Airtight ceramic disc ultrasonic cleaning device

Abstract

This utility model discloses a sealed ceramic disc ultrasonic cleaning device, comprising: a support assembly, a cleaning assembly, a cleaning agent circulation assembly, and a pressure control assembly. The support assembly provides support. The cleaning assembly includes: a cleaning tank, a base, and a heating circulation pipe. The base is fixed to the top of the support assembly, the cleaning tank is placed on the base, and the heating circulation pipe is fixed to the outer surface of the cleaning tank. The cleaning agent circulation assembly is connected to the cleaning tank and controls the delivery or discharge of cleaning agent into or from the cleaning tank. The pressure control assembly includes: a first gas pipeline and a second gas pipeline; one end of the first gas pipeline is connected to a gas source, and the other end is connected to the cleaning tank to introduce pressurized gas into the cleaning tank; a first gas valve is provided on the first gas pipeline; one end of the second gas pipeline is connected to a tail gas treatment device, and the other end is connected to the cleaning tank to discharge gas from the cleaning chamber; a second gas valve is provided on the second gas pipeline.

Description

Technical Field

[0001] This utility model relates to the field of cleaning device technology, specifically to a sealed ceramic disc ultrasonic cleaning device. Background Technology

[0002] In many precision fields such as semiconductors, electronic circuits, and medical equipment, cleaning processes play a crucial role in ensuring product quality and performance. Currently, these cleaning processes mainly employ two methods: physical (such as ultrasonic cleaning) and chemical (such as organic solvents). Regarding physical cleaning methods, while ultrasonic cleaning offers advantages such as high efficiency and environmental friendliness, it suffers from incomplete cleaning. Especially for workpieces with complex surface structures and micropores, such as ceramic discs with electrostatic chucks, the force of ultrasonic waves cannot penetrate evenly to every corner, resulting in some contaminants remaining and failing to meet increasingly stringent cleaning standards. Chemical cleaning methods often use organic solvents. However, organic solvents are highly volatile, posing significant safety hazards.

[0003] During the cleaning process, existing cleaning agents are typically heated electrically. If the volatile gases of the cleaning agent (i.e., organic solvent) accumulate in a confined space, it can easily cause a fire or even an explosion. Furthermore, some types of cleaning agents are highly temperature-sensitive, achieving ideal cleaning results only within a specific temperature range. Increased temperature, however, exacerbates the evaporation of the cleaning agent. This not only increases the complexity and operating costs of the cleaning equipment but also places extremely high demands on the precision of temperature control. If the temperature deviates beyond the specified range, the cleaning effect will be significantly reduced, and it may even damage the electrostatic chuck. Utility Model Content

[0004] The purpose of this invention is to provide a sealed ultrasonic cleaning device for ceramic discs, which reduces the amount of cleaning agent volatilized in the cleaning chamber during the cleaning process, and improves the cleaning effect of the electrostatic chuck and the safety of the cleaning operation.

[0005] To achieve the above objectives, this utility model provides a sealed ceramic disc ultrasonic cleaning device, comprising: Support components, used to provide support; A cleaning assembly includes: a cleaning tank, a base, and a heating circulation pipe. The base is fixed to the top of the support assembly, the cleaning tank is placed on the base, and the heating circulation pipe is fixed to the outer surface of the cleaning tank. A cleaning agent circulation component is connected to the cleaning tank and controls the delivery of cleaning agent into or discharge of cleaning agent from the cleaning tank. The pressure control component includes: a first gas pipeline and a second gas pipeline; one end of the first gas pipeline is connected to a gas source and the other end is connected to a cleaning tank to introduce pressurized gas into the cleaning tank; and a first gas valve is provided on the first gas pipeline; one end of the second gas pipeline is connected to a tail gas treatment device and the other end is connected to the cleaning tank to discharge gas from the cleaning chamber; and a second gas valve is provided on the second gas pipeline.

[0006] Optionally, the base is provided with a plurality of ultrasonic transducers, which are evenly arranged.

