 314 can hold the lower part of the mechanism, restricting the position of the displaceable part and balancing the weight of this part of the mechanism; the first spring 313 can restrict the position of the mechanism, counteract part of the tension of the second spring 314, and provide a certain initial pressure for patch application. The pressure during patch application is fed back by the sensor 33.

[0033] Combination Figure 2 and Figure 3As shown, in this embodiment, the bottom surface of the quick-change base 4 is provided with a groove 41, and the quick-change connector 6 has a fixing part 61 on its upper part. The fixing part 61 is inserted into the groove 41 and fixed by a locking member 7 located on the side of the quick-change base 4. Specifically, the bottom surface of the quick-change base 4 is provided with positioning holes at the four corners. Corresponding to the positioning holes, the quick-change connector 6 is provided with positioning pins for positioning the relative position between the quick-change base 4 and the quick-change connector 6.

[0034] The quick-change base 4 has a downward opening, which forms a groove 41. The side of the groove 41 has screw holes that connect to the outside of the quick-change base 4. When the fixing part 61 above the quick-change connector 6 is inserted into the groove 41, the locking member 7, i.e., the screw, is inserted into the screw hole until it locks the fixing part 61, thereby fixing the quick-change connector 6 onto the quick-change base 4. In addition, the quick-change connector 6 has positioning pins at its four corners. This positioning method ensures that the nozzle assembly 5 can be accurately positioned in the predetermined position after replacement, thereby avoiding a decrease in placement accuracy due to nozzle 52 positional deviation.

[0035] In this embodiment, the nozzle assembly 5 includes a heat insulation component 51 and a nozzle 52. One end of the heat insulation component 51 is connected to the quick-change connector 6, which is fixed with screws. The other end is connected to the nozzle 52, and this connection is achieved using negative pressure. The nozzle 52 can have different specifications, and the negative pressure allows for convenient replacement. The heat insulation component 51 and the quick-change connector 6 are detachably connected. The detachable connection between the heat insulation component 51 and the quick-change connector 6 can use the same detachable connection method as that between the quick-change connector 6 and the quick-change seat 4. The function of the heat insulation component 51 is to isolate the high-temperature welding area at the nozzle 52, which not only provides heat insulation but also protects the mounting material and the nozzle 52 from high temperatures. The heat insulation component 51 can effectively prevent heat from being directly transferred to the nozzle 52 or other sensitive components, thereby extending the service life of the equipment and improving operational safety.

[0036] Additionally, refer to Figure 4 As shown, in this embodiment, a first air pipe connector 42 and a second air pipe connector 43 are provided on the side of the quick-change seat 4, and both the first air pipe connector 42 and the second air pipe connector 43 are connected to a negative pressure source.

[0037] The heat insulation component 51 has a first gas pipeline and a second gas pipeline inside. The two ends of the first gas pipeline are respectively connected to the suction hole of the suction nozzle 52 and the first gas pipe connector 42 for sucking up the mounting material. The second gas pipeline is connected to the second gas pipe connector 43 for sucking up the suction nozzle 52 and fixing it to the heat insulation component 51.

[0038] In this embodiment, a heater is provided near the mounting position of the heat insulation component 51. The heater is located near the mounting position of the heat insulation component 51 and can appropriately heat the mounting material to improve the adhesion of the material and reduce the mounting difficulty, thereby improving the mounting accuracy and efficiency.

[0039] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this embodiment are only used to explain the relative positional relationship and movement of each component in a specific posture (as shown in the attached figure). If the specific posture changes, the directional indicator will also change accordingly.

[0040] Furthermore, in this embodiment, the use of terms such as "first" and "second" is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of those features. In the description of this embodiment, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0041] In this embodiment, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this embodiment according to the specific circumstances.

[0042] It should be understood that the above description of the specific embodiments of this utility model is only for illustrating the technical route and features of this utility model, and its purpose is to enable those skilled in the art to understand the content of this utility model and implement it accordingly. However, this utility model is not limited to the specific embodiments described above. All changes or modifications made within the scope of the claims of this utility model should be covered by the protection scope of this utility model.

