Single crystal furnace and connecting assembly

Abstract

The application provides a single crystal furnace and a connecting assembly. The single crystal furnace comprises a main furnace chamber, a furnace cover arranged at the upper end of the main furnace chamber, a sub-chamber lifting mechanism arranged above the furnace cover and in driving connection with the furnace cover, and at least one connecting assembly comprising a first mounting portion fixedly arranged on the furnace cover, a second mounting portion fixedly arranged on the main furnace chamber and corresponding in position to the first mounting portion, and a first connecting piece having one end connected with the first mounting portion and the other end connected with the second mounting portion. When the first connecting piece connects the main furnace chamber and the furnace cover into one body, the sub-chamber lifting mechanism lifts the main furnace chamber by lifting the furnace cover. The structure can directly and safely and stably lift the whole main furnace chamber by lifting the furnace cover, and the cumbersome steps such as disassembling a charging tank, installing a special lifting tool and the like are omitted, so that the operation process is simplified. Meanwhile, the structure no longer needs cooperation of multiple persons, reduces the labor cost, can reduce the configuration of special accessories of the equipment, and improves the utilization rate of the equipment and the maintenance efficiency.

Description

Technical Field

[0001] This application relates to the field of monocrystalline silicon manufacturing technology, and more specifically to a monocrystalline furnace and a connecting component. Background Technology

[0002] Existing Czochralski silicon single crystal furnace equipment has a complex main structure, including numerous components such as the frame, furnace bottom, main furnace chamber, furnace cover, isolation valve, auxiliary chamber, charging tank, and corresponding lifting mechanisms. The main furnace chamber, as a critical component, houses important components such as insulation layers and heaters. During the preparation phase between the end of each operation and the next charging cycle, the main furnace chamber and other components need to be lifted and rotated away from the furnace bottom at a certain angle to allow for maintenance, cleaning, and installation operations.

[0003] However, the current method for hoisting the main chamber of a single crystal furnace has significant drawbacks. When hoisting the main chamber, the charging tank must first be disassembled and removed, then a special hoisting fixture must be used before the hoisting operation can begin. After the main chamber is reset, the special fixture must be removed again and the charging tank reinstalled. This series of operations is cumbersome and complex, leading to low work efficiency. Furthermore, to ensure equipment safety, it typically requires two to three people working together, consuming considerable manpower and increasing the number of equipment accessories. Summary of the Invention

[0004] One of the purposes of this application is to provide a single crystal furnace to solve the technical problem in the prior art that the hoisting equipment of the main furnace chamber needs to be frequently disassembled and reassembled and requires the cooperation of many people, resulting in low efficiency and high labor costs.

[0005] To achieve one of the aforementioned objectives, this application provides a single-crystal furnace, comprising: a main furnace chamber and a furnace cover disposed at the upper end of the main furnace chamber; a secondary chamber lifting mechanism disposed above the furnace cover and pulsatorically connected to the furnace cover; at least one connecting assembly, comprising: a first mounting portion fixedly disposed on the furnace cover; a second mounting portion fixedly disposed on the main furnace chamber, corresponding to the position of the first mounting portion; a first connecting member, one end of which is connected to the first mounting portion and the other end of which is connected to the second mounting portion; when the first connecting member connects the main furnace chamber and the furnace cover as a whole, the secondary chamber lifting mechanism lifts the main furnace chamber by lifting the furnace cover.

[0006] As a further improvement of one embodiment of this application, the single crystal furnace further includes a detection device disposed on the first mounting part or the furnace cover, for detecting the connection status of the first connector with the first mounting part and the second mounting part.

[0007] As a further improvement of one embodiment of this application, the detection device includes a photoelectric switch or a limit switch.

[0008] As a further improvement of one embodiment of this application, the single crystal furnace also includes a protective cover, which is disposed outside the detection device. The protective cover is provided with a through hole for the photoelectric switch wiring and a through hole for the first connector to pass through.

[0009] As a further improvement of one embodiment of this application, the first mounting part includes a first fixing plate and a first mounting piece and a second mounting piece extending from both ends of the first fixing plate in the same direction, a first groove is formed between the first mounting piece and the second mounting piece, and the first fixing plate is fixedly connected to the furnace cover.

[0010] As a further improvement of one embodiment of this application, the first mounting plate is provided with a first mounting hole, and the second mounting plate is provided with a second mounting hole corresponding to the first mounting hole.