[0007] Optionally, the cleaning tank includes: A cleaning chamber has a cleaning cavity inside, and a number of evenly distributed positioning pins are provided at the bottom of the cleaning cavity. Each positioning pin includes a support section and a positioning section. The support section is fixed to the bottom of the cleaning cavity, and the positioning section is fixed to the support section. The diameter of the positioning section matches the diameter of the through hole on the surface of the electrostatic chuck, and the diameter of the positioning section is smaller than the diameter of the support section.

[0008] The top cover is located on the top of the cleaning chamber; and the top cover is sealed to the cleaning chamber by a fastener.

[0009] Optionally, the lower surface of the top cover is provided with a sealing ring that matches the size of the top of the cleaning chamber.

[0010] Optionally, both ends of the heating circulation tube are connected to a heat source, and the heating circulation tube is arranged in an S-shape on the outer surface of the cleaning chamber.

[0011] Optionally, the outer surface of the cleaning chamber is provided with a temperature indicator to display the temperature of the cleaning chamber.

[0012] Optionally, the cleaning agent circulation assembly includes: The liquid storage tank is located below the support and contains the cleaning agent. The first pipeline has its two ends connected to the bottom of the storage tank and the bottom of the cleaning chamber, respectively; and an inlet valve is provided at the end of the first pipeline near the cleaning chamber. An inlet pump is installed on the first pipeline and located near the end of the first pipeline that connects to the storage tank, and injects the cleaning agent in the storage tank into the cleaning chamber; The second pipeline is connected at both ends to the bottom of the liquid storage tank and the bottom of the cleaning chamber, and a reflux valve is provided on the second pipeline. The third pipeline is connected at both ends to the top of the liquid storage tank and the cleaning chamber, respectively, and the connection between the third pipeline and the cleaning chamber is located near the top of the cleaning chamber; a balance valve is provided on the third pipeline.

[0013] Optionally, both ends of the second pipeline are fixed to the first pipeline and are located on the cleaning agent input side and cleaning agent output side of the inlet pump, respectively, so that the reflux valve on the second pipeline is connected in parallel with the inlet pump and in series with the inlet valve.

[0014] Optionally, the pressure control component further includes a pressure gauge, which is disposed on the upper cover and communicates with the cleaning chamber, for detecting the pressure of the cleaning chamber.

[0015] Optionally, the support assembly includes a bracket with a mounting hole on its top surface for placing a base.

[0016] Compared with the prior art, the technical solution of this utility model has at least the following beneficial effects: The cleaning device of this invention adds a first gas pipeline and a second gas pipeline to the top of the cleaning tank, and controls the opening and closing states of the first and second gas pipelines through a first gas valve and a second gas valve to realize the operation of pressurization, pressure holding, gas replacement, and pressure release of the cleaning chamber. By pressurizing and holding the cleaning chamber, the amount of cleaning agent volatilized in the cleaning chamber during the cleaning process is reduced, improving the cleaning effect of the electrostatic chuck and reducing the amount of cleaning agent used, thereby reducing cleaning costs. Simultaneously, the pressurization operation of the cleaning chamber can also counteract the increased volatilization of cleaning agent caused by temperature rise, reducing the temperature sensitivity of the cleaning tank operation and making the cleaning device of this invention applicable to more conditions. Furthermore, the gas replacement operation of the cleaning chamber reduces the concentration of volatile cleaning agent gas in the cleaning chamber after the cleaning operation is completed and before the top cover is opened, preventing the accumulation of volatile cleaning agent gas in a confined space (i.e., excessive concentration of volatile gas in the cleaning chamber) and thus preventing fire or even explosion accidents, improving the safety of the cleaning operation.

[0017] The cleaning device described in this utility model uses a heating circulation tube to heat the cleaning agent. The heating equipment does not directly contact the cleaning agent, effectively solving the fire hazard caused by using electric heating. Attached Figure Description

[0018] Figure 1 This is a first-view structural schematic diagram of the cleaning device described in this utility model.

