A cooling isolation device and a processing apparatus

Abstract

The utility model provides cooling isolation device and processing equipment, include: platform, be provided with heater and bearing surface on the platform, bearing surface is used for bearing work piece, heater is used for promoting ambient temperature, isolation board, isolation board sets up in the platform side of bearing surface back, open mobile slide way on isolation board, mobile slide way extends on isolation board, mobile slide way is in first direction and penetrates isolation board, first direction is the direction of bearing surface's direction, cooling mechanism, cooling mechanism sets up on isolation board, and is used for cooling isolation board, connecting piece, connecting piece is in first direction and penetrates mobile slide way, and the upper end of connecting piece is fixedly connected on the platform, for the cooling isolation device of the utility model, can effectively protect the drive part.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a cooling isolation device and processing equipment. Background Technology

[0002] During the coating process, samples need to be used in a high-temperature environment and must be heated to a certain temperature to ensure proper coating. Simultaneously, due to process requirements, samples are placed on a moving component, rotating, translating, or lifting along with it to achieve sample transfer. The process mostly takes place within a chamber with very high internal temperatures. High temperatures pose a significant challenge to the moving component. Existing equipment frequently triggers overheating alarms due to excessively high ambient temperatures. Prolonged exposure to high temperatures also accelerates cable aging and reduces overall lifespan. This is a major drawback for equipment with production capacity requirements. Furthermore, during sample movement, other components above the sample may wear down, or additional coatings may form elsewhere due to process variations. Over time, particles of varying sizes can accumulate and fall onto the moving component or into its interior. Even during maintenance, human error can cause parts or tools to fall onto the moving component. Liquid accumulation above the component may also flow onto it. All of these factors can cause serious damage to moving components. Furthermore, they may affect the normal operation and lifespan of the moving components. Therefore, a cooling and isolation device is needed to protect the drive components. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a cooling and isolation device that can effectively protect the driving components.

[0004] This utility model also proposes a processing equipment.

[0005] A cooling isolation device according to a first aspect of the present invention includes: a platform, on which a heater and a bearing surface are disposed, the bearing surface being used to bear a workpiece, and the heater being used to raise the ambient temperature; an isolation plate, disposed on the side of the platform opposite to the bearing surface, the isolation plate having a sliding track extending on the isolation plate and penetrating through the isolation plate in a first direction, the first direction being the orientation direction of the bearing surface; a cooling mechanism, disposed on the isolation plate and used to cool the isolation plate and the surrounding environment; a connector, the connector penetrating through the sliding track along the first direction, the upper end of the connector being fixedly disposed on the platform; and a driving member, disposed at the lower end of the connector and driving the connector to move along the sliding track.

[0006] The cooling isolation device according to the first aspect of this utility model has at least the following beneficial effects: the driving member and the platform are separated to both sides of the isolation plate by the connecting member, and the cooling mechanism is provided on the isolation plate to block and reduce the heat in the area where the platform is located, thereby preventing high temperature from damaging the driving member. In addition, the isolation plate can also prevent particles formed on the platform side from damaging the driving member. That is, particles formed on the platform side will settle or fall onto the side of the isolation plate facing the platform.

[0007] According to some embodiments of the present invention, the cooling mechanism includes a water inlet, a water outlet, and a pipe, wherein the pipe is disposed on the isolation plate and connects the water inlet and the water outlet.

[0008] According to some embodiments of the present invention, the pipe is disposed inside the isolation plate and / or on the side of the isolation plate facing away from the platform.

[0009] According to some embodiments of the present invention, the width direction of the movable slide is a second direction, and the isolation plate includes a left plate portion and a right plate portion, which are spaced apart on both sides of the movable slide along the second direction.

[0010] According to some embodiments of the present invention, the cooling mechanism includes a left cooling section and a right cooling section, the left cooling section being disposed on the left plate and the right cooling section being disposed on the right cooling section.