[0011] As a further improvement of one embodiment of this application, the second mounting part is configured as a second fixing plate, one end of which is fixedly connected to the main furnace chamber, and the other end of which extends freely into an insert plate structure adapted to the first groove.

[0012] As a further improvement of one embodiment of this application, the insert structure is provided with a third mounting hole.

[0013] As a further improvement of one embodiment of this application, the first connector is configured as a pin, and the pin is provided with a backstop structure.

[0014] As a further improvement of one embodiment of this application, the pin includes a body and a locking structure. One end of the body is provided with a head for connection or insertion, and the other end is provided with a handle. The locking structure includes an elastic element and a locking protrusion or locking claw disposed on the body.

[0015] As a further improvement of one embodiment of this application, the number of the connecting components is three, and they are evenly distributed circumferentially between the main furnace chamber and the furnace cover.

[0016] To achieve one of the above-mentioned objectives, this application provides a connecting component applied to the single crystal furnace. The connecting component is used to connect the main furnace chamber and the furnace cover, so that the main furnace chamber and the furnace cover can be lifted and lowered in conjunction through a secondary chamber lifting mechanism connected to the furnace cover.

[0017] Compared with the prior art, the embodiments of this application have at least one of the following beneficial effects: This application discloses a single-crystal furnace, which effectively connects the main furnace chamber and the furnace cover through a connecting component. When the first connecting component integrates the main furnace chamber and the furnace cover, the auxiliary chamber lifting mechanism can lift the main furnace chamber by lifting the furnace cover. This structure allows the auxiliary chamber lifting mechanism, which was originally only used for lifting the furnace cover or auxiliary chamber, to directly and safely and stably lift the entire main furnace chamber by lifting the furnace cover, completely eliminating the cumbersome steps of disassembling the charging tank and installing special hoisting fixtures in traditional methods, thus simplifying the operation process. Furthermore, this structure not only makes single-person operation possible, eliminating the need for multiple people and reducing labor costs, but also reduces the configuration of special equipment accessories, improving equipment utilization and maintenance efficiency. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of a single crystal furnace 100 in one embodiment of this application.

[0019] Figure 2 This is a schematic diagram of the structure of the connecting component 200 in one embodiment of this application.

[0020] Figure 3(a) is a schematic diagram of the structure of the first mounting part 21 in one embodiment of this application.

[0021] Figure 3(b) is a schematic diagram of the structure of the second mounting part 22 in one embodiment of this application.

[0022] Figure 4 This is a schematic diagram of the structure of the first connector 23 in one embodiment of this application.

[0023] Figure 5 This is a schematic diagram of the structure of a single crystal furnace 100 having multiple connecting components 200 in one embodiment of this application.

[0024] Figure 6 This is a schematic diagram of the structure of a single crystal furnace 100 with a detection device 13 in one embodiment of this application.

[0025] Figure 7(a) is an exploded structural diagram of a single crystal furnace 100 with a protective cover 14 in one embodiment of this application.

[0026] Figure 7(b) is a schematic diagram of the combined structure of a single crystal furnace 100 with a protective cover 14 in one embodiment of this application.

[0027] Figure 7(c) is a schematic diagram of the structure of the protective cover 14 in one embodiment of this application.

[0028] Figure 8 This is a schematic diagram of the structure of the connecting component 200 in one embodiment of this application. Detailed Implementation

[0029] The present application will now be described in detail with reference to the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present application, and any structural, methodological, or functional modifications made by those skilled in the art based on these embodiments are included within the scope of protection of this application.

[0030] The terms used in this document, such as “center,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” and “outer,” indicating spatial relative positions, are used for illustrative purposes to describe the relationship of one unit or feature relative to another unit or feature as shown in the accompanying drawings. The terms “spatial relative positions” may be intended to include different orientations of the equipment in use or operation other than those shown in the figures.

[0031] For example, if the device in the figure is flipped, a unit described as being "below" or "under" other units or features will be "above" other units or features. Therefore, the exemplary term "below" can encompass both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or otherwise) and the spatially related descriptive terms used herein will be interpreted accordingly.

[0032] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0033] It should be noted that the term "comprising" or any other variation thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0034] like Figure 1 As shown, one embodiment of this application provides a single crystal furnace 100.

