Cleaning device for precursor source bottles

Abstract

This application relates to a cleaning device for a precursor source bottle, comprising: a first frame; a first driving member connected to the first frame; a rotating bracket rotatably connected to the first driving member; and a cleaning assembly for conveying cleaning material into the precursor source bottle to clean it. The precursor source bottle abuts against the rotating bracket under the action of a clamping assembly and rotates together with the rotating bracket under the action of the first driving member, thereby using the cleaning assembly to clean the precursor source bottle in a downward-facing position. The clamping assembly includes an abutment member adapted to the bottle opening of the precursor source bottle. The abutment member moves along a rotation axis perpendicular to the rotating bracket under external force to move away from or abut against the bottle opening of the precursor source bottle. This cleaning device ensures the firmness and stability of the precursor source bottle against the rotating bracket during rotation, greatly reducing the possibility of the precursor source bottle loosening or falling off during rotation.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a cleaning device for a precursor source bottle. Background Technology

[0002] In semiconductor manufacturing processes, precursor materials are key raw materials for preparing thin films and other semiconductor structures. These precursor materials are often highly reactive, toxic, or corrosive, thus requiring extremely strict cleanliness standards for the precursor source bottles used to contain them. After use, precursor source bottles often retain a certain amount of precursor material. If these residues are not thoroughly removed, they can lead to cross-contamination or cause runaway reactions during subsequent use, severely impacting the performance and yield of semiconductor devices.

[0003] During the cleaning process of precursor source bottles, the clamping mechanisms in the prior art are usually not well adapted to the shape and size of the precursor source bottles, making it difficult to achieve stable clamping and easily causing the source bottles to loosen or fall off during rotation. Utility Model Content

[0004] In view of this, the present application provides a cleaning device for precursor source bottles to solve at least one problem existing in the background art.

[0005] In a first aspect, embodiments of this application provide a cleaning device for a precursor source bottle, the cleaning device comprising:

[0006] First frame;

[0007] The first driving component is connected to the first frame;

[0008] A rotating bracket is rotatably connected to the first driving component, and the rotating bracket can rotate relative to the first frame under the driving action of the first driving component;

[0009] A cleaning component, connected to the first frame, is used to deliver cleaning material into the precursor source bottle to clean the precursor source bottle, the precursor source bottle having a bottle opening.

[0010] A clamping assembly is connected to the rotating bracket. The precursor source bottle abuts against the rotating bracket under the action of the clamping assembly and rotates together with the rotating bracket under the action of the first driving member, so as to use the cleaning assembly to clean the precursor source bottle in the bottle opening downward position.

[0011] The clamping assembly includes an abutment that is adapted to the mouth of the precursor source bottle. The abutment is movably connected to the rotating bracket. Under the action of an external force, the abutment moves along a rotation axis perpendicular to the rotating bracket to move away from or abut against the mouth of the precursor source bottle.

[0012] In conjunction with the first aspect of this application, in an optional embodiment, the abutting member is provided with a limiting through hole, the limiting through hole being adapted to the bottle opening of the precursor source bottle, and when the abutting member abuts against the precursor source bottle, the limiting through hole is sleeved on the bottle opening of the precursor source bottle.

[0013] In conjunction with a first aspect of this application, in an alternative embodiment, the clamping assembly includes:

[0014] A lifting component is movably connected to the rotating bracket, and an abutment component is connected to the lifting component. The abutment component moves along an axis perpendicular to the output shaft under the action of the lifting component to move away from or abut against the bottle opening of the precursor source bottle.

[0015] In conjunction with the first aspect of this application, in an optional embodiment, the clamping assembly further includes:

[0016] A locking member is used to connect the abutment and the rotating bracket when the abutment abuts against the precursor source bottle, so as to lock the relative position between the abutment and the rotating bracket.

[0017] In conjunction with the first aspect of this application, in an optional embodiment, the rotating bracket is provided with rotating shafts on both sides, the rotating shafts being connected to the output shaft of the first driving member. Under the driving action of the first driving member, the rotating shafts rotate with the output shaft and drive the rotating bracket to rotate together.

[0018] In conjunction with the first aspect of this application, in an optional embodiment, the clamping assembly further includes:

[0019] The first alignment member is connected to the rotating bracket;

[0020] The abutment is provided with a second alignment member that is adapted to the first alignment member. When the abutment is abutted against the precursor source bottle, the second alignment member is adapted to the first alignment member.

