Reflectance detection platform

Abstract

The utility model discloses a reflectivity detection platform relates to spectral measurement technical field, and platform body defines first accommodation space, and first accommodation space is used for accommodating the spare part of reflectivity detection platform, and light source generator is located at platform body, and vacuum detection mechanism is located at platform body, and first detection device can remove to first position to receive the light of monochromator, and first detection device can remove to second position to avoid the light of monochromator, to make sample carrier's sample can reflect the light of monochromator to second detection device, and controller is connected with first detection device, second detection device all communication. Therefore, can improve the degree of integration and modularization of reflectivity detection platform, can reduce the volume of reflectivity detection platform, and test convenient and fast, save test time, expense, and can greatly improve the portability and flexibility of reflectivity detection platform, be favorable to improving the detection efficiency of reflectivity detection platform.

Description

Technical Field

[0001] This utility model relates to the field of spectral measurement technology, and in particular to a reflectance detection platform. Background Technology

[0002] Optical components are indispensable core devices in vacuum ultraviolet spectroscopy research, and optical performance testing equipment is the foundation and guarantee for studying high-performance optical components in this band. Reflectometers are the main equipment for testing the key performance characteristics of optical components. However, current reflectivity testing beamlines are hampered by the large size, high cost, limited availability, and difficulty in scheduling synchrotron radiation beamlines, making them unsuitable for performance testing needs during optical component development. Therefore, there is an urgent need for a miniaturized, convenient, and rapid reflectivity measurement device to save testing time and costs. Utility Model Content

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, one objective of the present invention is to provide a reflectivity testing platform that adopts a desktop, integrated, and modular design, is small in size, and facilitates convenient and quick testing, thereby improving the testing efficiency of the reflectivity testing platform.

[0004] The reflectivity detection platform according to this utility model includes: a platform body and a light source generator. The platform body defines a first receiving space for accommodating the components of the reflectivity detection platform. The light source generator is disposed on the platform body. A vacuum detection mechanism is disposed on the platform body and includes: a focusing lens, a monochromator, a sample carrier, a first detection device, and a second detection device. The light source generator emits light toward the focusing lens. The focusing lens, the monochromator, and the sample carrier are arranged sequentially along the light transmission path. The first detection device can be moved to a first position to receive light emitted from the monochromator, and the first detection device can be moved to a second position to avoid light emitted from the monochromator, so that the sample carried by the sample carrier can reflect the light emitted from the monochromator to the second detection device. A controller is communicatively connected to both the first detection device and the second detection device.

[0005] The reflectivity detection platform of this utility model can improve the integration and modularity of the reflectivity detection platform, reduce the size of the reflectivity detection platform, make testing convenient and fast, save testing time and costs, and greatly improve the portability and flexibility of the reflectivity detection platform, which is conducive to improving the detection efficiency of the reflectivity detection platform.

[0006] In some examples of this utility model, when the first detection device is in the first position, the first detection device is located between the sample carrier and the monochromator.

[0007] In some examples of this utility model, the vacuum detection mechanism further includes: a housing, the housing including: a shell body and a cover, the shell body defining a second housing space with one end open, the cover being movably disposed on the shell body and capable of closing the open end of the second housing space, and the sample carrier, the first detection device, and the second detection device all being housed in the second housing space.

[0008] In some examples of this utility model, the reflectivity detection platform further includes: a vacuum pumping device and a vacuum pumping pipeline. The vacuum pumping device is connected to the second receiving space through the vacuum pumping pipeline. The vacuum pumping device is used to evacuate the vacuum detection mechanism. At least a portion of the vacuum pumping pipeline is housed in the first receiving space.

[0009] In some examples of this utility model, the housing further includes a control valve, which is used to control whether the second housing space is connected to the outside.

[0010] In some examples of this utility model, the reflectivity detection platform further includes: a first driving mechanism, the controller being communicatively connected to the first driving mechanism, the first driving mechanism being used to drive the first detection device to move so that the first detection device switches between the first position and the second position, and at least a portion of the first driving mechanism is housed in the first receiving space.

[0011] In some examples of this utility model, the reflectivity detection platform further includes: a second driving mechanism and a third driving mechanism. The controller is communicatively connected to both the second driving mechanism and the third driving mechanism. The second driving mechanism is used to drive the sample carrier to rotate, and the third driving mechanism is used to drive the second detection device to rotate. At least a portion of the second driving mechanism and at least a portion of the third driving mechanism are housed in the first receiving space.

