A multi-cavity radio frequency treatment device
Patent Information
- Application Number
- CN202522043053.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-23
- Publication Date
- 2026-09-11
- Estimated Expiration
- 2035-09-23
AI Technical Summary
[0006]鉴于上述的分析，本实用新型旨在提供一种多腔体射频处理装置，用以解决由于现有射频处理装置结构简单、控制方式简单导致的射频处理效率低、处理效果不理想等问题
[0033]1)多腔体协同处理能力：通过设置多个腔体，每个腔体均配备独立的射频模块、匹配模块，能够实现多个腔体的同步使用、同步加工、同功率等参数处理，有效提升射频处理效率及处理效果。
Smart Images
Figure CN224745700U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of radio frequency power supply technology, and in particular to a multi-cavity radio frequency processing device. Background Technology
[0002] In modern industrial production and scientific research, radio frequency (RF) processing technology is widely used in materials processing, plasma generation, microwave heating, and many other applications. Its core lies in utilizing the interaction between radio frequency electromagnetic fields and matter to achieve specific physical or chemical processes. However, traditional RF processing devices typically have some limitations.
[0003] On the one hand, traditional radio frequency processing devices are mostly single-cavity structures. When faced with complex process requirements, such as processing multiple different materials at the same time or achieving different processing effects in different areas, the single-cavity structure is difficult to meet diverse needs. It often requires multiple independent devices to operate separately, which not only increases equipment costs but also leads to cumbersome process flow and low production efficiency.
[0004] On the other hand, in terms of radio frequency power control, traditional devices mostly use a single power source, making it difficult to achieve precise and flexible power allocation and adjustment. For example, in some scenarios where different radio frequency powers need to be applied to different areas, a single power source cannot meet the differentiated requirements, resulting in unsatisfactory processing effects, and may even damage equipment or affect product quality due to unreasonable power allocation.
[0005] In addition, the control methods of traditional radio frequency processing devices are relatively simple, and they can usually only achieve basic power switching control. They lack the ability to finely regulate parameters such as radio frequency signal frequency and phase, which cannot meet the requirements of some high-end applications for precise control of radio frequency signals, thus limiting the application expansion of radio frequency processing technology to higher levels. Utility Model Content
[0006] Based on the above analysis, the present invention aims to provide a multi-cavity radio frequency processing device to solve the problems of low radio frequency processing efficiency and unsatisfactory processing effect caused by the simple structure and control method of existing radio frequency processing devices.
[0007] The objective of this utility model is mainly achieved through the following technical solutions:
[0008] This utility model provides a multi-cavity radio frequency processing device, the device comprising: Q controllers and signal distributors, N radio frequency modules, a matching module, and cavities; wherein;
[0009] The output of the controller is connected to the input of the signal distributor in a one-to-one correspondence. The input of each signal distributor receives one PWM control signal output by the corresponding controller.
[0010] Each signal distributor includes N output terminals; the nth output terminal of all signal distributors is connected to the input terminal of the nth RF module, the output terminal of the nth RF module is connected to the input terminal of the nth matching module, and the output terminal of the nth matching module is connected to the nth cavity;
[0011] Q and N are both integers greater than 1, and n ranges from 1 to N.
[0012] Based on the above solution, the present invention also makes the following improvements:
[0013] Furthermore, the radio frequency module includes one radio frequency bias power source and Q-1 radio frequency power sources;
[0014] The nth output of each signal distributor is connected one-to-one with the RF bias power source or RF power source in the nth RF module. The output of each RF bias power source and RF power source serves as an output of the nth RF module.
[0015] Furthermore, the matching module includes Q matching networks; wherein,
[0016] The Q output terminals of the nth RF module are connected one-to-one with the input terminals of the Q matching networks in the nth matching module;
[0017] The Q outputs of the Q matching networks in the nth matching module are connected to the nth cavity.
[0018] Furthermore, the signal distributor includes a signal receiving channel and N transmission line transformers; wherein,
[0019] The signal receiving channel includes one signal input port and N transmission ports; each transmission line transformer includes two signal output ports and one transmission port; wherein,
[0020] The N transmission ports of the signal receiving channel are connected one-to-one with the transmission ports of the N transmission line transformers.
[0021] Furthermore, the signal distributor also includes N groups of series resistors; wherein,
[0022] A series resistor bank is connected between each of the two signal output ports of the transmission line transformer.