[0021] In conjunction with the first aspect of this application, in an optional embodiment, the clamping assembly further includes:

[0022] A flexible component is connected to the rotating support. When the precursor source bottle is placed on the rotating support, the bottom of the precursor source bottle contacts the flexible component.

[0023] In conjunction with the first aspect of this application, in an optional embodiment, the rotating bracket is provided with a limiting part, which is adapted to the side wall of the precursor source bottle when the precursor source bottle is placed on the rotating bracket.

[0024] In conjunction with the first aspect of this application, in an alternative embodiment, the cleaning component includes:

[0025] The nozzle is connected to the lifting member. When the abutting member abuts against the precursor source bottle, the nozzle is inserted into the bottle mouth of the precursor source bottle.

[0026] Multiple interfaces can be connected to the nozzles respectively, so as to deliver different cleaning substances through different interfaces.

[0027] In conjunction with the first aspect of this application, in an alternative embodiment, the cleaning component includes:

[0028] A gas generator, connected to the top of the first frame, is used to generate dry gas. The gas generator is connected to the nozzle through the interface to deliver the generated dry gas into the precursor source bottle.

[0029] The cleaning device for the precursor source bottle provided in this application embodiment uses a first driving member to drive the precursor source bottle to rotate so that its bottle mouth faces downward, so as to facilitate cleaning of the inside of the precursor source bottle; this application embodiment uses an abutment member adapted to the bottle mouth of the precursor source bottle to abut against the bottle mouth, which can improve the adaptability of the abutment member to the shape and size of the precursor source bottle, thereby ensuring the firmness and stability of the precursor source bottle against the rotating support during rotation, greatly reducing the possibility of the precursor source bottle loosening or falling off during rotation, and further ensuring the cleaning effect of the precursor source bottle.

[0030] Furthermore, the limiting through hole sleeved onto the bottle mouth allows the abutment to restrict the position of the precursor source bottle from around the bottle mouth, further enhancing the firmness and stability of the precursor source bottle abutting against the rotating support during rotation.

[0031] Furthermore, the limiting part is adapted to the side wall of the precursor source bottle, which can prevent the precursor source bottle from lateral displacement during rotation, ensuring the stability and safety of the cleaning process.

[0032] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0033] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0034] Figure 1 A schematic diagram from an angle of the cleaning device for the precursor source bottle provided in an embodiment of this application;

[0035] Figure 2 Another schematic diagram of the cleaning device for the precursor source bottle provided in the embodiments of this application;

[0036] Figure 3 An exploded view of the rotating bracket and clamping assembly in the cleaning device for the precursor source bottle provided in this application embodiment;

[0037] Figure 4 An exploded view of the gas generator in the cleaning device for the precursor source bottle provided in the embodiments of this application;

[0038] Figure 5 This is a schematic diagram of the precursor source bottle in the cleaning device for the precursor source bottle provided in the embodiments of this application.

[0039] Figure label:

[0040] 10. First frame; 11. Automatic door opening and closing;

[0041] 20. First driving component;

[0042] 30. Rotating bracket; 31. Rotating shaft; 32. Limiting part; 321. Arc groove;

[0043] 40. Cleaning assembly; 41. Nozzle; 42. Gas generator; 421. Gas filter; 422. Centrifugal blower; 423. Housing filter; 43. Second frame; 44. Supply pipe;

[0044] 50. Clamping assembly; 51. Abutment member; 511. Limiting through hole; 512. Abutment plate; 52. Locking member; 53. First alignment member; 531. Alignment block; 5311. Insertion hole; 54. Second alignment member; 541. Insertion piece; 55. Flexible member;

[0045] 60. Precursor source bottle; 61. Bottle mouth; 62. Base. Detailed Implementation

[0046] To make the technical solution and beneficial effects of this utility model more apparent and understandable, a detailed description is provided below by listing specific embodiments. The accompanying drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly show the details of the local features; unless otherwise defined, the technical and scientific terms used herein have the same meanings as those in the technical field to which this application pertains.

[0047] In the description of this utility model, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "height", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", and "counterclockwise" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the purpose of simplifying the description of this utility model and do not indicate that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. In other words, they should not be construed as limitations on this utility model.

[0048] In this utility model, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating the relative importance of the indicated features or the number of indicated technical features. Therefore, a feature specified as "first" or "second" can explicitly indicate that at least one of those features is included. In the description of this utility model, "multiple" means at least two, such as two, three, etc.; "several" means at least one, such as one, two, three, etc., unless otherwise explicitly specified.

