Tail gas treatment device for high-purity triethyl borate production

Abstract

The utility model discloses a tail gas treatment device of high purity borate triethyl ester production, include: tail gas main pipe is used for with production device connection, transports the tail gas of production process generation, nitrogen gas main pipe is connected with tail gas main pipe, is used for to the nitrogen gas of tail gas main pipe inside import, detection subassembly is used for detecting the flammable gas content and pressure value in tail gas main pipe, absorption tower is used for absorbing tail gas, the utility model has the advantages of, realizes the tail gas treatment of high purity borate triethyl ester production, simple structure, convenient operation, handles thoroughly, avoids environmental pollution.

Description

Technical Field

[0001] This utility model relates to the field of exhaust gas treatment technology, specifically to an exhaust gas treatment device for the production of high-purity triethyl borate. Background Technology

[0002] In recent years, with the accelerated development of electronic specialty gases and electronic-grade wet chemicals, the variety of related products has become increasingly rich. Among them, triethyl borate (TEB), as an important precursor material, is widely used in advanced semiconductor manufacturing processes due to its key role in the preparation of boro-phospho-silicate glass (BPSG).

[0003] The treatment of exhaust gases during TEB production and purification requires extremely stringent safety control measures. These include absolute control of ambient humidity, specially designed anti-clogging equipment (such as using anti-condensation or selecting pipelines that are not prone to deposition), regular maintenance and inspection of the pipeline system, and the development of specific operating procedures and emergency plans to effectively prevent hydrolysis reactions, prevent dangerous situations such as pipeline blockage and pressure runaway, and ensure the safety of the entire production and use process. Existing production and purification technologies, as described in applications CN 116036633 A and CN 119549079 A, ​​do not mention effective exhaust gas monitoring and treatment systems. In actual production, if the exhaust gas emission rate is too fast, the generated static electricity may ignite the ethanol vapor produced by hydrolysis in the exhaust gas, leading to combustion or even explosion, causing incalculable economic losses and personal injury. Furthermore, if boric acid solid particles carried in the exhaust gas continuously accumulate on the inner wall of the pipeline, they will eventually clog the pipeline. This will cause a sharp increase in pressure at the front end of the unit (pressure buildup), which may lead to major accidents such as equipment rupture and material leakage in severe cases. Utility Model Content

[0004] To solve the above-mentioned technical problems, this utility model provides a tail gas treatment device for the production of high-purity triethyl borate, which can properly treat the generated tail gas while ensuring quality and quantity of production.

[0005] Specifically, this utility model discloses a tail gas treatment device for the production of high-purity triethyl borate, comprising:

[0006] The exhaust manifold is used to connect to the production equipment and transport the exhaust gas generated during the production process.

[0007] The nitrogen main pipe is connected to the exhaust main pipe and is used to introduce nitrogen into the exhaust main pipe.

[0008] The detection component is used to detect the content and pressure of combustible gas in the exhaust manifold.

[0009] An absorption tower is used to absorb exhaust gases.

[0010] The advantages of adopting the above technical solution are that it achieves tail gas treatment in the production of high-purity triethyl borate, with simple structure, convenient operation, thorough treatment, and avoidance of environmental pollution.

[0011] Furthermore, the exhaust manifold is connected to multiple branch pipes for connecting to multiple production units.

[0012] The advantage of adopting the above technical solution is that the setting of multiple branch pipelines can connect multiple production units, allowing multiple production units to share the same exhaust gas treatment equipment, reducing the footprint and layout of exhaust gas production units, and lowering costs.

[0013] Furthermore, a heat tracing cable is provided on the outside of the exhaust manifold. The heat tracing cable includes a heating core, an insulation layer, and a waterproof layer. The heating core is wrapped around the outside of the exhaust manifold, the insulation layer is located on the outside of the heating core, and the waterproof layer is located on the outside of the insulation layer.

[0014] The advantages of adopting the above technical solution are that the installation of the heat tracing cable ensures the temperature inside the exhaust gas main pipe, effectively reduces the formation of boric acid solids, avoids pipe blockage, ensures smooth flow of exhaust gas inside the exhaust gas main pipe, the heat insulation layer plays a role in heat preservation, and the waterproof layer plays a good role in waterproofing.

