An ultraviolet laser

Abstract

The utility model provides a kind of ultraviolet laser, including seed source, fundamental frequency amplification module and ultraviolet generation module being sequentially arranged along optical path, ultraviolet generation module is arranged in sealed shell, and inlet and outlet are equipped on sealed shell;Ultraviolet generation module includes ultraviolet frequency doubling module, reflecting mirror group and refracting mirror being sequentially arranged along optical path, the light of fundamental frequency amplification module output is incident after inlet, ultraviolet light is generated after passing through ultraviolet frequency doubling module, and the fundamental frequency light and green light without ultraviolet frequency doubling are reflected to optical garbage can by reflecting mirror group, and ultraviolet light is output from outlet after refracting by refracting mirror;In the optical path side between ultraviolet frequency doubling module and reflecting mirror group, between reflecting mirror group and refracting mirror and between refracting mirror and the window mirror of outlet, all be equipped with electrostatic precipitator, so that dust in optical path is adsorbed to electrostatic precipitator, thereby effectively reduce the device that dust is adsorbed on optical path, prolong the life of device.

Description

Technical Field

[0001] This utility model belongs to the field of ultraviolet laser technology, and specifically relates to an ultraviolet laser. Background Technology

[0002] Ultraviolet lasers have long suffered from a short lifespan due to the high energy of single photons, which easily damages optical components. Especially when dust adheres to the device surface, ultraviolet light hitting the device accelerates the damage. Furthermore, the interaction between the laser and the device generates static electricity. When dust particles float in the chamber and pass over the statically charged device, they are attracted to its surface. When the laser strikes this attracted dust, the dust absorbs the laser light, causing it to heat up and even ablate, damaging the device. This results in a decrease in laser output power and a deterioration in beam quality.

[0003] To address this issue, existing technologies place the ultraviolet frequency doubling crystal on a moving displacement device, shifting it a small distance periodically to prevent the ultraviolet laser from continuously striking the same position on the crystal. This method requires a large-sized nonlinear crystal, increasing costs, and also makes the mechanical control system more complex. Utility Model Content

[0004] In view of the above-mentioned defects or improvement needs of the existing technology, this utility model proposes an ultraviolet laser.

[0005] To achieve the above objectives, this utility model provides an ultraviolet laser, comprising a seed source, a fundamental frequency amplification module, and an ultraviolet generation module arranged sequentially along the optical path. The ultraviolet generation module is disposed in a sealed housing, which has an inlet and an outlet, both of which are sealed with window mirrors.

[0006] The ultraviolet generation module includes an ultraviolet frequency doubling module, a reflector group and a refractor arranged sequentially along the optical path. The light output from the fundamental frequency amplification module is incident through the light inlet and then generates ultraviolet light through the ultraviolet frequency doubling module. The fundamental frequency light and green light that have not undergone ultraviolet frequency doubling are reflected to the light trash can through the reflector group, while the ultraviolet light is refracted by the refractor and output from the light outlet.

[0007] Electrostatic dust removal devices are installed on the sides of the optical path between the ultraviolet frequency doubling module and the reflector group, between the reflector group and the refractor, and between the refractor and the window mirror of the light outlet.

[0008] According to the above scheme, an electrostatic dust removal device is also installed between the reflector group and the light trash can, and / or between the refractor and the window mirror of the light outlet.

[0009] According to the above scheme, the electrostatic dust removal device includes metal plates set on both sides of the area to be dusted. The metal plates are connected to a voltage device. When voltage is applied to the metal plates, static electricity is generated, so that the area between the inner sides of the metal plates constitutes the dust removal area.

[0010] According to the above scheme, an adhesive layer for fixing dust is provided on the inner side of the metal plate.

[0011] According to the above scheme, the metal plate is a symmetrical strip shape, a symmetrical arc shape, or an asymmetrical shape.

[0012] According to the above scheme, the refracting mirror is a right-angle prism; the light outlet window mirror is a Brewster angle window mirror.

[0013] According to the above scheme, the ultraviolet frequency doubling module includes a third frequency doubling crystal. The output terminal of the third frequency doubling crystal is at Brewster angle, and the end face of the output terminal is uncoated.

[0014] According to the above scheme, the sealed housing is also provided with an air inlet and an air outlet; this ultraviolet laser also includes a gas purification module, which is connected to the air inlet.

[0015] According to the above scheme, an electrostatic dust removal device is also installed inside the sealed housing where it connects with the air inlet and outlet.

[0016] According to the above scheme, an electrostatic dust removal device is also installed on the side of the optical path between the reflector group and the light trash can.

[0017] According to the above scheme, the fundamental frequency amplification module is a picosecond laser or a nanosecond laser.

[0018] In summary, compared with the prior art, the above-described technical solution conceived by this utility model can achieve the following beneficial effects:

[0019] 1. By setting an electrostatic dust removal device on the side of the optical path, the dust in the optical path becomes charged and is attracted to the electrostatic dust removal device, thereby effectively reducing the amount of dust adsorbed on the components in the optical path, reducing the damage to the components caused by the dust absorbing the heat of the laser, and thus extending the life of the components.