[0011] According to some embodiments of the present invention, the width direction of the movable slide is a second direction, and the movable slide has two side walls opposite to each other in the second direction, and the interval between the connector and the side walls is no more than 100mm.

[0012] According to some embodiments of the present invention, the distance between the platform and the isolation plate in the first direction does not exceed 300mm.

[0013] According to some embodiments of the present invention, a baffle is fixedly provided on the connector, the baffle is provided on the side of the isolation plate opposite to the platform, and the projection of the moving slide along the first direction is on the baffle.

[0014] According to some embodiments of the present invention, the distance between the baffle and the isolation plate in the first direction does not exceed 300mm.

[0015] According to some embodiments of the present invention, the width direction of the movable slide is the second direction, and the width of the platform along the second direction is greater than the width of the movable slide along the second direction.

[0016] A processing apparatus according to a second aspect of the present invention includes the cooling isolation device described in any of the above embodiments.

[0017] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of a cooling isolation device according to the present invention; Figure 2 This is a schematic diagram of a cooling isolation device of the present invention, having a left cooling section and a right cooling section; Figure 3 This is a cross-sectional structural diagram of a cooling isolation device according to the present invention; Figure 4 This is a cross-sectional schematic diagram of a cooling isolation device with a baffle according to the present invention.

[0019] Icon labels: 1. Platform; 11. Bearing surface; 2. Isolation plate; 21. Left plate; 22. Right plate; 23. Moving slide; 3. Connecting parts; 4. Driving parts; 5. Cooling mechanism; 51. Water inlet; 52. Water outlet; 53. Left cooling section; 54. Right cooling section; 55. Pipe; 6. Baffle. Detailed Implementation

[0020] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0021] In the description of this utility model, it should be understood that the orientation descriptions, such as up and down, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0022] In the description of this utility model, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features or their sequential relationship.

[0023] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0024] In semiconductor coating processes, the control of ambient temperature has a significant impact on thin film deposition on semiconductors. Increasing the ambient temperature to a certain extent can improve the adhesion between the thin film and the substrate. Heating the semiconductor in a vacuum environment can effectively remove impurities generated during the coating process, enhance the diffusion ability of deposited atoms, and optimize the crystal structure of the coating. It also allows for uniform and dense crystal growth during coating, thereby reducing defects and voids and improving coating quality. Furthermore, appropriately high temperatures can promote reactions and deposition during coating, resulting in thin films with specific structures and superior properties; for example, semiconductors with higher surface hardness or stronger wear resistance can be formed. On the other hand, controlling the ambient temperature can accelerate reactions and increase the deposition rate during coating, thereby shortening the coating cycle, improving semiconductor production efficiency, and reducing semiconductor production costs. However, heating the ambient temperature can easily damage the driving components of the driving stage; therefore, it is necessary to isolate the heated processing environment from the driving components.

[0025] Reference Figure 1 , Figure 2 and Figure 3The cooling isolation device in the first embodiment of this utility model includes: a platform 1, an isolation plate 2, a cooling mechanism 5, a connecting member 3, and a driving member 4. The platform 1 is equipped with a heater and a bearing surface 11. The bearing surface 11 is used to support the workpiece, and the heater is used to raise the ambient temperature. In the following coating process of the workpiece, it is necessary to heat the ambient temperature of the process. After placing the workpiece on the bearing surface 11 and moving the platform 1 to the process environment, the heater can heat both the process environment and the workpiece. The isolation plate 2 is located on the side of the platform 1 facing away from the bearing surface 11. A sliding track 23 is provided on the isolation plate 2, extending along it and penetrating the isolation plate 2 in a first direction, which is the orientation direction of the bearing surface 11. The cooling mechanism 5 is located on the isolation plate 2 and is used to cool it. The connecting member 3 extends along the first direction through the sliding track 23, and its upper end is fixedly connected to the platform 1. The driving member 4 is connected to the lower end of the connecting member 3 and drives the connecting member 3 to move along the sliding track 23. The movable slide 23 allows the drive component 4 to drive the connecting component 3 to move along the sliding track, which in turn moves the platform 1, thus achieving translation of the workpiece. Furthermore, the drive component 4 can also drive the connecting component 3 to lift, lower, and rotate, causing the platform 1 and the workpiece to move synchronously. The drive component 4 is positioned on the side of the isolation plate 2 opposite to the platform 1, thus isolating the drive component 4 from the workpiece's processing environment. To prevent heat from the process environment, specifically the heat generated by the heater, from damaging the drive component 4 through the isolation plate 2, a cooling mechanism 5 is installed on the isolation plate 2. This further minimizes heat loss through the isolation plate 2, providing better protection for the drive component 4.