[0019] Figure 2 This is a second-view structural schematic diagram of the cleaning device described in this utility model.

[0020] Figure 3 This is a third-view structural diagram of the cleaning device described in this utility model.

[0021] Figure 4 This is a schematic diagram of the cleaning device described in this utility model being placed in an electrostatic chuck.

[0022] In the diagram, 1-bracket, 2-cleaning chamber, 3-top cover, 4-hinge, 5-fixing component, 6-sealing ring, 7-base, 8-ultrasonic transducer, 9-heating circulation tube, 10-color-changing indicator sticker, 111-first gas pipeline, 112-second gas pipeline, 12-pressure gauge, 13-positioning pin, 14-liquid storage tank, 15-inlet pump, 16-reflux valve, 17-inlet valve, 18-balance valve, 19-electrostatic chuck, 20-through hole of electrostatic chuck, 21-first fixing hole. Detailed Implementation

[0023] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0024] In the description of this utility model, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0025] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0026] like Figures 1-3 As shown, this utility model provides a sealed ultrasonic cleaning device for ceramic discs, such as those using electrostatic chucks, for cleaning ceramic discs. It includes a support assembly, a cleaning assembly, a cleaning agent circulation assembly, and a pressure control assembly. The support assembly provides support; the cleaning assembly is fixed to the support assembly; the cleaning agent circulation assembly is connected to the cleaning assembly and controls the delivery or discharge of cleaning agent into or from the cleaning assembly; the pressure control assembly is located on the cleaning assembly and controls the internal pressure of the cleaning assembly.

[0027] The support assembly includes a bracket 1, which provides support force, and the top surface of the bracket 1 is provided with a mounting hole for placing the cleaning assembly.

[0028] like Figure 1 and Figure 2 As shown, the cleaning assembly includes a cleaning tank, a base 7, and a heating circulation pipe 9. The base 7 is fixed in the mounting hole of the bracket 1, the cleaning tank is placed on the base 7, and the heating circulation pipe 9 is fixed to the outer surface of the cleaning tank.

[0029] Specifically, the cleaning tank includes a cleaning chamber 2 and a top cover 3. For example... Figure 4 As shown, the cleaning chamber 2 has a cleaning cavity inside, and the bottom of the cleaning cavity is provided with several evenly distributed positioning pins 13. Each positioning pin 13 includes a support section and a positioning section. The support section is fixed to the bottom of the cleaning cavity, and the positioning section is fixed to the support section. The diameter of the positioning section matches the diameter of the through hole 20 on the surface of the electrostatic chuck 19, and the diameter of the positioning section is smaller than the diameter of the support section, so that the through hole 20 on the surface of the electrostatic chuck 19 is fitted onto the positioning section of the positioning pin 13 and locked onto the support section of the positioning pin 13 to support the electrostatic chuck 19. The upper cover 3 is located on the top of the cleaning chamber 2. When the upper cover 3 is closed, it isolates the internal gas of the cleaning chamber from the external gas.

[0030] like Figure 1 and Figure 2 As shown, the heating circulation pipe 9 is evenly wound around the outer surface of the cleaning chamber 2, and both ends of the heating circulation pipe 9 are connected to heat sources. The heat medium is introduced into the heating circulation pipe 9 from the heat source and flows along the heating circulation pipe 9 around the outer surface of the cleaning chamber 2, uniformly heating the cleaning chamber 2, and finally returning to the heat source to form a cycle. The temperature in the cleaning chamber can be controlled by controlling whether the heat medium is introduced into the heating circulation pipe 9. Figure 3 As shown, the base 7 is provided with a plurality of ultrasonic transducers 8, which are evenly arranged to provide ultrasonic waves to the cleaning chamber.

[0031] In one specific embodiment, the heating circulation pipe 9 is made of copper alloy material and is fixed to the outer surface of the cleaning chamber 2 by brazing; in this embodiment, the maximum temperature of the heat medium that can be introduced into the heating circulation pipe 9 is 95°C.