[0015] Furthermore, the heating core includes: a heating wire, an insulating layer, and a shielding layer, wherein there are multiple heating wires, and the insulating layer and the shielding layer are disposed on the outside of the heating wires.

[0016] The advantage of adopting the above technical solution is that the heating wire in the heating core provides heat to the exhaust pipe, and the setting of insulation and shielding layers avoids leakage.

[0017] Furthermore, the inner side of the exhaust manifold has a protective layer.

[0018] The advantage of adopting the above technical solution is that the protective layer prevents substances such as boric acid in the exhaust gas from corroding the pipeline, thus extending the service life of the pipeline.

[0019] Furthermore, the detection assembly includes a combustible gas detector and a pressure sensor installed on the exhaust manifold. The combustible gas detector is installed on the exhaust manifold to detect the ethanol concentration in the exhaust manifold.

[0020] The advantage of adopting the above technical solution is that a combustible gas detector is set up to detect the ethanol concentration in the pipeline. Since ethanol vapor in the exhaust manifold is a flammable and explosive gas, the combustible gas detector detects the concentration of ethanol vapor and issues an alarm when it exceeds the set value.

[0021] Furthermore, multiple valves are installed on the exhaust main pipe and the branch pipes.

[0022] Furthermore, the absorption tower contains packing material, which is one or more of sodium hydroxide, sodium carbonate, calcium hydroxide, calcium carbonate, and calcium chloride.

[0023] The advantage of adopting the above technical solution is that the packing is used to absorb harmful substances such as carbon oxides, acidic gases, and boron oxides in the exhaust gas. After being absorbed by the cooling tower, the substances can be discharged into the air, thus avoiding environmental pollution.

[0024] Furthermore, the absorption tower includes a tower body, a plurality of packing baskets are provided inside the absorption tower, the packing is contained in the packing baskets, a plurality of baffles are provided inside the absorption tower, and the packing baskets are placed on the baffles.

[0025] The advantage of adopting the above technical solution is that the arrangement of multiple packing baskets ensures complete reaction and reduces the residue of harmful substances. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0027] Figure 1 This is a schematic diagram of the overall structure of the tail gas treatment device for the production of high-purity triethyl borate according to this utility model.

[0028] Figure 2 This is a cross-sectional view of the exhaust manifold structure of this utility model.

[0029] Figure 3 This is a structural diagram of the heating core of this utility model.

[0030] Figure 4 This is a side view sectional view of the exhaust manifold of this utility model.

[0031] Figure 5 This is a schematic diagram of the baffle structure on the exhaust manifold of this utility model.

[0032] The reference numerals used in the attached figures are as follows:

[0033] 1. Main exhaust pipe; 11. Branch pipe; 12. Baffle; 2. Main nitrogen pipe; 3. Absorption tower; 31. Tower body; 32. Packing basket; 33. Baffle plate; 4. Heating cable; 41. Heating core; 411. Heating wire; 412. Insulation layer; 413. Shielding layer; 414. Protective layer; 42. Heat insulation layer; 43. Waterproof layer; 5. Combustible gas detector; 6. Pressure sensor; 7. Valve. Detailed Implementation

[0034] The present invention will now be described in further detail with reference to the accompanying drawings.

[0035] like Figure 1-5 As shown, this utility model discloses a tail gas treatment device for the production of high-purity triethyl borate, comprising:

[0036] The exhaust manifold 1 is used to connect to the production unit and transport the exhaust gas generated during the production process; the production unit is used to produce high-purity triethyl borate, and the structure of the production unit is existing technology.

[0037] Nitrogen main pipe 2 is connected to exhaust main pipe 1 and is used to introduce nitrogen into exhaust main pipe 1. Nitrogen is supplied to exhaust main pipe 1 to maintain a positive pressure state in exhaust main pipe 1. At the same time, it also has the function of diluting exhaust gas. The diluted exhaust gas reduces the concentration of harmful gases and ensures that harmful substances are completely removed.

[0038] The detection component is used to detect the content and pressure of combustible gas in the exhaust manifold 1.

[0039] Absorption tower 3 is used to absorb exhaust gas.

[0040] The advantages of adopting the above technical solution are that it achieves tail gas treatment in the production of high-purity triethyl borate, with simple structure, convenient operation, thorough treatment, and avoidance of environmental pollution.