[0035] A single crystal furnace 100 is a device used for crystal (such as silicon rod) growth. It provides specific environmental conditions, such as suitable temperature and pressure, for the single crystal growth process to achieve the transformation from raw materials to single crystals.

[0036] The single crystal furnace 100 includes a main furnace chamber 11 and a furnace cover 12 disposed at the upper end of the main furnace chamber 11. The furnace cover 12 is used to cover the main furnace chamber 11, thereby sealing and protecting the internal environment of the main furnace chamber 11.

[0037] The main furnace chamber 11 has a cylindrical cavity structure and is made of high-strength, high-temperature resistant, and corrosion-resistant materials. It is the core reaction vessel of the single crystal furnace 100. It includes heaters, insulation layers, etc., and is used to hold molten silicon material and grow silicon single crystal rods in it.

[0038] The upper end of the main furnace chamber 11 has a flat opening edge for sealing connection with the furnace cover 12. The furnace cover 12 has a disc-shaped structure and is also made of a material that is resistant to high temperatures, corrosion, and has good sealing performance. A good sealing effect is achieved by using a sealing ring to tightly fit the furnace cover 12 with the upper end of the main furnace chamber 11.

[0039] The single crystal furnace 100 includes a secondary chamber lifting mechanism, which is located above the furnace cover 12 and is connected to the furnace cover 12 via a transmission connection. This transmission connection refers to the power transmission relationship established between the secondary chamber lifting mechanism and the furnace cover 12 through a mechanical structure (such as gear transmission, chain transmission, or screw transmission).

[0040] The function of the auxiliary chamber lifting mechanism is to drive the furnace cover 12, which is connected to it, to move up and down through its own lifting action, and in turn drive other components associated with the furnace cover 12 (such as the main furnace chamber 11) to move up and down.

[0041] In one embodiment, the auxiliary chamber lifting mechanism is mounted on a fixed bracket above the furnace cover 12 and connected to the furnace cover 12 via a gear and rack transmission. Specifically, a motor drives a gear to rotate, and the gear meshes with a rack fixed to the furnace cover 12, thereby converting the rotational motion of the motor into the linear lifting motion of the furnace cover 12. Of course, other transmission connection methods can also be used, such as screw and nut transmission, chain transmission, etc., and there is no specific limitation on this.

[0042] The single crystal furnace 100 includes at least one connecting component 200, which fixes the main furnace chamber 11 and the furnace cover 12 together through specific structural components, so that the two become a relatively stable whole, so as to achieve synchronous lifting under the action of the auxiliary chamber lifting mechanism.

[0043] like Figure 2 As shown, the connecting assembly 200 includes a first mounting part 21, a second mounting part 22, and a first connector 23.

[0044] The first mounting part 21 is fixedly disposed on the furnace cover 12, providing the mounting position and connection point of the connecting component 200 on the furnace cover 12; the second mounting part 22 is fixedly disposed on the main furnace chamber 11, corresponding to the position of the first mounting part 21, providing the mounting position and connection point of the connecting component 200 on the main furnace chamber 11.

[0045] The shape and structure of the first mounting part 21 and the second mounting part 22 are determined according to the connection method with the first connector 23 and the overall design of the furnace cover 12 and the main furnace chamber 11, to ensure that they can be stably connected with the first connector 23.

[0046] The first connector 23 is the component in the connecting assembly 200 that plays the actual connecting role. One end of it is connected to the first mounting part 21, and the other end is connected to the second mounting part 22. When the first connector 23 connects the main furnace chamber 11 and the furnace cover 12 into one unit, the auxiliary chamber lifting mechanism lifts the main furnace chamber 11 along with the lifting furnace cover 12.

[0047] As shown in Figure 3(a), in one embodiment, the first mounting part 21 includes a first fixing plate 1, and a first mounting piece 2 and a second mounting piece 3 extending from both ends of the first fixing plate 1 in the same direction. A first groove 4 is formed between the first mounting piece 2 and the second mounting piece 3. The first fixing plate 1 is fixedly connected to the furnace cover 12.

[0048] In this embodiment, the first fixing plate 1 can be firmly connected to the furnace cover 12 by welding, riveting or other means. The first groove 4 is elongated, providing clear spatial positioning for the second mounting part 22, which helps to install quickly and accurately and improves assembly efficiency.

[0049] Referring to FIG3(a), in one specific embodiment, the first mounting plate 2 is provided with a first mounting hole 5, and the second mounting plate 3 is provided with a second mounting hole 6 corresponding to the first mounting hole 5.