[0012] In some examples of this utility model, the second drive mechanism and the third drive mechanism are controlled in a coordinated manner.

[0013] In some examples of this utility model, the platform body includes: a mounting top plate and a support plate. The mounting top plate has a mounting through hole, and the support plate is disposed in the mounting through hole. The sample carrier, the second detection device, the second driving mechanism, and the third driving mechanism are all disposed on the support plate.

[0014] In some examples of this utility model, the vacuum detection mechanism further includes: a mounting housing and a filter, the focusing lens being disposed on the side wall of the mounting housing, the mounting housing defining a third receiving space, and the filter being received in the third receiving space and corresponding to the focusing lens;

[0015] And / or, the platform body is provided with operating components.

[0016] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0018] Figure 1 This is a schematic diagram of the reflectivity detection platform according to an embodiment of the present utility model;

[0019] Figure 2 This is a schematic diagram of the platform body and operating components according to an embodiment of the present utility model;

[0020] Figure 3 This is a schematic diagram of the housing according to an embodiment of the present utility model;

[0021] Figure 4 This is a partial structural schematic diagram of the vacuum detection mechanism and mounting plate according to an embodiment of the present utility model;

[0022] Figure 5 This is a structural schematic diagram of the monochromator and mounting plate according to an embodiment of the present utility model;

[0023] Figure 6 This is a partial structural schematic diagram of the reflectivity detection platform according to an embodiment of the present utility model;

[0024] Figure 7 This is a schematic diagram of the structure of the support plate, the second detection device, the sample carrier, and the second driving mechanism according to the embodiments of this utility model;

[0025] Figure 8 This is a schematic diagram of the mounting housing, focusing lens, and filter according to an embodiment of the present invention.

[0026] Figure label:

[0027] Reflectivity testing platform 100;

[0028] Platform body 10; First containment space 11; Ventilation grille 12; Light source generator 13; Mounting top plate 14; Mounting through hole 15; Support plate 16; Operating component 17;

[0029] Vacuum detection mechanism 20; focusing lens 21; monochromator 22; grating drive module 221; sample carrier 23; first detection device 24; second detection device 25; housing 26; housing body 261; cover 262; mounting housing 27; third housing space 271; filter 28; filter switching module 29;

[0030] Vacuum pumping device 31; vacuum pumping pipeline 32; control valve 33; vacuum gauge 34; entrance slit 35; exit slit 36;

[0031] First drive mechanism 41; second drive mechanism 42; third drive mechanism 43. Detailed Implementation

[0032] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0033] The following is for reference. Figures 1-8 A reflectance detection platform 100 according to an embodiment of the present utility model is described.

[0034] like Figures 1-8 As shown, the reflectivity detection platform 100 according to an embodiment of the present invention includes: a platform body 10, a light source generator 13, a vacuum detection mechanism 20, and a controller.

[0035] The platform body 10 defines a first receiving space 11, which is used to receive the components of the reflectivity detection platform 100. The light source generator 13 is located on the platform body 10. The vacuum detection mechanism 20 is located on the platform body 10 and includes: a focusing lens 21, a monochromator 22, a sample carrier 23, a first detection device 24, and a second detection device 25. The light source generator 13 is used to emit light toward the focusing lens 21. The focusing lens 21, the monochromator 22, and the sample carrier 23 are arranged sequentially along the light transmission path. The first detection device 24 can be moved to a first position to receive the light emitted by the monochromator 22, and the first detection device 24 can be moved to a second position to avoid the light emitted by the monochromator 22, so that the sample carried by the sample carrier 23 can reflect the light emitted by the monochromator 22 to the second detection device 25. The controller is communicatively connected to both the first detection device 24 and the second detection device 25.

[0036] The platform body 10 can define a first receiving space 11, which is used to receive components of the reflectivity detection platform 100, such as wiring harnesses and drive components of the reflectivity detection platform 100.