[0041] Furthermore, the exhaust main pipe 1 is connected to multiple branch pipes 11 for connecting to multiple production devices. The production devices are devices for producing high-purity triethyl borate. The exhaust gas generated by these devices enters the branch pipes 11 and then enters the main pipe through the branch pipes 11. Multiple valves 7 are installed on the exhaust main pipe 1 and the branch pipes 11. The valves 7 can be solenoid valves, manual valves, etc. The valves 7 on the branch pipes 11 control the opening and closing of the branch pipes 11, and the valves 7 on the exhaust main pipe 1 are used to control the opening and closing of the exhaust main pipe 1.

[0042] The advantage of adopting the above technical solution is that the setting of multiple branch pipes 11 can connect multiple production units, allowing multiple production units to share the same exhaust gas treatment equipment, reducing the footprint and layout of exhaust gas production units, and lowering costs.

[0043] Furthermore, a heat tracing cable 4 is provided on the outside of the exhaust manifold 1. The heat tracing cable 4 includes a heating core 41, an insulation layer 42, and a waterproof layer 43. The heating core 41 is wrapped around the outside of the exhaust manifold 1, and the core of the heat tracing cable 4 is spirally wound to ensure uniform heating on the outside of the pipe. The insulation layer 42 covers the outside of the heating core 41, and the waterproof layer 43 covers the outside of the insulation layer 42. The insulation layer 42 and the waterproof layer 43 not only play a good role in heat preservation and waterproofing, but also ensure that the heating core 41 is tightly wrapped around the outside of the exhaust manifold 1 by covering it, so as to ensure that the heating core 41 is in close contact with the exhaust manifold 1, improve the heat utilization rate, and ensure the temperature inside the exhaust manifold 1.

[0044] Furthermore, the heating core 41 includes: heating wires 411, an insulating layer 412, and a shielding layer 413. There can be multiple heating wires 411, specifically two arranged in parallel. A thermally conductive insulating adhesive is placed between the two heating wires 411. The insulating layer 412 and the shielding layer 413 cover the outside of the heating wires 411. The heating wires 411 within the heating core 41 provide heat to the exhaust gas pipe, while the insulating layer 412 and shielding layer 413 prevent leakage.

[0045] Furthermore, the inner side of the exhaust main pipe 1 has a protective layer 414, which can be a sprayed polytetrafluoroethylene layer or a ceramic lining to protect the entire exhaust main pipe 1 and prevent acidic substances from corroding the pipe. At the same time, the branch pipe 11 has the same protective layer 414.

[0046] The 414 protective layer prevents substances such as boric acid in the exhaust gas from corroding the pipeline and extends the service life of the pipeline.

[0047] Furthermore, the detection components include a combustible gas detector 5 and a pressure sensor 6 installed on the exhaust gas main pipe 1. The combustible gas detector 5 is installed on the exhaust gas main pipe 1, and its connection to the pipe can be a flange connection, a welded threaded connection, etc., and is used to detect the ethanol concentration in the exhaust gas main pipe 1. The pressure sensor 6 detects the gas pressure in the pipe. Both the combustible gas detector 5 and the pressure sensor 6 transmit the detected values ​​to the control system. When the combustible gas value exceeds the set value, the control system can control the valve 7 located in the nitrogen main pipe 2. At this time, the valve 7 can be a solenoid valve, or the valve 7 can be manually opened to increase the amount of nitrogen entering, dilute the combustible gas concentration, keep the combustible gas concentration within the safe range, and at the same time issue an alarm to wait for the staff to handle it.

[0048] When the pressure sensor 6 detects a value exceeding the set value, the control system issues an alarm to detect the pressure in the pipeline to determine if there is a blockage. At the same time, the control system closes the valve. The valve will only be reopened after the fault is manually cleared to continue absorbing exhaust gas.

[0049] In some implementations, the absorption tower 3 contains packing material, which is one or more of sodium hydroxide, sodium carbonate, calcium hydroxide, calcium carbonate, and calcium chloride. An inlet pipe is provided at the bottom of the absorption tower 3 for introducing exhaust gas. The inlet pipe extends into the interior of the absorption tower 3, with its end facing upward and equipped with a horizontally installed baffle 12. The exhaust gas to be treated diffuses into the absorption tower 3 under the protection of the baffle 12, avoiding excessive concentration of the gas and incomplete absorption. At the same time, the use of multiple packing materials can also ensure complete absorption.

