A roller assembly / disassembly fixture

Abstract

This application discloses a roller assembly / disassembly fixture, comprising: a horizontal plate; at least three support legs, all connected to the horizontal plate and spaced apart in the circumferential direction of the horizontal plate; a vertical rod extending vertically and movably connected to the horizontal plate, the vertical rod being configured to move vertically; a horizontal rod extending horizontally, the middle of the horizontal rod being connected to the lower end of the vertical rod, and fixed portions symmetrically arranged at both ends of the horizontal rod for fixing to the roller; and a driving member connected to the vertical rod for driving the vertical rod to move vertically. According to the roller assembly / disassembly fixture of this application, the assembly / disassembly of rollers can be conveniently achieved.

Description

Technical Field

[0001] This application relates to the field of disassembly and assembly fixtures, and more specifically to a roller disassembly and assembly fixture. Background Technology

[0002] Currently, in semiconductor processing equipment such as CVD (Chemical Vapor Deposition) equipment, buffer robots are typically used to transfer wafers to various chambers for processing.

[0003] The buffer robot contains magnetic poles and rollers. Over time, the internal rollers will wear down, causing deviations in the transmission position. The internal rollers need to be replaced regularly. However, because the internal magnetic poles have an attractive force on the rollers, they cannot be manually removed horizontally. Using a pry bar to lift the rollers can easily damage the internal magnetic poles. Furthermore, due to the attractive force, manually installing the rollers poses a risk of damaging components and personnel, and also takes a lot of time.

[0004] Therefore, improvements are needed to at least partially address the aforementioned problems. Utility Model Content

[0005] The utility model description section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0006] To at least partially solve the above problems, according to a first aspect of the present invention, a roller assembly / disassembly fixture is provided, comprising:

[0007] Horizontal plate;

[0008] Support legs, there are at least three support legs, all of which are connected to the horizontal plate and are arranged at intervals in the circumferential direction of the horizontal plate;

[0009] A vertical member, which extends in a vertical direction and is movably connected to the horizontal plate, is configured to be movable in a vertical direction;

[0010] A horizontal member extends horizontally, with its middle section connected to the lower end of the vertical member. The horizontal member has symmetrically arranged fixing parts at both ends, which are used to fix it to the roller.

[0011] A driving component, connected to the vertical rod, is used to drive the vertical rod to move in the vertical direction.

[0012] For example, the fixing part is rotatably connected to the horizontal rod; or,

[0013] The fixing part is integrally formed with the horizontal rod.

[0014] For example, the fixing part is rectangular or T-shaped.

[0015] For example, the vertical rod is a lead screw;

[0016] A lead screw nut is fixedly installed on the horizontal plate;

[0017] The lead screw is inserted into the lead screw nut.

[0018] For example, the drive component includes a turntable and a handle, the center of the turntable being fixedly connected to the upper end of the vertical rod, and the handle being fixedly connected to the turntable.

[0019] For example, the support leg includes a support rod and a support foot;

[0020] The support rod is inverted L-shaped, with its first end fixedly connected to the horizontal plate and its second end fixedly connected to the support foot.

[0021] For example, a level is provided on the horizontal bar.

[0022] For example, the driving component includes a motor and a transmission structure. The motor is connected to the vertical rod through the transmission structure to drive the vertical rod to move in the vertical direction.

[0023] According to the present invention, the roller assembly and disassembly fixture can drive the vertical rod to move in the vertical direction through the driving component, thereby driving the horizontal rod to move in the vertical direction, and thus driving the roller fixed to the fixed part to move up and down in the vertical direction, so as to conveniently realize its assembly and disassembly and with high safety. Attached Figure Description

[0024] The following figures are included as part of this application for understanding the application. The figures illustrate embodiments of the application and their descriptions, serving to explain the apparatus and principles of the application. In the figures,

[0025] Figure 1 This is a schematic diagram of the structure of a roller assembly / disassembly fixture according to an embodiment of this application.