[0037] The light source generator 13 is disposed on the platform body 10. The connection between the light source generator 13 and the platform body 10 can be, but is not limited to, snap-fit ​​or bolt connection. As some embodiments of this application, the light source generator 13 is connected to the platform body 10 by bolt connection. The light source generator 13 can be, but is not limited to, a deuterium lamp light source or a xenon lamp light source. As some embodiments of this application, the light source generator 13 is a deuterium lamp light source. The deuterium lamp light source can not only be used in a vacuum environment, but also has high stability and long service life. Furthermore, the deuterium lamp light source can meet the performance testing requirements of samples in the 115nm-300nm wavelength band.

[0038] The vacuum detection mechanism 20 is located on the platform body 10. The connection between the vacuum detection mechanism 20 and the platform body 10 can be, but is not limited to, snap-fit ​​or bolt connection. As some embodiments of this application, the vacuum detection mechanism 20 is connected to the platform body 10 by bolt connection. The vacuum detection mechanism 20 includes: a focusing lens 21, a monochromator 22, a sample carrier 23, a first detection device 24, and a second detection device 25. The light source generator 13 can emit light to the focusing lens 21. The focusing lens 21, the monochromator 22, and the sample carrier 23 are arranged sequentially along the light transmission path. That is, the light emitted by the light source generator 13 can be directed to the focusing lens 21 and transmitted sequentially through the focusing lens 21, the monochromator 22, and the sample carrier 23.

[0039] The first detection device 24 has a first position and a second position. The first detection device 24 can be moved to the first position to receive light emitted from the monochromator 22. That is, the first detection device 24 can be moved to the first position, and the first detection device 24 in the first position can receive the light emitted through the light source generator 13, the focusing lens 21, and the monochromator 22. Moreover, the first detection device 24 can be moved to the second position, and the first detection device 24 in the second position can avoid the light emitted through the light source generator 13, the focusing lens 21, and the monochromator 22, so that the light passing through the monochromator 22 can reach the sample carrier 23, and the sample carried by the sample carrier 23 can reflect the light emitted from the monochromator 22 to the second detection device 25.

[0040] The controller is communicatively connected to the first detection device 24. In some embodiments of this application, the controller and the first detection device 24 are electrically connected via a wire to enable communication between them. In some embodiments of this application, the controller and the first detection device 24 are also communicatively connected via a wireless connection. The controller is also communicatively connected to the second detection device 25. In some embodiments of this application, the controller and the second detection device 25 are electrically connected via a wire to enable communication between them. In some embodiments of this application, the controller and the second detection device 25 are also communicatively connected via a wireless connection.

[0041] As some embodiments of this application, such as Figure 5 As shown, the monochromator 22 also includes: a grating, a grating driving module 221, a grating driving rod, and a grating turntable. The grating is mounted on the grating turntable. The grating driving module 221 can drive the grating driving rod to move back and forth through linear motion, thereby driving the grating turntable to rotate to complete the scanning of the grating. By scanning the grating, the grating can be separated into monochromatic light of different wavelengths, so that the reflectivity of the sample in a specific wavelength band can be detected by the monochromator 22.

[0042] As some embodiments of this application, the reflectance of samples in a longer wavelength range can be detected by selecting gratings with different grating densities.

[0043] As some embodiments of this application, such as Figure 6 As shown, the monochromator 22 also includes an entrance slit 35 and an exit slit 36. The light emitted by the light source generator 13 can be directed toward the focusing lens 21 and transmitted sequentially along the focusing lens 21, the entrance slit 35, the grating, and the exit slit 36.

[0044] When the first detection device 24 is in the first position, it can acquire the initial signal. When the first detection device 24 is in the second position, it can avoid the light emitted by the light source generator 13, focusing lens 21, and monochromator 22, so that the light is reflected by the sample to the second detection device 25.

[0045] The second detection device 25 can acquire the sample reflectance signal and calculate the sample reflectance by analyzing the initial signal and the sample reflectance signal.

[0046] As some embodiments of this application, the platform body 10 is formed with multiple ventilation grilles 12. This arrangement enables the first receiving space 11 to have good ventilation and waterproof performance, reducing the probability of excessively high temperatures of components within the first receiving space 11. The reflectivity detection platform 100 of this application can be designed as a desktop to reduce the volume of the reflectivity detection platform 100 and improve its portability and flexibility.