[0049] In this utility model, unless otherwise explicitly defined, the terms "installation," "connection," "linking," "fixing," and "setting," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can also refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0050] In this utility model, unless otherwise explicitly defined, the terms "above," "on top of," "above," "over," "below," "below," "below," or "below" for "first feature above second feature" can refer to direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Furthermore, "above," "above," and "over" for "first feature above second feature" can mean the first feature is directly above or diagonally above the second feature, or simply indicates that the horizontal height of the first feature is higher than the horizontal height of the second feature. Similarly, "below," "below," and "below" for "first feature below second feature" can mean the first feature is directly below or diagonally below the second feature, or simply indicates that the horizontal height of the first feature is lower than the horizontal height of the second feature.

[0051] The precursor source bottle 60 involved in this embodiment is a container for holding highly active, toxic, or corrosive substances, and is made of stainless steel. The volume of the precursor source bottle 60 in this embodiment can be 100L, 150L, ​​or 200L, but is not limited to these. Please refer to... Figure 5 The precursor source bottle 60 has a bottle mouth 61 at the top and a base 62 connected to the bottom of the precursor source bottle 60. The base 62 can be connected to the bottom of the precursor source bottle 60 by welding, but it is not limited to this.

[0052] This application provides a cleaning device for precursor source bottles. Please refer to [link / reference]. Figures 1 to 5 The cleaning device for the precursor source bottle 60 includes a first frame 10, a first drive member 20, a rotating bracket 30, a cleaning component 40, and a clamping component 50.

[0053] The first frame 10 serves as the main support structure of the cleaning device, used to install and fix other functional components, providing basic support for the entire cleaning device. The first frame 10 also has a working space within which the first drive component 20, rotating bracket 30, clamping assembly 50, and some cleaning components 40 are located, to prevent external contaminants from contaminating the cleaning device.

[0054] The first drive unit 20 is connected to the first frame 10 and provides a power source for the rotation of the precursor source bottle 60. The first drive unit 20 can be a motor or other device capable of providing rotational power, and its output shaft can drive the connected components to rotate.

[0055] The rotating bracket 30 is rotatably connected to the first driving member 20. Rotating shafts 31 are provided on both sides of the rotating bracket 30, and these rotating shafts 31 are directly connected to the output shaft of the first driving member 20 (not shown in the figure). When the first driving member 20 is working, its output shaft drives the rotating shafts 31 to rotate, and the rotating shafts 31 in turn drive the entire rotating bracket 30 to rotate around its axis.

[0056] The cleaning component 40 is connected to the first frame 10 and is used to deliver cleaning substances into the precursor source bottle 60 to clean the precursor source bottle 60. The cleaning substances include, but are not limited to, cleaning fluid, pure water, and dry gas.

[0057] The clamping assembly 50 is connected to the rotating bracket 30. The precursor source bottle 60 abuts against the rotating bracket 30 under the action of the clamping assembly 50 and rotates together with the rotating bracket 30 under the action of the first driving member 20, so that the cleaning assembly 40 can clean the precursor source bottle 60 when its opening 61 is facing downwards. The clamping assembly 50 includes an abutment member 51, which is adapted to the opening 61 of the precursor source bottle 60. The abutment member 51 is movably connected to the rotating bracket 30, and under the action of external force, the abutment member 51 rotates in a direction perpendicular to the rotation direction of the rotating bracket 30 (i.e., ...). Figure 3 The arrow s1 shown in the figure moves to move away from or to contact the mouth 61 of the precursor source bottle 60.

[0058] In order to ensure the cleaning effect of the precursor source bottle 60, the cleaning device described above uses the first driving member 20 to drive the precursor source bottle 60 to rotate so that its bottle mouth 61 faces downward, so as to facilitate the cleaning of the inside of the precursor source bottle 60. In this embodiment, the abutment member 51 adapted to the bottle mouth 61 of the precursor source bottle 60 abuts against the bottle mouth 61 of the precursor source bottle 60, which can improve the adaptability of the shape and size of the abutment member 51 to the precursor source bottle 60, thereby ensuring the firmness and stability of the precursor source bottle 60 abutting against the rotating support 30 during rotation, greatly reducing the possibility of the precursor source bottle 60 loosening or falling off during rotation, and further ensuring the cleaning effect of the precursor source bottle 60.

[0059] In an optional embodiment, the first frame 10 is provided with an automatic opening and closing door 11, which improves the convenience of opening and closing the first frame 10. The structure of the automatic opening and closing door 11 to achieve the automatic opening and closing function is not specifically limited in this embodiment.