[0026] Explanation of reference numerals in the attached figures:

[0027] 100-Horizontal plate, 110-Screw nut, 200-Support leg, 210-Support rod, 220-Support foot, 300-Vertical rod, 400-Horizontal rod, 410-Fixing part, 500-Driver, 510-Turntable, 520-Handle. Detailed Implementation

[0028] The following description provides numerous specific details to offer a more thorough understanding of this application. However, it will be apparent to those skilled in the art that this application can be practiced without one or more of these details. In other instances, certain technical features well-known in the art have not been described to avoid confusion with this application.

[0029] It should be understood that this application can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of this application to those skilled in the art. In the drawings, for clarity, the dimensions and relative dimensions of layers and regions may be exaggerated. The same reference numerals denote the same elements throughout.

[0030] It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or parts, these elements, components, areas, layers, and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or part from another element, component, area, layer, or part. Therefore, without departing from the teachings of this application, the first element, component, area, layer, or part discussed below may be referred to as the second element, component, area, layer, or part.

[0031] Spatial relation terms such as "below," "under," "below," "under," "above," and "above" are used here for convenience to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of devices in use and operation.

[0032] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of this application. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0033] Embodiments of the utility model are described herein with reference to cross-sectional views that serve as schematic diagrams of preferred embodiments (and intermediate structures) of this application. Thus, variations in the shown shape can be anticipated due to, for example, manufacturing techniques and / or tolerances. Therefore, embodiments of this application should not be limited to the specific shapes shown herein, but include shape deviations due to, for example, manufacturing processes. Consequently, the figures are substantially schematic, and their shapes are not intended to show the actual shape of the device and are not intended to limit the scope of this application.

[0034] See attached document Figure 1 An exemplary description is provided for a roller assembly / disassembly fixture according to an embodiment of this application. This roller assembly / disassembly fixture is used for disassembling and installing rollers (e.g., rollers in a buffer robot or other similar equipment). The roller assembly / disassembly fixture includes a horizontal plate 100, a support leg 200, a vertical rod 300, a horizontal rod 400, and a drive member 500.

[0035] The horizontal plate 100 is flat and remains horizontal when the rollers are disassembled and assembled using the roller disassembly and assembly fixture.

[0036] There are at least three support legs 200, all of which are connected to the horizontal plate 100 and are spaced apart in the circumferential direction of the horizontal plate 100. The support legs 200 are used to support the horizontal plate 100 on the equipment on which the rollers are to be removed, so that it is in a horizontal state.

[0037] The vertical member 300 extends vertically and is movably connected to the horizontal plate 100. The vertical member 300 is configured to move vertically.

[0038] A horizontal member 400 extends horizontally, and its middle portion is connected to the lower end of a vertical member 300. For example, the center of the horizontal member 400 is fixedly connected to the lower end of the vertical member 300. Therefore, when the vertical member 300 moves vertically, it can drive the horizontal member 400 to move synchronously vertically, and the horizontal member 400 remains horizontal during the movement. Fixed portions 410 are symmetrically provided at both ends of the horizontal member 400, and these fixed portions 410 are used to fix it to rollers. Thus, when the horizontal member 400 moves vertically, it can drive the rollers to move horizontally along the vertical direction via the fixed portions 410.

[0039] The driving component 500 is connected to the vertical rod 300 and is used to drive the vertical rod 300 to move in the vertical direction.

[0040] According to the roller disassembly and assembly fixture of the present application embodiment, when disassembling the roller, the roller disassembly and assembly fixture is first placed on the equipment of the roller to be disassembled and assembled, so that the support leg 200 can effectively support the horizontal plate 100 and keep it in a horizontal state; then, the fixing parts 410 at both ends of the horizontal rod 400 are fixed to the roller to be disassembled; then, the vertical rod 300 is driven to move upward in the vertical direction by the driving member 500, which can drive the roller to move upward in a horizontal state, thereby realizing the disassembly of the roller.

[0041] When installing the roller, first place the roller removal and installation fixture on the equipment where the roller is to be removed or installed, so that the support leg 200 can effectively support the horizontal plate 100 and keep it in a horizontal state. Then, fix the roller to both ends of the horizontal rod 400. Then, drive the vertical rod 300 to move downward in the vertical direction through the drive member 500, so that the roller can move downward in a horizontal state and be installed in the appropriate position.

[0042] The roller assembly / disassembly fixture of this utility model can conveniently assemble and disassemble rollers, with high safety, and is not easy to damage rollers and other components. It can significantly reduce operational risks, shorten assembly / disassembly time, and improve assembly / disassembly efficiency.