[0023] Furthermore, the signal receiving channel includes: N signal channels, N isolation resistors, and a capacitor module; wherein,
[0024] The first port of each of the signal channels is connected to the first port of an isolation resistor, and the second ports of the N isolation resistors are interconnected.
[0025] The second ports of the N signal channels are all connected to the first port of the capacitor module, and the second port of the capacitor module is grounded.
[0026] The first port of each of the signal channels is used as a transmission port of the signal receiving channel; the connection point of the second ports of the N signal channels is used as the signal input port of the signal receiving channel.
[0027] Furthermore, the capacitor module includes M series capacitor groups, and the M series capacitor groups are connected in parallel; one end of the M series capacitor groups connected in parallel is used as the first port of the capacitor module, and the other end of the M series capacitor groups connected in parallel is used as the second port of the capacitor module.
[0028] Furthermore, the signal channel includes a parallel capacitor bank and a first inductor; wherein, one end of the parallel capacitor bank is used as the first port of the signal channel, one end of the parallel capacitor bank is also connected to one end of the first inductor, and the other end of the first inductor is used as the second port of the signal channel; the other end of the parallel capacitor bank is grounded.
[0029] Furthermore, both the parallel capacitor bank and the series capacitor bank include two or more capacitors, and the series resistor bank includes two or more resistors.
[0030] Furthermore, the signal receiving channel is implemented using a 1-to-N Wilkinson splitter.
[0031] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:
[0032] The multi-cavity radio frequency processing device provided by this utility model has the following beneficial effects:
[0033] 1) Multi-cavity collaborative processing capability: By setting up multiple cavities, each equipped with an independent RF module and matching module, it is possible to achieve synchronous use, synchronous processing, and parameter processing of multiple cavities with the same power, effectively improving RF processing efficiency and processing effect.
[0034] 2) Flexible power distribution and adjustment: The RF module contains an RF bias power source and multiple RF power sources. The signal distributor can accurately distribute the PWM control signal output by the controller to each power source, thereby achieving precise control of the RF power of each cavity and effectively improving product quality and process stability.
[0035] 3) Refined Signal Control: The cooperation of Q controllers and signal distributors enables the device to precisely control parameters such as frequency and phase of radio frequency signals. In the manufacturing of wireless communication equipment, this refined control capability allows for accurate adjustment of radio frequency signal parameters to meet the testing and calibration requirements of different frequency bands and communication standards, improving equipment performance and compatibility, and expanding the application scope of radio frequency processing technology in high-end communication fields.
[0036] 4) Improved System Integration and Reliability: By integrating multiple cavities and related modules into one unit, the overall layout and structural design of the equipment have been optimized, reducing the number of external connection lines and interfaces, and lowering the risk of system failure. At the same time, the collaborative work between the modules has been carefully designed and optimized, ensuring the stable operation of the entire device under multi-cavity and multi-parameter control conditions, thus improving the reliability and service life of the equipment.
[0037] 5) Optimized signal distribution method: This utility model also optimizes the design of the signal distributor to achieve efficient distribution of control signals; at the same time, it can suppress signal reflection and standing waves, and ensure the stable signal quality after distribution; effectively improving the efficiency and reliability of distribution, and meeting the application requirements of multi-port output.
[0038] In this invention, the above-described technical solutions can be combined with each other to achieve more preferred combinations. Other features and advantages of this invention will be set forth in the following description, and some advantages will become apparent from the description or be learned by practicing this invention. The objectives and other advantages of this invention can be realized and obtained from the details specifically pointed out in the text and accompanying drawings. Attached Figure Description
[0039] The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of the invention. Throughout the drawings, the same reference numerals denote the same parts.
[0040] Figure 1 A schematic diagram of the structure of the multi-cavity radio frequency processing device provided in the embodiment of this utility model;
[0041] Figure 2 This is a schematic diagram of the structure of the signal distributor provided in an embodiment of the present utility model;
[0042] Figure 3 A circuit diagram of a signal distributor provided in an embodiment of this utility model. Detailed Implementation
[0043] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which constitute a part of this application and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not intended to limit the scope of the present invention.