[0047] This application achieves a miniaturized, desktop design for the reflectivity detection platform 100 by housing the light source generator 13, vacuum detection mechanism 20, and controller on the platform body 10, and by enabling the first receiving space 11 of the platform body 10 to accommodate the components of the reflectivity detection platform 100, and by enabling the first detection device 24 to move to a first position to receive the light emitted by the monochromator 22, and to move to a second position to avoid the light emitted by the monochromator 22. This makes the reflectivity detection platform 100 convenient and quick to test, saves testing time and testing costs, and greatly improves the portability and flexibility of the reflectivity detection platform 100, which is conducive to improving the testing efficiency of the reflectivity detection platform 100.

[0048] In some embodiments of this utility model, such as Figure 6 As shown, when the first detection device 24 is in the first position, the first detection device 24 is located between the sample carrier 23 and the monochromator 22.

[0049] The first detection device 24 has a first position and a second position. The first detection device 24 can move to the first position. When in the first position, the first detection device 24 is located between the sample carrier 23 and the monochromator 22, and light emitted from the monochromator 22 can reach and be received by the first detection device 24. This arrangement enables the first detection device 24 to reliably acquire the initial signal and reduces the risk of the second detection device 25 acquiring a signal when the first detection device 24 is in the first position, thus improving the reliability and accuracy of the reflectivity detection platform 100.

[0050] In some embodiments of this utility model, such as Figure 1 and Figure 3 As shown, the vacuum detection mechanism 20 also includes a housing 26, which includes a shell body 261 and a cover 262. The shell body 261 defines a second housing space with one end open. The cover 262 is movably disposed on the shell body 261 and can close the open end of the second housing space. The sample carrier 23, the first detection device 24, and the second detection device 25 are all housed in the second housing space.

[0051] Among them, the shell body 261 defines a second containment space along the first direction (i.e. Figure 1(As shown in the Z direction), the shell body 261 has two opposing ends, one end close to the platform body 10 and the other end away from the platform body 10. The end away from the platform body 10 is constructed as an open end. The cover 262 is movably disposed on the shell body 261 and can close the open end of the second receiving space. That is, the cover 262 is movably disposed on the shell body 261. The cover 262 and the shell can be movably connected in a way that is not limited to rotatable connection, sliding connection, etc. As some embodiments of this application, the cover 262 has a pivot shaft and the shell body 261 has a pivot hole. The pivot shaft and the pivot hole cooperate with each other to make the cover 262 and the shell 261 rotatably connected. When the cover 262 is rotated to the position of closing the open end of the second receiving space, the cover 262 and the shell body 261 can be connected by a method that is not limited to bolt connection, snap-fit, etc., so that the cover 262 and the shell body 261 are fixedly engaged. The sample carrier 23, the first detection device 24, and the second detection device 25 are all housed in the second receiving space.

[0052] By including a housing 26 in the vacuum detection mechanism 20, and housing the sample carrier 23, the first detection device 24, and the second detection device 25 in the second housing space, the sample carrier 23, the first detection device 24, and the second detection device 25 can be housed and protected. Furthermore, multiple components can be housed in one housing. While ensuring the vacuum performance of the vacuum detection mechanism 20, the number of housings can be reduced, thereby saving production costs and reducing volume.

[0053] In some embodiments of this utility model, such as Figure 4 As shown, the reflectivity detection platform 100 also includes: a vacuum pumping device 31 and a vacuum pumping pipeline 32. The vacuum pumping device 31 is connected to the second containment space through the vacuum pumping pipeline 32. The vacuum pumping device 31 is used to evacuate the vacuum detection mechanism 20. At least a portion of the vacuum pumping pipeline 32 is contained in the first containment space 11.

[0054] The vacuum pumping device 31 can be constructed as, but is not limited to, a mechanical pump, a molecular pump, etc. As some embodiments of this application, the vacuum pumping device 31 is constructed as a combination pump of a molecular pump and a mechanical pump (capable of achieving a vacuum environment of 1E-4Pa).

[0055] The vacuum pumping device 31 is connected to the second receiving space through the vacuum pumping pipe 32. That is, the vacuum pumping pipe 32 is connected between the vacuum pumping device 31 and the second receiving space. The vacuum pumping device 31 can evacuate the vacuum detection mechanism 20 through the vacuum pumping pipe 32. At least part of the vacuum pumping pipe 32 is housed in the first receiving space 11. That is, part of the vacuum pumping pipe 32 is housed in the first receiving space 11, or the entire vacuum pumping pipe 32 is housed in the first receiving space 11.