Claims

1. A eutectic mounting shaft with a quick-change nozzle, characterized in that, The eutectic mounting shaft includes a drive unit (1), a fixed base (2), a sensor assembly (3), a quick-change base (4), and a nozzle assembly (5). The driving component (1) is fixedly installed on the fixed base (2), and its output shaft is connected to the sensor assembly (3) to drive the sensor assembly (3) to rotate; The sensor assembly (3) includes a flexible telescopic mechanism (31), a base plate (32), a sensor (33), and a sensor fixing member (34). The base plate (32) is fixedly connected to the top surface of the sensor (33), and the sensor fixing member (34) is fixedly connected to the bottom surface of the sensor (33), and there is a gap between the base plate (32) and the sensor fixing member (34) to provide deformation space for the sensor (33). The flexible telescopic mechanism (31) includes a base (311), a sliding block (312), a first spring (313), and a second spring (314). The first spring (313) is disposed between the base (311) and the top surface of the sliding block (312), and the second spring (314) is disposed between the base (311) and the bottom surface of the sliding block (312). The first spring (313) and the second spring (314) together form a flexible mechanism in the height direction; the second spring (314) is used to pull the lower half of the mechanism and restrict the position of the lower part of the mechanism that can be displaced. One end of the quick-change seat (4) is connected to the sensor assembly (3), and the other end is connected to the nozzle assembly (5) via a quick-change connector (6); The quick-change seat (4) and the quick-change connector (6) are detachably connected.

2. The eutectic mounting shaft with a quick-change nozzle as described in claim 1, characterized in that, The base plate (32) is fixed to the bottom of the flexible telescopic mechanism (31) and is fixedly connected to the top surface of the sensor (33). The flexible telescopic mechanism (31) can drive the base plate (32) to move along the axial direction of the eutectic mounting axis.

3. The eutectic mounting shaft with a quick-change nozzle as described in claim 2, characterized in that, The sliding block (312) is disposed inside the base (311) and is connected to the base (311) by a linear mechanism. The sliding block (312) can slide along the axial direction of the base (311). The base (311) is connected to the output shaft of the drive (1) and can drive the sliding block (312) to rotate.

4. The eutectic mounting shaft with a quick-change nozzle as described in claim 3, characterized in that, The linear mechanism is a cross roller guide mechanism, which can restrict the rotation of the sliding block (312) within the base (311).

5. The eutectic mounting shaft with a quick-change nozzle as described in any one of claims 1-3, characterized in that, The bottom surface of the quick-change seat (4) is provided with a groove (41), and the quick-change connector (6) has a fixing part (61) on its upper part. The fixing part (61) is inserted into the groove (41) and fixed by a locking part (7) located on the side of the quick-change seat (4).

6. The eutectic mounting shaft with a quick-change nozzle as described in claim 5, characterized in that, The quick-change seat (4) has positioning holes at the four corners of its bottom surface. Corresponding to the positioning holes, the quick-change connector (6) is provided with positioning pins to position the relative position between the quick-change seat (4) and the quick-change connector (6).

7. The eutectic mounting shaft with a quick-change nozzle as described in claim 1, characterized in that, The suction nozzle assembly (5) includes a heat insulation element (51) and a suction nozzle (52); One end of the heat insulation component (51) is connected to the quick-change connector (6), and the other end is connected to the suction nozzle (52). The heat insulation component (51) and the quick-change connector are detachably connected.

8. The eutectic mounting shaft with a quick-change nozzle as described in claim 7, characterized in that, The quick-change seat (4) is provided with a first air pipe connector (42) and a second air pipe connector (43) on its side. Both the first air pipe connector (42) and the second air pipe connector (43) are connected to a negative pressure source. The heat insulation component (51) has a first gas pipeline and a second gas pipeline inside. The two ends of the first gas pipeline are respectively connected to the suction hole of the suction nozzle (52) and the first gas pipe connector (42) for sucking up the mounting material. The second gas pipeline is connected to the second gas pipe connector (43) for sucking up the suction nozzle (52) and fixing it on the heat insulation component (51).

9. The eutectic mounting shaft with a quick-change nozzle as described in claim 8, characterized in that, The heat insulation component (51) is provided with a heater near the mounting position.

Images