[0060] In an optional embodiment, the abutment member 51 is provided with a limiting through hole 511, which is adapted to the bottle opening 61 of the precursor source bottle 60. When the abutment member 51 abuts against the precursor source bottle 60, the limiting through hole 511 is sleeved on the bottle opening 61 of the precursor source bottle 60. The limiting through hole 511 sleeved on the bottle opening 61 allows the abutment member 51 to restrict the position of the precursor source bottle 60 from the surrounding area of ​​the bottle opening 61, further enhancing the firmness and stability of the precursor source bottle 60 abutting against the rotating support 30 during rotation.

[0061] In an optional embodiment, the abutment 51 includes an abutment plate 512, the shape of which is adapted to the shape of the bottle opening 61 of the precursor source bottle 60, so as to increase the contact area between the abutment 51 and the precursor source bottle 60, thereby improving the abutment firmness between the precursor source bottle 60 and the rotating support 30.

[0062] In an optional embodiment, the clamping assembly 50 further includes a lifting member (not shown), which is movably connected to the rotating bracket 30. An abutment member 51 is connected to the lifting member and moves along an axis perpendicular to the output shaft under the action of the lifting member to move away from or abut against the bottle opening 61 of the precursor source bottle 60. In one example, the axis of rotation 31 of the rotating bracket 30 is horizontal, and the lifting member is vertical (i.e., Figure 3 The arrow s1 shown in the image indicates the direction of movement.

[0063] The lifting component in this application embodiment may be an electric lifting component driven by a motor, but it is not limited to this.

[0064] In an optional embodiment, the clamping assembly 50 further includes a locking member 52, which is used to connect the abutment 51 and the rotating bracket 30 when the abutment 51 abuts against the precursor source bottle 60, so as to lock the relative position between the abutment 51 and the rotating bracket 30.

[0065] In this embodiment, the rotating bracket 30 is provided with a first threaded hole, the abutment 51 is provided with a second threaded hole corresponding to the position of the first threaded hole, and the locking member 52 is inserted into the first threaded hole and the second threaded hole to lock the relative position between the abutment 51 and the rotating bracket 30 by means of the locking member 52, thereby further ensuring the firmness and stability of the abutment between the precursor source bottle 60 and the rotating bracket 30.

[0066] In an optional embodiment, the clamping assembly 50 further includes a first alignment member 53 and a second alignment member 54. The first alignment member 53 is connected to the rotating bracket 30, and the second alignment member 54 is disposed on the abutment member 51. When the abutment member 51 abuts against the precursor source bottle 60, the second alignment member 54 is adapted to the first alignment member 53. This embodiment of the application, through the adaptation of the first alignment member 53 and the second alignment member 54, ensures the accuracy of the abutment member 51's position against the precursor source bottle 60, thereby ensuring the firmness between the precursor source bottle 60 and the rotating bracket 30.

[0067] In an optional embodiment, the first alignment member 53 is an insertion hole 5311 provided on the alignment block 531 connected to the rotating bracket 30, and the second alignment member 54 is an insertion piece 541 provided on the abutment member 51. When the abutment member 51 abuts against the precursor source bottle 60, the insertion piece 541 is inserted into the insertion hole 5311. The number of insertion holes 5311 and insertion pieces 541 can be set according to requirements, and this embodiment does not impose a specific limitation.

[0068] In an optional embodiment, the clamping assembly 50 further includes a flexible member 55 connected to the rotating bracket 30. When the precursor source bottle 60 is placed on the rotating bracket 30, the bottom of the precursor source bottle 60 contacts the flexible member 55. This can be understood as follows: when the abutment member 51 abuts against the bottle opening 61 (i.e., the top of the precursor source bottle 60) of the precursor source bottle 60, the flexible member 55 abuts against the bottom of the precursor source bottle 60 and the rotating bracket 30, thereby increasing the friction between the bottom of the precursor source bottle 60 and the rotating bracket 30, further improving the abutment strength between the precursor source bottle 60 and the rotating bracket 30 during rotation.

[0069] The flexible component 55 can be a rubber pad or a cushioning pad made of elastic material, which can reduce the hard contact between the precursor source bottle 60 and the rotating support 30 and prevent the precursor source bottle 60 from being damaged during placement and rotation.