[0050] In this embodiment, the mounting holes allow the first connector 23 to pass through accurately and be fixed. The bolts, pins and other connectors cooperate with the mounting holes to achieve a reliable mechanical connection, ensuring that the components will not easily loosen or separate during the operation of the single crystal furnace 100. Moreover, when disassembly or maintenance is required, the first connector 23 can be loosened, making the operation convenient and quick.

[0051] As shown in Figure 3(b), in one embodiment, the second mounting part 22 is configured as a second fixing plate, one end of which is fixedly connected to the main furnace chamber 11, and the other end of which extends freely as an insert plate structure adapted to the first groove 4.

[0052] In this embodiment, the second mounting part 22 is also firmly fixedly connected to the main furnace chamber 11 by welding, riveting, or other methods, ensuring the stability of the second mounting part 22 itself. Its freely extending insert structure fits tightly with the first groove 4 in shape and size, reducing gaps and shaking.

[0053] Referring again to FIG3(b), in one specific embodiment, a third mounting hole 7 is provided on the insert structure. The position and size of the third mounting hole 7 correspond to the first mounting hole 5 and the second mounting hole 6. The first mounting part 21 and the second mounting part 22 are connected together by the first connector 23 through the first mounting hole 5, the second mounting hole 6 and the third mounting hole 7.

[0054] In this way, the stress generated during the connection process is dispersed through the combined action of multiple mounting holes, so that the single crystal furnace 100 will not separate or loosen even when subjected to various forces such as vibration and impact.

[0055] In one embodiment, the first connector 23 is configured as a pin. The pin passes sequentially through the first mounting hole 5, the third mounting hole 7, and the second mounting hole 6, connecting the first mounting portion 21 and the second mounting portion 22 together.

[0056] like Figure 4 As shown, in one specific embodiment, the first connector 23 is configured as a pin with a locking structure. Specifically, the pin includes a body 23-1 and a locking structure 23-2. One end of the body 23-1 is provided with a head 23-3 for connection or insertion, and the other end is provided with a handle 23-4. The locking structure 23-2 includes an elastic element and a locking protrusion or locking claw disposed on the body 23-1.

[0057] Thus, by configuring the first connector 23 as a pin with a backstop structure 23-2, the pin can be effectively prevented from falling off by itself after being inserted into the connection, ensuring that the connection between the main furnace chamber 11 and the furnace cover 12 remains stable, and avoiding safety hazards and equipment failures caused by loose connections.

[0058] In this embodiment, the shape and size of the end 23-3 are designed according to the actual connection requirements, such as being round or square. Its main purpose is to facilitate the insertion of the pin into the corresponding mounting hole or slot to achieve the initial connection.

[0059] During the insertion of the pin, the anti-reverse protrusion or anti-reverse claw can smoothly pass through the mounting hole and other structures under the action of the elastic element. When the pin is inserted into place, the elastic force of the elastic element causes the anti-reverse protrusion or anti-reverse claw to pop out and lock the structure around the mounting hole, thereby effectively preventing the pin from retracting on its own when subjected to external force.

[0060] In actual operation, the operator only needs to hold the handle 23-4, align the end 23-3 of the pin with the mounting hole, and insert it. When the operator hears or feels the locking sound or resistance of the anti-reverse structure 23-2, it indicates that the pin has been installed in place and effectively prevented from retracting, ensuring that the connection between the main furnace chamber 11 and the furnace cover 12 remains stable. This design ensures both the convenience of inserting and removing the pin and the reliable implementation of the anti-reverse function, improving the ease of use and reliability of the connecting component 200.

[0061] The number of connecting components 200 may include multiple components. In one embodiment, the number of connecting components 200 is three, and they are evenly distributed circumferentially between the main furnace chamber 11 and the furnace cover 12, such as... Figure 5 As shown.

[0062] Thus, by setting the number of connecting components 200 to three and distributing them evenly along the circumference, the connection points between the main furnace chamber 11 and the furnace cover 12 are evenly distributed in the circumferential direction, avoiding damage to certain parts due to excessive stress caused by uneven distribution of connection points, thereby improving the stability and reliability of the connection.

[0063] like Figure 6 As shown, in one embodiment, the single crystal furnace 100 further includes a detection device 13, which is disposed on the first mounting part 21 or the furnace cover 12, and is used to detect the connection status between the first connector 23 and the first mounting part 21 and the second mounting part 22.