[0056] As some embodiments of this application, the reflectivity detection platform 100 further includes a vacuum gauge 34, which is disposed in the vacuum pumping pipeline 32 and can display the vacuum level in the vacuum detection mechanism 20 in real time.

[0057] This configuration allows the vacuum detection mechanism 20 to be evacuated, which reduces the risk of strong absorption of light by certain molecules in the air during the transmission of light through the vacuum detection mechanism 20. This improves the detection accuracy of the reflectivity detection platform 100. Furthermore, by housing at least a portion of the vacuum tube 32 within the first housing space 11, space utilization is improved, which is beneficial for the desktop and miniaturized design of the reflectivity detection platform 100.

[0058] In some embodiments of this utility model, such as Figure 1 , Figure 3 and Figure 4 As shown, the housing 26 also includes a control valve 33, which is used to control whether the second housing space is connected to the outside world.

[0059] Specifically, the control valve 33 has two states: open and closed. When the control valve 33 is in the open state, the second receiving space is connected to the outside. When the control valve 33 is in the closed state, the second receiving space is not connected to the outside. It should be noted that after the vacuum detection mechanism 20 evacuates the vacuum, the second receiving space will generate a huge negative pressure, making it difficult to open the cover 262. By controlling the control valve 33 to switch the control valve 33 to the open state, the second receiving space can be connected to the outside, so that the pressure of the second receiving space and the outside can be balanced, so that the cover 262 can be opened. This helps to reduce the operation difficulty of the reflectivity detection platform 100 and improves the detection efficiency.

[0060] In some embodiments of this utility model, such as Figure 4 As shown, the reflectivity detection platform 100 further includes: a first drive mechanism 41, a controller is communicatively connected to the first drive mechanism 41, the first drive mechanism 41 is used to drive the first detection device 24 to move so that the first detection device 24 switches between a first position and a second position, and at least a portion of the first drive mechanism 41 is housed in the first receiving space 11.

[0061] In this embodiment, the controller and the first drive mechanism 41 are communicatively connected. In some embodiments of this application, the controller and the first drive mechanism 41 are electrically connected via wires to enable communication. In other embodiments, the controller and the first drive mechanism 41 are wirelessly connected. Signals can be input to the controller via external signal input devices (such as buttons, mice, keyboards, etc.) to control the operation of the first drive mechanism 41.

[0062] The first drive mechanism 41 is used to drive the first detection device 24 to move so that the first detection device 24 switches between a first position and a second position. As some embodiments of this application, the first drive mechanism 41 is configured as a drive motor. The first drive mechanism 41 is connected to the first detection device 24 in a transmission manner. The first drive mechanism 41 can drive the first detection device 24 to rotate so that the first detection device 24 switches between a first position and a second position. As some embodiments of this application, the first drive mechanism 41 is configured as a drive cylinder. The first drive mechanism 41 can drive the first detection device 24 to move so that the first detection device 24 switches between a first position and a second position.

[0063] At least a portion of the first drive mechanism 41 is housed in the first receiving space 11. That is, a portion of the first drive mechanism 41 is housed in the first receiving space 11, or all of the first drive mechanism 41 is housed in the first receiving space 11. As some embodiments of this application, all of the first drive mechanism 41 is housed in the first receiving space 11.

[0064] This configuration enables the reflectivity detection platform 100 to have a reasonable structure, improves space utilization, enhances the integration and modularity of the reflectivity detection platform 100, and greatly improves its portability and flexibility.

[0065] In some embodiments of this utility model, such as Figure 4 and Figure 7 As shown, the reflectivity detection platform 100 also includes a second drive mechanism 42 and a third drive mechanism 43. The controller is communicatively connected to both the second drive mechanism 42 and the third drive mechanism 43. The second drive mechanism 42 is used to drive the sample carrier 23 to rotate, and the third drive mechanism 43 is used to drive the second detection device 25 to rotate. At least a portion of the second drive mechanism 42 and at least a portion of the third drive mechanism 43 are housed in the first receiving space 11.

[0066] In some embodiments of this application, the controller and the second drive mechanism 42 are electrically connected via wires to enable communication between the controller and the second drive mechanism 42. In other embodiments of this application, the controller and the second drive mechanism 42 are wirelessly connected.