[0070] In an optional embodiment, the base 62 of the precursor source bottle 60 includes at least two mounting seats, and there is a gap between two adjacent mounting seats. The flexible member 55 is embedded in the gap, which can not only increase the abutment force in the axial direction of the precursor source bottle 60, but also increase the friction force in the transverse direction (that is, the radial direction of the precursor source bottle 60) between the precursor source bottle 60 and the rotating bracket 30.

[0071] In an optional embodiment, the rotating bracket 30 is provided with a limiting part 32, which is adapted to the side wall of the precursor source bottle 60 when the precursor source bottle 60 is placed on the rotating bracket 30.

[0072] The limiting part 32 is an arc-shaped groove 321 provided on the rotating bracket 30. The arc-shaped groove 321 is adapted to the side wall of the precursor source bottle 60, which can prevent the precursor source bottle 60 from lateral displacement during rotation, and ensure the stability and safety of the cleaning process.

[0073] In an optional embodiment, the cleaning assembly 40 includes a nozzle 41 and multiple interfaces (not shown in the figure). The nozzle 41 is connected to a lifting member, and when the abutment member 51 abuts against the precursor source bottle 60, the nozzle 41 is inserted into the bottle opening 61 of the precursor source bottle 60. The multiple interfaces can be connected to the nozzle 41 respectively, and the multiple interfaces can be connected to different cleaning substance generating devices to realize the delivery of different cleaning substances into the interior of the precursor source bottle 60 through different interfaces.

[0074] The cleaning substance generating device includes at least a gas generator 42, which is connected to the top of the first frame 10 and is used to generate dry gas. The gas generator 42 is connected to a nozzle 41 through an interface to deliver the generated dry gas to the precursor source bottle 60.

[0075] The gas generator 42 includes a gas filter 421, a centrifugal blower 422, and a housing filter 423. The gas filter 421 and the centrifugal blower 422 are located inside the second frame 43. The gas filter 421 is used for the gas generated by the centrifugal blower 422 to ensure the particulate matter content of the dried gas, further ensuring the cleanliness of the inner wall of the precursor source bottle 60 after drying. The second frame 43 is connected to the top of the first frame 10, and the housing filter 423 is connected to the side wall of the second frame 43 to filter the air entering the second frame 43.

[0076] Please refer to Figure 1 The gas generator 42 and the nozzle 41 are connected by a supply pipe 44 to deliver the dry body generated by the gas generator 42 to the precursor source bottle 60, thereby achieving drying and cleaning of the inside of the precursor source bottle 60.

[0077] The cleaning substance generating device also includes a pure water supplier (not shown in the figure) and a cleaning agent supplier (not shown in the figure), which are connected to different interfaces to provide pure water or cleaning agent to rinse the precursor source bottle 60. Schematic diagrams of the pure water supplier and the cleaning agent supplier are not shown in this embodiment.

[0078] The cleaning device operates as follows: First, the precursor source bottle 60 is placed on the rotating support 30, with the bottom of the precursor source bottle 60 contacting the flexible member 55 and the sidewalls fitting with the limiting part 32. Then, the position of the abutment member 51 is adjusted by the lifting member so that the abutment member 51 abuts against the bottle mouth 61 of the precursor source bottle 60, the limiting through hole 511 is fitted onto the bottle mouth 61, and the nozzle 41 is inserted into the bottle mouth 61. At the same time, the second alignment member 54 fits with the first alignment member 53 to ensure correct positioning. Next, the locking member 52 is used to lock the relative position between the abutment member 51 and the rotating support 30.

[0079] The first drive unit 20 is activated, and its output shaft drives the rotating shaft 31 to rotate, which in turn drives the rotating bracket 30 to rotate. Since the precursor source bottle 60 is fixed to the rotating bracket 30 by the clamping assembly 50, the precursor source bottle 60 rotates along with the rotating bracket 30, rotating clockwise around the rotating shaft 31 (i.e., ...). Figure 3The precursor source bottle 60 rotates (in the direction of arrow r1 shown). During rotation, the bottle opening 61 is flipped so that it faces downwards. At this time, it is connected to the nozzle 41 through different interfaces to deliver cleaning material into the precursor source bottle 60 for thorough cleaning. After cleaning, the precursor source bottle 60 can be dried using dry gas generated by the gas generator 42.

[0080] With this design, the cleaning device can effectively clean and dry the precursor source bottle 60, improving cleaning efficiency and quality while ensuring operational safety and reliability.