[0032] In a preferred embodiment, such as Figure 1 As shown, the cleaning chamber 2 and the upper cover 3 are connected by a hinge 4, and the top surface of the cleaning chamber 2 is provided with a plurality of evenly distributed first fixing holes 21 (e.g., ...). Figure 4As shown in the figure, the edge of the upper cover 3 is provided with several second fixing holes that match the first fixing hole 21; the fixing member 5 can pass through the first fixing hole 21 and its corresponding second fixing hole in sequence to realize the closure and sealing of the cleaning chamber 2 and the upper cover 3. Furthermore, the lower surface of the upper cover 3 is provided with a sealing ring 6 that matches the top size of the cleaning chamber 2 to improve the sealing performance of the cleaning chamber.

[0033] In a preferred embodiment, such as Figure 1 and Figure 2 As shown, a temperature indicator is provided on the outer surface of the cleaning chamber 2 to display the temperature inside the cleaning chamber. In one embodiment, the temperature indicator is a color-changing indicator sticker 10, which is attached to the outer surface of the cleaning chamber 2 with thermally conductive adhesive. The color change of the color-changing indicator sticker 10 reflects the temperature change inside the cleaning chamber; when the cleaning chamber is at the working temperature (i.e., a heat source is introduced into the heating circulation pipe 9), the color-changing indicator sticker 10 is red; when the cleaning chamber is at the non-working temperature (i.e., no heat source is introduced into the heating circulation pipe 9), the color-changing indicator sticker 10 is blue.

[0034] Furthermore, the heat source is the heating medium provided by the heating circulation pipe 9, with a temperature of 70℃-80℃, that is, the working temperature of the cleaning chamber is 70℃-80℃.

[0035] In a preferred embodiment, such as Figure 1 , Figure 2 and Figure 4 As shown, the heating circulation tubes 9 are arranged in an S-shape on the outer surface of the cleaning chamber 2. In actual use, the number of winding turns of the heating circulation tubes and the density of the S-shaped continuous arrangement of the heating circulation tubes 9 can be set as needed.

[0036] like Figure 1 and Figure 3 As shown, the cleaning agent circulation assembly includes: a storage tank 14, a first pipeline, a second pipeline, a third pipeline, and an inlet pump 15. The storage tank 14 is located below the support 1 and stores the cleaning agent inside. The two ends of the first pipeline are connected to the bottom of the storage tank 14 and the bottom of the cleaning chamber 2, respectively, connecting the cleaning chamber to the storage tank 14. The inlet pump 15 (e.g., a pneumatic circulation pump) is installed on the first pipeline, near the end connected to the storage tank 14, and injects the cleaning agent from the storage tank 14 into the cleaning chamber. Furthermore, an inlet valve 17 is provided at the end of the first pipeline near the cleaning chamber 2. When the inlet valve 17 is open, the cleaning agent in the storage tank 14 is injected into the cleaning chamber through the inlet pump 15; when the inlet valve 17 is closed, the volume of the cleaning agent in the cleaning chamber no longer changes.

[0037] The two ends of the second pipeline are respectively connected to the bottom of the storage tank 14 and the bottom of the cleaning chamber 2, and a reflux valve 16 is provided on the second pipeline. When the reflux valve 16 is closed, the volume of the cleaning agent in the cleaning chamber remains unchanged; when the reflux valve 16 is opened, the cleaning agent in the cleaning chamber flows back to the storage tank 14.

[0038] In a preferred embodiment, such as Figure 3 As shown, both ends of the second pipeline are fixed to the first pipeline and are located at the cleaning agent input side and cleaning agent output side of the inlet pump 15, respectively. The return valve 16 on the second pipeline is connected in parallel with the inlet pump 15 and in series with the inlet valve 17. When the inlet valve 17 is open and the return valve 16 is closed, the cleaning agent in the storage tank 14 is introduced into the cleaning chamber through the inlet pump 15. When the inlet valve 17 is open and the return valve 16 is open, the cleaning agent in the cleaning chamber flows back to the storage tank 14 through the inlet valve 17 and the return valve 16 in sequence.