[0043] For example, see Appendix Figure 1 In this embodiment, the fixing part 410 is rotatably connected to the horizontal rod 400. For example, this rotatable connection can be achieved through a hole-shaft structure or other similar structures, with the rotating shaft extending horizontally. Exemplarily, the fixing part 410 can be T-shaped or rectangular. The fixing part 410 is provided with screw holes, through which a connector such as a screw can be passed to fix the roller to the fixing part 410. Because the fixing part 410 is rotatable relative to the horizontal rod 400, the engagement position of the two can be better adjusted when fixing the roller to the fixing part 410, achieving a better fixing effect.

[0044] In some other embodiments, the fixing part 410 and the horizontal member 400 can be integrally formed, such as integrally cast or integrally bent. In this case, the fixing part 410 is not rotatable relative to the horizontal member 400.

[0045] See appendix Figure 1In this embodiment, the vertical rod 300 is a lead screw, and a lead screw nut 110 is fixedly installed on the horizontal plate 100. Exemplarily, the lead screw nut 110 can be fixed to the horizontal plate 100 by screw connection, welding, or other suitable fixing connection methods, and it does not move or rotate relative to the horizontal plate 100 during the roller assembly and disassembly process. The lead screw passes through the lead screw nut 110, and the lead screw and lead screw nut 110 form a lead screw transmission structure. Therefore, when the vertical rod 300 (i.e., the lead screw) rotates, it can move synchronously in the vertical direction. That is, the driving member 500 only needs to drive the vertical rod 300 to rotate to make it move in the vertical direction. In this embodiment, the middle part of the horizontal rod 400 is rotatably connected to the lower end of the vertical rod 300 through a bearing.

[0046] For example, a level (not shown in the figure) is also provided on the horizontal bar 400 to allow operators to observe whether the horizontal bar 400 is in a horizontal state, that is, whether the roller fixed to the fixing part 410 is in a horizontal state, thereby ensuring that the roller is removed or installed in a horizontal state and ensuring the safety of roller removal and installation. For example, the level can be a bubble level or an electronic level. The level can be fixedly connected to the upper surface of the horizontal bar 400 by means such as adhesive or snap-fit.

[0047] See appendix Figure 1 In this embodiment, the driving component 500 includes a turntable 510 and a handle 520. The center of the turntable 510 is fixedly connected to the upper end of the vertical rod 300, and the turntable 510 rotates synchronously with the vertical rod 300. For example, the turntable 510 can be fixedly connected to the upper end of the vertical rod 300 by screws, welding, or other suitable fixing methods. The handle 520 is fixedly connected to the turntable 510 and is used to drive the turntable 510 to rotate. For example, the handle 520 can be fixedly connected to the turntable 510 by screws, welding, or other suitable fixing methods. Therefore, in this embodiment, the operator only needs to manually rotate the handle 520 to drive the turntable 510 and the vertical rod 300 to rotate, which will drive the vertical rod 300 to move vertically, thereby driving the horizontal rod 400 and the roller fixed to the fixing part 410 to move up and down vertically, thus realizing the installation and removal of the roller.

[0048] In some other embodiments, the driving component 500 may include a motor and a transmission structure. The motor is connected to the vertical rod 300 via the transmission structure to drive the vertical rod 300 to move in the vertical direction. For example, the vertical rod 300 may be a rack extending in the vertical direction, slidably connected to the horizontal plate 100. The transmission structure is a gear transmission structure, and the motor is connected to the vertical rod 300 (i.e., the rack) via the gear transmission structure to drive the vertical rod 300 to move in the vertical direction. For example, the motor and transmission structure may be mounted on the horizontal plate 100.