[0067] The controller is communicatively connected to the third drive mechanism 43. In some embodiments of this application, the controller and the third drive mechanism 43 are electrically connected via wires to enable communication. In other embodiments, the controller and the third drive mechanism 43 are wirelessly connected. Signals can be input to the controller via external signal input devices (e.g., buttons, mice, keyboards, etc.) to control the operation of the second drive mechanism 42 and the third drive mechanism 43.

[0068] The second drive mechanism 42 is used to drive the sample carrier 23 to rotate. The sample carrier 23 can carry the sample to be tested. As some embodiments of this application, the second drive mechanism 42 is constructed as a drive motor. The second drive mechanism 42 is connected to the sample carrier 23 in a transmission manner. The rotation of the second drive mechanism 42 can drive the sample carrier 23 to rotate. As some embodiments of this application, the second drive mechanism 42 is constructed as a drive cylinder. The drive cylinder is connected to a rack and can drive the rack to move. The movement of the rack can drive the gear meshing with it to rotate, so as to drive the sample carrier 23 that is engaged with the gear to rotate.

[0069] The third drive mechanism 43 is used to drive the second detection device 25 to rotate. As some embodiments of this application, the third drive mechanism 43 is constructed as a drive motor. The third drive mechanism 43 is connected to the second detection device 25 in a transmission manner. The rotation of the third drive mechanism 43 can drive the second detection device 25 to rotate. As some embodiments of this application, the third drive mechanism 43 is constructed as a drive cylinder. The drive cylinder is connected to a rack and can drive the rack to move. The movement of the rack can drive the gear meshing with it to rotate, so as to drive the second detection device 25 that is engaged with the gear to rotate.

[0070] At least a portion of the second drive mechanism 42 and at least a portion of the third drive mechanism 43 are housed in the first containment space 11.

[0071] As some embodiments of this application, portions of the second drive mechanism 42 and portions of the third drive mechanism 43 are housed in the first receiving space 11. As some embodiments of this application, the entirety of the second drive mechanism 42 and the entirety of the third drive mechanism 43 are housed in the first receiving space 11.

[0072] This configuration enables the reflectivity detection platform 100 to have a reasonable structure, improves space utilization, enhances the integration and modularity of the reflectivity detection platform 100, and greatly improves its portability and flexibility.

[0073] In some embodiments of this utility model, the second drive mechanism 42 and the third drive mechanism 43 are linked and controlled.

[0074] The second drive mechanism 42 and the third drive mechanism 43 are both connected to the controller. The second drive mechanism 42 and the third drive mechanism 43 can be linked for control. For example, when the second drive mechanism 42 drives the sample carrier 23 to rotate, the third drive mechanism 43 can drive the second detection device 25 to rotate according to the angle of rotation of the sample carrier 23 driven by the second drive mechanism 42, so that the light reflected by the sample on the sample carrier 23 can be received and detected by the second detection device 25.

[0075] As some embodiments of this application, the ratio of the angle at which the second driving mechanism 42 drives the sample carrier 23 to rotate to the angle at which the third driving mechanism 43 drives the second detection device 25 to rotate is 2:1. For example, the second driving mechanism 42 drives the sample carrier 23 to rotate 60 degrees, and the third driving mechanism 43 drives the second detection device 25 to rotate 30 degrees.

[0076] This configuration enables the drive control logic of the second drive mechanism 42 and the third drive mechanism 43 to be reasonable, ensuring that the light reflected from the sample on the sample carrier 23 is received and detected by the second detection device 25, which is beneficial to improving the reliability of the reflectivity detection platform 100.

[0077] In some embodiments of this utility model, such as Figure 1 , Figures 4-7 As shown, the platform body 10 includes: a mounting top plate 14 and a support plate 16. The mounting top plate 14 has a mounting through hole 15, and the support plate 16 is disposed in the mounting through hole 15. The sample carrier 23, the second detection device 25, the second drive mechanism 42, and the third drive mechanism 43 are all disposed on the support plate 16.