[0039] The third pipeline connects to the top of the storage tank 14 and the cleaning chamber 2 at its two ends, respectively, with the connection point between the third pipeline and the cleaning chamber 2 located near the top of the cleaning chamber 2, thus connecting the cleaning chamber to the interior of the storage tank 14. When the level of the cleaning agent in the cleaning chamber is higher than the connection point between the third pipeline and the cleaning chamber 2, the cleaning agent in the cleaning chamber will flow back to the storage tank 14 through the third pipeline, preventing overflow of the cleaning chamber. Simultaneously, the gas in the cleaning chamber and the gas in the storage tank 14 can be exchanged through the third pipeline, achieving pressure balance between the cleaning chamber and the storage tank 14.

[0040] Furthermore, the cleaning agent is typically a volatile solution. To prevent the cleaning agent from evaporating due to heating of the cleaning chamber, a balancing valve 18 is provided on the third pipeline. When the cleaning chamber is in working condition (i.e., the cleaning chamber is heated), the balancing valve 18 is closed, making the cleaning chamber a sealed environment to prevent the cleaning agent from evaporating due to heating and to improve the cleaning efficiency of the electrostatic chuck 19 in the cleaning chamber. When the cleaning chamber is not in working condition (i.e., the cleaning chamber is not heated), the balancing valve 18 is opened, connecting the cleaning chamber to the liquid storage tank 14, ensuring that the pressure in the cleaning chamber and the pressure in the liquid storage tank 14 are always balanced, allowing the cleaning agent to enter or exit the cleaning chamber.

[0041] like Figure 1 and Figure 2As shown, the pressure control assembly is disposed on the upper surface of the upper cover 3, and includes: a first gas pipeline 111 and a second gas pipeline 112. One end of the first gas pipeline 111 is connected to a gas source, and the other end passes through the upper cover 3, connecting the first gas pipeline 111 to the cleaning chamber, through which pressurized gas is introduced into the cleaning chamber; and the first gas pipeline 111 is equipped with a first gas valve, which is used to control whether pressurized gas is introduced into the first gas pipeline 111. One end of the second gas pipeline 112 is connected to the exhaust gas treatment device, and the other end passes through the upper cover 3, connecting the second gas pipeline 112 to the cleaning chamber to discharge gas from the cleaning chamber; and the second gas pipeline 112 is equipped with a second gas valve, which is used to control whether gas is output from the cleaning chamber from the second gas pipeline 112. When the first gas valve is open and the second gas valve is closed, pressurized gas is introduced into the cleaning chamber through the first gas pipeline 111, increasing the pressure inside the cleaning chamber and reducing the amount of cleaning agent volatilization. When both the first and second gas valves are closed, the pressure inside the cleaning chamber remains constant, maintaining the pressure within the cleaning chamber. When both the first and second gas valves are open, the high-pressure gas in the cleaning chamber flows out through the second gas pipeline 112 and is replaced by the pressurized gas introduced through the first gas pipeline 111, replacing the volatile cleaning agent gas with pressurized gas, effectively reducing the concentration of volatile cleaning agent gas in the cleaning chamber and improving the safety of the cleaning device. When the first gas valve is closed and the second gas valve is open, the gas in the cleaning chamber is discharged through the second gas pipeline 12, depressurizing the cleaning chamber and ensuring the safety of opening the top cover.

[0042] In a preferred embodiment, the pressurizing gas is nitrogen.

[0043] Furthermore, such as Figure 1 and Figure 2 As shown, the pressure control device further includes a pressure gauge 12, which is set on the upper surface of the upper cover 3 and communicates with the cleaning chamber, for detecting the pressure of the cleaning chamber.