[0020] 2. By setting an adhesive layer on the inside of the metal plate of the electrostatic dust removal device, the adsorbed dust can be more effectively adhered and fixed.

[0021] 3. Due to the high airflow speed at the inlet and outlet, the airflow carries a lot of dust. By installing electrostatic dust removal devices at the inlet and outlet, the dust can be effectively adsorbed, improving the cleanliness inside the sealed housing.

[0022] 4. By adding a gas purification module to the air inlet, the incoming gas is further filtered, improving the cleanliness inside the sealed housing. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the ultraviolet generation module provided in this embodiment of the utility model.

[0024] Figure 2This is a schematic diagram of the electrostatic dust removal device provided in this embodiment of the utility model.

[0025] Figure 3 This is a schematic diagram of the dust removal principle of the electrostatic dust removal device provided in this embodiment of the utility model.

[0026] In the diagram: 1-Sealed housing, 2-UV frequency doubling module, 3-Reflector group, 4-Refractor, 5-Light trash can, 6-Electrostatic dust removal device, 601-First metal plate, 602-Second metal plate, 701-Light inlet, 702-Light outlet, 801-Air inlet, 802-Air outlet, 9-Light, 10-Dust. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model. Furthermore, the technical features involved in the various embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.

[0028] This embodiment provides an ultraviolet laser, including a seed source, a fundamental frequency amplification module, and an ultraviolet generation module arranged sequentially along the optical path. For example... Figure 1 As shown, the ultraviolet generation module is housed in a sealed housing 1. The sealed housing 1 has an inlet 701 and an outlet 702, both of which are sealed with window mirrors.

[0029] Continue as Figure 1 As shown, the ultraviolet generation module includes an ultraviolet frequency doubling module 2, a reflector group 3, and a refractor 4 arranged sequentially along the optical path inside the sealed housing 1. The light 9 output by the fundamental frequency amplification module is incident through the light inlet 701 and generates ultraviolet light through the ultraviolet frequency doubling module 3. The fundamental frequency light and green light that have not undergone ultraviolet frequency doubling are reflected by the reflector group 3 to the light trash can 5. The ultraviolet light is refracted by the refractor 4 and output from the light outlet 702.

[0030] Specifically, in this embodiment, the ultraviolet frequency doubling module 2 includes a third-harmonic crystal. The output end of the third-harmonic crystal is at a Brewster angle, and the end face of the output end is uncoated, extending its service life. To facilitate a better light output angle, the window mirror of the light output port 702 is a Brewster angle window mirror, and the refractor 4 is a right-angle prism. The light 9 output from the fundamental frequency amplification module is incident through the light inlet 701 and generates ultraviolet light after passing through the third-harmonic crystal. The fundamental frequency light without frequency doubling, the green light generated by second harmonic generation, and the ultraviolet light generated by third harmonic generation are emitted at different angles. The reflector group 3 reflects the fundamental frequency light and the green light to the light trash can 5. After being refracted by the refractor 4 (right-angle prism), the ultraviolet light propagates parallel to the side of the laser, facilitating subsequent output applications. After passing through the Brewster angle window mirror, it is output from the light output port 702.

[0031] Continue as Figure 1 As shown, electrostatic dust removal devices 6 are provided on the side of the optical path between the ultraviolet frequency doubling module 2 and the reflector group 3, between the reflector group 2 and the refractor 4, and between the refractor 4 and the window mirror of the light outlet 702. An electrostatic dust removal device 6 is also provided on the side of the optical path between the reflector group 3 and the light trash can 5.

[0032] like Figure 2 As shown, in this embodiment, the electrostatic dust removal device 6 includes metal plates disposed on both sides of the area to be dusted (here, both sides of the optical path), namely the first metal plate 601 and the second metal plate 602 in the figure. The metal plates are connected to a voltage device. When voltage is applied to the metal plates, static electricity is generated, causing the area between the inner sides of the metal plates to form a dust removal area. The voltage device includes a low-voltage DC power supply, a DC-to-AC converter, a boost circuit (usually implemented by a transformer), and an AC-to-DC converter connected in sequence. The negative terminal of the AC-to-DC converter's output is connected to the first metal plate 601, and the positive terminal is connected to the second metal plate 602, resulting in a voltage of 0 for the first metal plate 601 and a DC high voltage of 5kV or higher for the second metal plate 602. Figure 3 As shown, an electric field is formed between the first metal plate 601 and the second metal plate 602. Dust particles 10, after becoming charged, are attracted to the inner side of either the first or second metal plate 602. Negatively charged dust particles 10 move towards the positive electrode, and positively charged dust particles 10 move towards the negative electrode. The electrostatic dust removal device 6 can also be implemented in other ways.