[0078] The mounting top plate 14 has a mounting through hole 15. In other words, the mounting through hole 15 is formed in the mounting top plate 14, and the support plate 16 is disposed in the mounting through hole 15. The support plate 16 is disposed in the mounting through hole 15 in a manner that can be, but is not limited to, snap-fit, bolt connection, etc. As some embodiments of this application, the support plate 16 is disposed in the mounting through hole 15 by snap-fit.

[0079] The sample carrier 23, the second detection device 25, the second drive mechanism 42, and the third drive mechanism 43 are all disposed on the support plate 16. As some embodiments of this application, the second drive mechanism 42 and the third drive mechanism 43 are both fixedly disposed on the support plate 16, the sample carrier 23 is disposed on the second drive mechanism 42 and is connected to the second drive mechanism 42 in a transmission manner, and the second detection device 25 is disposed on the third drive mechanism 43 and is connected to the third drive mechanism 43 in a transmission manner.

[0080] This configuration significantly improves the integration and modularity of the reflectivity detection platform 100. Furthermore, by placing the sample carrier 23, the second detection device 25, the second drive mechanism 42, and the third drive mechanism 43 on the support plate 16, it facilitates the disassembly, assembly, and maintenance of these components, thereby significantly improving the efficiency of disassembly, assembly, and maintenance of the reflectivity detection platform 100 and enhancing its reliability.

[0081] In some embodiments of this utility model, such as Figure 8 As shown, the vacuum detection mechanism 20 also includes: a mounting housing 27, a filter 28, a focusing lens 21 disposed on the side wall of the mounting housing 27, the mounting housing 27 defining a third receiving space 271, and the filter 28 being received in the third receiving space 271 and corresponding to the focusing lens 21.

[0082] The mounting housing 27 is disposed on the mounting top plate 14. The connection between the mounting housing 27 and the mounting top plate 14 can be, but is not limited to, snap-fit ​​or bolt connection. As some embodiments of this application, the mounting housing 27 and the mounting top plate 14 are connected by bolt connection. The focusing lens 21 is disposed on the side wall of the mounting housing 27. The connection between the focusing lens 21 and the side wall of the mounting housing 27 can be, but is not limited to, snap-fit ​​or adhesive connection. As some embodiments of this application, the focusing lens 21 is snap-fitted to the side wall of the mounting housing 27.

[0083] The mounting housing 27 defines a third receiving space 271, in which the filter 28 is received and corresponds to the focusing lens 21. In other words, the filter 28 is received in the third receiving space 271, and light can be transmitted from the focusing lens 21 to the filter 28.

[0084] As some embodiments of this application, the vacuum detection mechanism 20 further includes a filter switching module 29, which is connected to a plurality of filters 28 and is used to switch the filters 28. Specifically, there can be a plurality of filters 28, and the filters 28 have different filtering wavelengths. The filter switching module 29 can switch the filters 28 to selectively replace the filters 28 corresponding to the focusing lens 21 to transmit light in a specific wavelength range. This configuration can improve the ease of operation of the reflectivity detection platform 100 and help improve detection efficiency.

[0085] This configuration allows the filter 28 and focusing lens 21 to be integrated, which improves the integration level of the reflectivity detection platform 100. Furthermore, this configuration allows for selective transmission of light within a specific wavelength range to obtain the desired light within that specific wavelength range, which helps improve the detection reliability of the reflectivity detection platform 100.

[0086] In some embodiments of this utility model, such as Figure 1 and Figure 2 As shown, the platform body 10 is equipped with an operating component 17. The operating component 17 can be configured as, but is not limited to, a mouse, keyboard, monitor, buttons, etc. As some embodiments of this application, the operating component 17 is configured as a mouse, keyboard, monitor, and buttons. The operating component 17 is communicatively connected to the controller of the reflectivity detection platform 100. Through the operating component 17, signals can be input to the controller to control the operation of the reflectivity detection platform 100. This configuration can significantly improve the ease of operation of the reflectivity detection platform 100 and improve the detection efficiency of the reflectivity detection platform 100.