[0049] See appendix Figure 1 In this embodiment, the support leg 200 includes a support rod 210 and a support foot 220. The support rod 210 is inverted L-shaped, having a horizontal section and a vertical section connected to the horizontal section. The first end of the support rod 210 (i.e., one end of the horizontal section) is fixedly connected to the horizontal plate 100, and the second end of the support rod 210 (i.e., one end of the vertical section) is fixedly connected to the support foot 220. For example, the connection can be made by screws, welding, or other suitable fixing methods. The support foot 220 is used to support the equipment on which the rollers are to be removed. The specific shape of the support foot 220 can be determined according to the surface shape of the equipment on which the rollers are to be removed, as long as it can provide stable support on that surface. For example, the shape of the support foot 220 can be inverted L-shaped, cylindrical, tubular, or other suitable shapes. By setting the support rod 210 in an inverted L-shape, the area of ​​the horizontal plate 100 is reduced, costs are lowered, and sufficient space can be left below the horizontal plate 100 for the horizontal rod 400 and the rollers to move up and down.

[0050] Although exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely illustrative and are not intended to limit the scope of this application. Various changes and modifications can be made therein by those skilled in the art without departing from the scope and spirit of this application. All such changes and modifications are intended to be included within the scope of this application as claimed in the appended claims.

[0051] Numerous specific details are set forth in the specification provided herein. However, it will be understood that embodiments of this application may be practiced without these specific details. In some instances, well-known methods, structures, and techniques have not been shown in detail so as not to obscure the understanding of this specification.

[0052] Similarly, it should be understood that, in order to streamline this application and aid in understanding one or more of the various aspects of the invention, features of this application may sometimes be grouped together in a single embodiment, figure, or description thereof in the description of exemplary embodiments of this application. However, this approach should not be construed as reflecting an intention that the claimed application requires more features than are expressly recited in each claim. Rather, as reflected in the corresponding claims, the inventive point lies in solving the corresponding technical problem with fewer features than all of those in a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into that detailed description, wherein each claim itself is a separate embodiment of this application.

[0053] Those skilled in the art will understand that, apart from the mutual exclusion of features, all features disclosed in this specification (including the accompanying claims, abstract, and drawings) and all processes or elements of any method or apparatus so disclosed can be combined in any combination. Unless otherwise expressly stated, each feature disclosed in this specification (including the accompanying claims, abstract, and drawings) may be replaced by an alternative feature serving the same, equivalent, or similar purpose.

[0054] Furthermore, those skilled in the art will understand that although some embodiments described herein include certain features but not others included in other embodiments, combinations of features from different embodiments are intended to be within the scope of this application and form different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0055] It should be noted that the above embodiments are illustrative of this application and not restrictive of this application, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims.

Claims

1. A roller dismounting jig characterized by, include: Horizontal plate; Support legs, there are at least three support legs, all of which are connected to the horizontal plate and are arranged at intervals in the circumferential direction of the horizontal plate; A vertical member, which extends in a vertical direction and is movably connected to the horizontal plate, is configured to be movable in a vertical direction; A horizontal member extends horizontally, with its middle section connected to the lower end of the vertical member. The horizontal member has symmetrically arranged fixing parts at both ends, which are used to fix it to the roller. A driving component, connected to the vertical rod, is used to drive the vertical rod to move in the vertical direction.

2. The roller assembly / disassembly fixture according to claim 1, characterized in that, The fixing part is rotatably connected to the horizontal rod; or, The fixing part is integrally formed with the horizontal rod.

3. The roller assembly / disassembly fixture according to claim 2, characterized in that, The fixing part is rectangular or T-shaped.

4. The roller assembly / disassembly fixture according to claim 1, characterized in that, The vertical rod is a lead screw; A lead screw nut is fixedly installed on the horizontal plate; The lead screw is inserted into the lead screw nut.

5. The roller assembly / disassembly fixture according to claim 4, characterized in that, The driving component includes a turntable and a handle. The center of the turntable is fixedly connected to the upper end of the vertical rod, and the handle is fixedly connected to the turntable.

6. The roller assembly / disassembly fixture according to claim 1, characterized in that, The support leg includes a support rod and a support foot; The support rod is inverted L-shaped, with its first end fixedly connected to the horizontal plate and its second end fixedly connected to the support foot.

7. The roller assembly / disassembly fixture according to claim 1, characterized in that, A level is installed on the horizontal bar.

8. The roller assembly / disassembly fixture according to claim 1, characterized in that, The driving component includes a motor and a transmission structure. The motor is connected to the vertical rod through the transmission structure and is used to drive the vertical rod to move in the vertical direction.

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