[0064] Thus, by setting up the detection device 13, the condition of the connection parts can be monitored in real time and accurately, and potential problems such as loose connections and abnormal separation can be detected in a timely manner, thus avoiding safety accidents caused by connection failures.

[0065] In one specific embodiment, the detection device 13 can be a photoelectric switch or a limit switch.

[0066] In this way, it can respond quickly and accurately to changes in connection status and issue alarm signals in a timely manner.

[0067] In this embodiment, the photoelectric switch utilizes the photoelectric effect for detection, a non-contact detection method that avoids additional interference and damage to the connectors, offers high detection accuracy, and can detect minute displacement changes. Limit switches, on the other hand, detect the position and state of an object through the action of mechanical contacts, and are characterized by simple structure and high reliability.

[0068] Continue to refer to Figure 2 Figure 3 and Figure 6As shown, in one specific embodiment, the photoelectric switch is mounted on the surface of the first mounting plate 2 in the first mounting part 21 away from the second mounting plate 3. The first mounting plate 2 provides a stable and easy-to-operate mounting base for the photoelectric switch. When the first connector 23 passes through the second mounting hole 6 on the second mounting plate 3, the third mounting hole 7 on the second mounting part 22, and the first mounting hole 5 on the first mounting plate 2 in sequence, the protruding end 23-3 of the first connector 23 is located on the beam path formed by the light emitted by the photoelectric switch. At this time, the end 23-3 blocks the light, causing the light that could have reached the receiving end to be blocked, and the intensity of the light received by the receiving end changes.

[0069] When the light intensity at the receiving end is lower than the preset threshold, it is determined that an object is blocking the light, which means that the first connector 23 has successfully passed through the first, second, and third mounting holes to achieve the connection between the furnace cover 12 and the main furnace chamber 11; conversely, when the light intensity at the receiving end is higher than the preset threshold, it indicates that no object is blocking the light, that is, the first connector 23 is not correctly connected or not connected.

[0070] Continue to refer to Figure 6 As shown, a photoelectric switch mounting plate 8 can also be provided between the photoelectric switch and the first mounting plate 2, that is, the photoelectric switch mounting plate 8 is fixedly mounted on the surface of the first mounting plate 2 away from the second mounting plate 3, and the photoelectric switch is fixedly mounted on one side of the photoelectric switch mounting plate 8.

[0071] As shown in Figures 7(a) to 7(c), in one embodiment, the single crystal furnace 100 further includes a protective cover 14, which covers the outside of the detection device 13. The protective cover 14 is provided with a through hole 14-1 for connecting the photoelectric switch and an insertion hole 14-2 for inserting the end 23-3 of the first connector 23.

[0072] Thus, by covering the detection device 13 with a protective cover 14, a physical barrier can be formed to isolate the detection device 13 from the harsh external environment, preventing dust and impurities from adhering to the surface of the detection device 13 and affecting its detection accuracy.

[0073] In this embodiment, the working environment of the single crystal furnace 100 is relatively complex, and there may be factors such as dust, impurities, splashed liquid, and accidental collisions. The protective cover 14 can protect the detection device 13 from being affected. For example, it can prevent dust and impurities from adhering to the surface of the photoelectric switch and avoid affecting the photoelectric switch's function of emitting and receiving light; it can block splashed liquid and prevent liquid from entering the detection device 13 and causing short circuits and other faults; it can withstand a certain amount of external force collision and protect the detection device 13 from damage.

[0074] In addition, the protective cover 14 is made of high-strength, corrosion-resistant material, and its shape is customized according to the shape of the detection device 13. A through hole 14-1 for connecting the photoelectric switch is provided on the protective cover 14, which ensures that the photoelectric switch can be connected to the external circuit normally to realize signal transmission, without compromising the overall protective performance of the protective cover 14. This allows the protective cover 14 to play a protective role without affecting the normal operation of the detection device 13.

[0075] In one embodiment, a through hole 14-2 is provided on the protective cover 14 for the first connector 23 to pass through. The through hole 14-2 corresponds to the installation positions of the first mounting part 21, the second mounting part 22, and the first connector 23. Specifically, during the installation process, when the first mounting part 21 and the second mounting part 22 are connected through the first connector 23, the first connector 23 needs to pass through the corresponding holes on the first mounting part 21 and the second mounting part 22 in sequence. The through hole 14-2 on the protective cover 14 is exactly on the path through which the first connector 23 passes, providing the necessary channel for the smooth insertion of the first connector 23.