[0087] As some embodiments of this application, the reflectivity detection platform 100 can perform reflectivity detection through the following steps: First, ensure that the reflectivity detection platform 100 is in a non-vacuum state. Then, open the cover 262, place the sample inside, and seal the open end of the second receiving space with the cover 262 to ensure the airtightness of the second receiving space. Next, turn on the vacuum pumping device 31 to evacuate the vacuum detection mechanism 20. The vacuum level of the vacuum detection mechanism 20 can be checked through the operating component 17 or the vacuum gauge 34. If the preset value is reached, detection can be performed. Then, control the first detection device 24 to move to the first position to detect the undetected sample. The initial signal reflected by the sample is denoted as I0. Then, the first detection device 24 is moved to the second position (before this, the sample carrier 23 and the second detection device 25 can be rotated to a specific angle) to avoid the light emitted by the light source generator 13, focusing lens 21 and monochromator 22. At this time, the light can hit the sample and be reflected to the second detection device 25. The signal reflected by the sample at this time is denoted as I1. The reflectivity of the sample can be obtained by calculating I1 / I0. After the test, the vacuum detection mechanism 20 is broken by controlling valve 33 and the sample is taken out.

[0088] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0089] In the description of this utility model, "first feature" and "second feature" may include one or more of the features.

[0090] In the description of this utility model, "multiple" means two or more.

[0091] In the description of this utility model, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or it may include the first and second features not being in direct contact but being in contact through another feature between them.

[0092] In the description of this utility model, the terms "above", "over" and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicate that the first feature is at a higher horizontal level than the second feature.

[0093] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0094] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A reflectivity detection platform, characterized in that, include: The platform body and the light source generator are provided. The platform body defines a first receiving space for accommodating the components of the reflectivity detection platform. The light source generator is located on the platform body. A vacuum detection mechanism is provided on the platform body and includes: a focusing lens, a monochromator, a sample carrier, a first detection device, and a second detection device. The light source generator is used to emit light toward the focusing lens. The focusing lens, the monochromator, and the sample carrier are arranged sequentially along the light transmission path. The first detection device can be moved to a first position to receive light emitted from the monochromator, and the first detection device can be moved to a second position to avoid light emitted from the monochromator, so that the sample carried by the sample carrier can reflect the light emitted from the monochromator to the second detection device. The controller is communicatively connected to both the first detection device and the second detection device.

2. The reflectivity detection platform of claim 1, wherein, When the first detection device is in the first position, the first detection device is located between the sample carrier and the monochromator.

3. The reflectivity detection platform of claim 1, wherein, The vacuum detection mechanism further includes a housing, which includes a shell body and a cover. The shell body defines a second receiving space with one end open. The cover is movably disposed on the shell body and can close the open end of the second receiving space. The sample carrier, the first detection device, and the second detection device are all housed in the second receiving space.

4. The reflectivity detection platform of claim 3, wherein, Also includes: The vacuum device and the vacuum pipeline are connected to the second receiving space through the vacuum pipeline. The vacuum device is used to evacuate the vacuum detection mechanism. At least a portion of the vacuum pipeline is housed in the first receiving space.

5. The reflectivity detection platform of claim 3, wherein, The housing further includes a control valve, which is used to control whether the second housing space is connected to the outside.

6. The reflectivity detection platform of claim 1, wherein, Also includes: A first drive mechanism, wherein the controller is communicatively connected to the first drive mechanism, the first drive mechanism is used to drive the first detection device to move so that the first detection device switches between the first position and the second position, and at least a portion of the first drive mechanism is housed in the first receiving space.

7. The reflectivity detection platform of claim 1, wherein, Also includes: The controller is communicatively connected to both the second and third drive mechanisms. The second drive mechanism is used to drive the sample carrier to rotate, and the third drive mechanism is used to drive the second detection device to rotate. At least a portion of the second drive mechanism and at least a portion of the third drive mechanism are housed in the first receiving space.

8. The reflectivity detection platform of claim 7, wherein, The second drive mechanism and the third drive mechanism are controlled in a coordinated manner.

9. The reflectivity detection platform of claim 7, wherein, The platform body includes: a mounting top plate and a support plate. The mounting top plate has a mounting through hole, and the support plate is disposed in the mounting through hole. The sample carrier, the second detection device, the second driving mechanism, and the third driving mechanism are all disposed on the support plate.

10. The reflectivity detection platform according to any one of claims 1-9, wherein, The vacuum detection mechanism further includes: a mounting housing and a filter, wherein the focusing lens is disposed on the side wall of the mounting housing, the mounting housing defines a third receiving space, and the filter is received in the third receiving space and corresponds to the focusing lens; And / or, the platform body is provided with operating components.

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