A silane emergency relief treatment system

Abstract

The utility model discloses a kind of silane emergency relief processing systems, it is related to silane preparation technical field, including silane tail gas pipe, silane tail gas pipe is connected with first condenser, first condenser is equipped with first condensing pipe, exhaust pipe and first uncondensed gas pipe, pressure control unit is equipped on exhaust pipe, first uncondensed gas pipe is connected with second condenser, second condenser is equipped with second uncondensed gas pipe and second condensate pipe, second uncondensed gas pipe is connected with first condenser. The utility model uses two-stage condensation, the refrigerant of first-stage condensation uses the tail gas of second-stage condensation as refrigerant, reduces refrigerant consumption, improves the temperature of outer sending tail gas simultaneously, avoids the pipeline frost of exhaust pipe to dewing;Through pressure control unit pressurization cryogenic, improve condensing effect, reduce the load and device scale of downstream processing device, significantly reduce investment cost.

Description

Technical Field

[0001] This invention belongs to the field of silane preparation technology, specifically relating to a silane emergency release treatment system. Background Technology

[0002] Silane, also known as silane or silane hydrodeionization, is a colorless, highly flammable gas with the chemical formula SiH4. It is easily purified and can be precisely controlled, earning it the title of "flowing pure silicon." It is the core raw material for the silane method of producing high-purity crystalline silicon and an important electronic specialty gas that cannot be replaced by other silicon sources. It is widely used in TFT / LCD, crystalline silicon solar cells, semiconductors, and emerging fields such as silicon-carbon anodes and advanced ceramics. Silane practically dominates the entire new energy, semiconductor, and new materials industries. The main methods for silane preparation include the magnesium silicide method, the sodium aluminum hydride method, and the chlorosilane disproportionation method. The chlorosilane disproportionation method involves the hydrogenation reaction of silicon tetrachloride to synthesize trichlorosilane, which then undergoes a three-step reversible disproportionation reaction to produce silane products, with silicon tetrachloride as a byproduct. The silicon tetrachloride is returned to the hydrogenation process. The entire system is a closed-loop cycle with almost no emissions, high atom utilization, and is environmentally friendly, making it very suitable for industrial production and the primary method for silane preparation.

[0003] The chlorosilane disproportionation process was developed by Union Carbide Corporation (UCC) and proposed in patent US4340574. This process involves a multi-step disproportionation reaction in a two-stage fixed bed combined with distillation purification to prepare silanes. Due to the limitation of reaction equilibrium, the single-pass yield of silanes is less than 8 mol.%, a large amount of material needs to be recycled, the process is long, the production efficiency is low, and the energy consumption and investment are large.

[0004] In emergency situations, silane production systems require pressure relief through a safety venting system to ensure safety. Existing methods typically involve sending vented exhaust gases to a scrubbing system for alkaline treatment to prevent safety and environmental accidents. Current technologies usually involve directly receiving the exhaust gases or using simple condensation before sending them to the scrubbing system. However, this approach suffers from drawbacks such as large scrubbing system designs, high investment costs, and poor condensation efficiency. Utility Model Content

[0005] The purpose of this invention is to solve the problems of the prior art and provide a silane emergency release treatment system. This invention adopts a two-stage condensation system. The refrigerant for the first stage condensation is the tail gas from the second stage condensation system, which reduces refrigerant consumption and increases the temperature of the external tail gas to prevent frost and condensation on the exhaust pipe. The system uses a pressure control unit for pressurization and deep cooling to improve the condensation effect, reduce the load and scale of downstream treatment devices, and significantly reduce investment costs.

[0006] This utility model is achieved through the following technical solution: A silane emergency release treatment system includes a silane tail gas pipe connected to a first condenser. The first condenser is provided with a first condenser pipe, an exhaust pipe, and a first uncondensed gas pipe. A pressure control unit is provided on the exhaust pipe. The first uncondensed gas pipe is connected to a second condenser. The second condenser is provided with a second uncondensed gas pipe and a second condensate pipe. The second uncondensed gas pipe is connected to the first condenser.

[0007] Preferably, the pressure control unit includes a pressure transmitter and a pressure regulating valve disposed on the exhaust pipe.

[0008] Preferably, the first condensate pipe and the second condensate pipe are connected to the condensate storage tank.

[0009] Preferably, the second condenser is provided with a low-temperature refrigerant inlet pipe and a low-temperature refrigerant outlet pipe.

[0010] Preferably, the first condensate pipe and the second condensate pipe are connected to the main condensate pipe.

[0011] Preferably, the lower end of the condensate main pipe is inserted into the condensate in the condensate storage tank.

[0012] Preferably, a balance line is provided between the condensate storage tank and the exhaust pipe.

[0013] Compared with the prior art, this utility model has the following advantages and beneficial effects: I. This utility model provides a silane emergency release treatment system. Silane release tail gas is discharged through a silane tail gas pipe into a first condenser (the refrigerant in the first condenser is the uncondensed gas discharged through a second uncondensed gas pipe after condensation in the second condenser) for initial condensation. The uncondensed gas after the first condensation is discharged through the first uncondensed gas pipe into a second condenser (the refrigerant in the second condenser is a low-temperature refrigerant) for secondary condensation. The uncondensed gas after the second condensation is heated by the first condenser and then discharged under the control of a pressure control unit on the exhaust pipe. The condensate in the first and second condensers is discharged through a first condensate pipe and a second condensate pipe, respectively. The pressure control unit condenses more silane release tail gas. This utility model adopts two-stage condensation. The refrigerant for the first stage condensation is the tail gas from the second stage condensation, reducing refrigerant consumption and increasing the temperature of the externally supplied silane release tail gas to prevent frost and condensation on the exhaust pipe. Deep cooling via the pressure control unit improves the condensation effect, reduces the load and scale of downstream treatment devices, and significantly reduces investment costs.