[0076] The following will combine Figure 1 The installation process of the single crystal furnace is described up to Figure 7(c).

[0077] First, install the detection device 13. Select a photoelectric switch as the detection device 13 according to requirements, and install it onto the surface of the first mounting plate 2 in the first mounting part 21 that is away from the second mounting plate 3. During installation, use the photoelectric switch mounting plate 8 with bolts and nuts to fix the photoelectric switch mounting plate 8 and the photoelectric switch onto the first mounting plate 2.

[0078] Next, complete the docking of the first mounting part 21 and the second mounting part 22. Slowly insert the insert plate structure of the second mounting part 22 into the first groove 4 of the first mounting part 21. During the insertion process, carefully adjust the position to ensure that the first mounting hole 5 on the first mounting plate 2, the second mounting hole 6 on the second mounting plate 3, and the third mounting hole on the insert plate structure are precisely aligned.

[0079] After aligning the three mounting holes, the first connector 23 is installed. The first connector 23 is in the form of a pin, with the end 23-3 passing through the second mounting hole 6, the third mounting hole 7, and the first mounting hole 5 in sequence, so that the pin passes through the three holes, realizing the initial connection between the first mounting part 21 and the second mounting part 22.

[0080] Once the pin is inserted into place, the elastic element in the anti-retraction structure 23-2 pushes the anti-retraction protrusion or anti-retraction claw to pop out and lock in the corresponding position, preventing the pin from accidentally falling off and ensuring connection stability. Since there are three connecting components 200 and they are evenly distributed circumferentially between the main furnace chamber 11 and the furnace cover 12, the installation of the three connecting components 200 is completed in sequence according to the above method to ensure that the connection between the main furnace chamber 11 and the furnace cover 12 is uniform and stable.

[0081] Finally, install the protective cover 14. Place the protective cover 14 over the installed detection device 13 and secure it to the first mounting part 21 using the snap-fit ​​structure on the protective cover 14 to ensure that the protective cover 14 fits tightly and will not loosen.

[0082] The protective cover 14 is provided with through holes 14-1 and 14-2. When connecting the photoelectric switch circuit, the wire is smoothly passed through the through hole 14-1, and sealant is used to seal the gap between the wire and the through hole 14-1 to prevent dust and liquid from entering the interior of the protective cover 14. The end 23-3 of the first connector 23 is passed through the first mounting hole 5 and then through the through hole 14-2 of the protective cover 14.

[0083] After the main furnace chamber 11 and the furnace cover 12 are connected by the connecting assembly 200, the connecting assembly 200 is connected to the auxiliary chamber lifting mechanism by a high-strength transmission chain and gear set. When the operator starts the auxiliary chamber lifting mechanism, the power is transmitted to the gear set through the transmission chain, and the gear set then distributes the power evenly to the connecting assembly 200. The connecting assembly 200 synchronously transmits the power to the main furnace chamber 11 and the furnace cover 12, enabling them to rise or fall smoothly and synchronously.

[0084] like Figure 8 As shown, one embodiment of this application provides a connecting component 200. This connecting component 200 is applied to a single crystal furnace 100 for quickly connecting the main furnace chamber 11 and the furnace cover 12, and realizing the linkage lifting and lowering of the two through the auxiliary chamber lifting mechanism.

[0085] The connecting component 200 adopts a unique snap-fit ​​design. During connection, simply align one end of the connecting component 200 with the main furnace chamber 11 interface and gently push; the snap will automatically lock, emitting a crisp "click" sound, indicating a successful connection. The entire process takes only a few seconds. Simultaneously, precise positioning pins and holes are set inside the connecting structure. When the connecting component 200 is connected to the main furnace chamber 11, the positioning pins accurately insert into the positioning holes, ensuring connection precision and avoiding equipment operation problems caused by installation deviations.

[0086] The other end of the connecting component 200 is connected to the furnace cover 12. The connection method also adopts a quick snap design, and a sealing ring is set around the snap. When the connecting component 200 is connected to the furnace cover 12, the sealing ring will be compressed to form a good sealing effect, effectively preventing gas leakage inside the furnace and ensuring the vacuum environment inside the single crystal furnace 100.