[0044] A specific embodiment of this utility model discloses a multi-cavity radio frequency processing device, the structural schematic diagram of which is shown below. Figure 1 As shown. The device includes: Q controllers and signal distributors, N radio frequency modules, matching modules, and cavities; wherein, the output terminals of the controllers are connected one-to-one with the input terminals of the signal distributors, and the input terminal of each signal distributor receives one PWM control signal output by the corresponding controller; each signal distributor includes N output terminals; the nth output terminal of all signal distributors is connected to the input terminal of the nth radio frequency module, the output terminal of the nth radio frequency module is connected to the input terminal of the nth matching module, and the output terminal of the nth matching module is connected to the nth cavity; Q and N are both integers greater than 1, and n ranges from 1 to N.
[0045] It should be noted that the cavity described in this embodiment can be a single plasma cavity or one of the processing chambers of a plasma processing device with multiple processing chambers.
[0046] The radio frequency module includes one radio frequency bias power source and Q-1 radio frequency power sources; the nth output terminal of all signal distributors is connected one-to-one with the radio frequency bias power source or radio frequency power source in the nth radio frequency module, and the output terminal of each radio frequency bias power source and radio frequency power source serves as an output terminal of the nth radio frequency module.
[0047] It should be noted that in this embodiment, the controller is only used to output PWM control signals, and different controllers output different PWM control signals. The PWM control signals are distributed through a signal distributor, and the distributed PWM control signals are input to the corresponding power sources in the RF module, controlling the corresponding power sources to output matching power signals. Based on the multi-cavity RF processing device provided in this embodiment, it is possible to achieve synchronous use, synchronous processing, and parameter processing with the same power for multiple cavities, effectively solving the problems of low RF processing efficiency and unsatisfactory processing effects caused by the simple structure and control method of existing RF processing devices.
[0048] The matching module includes Q matching networks; wherein, the Q output terminals of the nth RF module are connected one-to-one with the input terminals of the Q matching networks in the nth matching module; and the Q output terminals of the Q matching networks in the nth matching module are respectively connected to the nth cavity.
[0049] Preferably, the structural schematic diagram of the signal distributor provided in this embodiment is as follows: Figure 2As shown, the signal distributor includes a signal receiving channel and N transmission line transformers. The signal receiving channel includes one signal input port and N transmission ports. Each transmission line transformer includes two signal output ports and one transmission port. The N transmission ports of the signal receiving channel are connected one-to-one with the transmission ports of the N transmission line transformers. The signal distributor also includes N series resistor groups. One series resistor group is connected between each of the two signal output ports of each transmission line transformer.
[0050] The circuit diagram of the signal distributor is as follows: Figure 3 As shown. The signal receiving channel includes: N signal channels, N isolation resistors, and a capacitor module; wherein, the first port of each signal channel is connected to the first port of an isolation resistor, and the second ports of the N isolation resistors are interconnected; the second ports of the N signal channels are all connected to the first port of the capacitor module, and the second port of the capacitor module is grounded; the first port of each signal channel is used as a transmission port of the signal receiving channel; and the connection point of the second ports of the N signal channels is used as the signal input port of the signal receiving channel.
[0051] The capacitor module includes M series capacitor groups connected in parallel. One end of the parallel connection of the M series capacitor groups serves as the first port of the capacitor module, and the other end serves as the second port. By setting up series capacitor groups, the overall voltage across the series capacitor group is equal to the sum of the voltages across each individual capacitor within the group, thereby further enhancing the voltage carrying capacity of the signal distributor and preventing breakdown.
[0052] The signal channel includes a parallel capacitor bank and a first inductor; one end of the parallel capacitor bank serves as the first port of the signal channel, and the other end of the parallel capacitor bank is also connected to one end of the first inductor, with the other end of the first inductor serving as the second port of the signal channel; the other end of the parallel capacitor bank is grounded. By setting up a parallel capacitor bank, the total current carried by the parallel capacitor bank is equal to the sum of the currents carried by each capacitor within the parallel capacitor bank, thereby further enhancing the current carrying capacity of the signal distributor.
[0053] Specifically, the parallel capacitor bank and the series capacitor bank each include two or more capacitors, and the series resistor bank includes two or more resistors.
[0054] exist Figure 3In the circuit diagram of the signal distributor shown, the series resistor group includes two resistors, denoted as R1 and R2, with equal resistance values. The parallel capacitor group includes two capacitors, denoted as C1 and C2, whose values may vary depending on the situation. The series capacitor group includes two capacitors, denoted as C3 and C4, whose values may vary depending on the situation, but it is necessary to ensure that the equivalent capacitance of each parallel series capacitor group is the same.