[0044] refer to Figures 1-4When using the sealed ceramic disc ultrasonic cleaning device of this utility model, open the upper cover 3 and place the electrostatic suction cup 19 into the cleaning chamber. The through hole 20 of the electrostatic suction cup 19 is fitted onto the positioning section of the positioning pin 13 to fix the electrostatic suction cup 19. At this time, the electrostatic suction cup 19 is supported by the support section of the positioning pin 13, creating a certain distance between the electrostatic suction cup 19 and the bottom of the cleaning chamber, facilitating cleaning. Close the upper cover 3 of the cleaning chamber, aligning the second fixing hole at the edge of the upper cover 3 with the first fixing hole 21 at the top of the cleaning chamber 2. Use a fixing piece 5 to pass through the second fixing hole and the first fixing hole 21 in sequence to achieve a sealed connection between the upper cover 3 and the cleaning chamber 2. At this time, the cleaning chamber is a sealed space.

[0045] Close the reflux valve 16, open the inlet valve 17 and the balance valve 18, and use the inlet pump 15 to inject the cleaning agent from the storage tank 14 into the cleaning chamber. If too much cleaning agent is injected into the cleaning chamber, the excess cleaning agent will flow back to the storage tank 14 from the third pipeline. After a certain period of time, close the inlet valve 17 and the balance valve 18 to ensure that the cleaning agent in the cleaning chamber has a certain liquid level, and the liquid level is lower than the connection between the third pipeline and the cleaning chamber body 2. Then, the heat source introduces a heat medium into the heating circulation pipe 9 to heat the cleaning agent in the cleaning chamber, keeping the temperature of the cleaning agent at 70℃-80℃. At this time, the color-changing indicator sticker 10 on the outer surface of the cleaning chamber body 2 changes from blue to red to indicate that the cleaning chamber has been heated. At the same time, open the first gas valve and introduce pressurized gas into the cleaning chamber through the first gas pipeline 111 to create a positive pressure environment (i.e., higher than atmospheric pressure) in the cleaning chamber, thereby pressurizing the cleaning chamber.

[0046] The first and second air valves are closed to maintain a high pressure in the cleaning chamber, effectively preventing the cleaning agent from evaporating and reducing the amount of cleaning agent used when cleaning the electrostatic chuck 19. Simultaneously, the ultrasonic transducer 8 is turned on, using ultrasonic waves to vibrate the cleaning chamber, thereby ultrasonically cleaning the electrostatic chuck 19.

[0047] After ultrasonic cleaning of the electrostatic chuck 19 is completed, the ultrasonic transducer 8 is turned off, the reflux valve 16 is opened to allow the cleaning agent in the cleaning chamber to flow back to the storage tank 14, and the balancing valve 18 is opened to balance the pressure in the cleaning chamber and the storage tank. After the cleaning agent in the cleaning chamber is emptied, the reflux valve 16 and the balancing valve 18 are closed. Then, the first gas valve and the second gas valve are opened to replace the gas in the cleaning chamber with pressurized gas, reducing the concentration of volatile cleaning agent gas in the cleaning chamber and preventing the risk of explosion due to excessive concentration of volatile cleaning agent gas.

[0048] After the gas replacement in the cleaning chamber is completed, the first gas valve is closed, and the cleaning chamber is depressurized using the second gas pipeline 112. The pressure inside the cleaning chamber is detected by the pressure gauge 12. When the pressure inside the cleaning chamber decreases to atmospheric pressure, the fixing part 5 is removed, the top cover 3 is opened, and the electrostatic chuck 19 is taken out to complete the cleaning operation.

[0049] In summary, the cleaning device of this utility model adds a first gas pipeline and a second gas pipeline to the top of the cleaning tank, and controls the opening and closing states of the first gas pipeline and the second gas pipeline through the first gas valve and the second gas valve to realize the operation of pressurization, pressure holding, gas replacement and pressure relief of the cleaning chamber, so as to reduce the amount of cleaning agent volatilization in the cleaning chamber during the cleaning process, improve the cleaning effect of the electrostatic chuck and the safety of the cleaning operation.