[0081] It should be understood that the above embodiments are exemplary and are not intended to encompass all possible implementations included in the claims. Various modifications and changes can be made to the above embodiments without departing from the scope of this disclosure. Similarly, the various technical features of the above embodiments can be arbitrarily combined to form other embodiments of this application that may not be explicitly described. Therefore, the above embodiments only illustrate several implementations of this application and do not limit the scope of protection of this patent application.

Claims

1. A cleaning device for a precursor source bottle, characterized in that, The cleaning device includes: First frame (10); The first driving component (20) is connected to the first frame (10); A rotating bracket (30) is rotatably connected to the first driving member (20). The rotating bracket (30) can rotate relative to the first frame (10) under the driving action of the first driving member (20). A cleaning component (40) is connected to the first frame (10) and is used to deliver cleaning material into the precursor source bottle (60) to clean the precursor source bottle (60), the precursor source bottle (60) having a bottle mouth (61). A clamping assembly (50) is connected to the rotating bracket (30). The precursor source bottle (60) abuts against the rotating bracket (30) under the action of the clamping assembly (50) and rotates together with the rotating bracket (30) under the action of the first driving member (20) so as to use the cleaning assembly (40) to clean the precursor source bottle (60) in the state where the bottle mouth (61) is facing down. The clamping assembly (50) includes an abutment (51) that is adapted to the mouth (61) of the precursor source bottle (60). The abutment (51) is movably connected to the rotating bracket (30). Under the action of an external force, the abutment (51) moves along the rotation axis (31) perpendicular to the rotating bracket (30) to move away from or abut against the mouth (61) of the precursor source bottle (60).

2. The cleaning apparatus of a precursor source bottle according to claim 1, characterized by, The abutment (51) is provided with a limiting through hole (511), which is adapted to the bottle mouth (61) of the precursor source bottle (60). When the abutment (51) abuts against the precursor source bottle (60), the limiting through hole (511) is sleeved on the bottle mouth (61) of the precursor source bottle (60).

3. The cleaning apparatus of a precursor source bottle according to claim 1 or 2, characterized by, The clamping assembly (50) includes: The lifting component is movably connected to the rotating bracket (30), and the abutment (51) is connected to the lifting component. The abutment (51) moves along the axis perpendicular to the output shaft of the first driving component (20) under the action of the lifting component, so as to move away from or abut against the bottle mouth (61) of the precursor source bottle (60).

4. The cleaning apparatus of a precursor source bottle according to claim 3, wherein The clamping assembly (50) further includes: A locking member (52) is used to connect the abutment (51) and the rotating bracket (30) when the abutment (51) abuts against the precursor source bottle (60) to lock the relative position between the abutment (51) and the rotating bracket (30).

5. The apparatus of claim 1, wherein, The rotating bracket (30) has rotating shafts (31) on both sides. The rotating shafts (31) are connected to the output shaft of the first driving member (20). Under the driving action of the first driving member (20), the rotating shafts (31) rotate with the output shaft and drive the rotating bracket (30) to rotate together.

6. The apparatus for cleaning a precursor source bottle according to claim 1 or 2, wherein The clamping assembly (50) further includes: The first alignment member (53) is connected to the rotating bracket (30); The abutment (51) is provided with a second alignment member (54) that is adapted to the first alignment member (53). When the abutment (51) abuts against the precursor source bottle (60), the second alignment member (54) is adapted to the second alignment member (54).

7. The apparatus of claim 1 or 2, wherein The clamping assembly (50) further includes: The flexible component (55) is connected to the rotating bracket (30). When the precursor source bottle (60) is placed on the rotating bracket (30), the bottom of the precursor source bottle (60) contacts the flexible component (55).

8. The cleaning device for the precursor source bottle according to claim 1, characterized in that, The rotating bracket (30) is provided with a limiting part (32). When the precursor source bottle (60) is placed on the rotating bracket (30), the limiting part (32) is adapted to the side wall of the precursor source bottle (60).

9. The apparatus of claim 3, wherein, The cleaning component (40) includes: The nozzle (41) is connected to the lifting member. When the abutting member (51) abuts against the precursor source bottle (60), the nozzle (41) is inserted into the bottle mouth (61) of the precursor source bottle (60). Multiple interfaces can be connected to the nozzle (41) respectively to deliver different cleaning substances through different interfaces.

10. The cleaning apparatus of a precursor source bottle according to claim 9, wherein, The cleaning component (40) includes: A gas generator (42) is connected to the top of the first frame (10) for generating dry gas. The gas generator (42) is connected to the nozzle (41) through the interface to deliver the generated dry gas to the precursor source bottle (60).

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