[0055] Preferably, the transmission line transformer adopts a microstrip line structure, a coaxial line structure, or a waveguide structure.
[0056] In addition, the signal receiving channel can also be implemented using a 1-to-N Wilkinson divider.
[0057] Those skilled in the art will understand that the programs / software involved in the controller in the above embodiments are common methods in the prior art. For example, existing methods for generating PWM control signals can be run in the controller. Similarly, the programs / software involved in the RF module are common methods in the prior art. For example, existing methods for generating corresponding RF power signals based on PWM control signals can be run in the RF module. This utility model does not involve any software improvements. This utility model only requires connecting the various devices with corresponding functions through the connection relationships given in the embodiments of this utility model, without involving any program or software improvements. As for the connection methods between the various hardware devices with corresponding functions, they can all be implemented by those skilled in the art using existing technology, and will not be described in detail here.
[0058] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model should be included within the protection scope of the present utility model.
Claims
1. A multi-cavity radio frequency treatment device, characterized by, The device includes: Q controllers and signal distributors, N radio frequency modules, matching modules, and cavities; wherein... The output of the controller is connected to the input of the signal distributor in a one-to-one correspondence. The input of each signal distributor receives one PWM control signal output by the corresponding controller. Each signal distributor includes N output terminals; the nth output terminal of all signal distributors is connected to the input terminal of the nth RF module, the output terminal of the nth RF module is connected to the input terminal of the nth matching module, and the output terminal of the nth matching module is connected to the nth cavity; Q and N are both integers greater than 1, and n ranges from 1 to N.
2. The multi-cavity radio frequency treatment device of claim 1, wherein, The radio frequency module includes one radio frequency bias power source and Q-1 radio frequency power sources; The nth output of each signal distributor is connected one-to-one with the RF bias power source or RF power source in the nth RF module. The output of each RF bias power source and RF power source serves as an output of the nth RF module.
3. The multi-cavity radio frequency treatment device of claim 2, wherein, The matching module includes Q matching networks; wherein... The Q output terminals of the nth RF module are connected one-to-one with the input terminals of the Q matching networks in the nth matching module; The Q outputs of the Q matching networks in the nth matching module are connected to the nth cavity.
4. The multi-cavity radio frequency processing device according to any one of claims 1-3, characterized in that, The signal distributor includes a signal receiving channel and N transmission line transformers; wherein... The signal receiving channel includes one signal input port and N transmission ports; each transmission line transformer includes two signal output ports and one transmission port; wherein, The N transmission ports of the signal receiving channel are connected one-to-one with the transmission ports of the N transmission line transformers.
5. The multi-cavity RF treatment device of claim 4, wherein, The signal distributor also includes N groups of series resistors; wherein... A series resistor bank is connected between each of the two signal output ports of the transmission line transformer.
6. The multi-cavity RF treatment device of claim 5, wherein, The signal receiving channel includes: N signal channels, N isolation resistors, and a capacitor module; wherein, The first port of each of the signal channels is connected to the first port of an isolation resistor, and the second ports of the N isolation resistors are interconnected. The second ports of the N signal channels are all connected to the first port of the capacitor module, and the second port of the capacitor module is grounded. The first port of each of the signal channels is used as a transmission port of the signal receiving channel; the connection point of the second ports of the N signal channels is used as the signal input port of the signal receiving channel.
7. The multi-cavity RF treatment device of claim 6, wherein, The capacitor module includes M series capacitor groups, and the M series capacitor groups are connected in parallel; one end of the M series capacitor groups connected in parallel is used as the first port of the capacitor module, and the other end of the M series capacitor groups connected in parallel is used as the second port of the capacitor module.
8. The multi-cavity radio frequency processing device according to claim 7, characterized in that, The signal channel includes a parallel capacitor bank and a first inductor; wherein, one end of the parallel capacitor bank is used as the first port of the signal channel, one end of the parallel capacitor bank is also connected to one end of the first inductor, and the other end of the first inductor is used as the second port of the signal channel; the other end of the parallel capacitor bank is grounded.
9. The multi-cavity radio frequency treatment device of claim 8, wherein, The parallel capacitor bank and the series capacitor bank each include two or more capacitors, and the series resistor bank includes two or more resistors.
10. The multi-cavity radio frequency processing device according to claim 4, characterized in that, The signal receiving channel is implemented by a 1 / N Wilkinson divider.