[0026] The width direction of the movable slide 23 is the second direction, and the width of the platform 1 along the second direction is greater than the width of the movable slide 23 along the second direction. This ensures that particles falling from both sides of the platform 1 are separated to the maximum extent by the isolation plate 2, that is, they will settle on the isolation plate 2, effectively preventing them from entering one side of the drive component 4 through the movable slide 23.

[0027] According to some embodiments of this utility model, the cooling mechanism 5 includes an inlet 51, an outlet 52, and a pipe 55. The pipe 55 is disposed on the isolation plate 2 and connects the inlet 51 and the outlet 52. By incorporating the pipe 55 into the cooling mechanism 5, the heat insulation area can be better controlled, and a liquid cooling medium can be selected to flow and insulate within the pipe 55. The low-temperature cooling medium enters the pipe 55 from the inlet 51 and absorbs heat, while the high-temperature cooling medium exits from the outlet 52 to dissipate heat, and this cycle repeats. Furthermore, to prevent excessive temperature differences between the isolation plate 2 and the process environment, the temperature of the cooling medium at the inlet 51 can be controlled, thereby better preventing condensation on the isolation plate 2 and preventing condensed water droplets from flowing into the drive component 4, thus better protecting the drive component 4.

[0028] When equipment requires heat insulation, various cooling media can be selected. Different types of cooling media affect the insulation effect, and their applicability also differs. Specifically, water is a good cooling media due to its high thermal conductivity and fluidity, rapid heat transfer, low cost, and easy availability. Air, on the other hand, is used by introducing air into the heat exchange equipment via fans to remove heat, but its heat transfer efficiency is low. Therefore, in this solution, water is chosen as the cooling media to remove more heat for insulation while minimizing the impact on the processing environment. Furthermore, to enhance the insulation effect, appropriate additives can be added to the water to prevent freezing or corrosion.

[0029] According to some embodiments of this utility model, the pipe 55 is disposed inside the isolation plate 2 and / or on the side of the isolation plate 2 facing away from the platform 1. The placement of the pipe 55 inside the isolation plate 2 and on the side of the isolation plate 2 facing away from the platform 1 can reduce the impact of the cooling device on the process environment of the platform 1, thereby ensuring both the high temperature of the process environment and isolating the driving component 4 from the high temperature.

[0030] According to some embodiments of this utility model, the isolation plate 2 includes a left plate portion 21 and a right plate portion 22, which are spaced apart on both sides of the movable slide 23 along a second direction. The arrangement of the left plate portion 21 and the right plate portion 22 allows for easier adjustment of the interval between them, thereby facilitating the adjustment of the width of the movable slide 23 and improving the adaptability of the device. It also makes the device easier to disassemble and install.

[0031] According to some embodiments of the present invention, the cooling mechanism 5 includes a left cooling section 53 and a right cooling section 54. The left cooling section 53 is disposed on the left plate section 21, and the right cooling section 54 is disposed on the right plate section 22. The arrangement of the left cooling section 53 and the right cooling section 54 makes the cooling effect on the isolation plate 2 more uniform, thereby better improving the heat insulation performance of the heat insulation plate.