[0050] Furthermore, the absorption tower 3 includes a tower body 31, and multiple packing baskets 32 are provided inside the absorption tower 3. The packing is contained in the packing baskets 32. Multiple baffles 33 are provided inside the absorption tower 3. The baffles 33 are mesh plates. The packing baskets 32 are placed on the baffles 33. An air outlet is provided at the top of the absorption tower 3 to discharge the exhaust gas after the removal of harmful substances into the air. At the same time, multiple maintenance windows are opened on the side of the tower body 31, which can be opened when it is necessary to replace the packing and clean the interior. The baffles 33 can be detachably installed inside the absorption tower 3. The packing baskets 32 can hold different packing and fix the packing.

[0051] During operation, the exhaust gas first enters the exhaust gas main pipe 1. The nitrogen main pipe 2 first replenishes the exhaust gas main pipe 1 with nitrogen. At the same time, the combustible gas detector 5 and pressure sensor 6 located in the exhaust gas main pipe 1 detect the concentration of ethanol vapor and the pressure inside the pipe. After being diluted by nitrogen, the exhaust gas enters the absorption tower 3 for absorption. After removing harmful substances, it is discharged into the air.

[0052] For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. A tail gas treatment device for the production of high-purity triethyl borate, characterized in that, include: The exhaust manifold (1) is used to connect to the production unit and transport the exhaust gas generated during the production process; The nitrogen main pipe (2) is connected to the exhaust main pipe (1) and is used to introduce nitrogen into the exhaust main pipe (1); The detection component is used to detect the content and pressure of combustible gas in the exhaust manifold (1); Absorption tower (3) is used to absorb exhaust gas.

2. The tail gas treatment device for the production of high-purity triethyl borate according to claim 1, characterized in that, The exhaust manifold (1) is connected to multiple branch pipes (11) for connecting to multiple production units.

3. The tail gas treatment device for the production of high-purity triethyl borate according to claim 2, characterized in that, A heat tracing cable (4) is provided on the outside of the exhaust manifold (1). The heat tracing cable (4) includes a heating core (41), an insulation layer (42), and a waterproof layer (43). The heating core (41) is wrapped around the outside of the exhaust manifold (1). The insulation layer (42) is provided on the outside of the heating core (41), and the waterproof layer (43) is provided on the outside of the insulation layer (42).

4. The tail gas treatment device for the production of high-purity triethyl borate according to claim 3, characterized in that, The heating core (41) includes: a heating wire (411), an insulation layer (412) and a shielding layer (413). There are multiple heating wires (411), and the insulation layer (412) and the shielding layer (413) are disposed on the outside of the heating wires (411).

5. The tail gas treatment device for the production of high-purity triethyl borate according to claim 1, characterized in that, The exhaust manifold (1) has a protective layer (414) on its inner side.

6. The tail gas treatment device for the production of high-purity triethyl borate according to claim 1, characterized in that, The detection assembly includes a combustible gas detector (5) and a pressure sensor (6) installed on the exhaust manifold (1). The combustible gas detector (5) is installed on the exhaust manifold (1) and is used to detect the ethanol concentration in the exhaust manifold (1).

7. The tail gas treatment device for the production of high-purity triethyl borate according to claim 2, characterized in that, Multiple valves (7) are installed on the exhaust main pipe (1) and the branch pipe (11).

8. The tail gas treatment device for the production of high-purity triethyl borate according to claim 1, characterized in that, The absorption tower (3) contains packing material, which is one or more of sodium hydroxide, sodium carbonate, calcium hydroxide, calcium carbonate, and calcium chloride.

9. The tail gas treatment device for the production of high-purity triethyl borate according to claim 8, characterized in that, The absorption tower (3) includes a tower body (31), and a plurality of packing baskets (32) are provided inside the absorption tower (3). The packing is contained in the packing baskets (32). A plurality of partitions (33) are provided inside the absorption tower (3), and the packing baskets (32) are placed on the partitions (33).

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