[0050] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A sealed ceramic disc ultrasonic cleaning device, characterized in that, include: Support components, used to provide support; A cleaning assembly includes: a cleaning tank, a base, and a heating circulation pipe. The base is fixed to the top of the support assembly, the cleaning tank is placed on the base, and the heating circulation pipe is fixed to the outer surface of the cleaning tank. A cleaning agent circulation component is connected to the cleaning tank and controls the delivery of cleaning agent into or discharge of cleaning agent from the cleaning tank. The pressure control component includes: a first gas pipeline and a second gas pipeline; one end of the first gas pipeline is connected to a gas source and the other end is connected to a cleaning tank to introduce pressurized gas into the cleaning tank; and a first gas valve is provided on the first gas pipeline; one end of the second gas pipeline is connected to a tail gas treatment device and the other end is connected to the cleaning tank to discharge gas from the cleaning chamber; and a second gas valve is provided on the second gas pipeline.

2. The sealed ceramic disc ultrasonic cleaning device according to claim 1, characterized in that, The base contains several ultrasonic transducers, which are evenly arranged.

3. The sealed ceramic disc ultrasonic cleaning device according to claim 1, characterized in that, The cleaning tank includes: A cleaning chamber has a cleaning cavity inside, and a number of evenly distributed positioning pins are provided at the bottom of the cleaning cavity. Each positioning pin includes a support section and a positioning section. The support section is fixed to the bottom of the cleaning cavity, and the positioning section is fixed to the support section. The diameter of the positioning section matches the diameter of the through hole on the surface of the electrostatic chuck, and the diameter of the positioning section is smaller than the diameter of the support section. The top cover is located on the top of the cleaning chamber; and the top cover is sealed to the cleaning chamber by a fastener.

4. The sealed ceramic disc ultrasonic cleaning device according to claim 3, characterized in that, The lower surface of the top cover is provided with a sealing ring that matches the size of the top of the cleaning chamber.

5. The sealed ceramic disc ultrasonic cleaning device according to claim 3, characterized in that, Both ends of the heating circulation tube are connected to a heat source, and the heating circulation tube is arranged in an S-shape on the outer surface of the cleaning chamber.

6. The sealed ceramic disc ultrasonic cleaning device according to claim 3, characterized in that, The outer surface of the cleaning chamber is equipped with a temperature indicator to display the temperature of the cleaning chamber.

7. The sealed ceramic disc ultrasonic cleaning device according to claim 3, characterized in that, The cleaning agent circulation assembly includes: The liquid storage tank is located below the support and contains the cleaning agent. The first pipeline has its two ends connected to the bottom of the storage tank and the bottom of the cleaning chamber, respectively; and an inlet valve is provided at the end of the first pipeline near the cleaning chamber. An inlet pump is installed on the first pipeline and located near the end of the first pipeline that connects to the storage tank, and injects the cleaning agent in the storage tank into the cleaning chamber; The second pipeline is connected at both ends to the bottom of the liquid storage tank and the bottom of the cleaning chamber, and a reflux valve is provided on the second pipeline. The third pipeline is connected at both ends to the top of the liquid storage tank and the cleaning chamber, respectively, and the connection between the third pipeline and the cleaning chamber is located near the top of the cleaning chamber; a balance valve is provided on the third pipeline.

8. The sealed ceramic disc ultrasonic cleaning device according to claim 7, characterized in that, Both ends of the second pipeline are fixed to the first pipeline and are located on the cleaning agent input side and cleaning agent output side of the inlet pump, respectively, so that the reflux valve on the second pipeline is connected in parallel with the inlet pump and in series with the inlet valve.

9. The sealed ceramic disc ultrasonic cleaning device according to claim 3, characterized in that, The pressure control component further includes a pressure gauge, which is set on the upper cover and communicates with the cleaning chamber, for detecting the pressure of the cleaning chamber.

10. The sealed ceramic disc ultrasonic cleaning device according to claim 1, characterized in that, The support component includes a bracket, the top surface of which has mounting holes for placing a base.

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