[0032] According to some embodiments of this utility model, the movable slide 23 is provided with two side walls opposite each other in the second direction, and the gap between the connector 3 and the side walls is no more than 100mm. This avoids excessively large gaps between the connector 3 and the side walls, effectively preventing particles generated in the process environment from entering the drive component 4 through the gap, thus better protecting the drive component 4.

[0033] According to some embodiments of this utility model, the distance between the stage 1 and the isolation plate 2 in the first direction does not exceed 300mm. This avoids an excessively large distance between the stage 1 and the isolation plate 2, effectively preventing particles generated in the process environment from entering the drive component 4 through the gap, thus providing better protection for the drive component 4.

[0034] Reference Figure 4 According to some embodiments of this utility model, a baffle 6 is fixedly provided on the connecting member 3. The baffle 6 is located on the side of the isolation plate 2 facing away from the platform 1, and the projection of the moving slide 23 along the first direction is on the baffle 6. The baffle 6 prevents particles generated in the process environment from entering the driving member 4 through the moving slide 23, that is, particles passing through the moving slide 23 will settle on the baffle 6, thereby better protecting the driving member 4. Furthermore, the distance between the baffle 6 and the isolation plate 2 in the first direction does not exceed 300mm.

[0035] A processing apparatus according to a second aspect of the present invention includes a cooling isolation device according to any one of the above embodiments.

[0036] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A cooling and isolation device, characterized in that, include: A platform, on which a heater and a bearing surface are provided, the bearing surface being used to support the workpiece, and the heater being used to raise the ambient temperature; An isolation plate is disposed on the side of the platform opposite to the bearing surface. A sliding track is provided on the isolation plate, and the sliding track extends on the isolation plate and penetrates the isolation plate in a first direction, which is the orientation direction of the bearing surface. A cooling mechanism is disposed on the isolation plate and is used to cool the isolation plate; A connector, which extends through the movable slide along the first direction, and the upper end of the connector is fixedly mounted on the platform; A driving component is disposed at the lower end of the connector and drives the connector to move along the sliding track.

2. The cooling isolation device according to claim 1, characterized in that, The cooling mechanism includes a water inlet, a water outlet, and a pipe. The pipe is installed on the isolation plate and connects the water inlet and the water outlet.

3. The cooling isolation device according to claim 2, characterized in that, The pipe is located inside the isolation plate and / or on the side of the isolation plate opposite to the platform.

4. The cooling isolation device according to claim 1, characterized in that, The width direction of the movable slide is the second direction, and the partition plate includes a left plate portion and a right plate portion, which are spaced apart on both sides of the movable slide along the second direction.

5. The cooling isolation device according to claim 4, characterized in that, The cooling mechanism includes a left cooling section and a right cooling section, with the left cooling section disposed on the left plate and the right cooling section disposed on the right cooling section.

6. The cooling isolation device according to claim 1, characterized in that, The width direction of the movable slide is the second direction, and the movable slide has two side walls opposite each other in the second direction. The distance between the connector and the side walls is no more than 100mm.

7. The cooling isolation device according to claim 1, characterized in that, The distance between the platform and the isolation plate in the first direction shall not exceed 300 mm.

8. The cooling isolation device according to claim 1, characterized in that, A baffle is fixedly installed on the connector. The baffle is located on the side of the isolation plate opposite to the platform. The projection of the moving slide along the first direction is on the baffle.

9. The cooling isolation device according to claim 8, characterized in that, The distance between the baffle and the isolation plate in the first direction does not exceed 300mm.

10. The cooling isolation device according to claim 1, characterized in that, The width direction of the movable slide is the second direction, and the width of the platform along the second direction is greater than the width of the movable slide along the second direction.

11. A processing device, characterized in that, Includes the cooling isolation device according to any one of claims 1-10.

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