[0033] Preferably, the inner side of the metal plate is provided with an adhesive layer for fixing dust, so that the dust attracted by electrostatic attraction is collected on the adhesive material. The adhesive layer can be an adhesive tape of different materials, such as floor adhesive, polyimide tape, etc.

[0034] The shape of the metal plate can be designed according to requirements. It can be a symmetrical strip, a symmetrical arc, or an asymmetrical shape. The metal plate is distributed on both sides of the optical path, which can effectively reduce dust adhering to the components on the optical path, thereby extending the life of the components.

[0035] As a preferred embodiment, the sealing housing 1 is also provided with an air inlet 801 and an air outlet 802 for exchanging the gas inside the sealing housing 1, filling the cavity with pure nitrogen or filtered and dried air to improve the cleanliness inside the sealing housing 1. It should be noted that although the sealing housing 1 is provided with an air inlet 801 and an air outlet 802, the air inlet 801 and the air outlet 802 are only used for connecting to the gas circuit of other specific equipment, and the connection is sealed, so it will not damage the sealed environment inside the sealing housing 1.

[0036] This ultraviolet laser may also include a gas purification module. The gas purification module passes the gas through a container containing a desiccant and a filter device before it is filled into the cavity, reducing the humidity and dust in the gas. It is connected to the air inlet 801 and achieves a seal with the outside at the air inlet 801, reducing dust from the source of the air intake and improving the cleanliness of the sealed housing 1.

[0037] In some embodiments, an electrostatic dust removal device 6 is also provided inside the sealed housing 1 at the connection point between the air inlet 801 and the air outlet 802. Because the airflow speed is faster at the inlet and outlet positions, and the airflow carries more dust, this device can effectively adsorb the dust onto the inlet and outlet, thereby improving the cleanliness inside the sealed housing 1.

[0038] In some embodiments, the fundamental frequency amplification module is a picosecond laser or a nanosecond laser.

[0039] This invention uses electrostatic dust removal devices on both sides of the optical path to charge dust in the optical path and attract it to the electrostatic dust removal devices, thereby effectively reducing dust adsorption on the devices in the optical path, reducing the damage to the devices caused by dust absorbing laser heat, and thus extending the device life.

[0040] It should be noted that, depending on the implementation needs, the various steps / components described in this application can be broken down into more steps / components, or two or more steps / components or parts of the operation of steps / components can be combined into new steps / components to achieve the purpose of this utility model.

[0041] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An ultraviolet laser, comprising a seed source, a fundamental frequency amplification module, and an ultraviolet generation module arranged sequentially along an optical path, characterized in that: The ultraviolet generation module is housed in a sealed housing, which has an inlet and an outlet, both of which are sealed with window mirrors. The ultraviolet generation module includes an ultraviolet frequency doubling module, a reflector group and a refractor arranged sequentially along the optical path. The light output from the fundamental frequency amplification module is incident through the light inlet and then generates ultraviolet light through the ultraviolet frequency doubling module. The fundamental frequency light and green light that have not undergone ultraviolet frequency doubling are reflected to the light trash can through the reflector group, while the ultraviolet light is refracted by the refractor and output from the light outlet. Electrostatic dust removal devices are installed on the sides of the optical path between the ultraviolet frequency doubling module and the reflector group, between the reflector group and the refractor, and between the refractor and the window mirror of the light outlet.

2. The ultraviolet laser according to claim 1, characterized in that: An electrostatic dust removal device includes metal plates installed on both sides of the area to be dusted. The metal plates are connected to a voltage device. When voltage is applied to the metal plates, static electricity is generated, so that the area between the inner sides of the metal plates constitutes the dust removal area.

3. The ultraviolet laser according to claim 2, characterized in that: The inside of the metal plate has an adhesive layer for fixing dust.

4. The ultraviolet laser according to claim 2 or 3, characterized in that: The metal plate is symmetrical in the form of a long strip, a symmetrical arc, or an asymmetrical shape.

5. The ultraviolet laser according to claim 1, characterized in that: The refracting mirror is a right-angle prism; the light outlet window is a Brewster angle window.

6. The ultraviolet laser according to claim 1, characterized in that: The ultraviolet frequency doubling module includes a third frequency doubling crystal. The output terminal of the third frequency doubling crystal is at Brewster angle, and the end face of the output terminal is uncoated.

7. The ultraviolet laser according to claim 1, characterized in that: The sealed housing is also equipped with an air inlet and an air outlet; This ultraviolet laser also includes a gas purification module, which is connected to the air inlet.

8. The ultraviolet laser according to claim 7, characterized in that: An electrostatic dust removal device is also installed inside the sealed housing where it connects to the air inlet and outlet.

9. The ultraviolet laser according to claim 1, characterized in that: An electrostatic dust removal device is also installed on the side of the optical path between the reflector assembly and the light trash can.

10. The ultraviolet laser according to claim 1, characterized in that: The fundamental frequency amplification module is a picosecond laser or a nanosecond laser.

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