[0087] Furthermore, with the adoption of this connection component 200, only one operator is needed to complete the separation operation of the main furnace chamber 11 and the furnace cover 12 within a few minutes, which greatly improves maintenance efficiency, reduces equipment downtime, and brings significant economic benefits to the enterprise.

[0088] In summary, this application provides a single crystal furnace 100 and a connecting assembly 200. By setting the connecting assembly 200, the main furnace chamber 11 and the furnace cover 12 are effectively connected. When the first connecting member 23 connects the main furnace chamber 11 and the furnace cover 12 as a single unit, the auxiliary chamber lifting mechanism can lift the main furnace chamber 11 along with the furnace cover 12. This structure allows the auxiliary chamber lifting mechanism, which was originally only used for lifting the furnace cover 12 or the auxiliary chamber, to directly and safely and stably lift the entire main furnace chamber 11 along with the furnace cover 12, completely eliminating the cumbersome steps of disassembling the charging tank and installing special hoisting fixtures in traditional methods, thus simplifying the operation process. At the same time, this structure not only makes single-person operation possible, eliminating the need for multiple people and reducing labor costs, but also reduces the configuration of special equipment accessories, improving equipment utilization and maintenance efficiency.

[0089] It should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This way of describing the specification is only for clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0090] The detailed descriptions listed above are merely specific descriptions of feasible implementation methods of this application and are not intended to limit the scope of protection of this application. All equivalent implementation methods or modifications made without departing from the spirit of the art of this application should be included within the scope of protection of this application.

Claims

1. A single crystal furnace, characterized in that, include: The main furnace chamber and the furnace cover located at the upper end of the main furnace chamber; The auxiliary chamber lifting mechanism is located above the furnace cover and is connected to the furnace cover via a transmission mechanism. At least one connection component, including: The first mounting part is fixedly installed on the furnace cover; The second mounting part is fixedly installed on the main furnace chamber, corresponding to the position of the first mounting part; The first connector has one end connected to the first mounting part and the other end connected to the second mounting part; When the first connector connects the main furnace chamber and the furnace cover into one unit, the auxiliary chamber lifting mechanism lifts the main furnace chamber by lifting the furnace cover.

2. The single crystal furnace according to claim 1, characterized in that, The single crystal furnace also includes a detection device disposed on the first mounting part or the furnace cover, for detecting the connection status of the first connector with the first mounting part and the second mounting part.

3. The single crystal furnace according to claim 2, characterized in that, The detection device includes a photoelectric switch or a limit switch.

4. The single crystal furnace according to claim 3, characterized in that, The single crystal furnace also includes a protective cover, which is placed outside the detection device. The protective cover has a through hole for the photoelectric switch wiring and a through hole for the first connector to pass through.

5. The single crystal furnace according to claim 1, characterized in that, The first mounting portion includes a first fixing plate and a first mounting piece and a second mounting piece extending from both ends of the first fixing plate in the same direction. A first groove is formed between the first mounting piece and the second mounting piece. The first fixing plate is fixedly connected to the furnace cover.

6. The single crystal furnace according to claim 5, characterized in that, The first mounting plate has a first mounting hole, and the second mounting plate has a second mounting hole corresponding to the first mounting hole.

7. The single crystal furnace according to claim 5, characterized in that, The second mounting part is configured as a second fixing plate, one end of which is fixedly connected to the main furnace chamber, and the other end of which extends freely as an insert plate structure adapted to the first groove.

8. The single crystal furnace according to claim 7, characterized in that, The insert structure is provided with a third mounting hole.

9. The single crystal furnace according to claim 1, characterized in that, The first connector is configured as a pin, and the pin is provided with a backstop structure.

10. The single crystal furnace according to claim 9, characterized in that, The pin includes a body and a locking structure. One end of the body is provided with a head for connection or insertion, and the other end is provided with a handle. The locking structure includes an elastic element and a locking protrusion or locking claw disposed on the body.

11. The single crystal furnace according to claim 1, characterized in that, The number of connecting components is three, and they are evenly distributed circumferentially between the main furnace chamber and the furnace cover.

12. A connecting component, characterized in that, Applied to the single crystal furnace according to any one of claims 1-11, the connecting assembly is used to connect the main furnace chamber and the furnace cover, so that the main furnace chamber and the furnace cover can be lifted and lowered in conjunction through the auxiliary chamber lifting mechanism connected to the furnace cover.

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