[0014] II. The silane emergency release treatment system provided by this utility model adopts high pressure control (pressure of 0.2-0.3MPa) to condense more silane release tail gas and reduce the processing volume of the scrubbing system.

[0015] III. The present invention provides a silane emergency release treatment system in which the condensate in the first condenser and the second condenser are discharged into the condensate storage tank through the first condensate pipe and the second condensate pipe, respectively; the condensate main pipe is inserted into the condensate in the condensate storage tank to avoid pressure leakage.

[0016] IV. The silane emergency release treatment system provided by this utility model has a balanced pipeline that ensures that the exhaust pipe and the condensate storage tank are pressurized. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of the structure of Embodiment 2 of this utility model; The components are as follows: 1. Silane tail gas pipe; 2. First condenser; 3. First condenser pipe; 4. Exhaust pipe; 5. First non-condensable gas pipe; 6. Second condenser; 61. Low-temperature refrigerant inlet pipe; 62. Low-temperature refrigerant outlet pipe; 7. Second non-condensable gas pipe; 8. Second condensate pipe; 9. Pressure control unit; 91. Pressure transmitter; 92. Pressure regulating valve; 10. Condensate storage tank; 11. Condensate main pipe; 12. Balance line. Detailed Implementation The present invention will be further described in detail below with reference to the embodiments, but the implementation of the present invention is not limited thereto.

[0018] Example 1 like Figure 1 As shown, a silane emergency release treatment system includes a silane tail gas pipe 1, which is connected to a first condenser 2. The first condenser 2 is provided with a first condenser pipe 3, an exhaust pipe 4, and a first uncondensed gas pipe 5. The exhaust pipe 4 is provided with a pressure control unit 9. The first uncondensed gas pipe 5 is connected to a second condenser 6. The second condenser 6 is provided with a second uncondensed gas pipe 7 and a second condensate pipe 8. The second uncondensed gas pipe 7 is connected to the first condenser 2.

[0019] Example 2 like Figure 2 As shown, a silane emergency release treatment system includes a silane tail gas pipe 1, which is connected to a first condenser 2. The first condenser 2 is provided with a first condenser pipe 3, an exhaust pipe 4, and a first uncondensed gas pipe 5. The exhaust pipe 4 is provided with a pressure control unit 9. The first uncondensed gas pipe 5 is connected to a second condenser 6. The second condenser 6 is provided with a second uncondensed gas pipe 7 and a second condensate pipe 8. The second uncondensed gas pipe 7 is connected to the first condenser 2.

[0020] The pressure control unit 9 includes a pressure transmitter 91 and a pressure regulating valve 92 mounted on the exhaust pipe 4. The pressure transmitter 91 and the pressure regulating valve 92 are connected to a DCS controller. The DCS controller sets the pressure (e.g., 0.2-0.3 MPa), and adjusts the opening of the pressure regulating valve 92 in real time according to the detection value of the pressure transmitter 91 to maintain the pressure at the set pressure.

[0021] The first condensate pipe and the second condensate pipe 8 are connected to the condensate storage tank 10.

[0022] The second condenser 6 is equipped with a low-temperature refrigerant inlet pipe 61 and a low-temperature refrigerant outlet pipe 62 (the refrigerant is generally a -70℃ refrigerant).

[0023] The first condensate pipe and the second condensate pipe 8 are connected to the condensate main pipe 11.

[0024] The lower end of the condensate main pipe 11 is inserted into the condensate in the condensate storage tank 10.

[0025] A balance line 12 is provided between the condensate storage tank 10 and the exhaust pipe 4.

[0026] The first condenser 2, the second condenser 6, the pressure transmitter 91, and the pressure regulating valve 92 are all existing technologies and will not be described in detail here.

[0027] Compared with the prior art, this utility model has the following advantages and beneficial effects: I. This utility model provides a silane emergency release treatment system. Silane release tail gas is discharged through silane tail gas pipe 1 into a first condenser 2 (the refrigerant in the first condenser 2 is the uncondensed gas discharged through the second uncondensed gas pipe 7 after condensation in the second condenser 6) for the first condensation. The uncondensed gas after the first condensation is discharged through the first uncondensed gas pipe 5 into the second condenser 6 (the refrigerant in the second condenser 6 is a low-temperature refrigerant) for the second condensation. The uncondensed gas after the second condensation is heated by the first condenser 2 and then discharged under the control of the pressure control unit 9 on the exhaust pipe 4. The condensate in the first condenser 2 and the second condenser 6 is discharged through the first condensate pipe and the second condensate pipe 8, respectively. The pressure control unit 9 is designed to condense more silane release tail gas. This invention employs a two-stage condensation process. The refrigerant for the first-stage condensation is the exhaust gas from the second-stage condensation, which reduces refrigerant consumption and increases the temperature of the externally supplied silane exhaust gas, preventing frost and condensation on the exhaust pipe 4. The pressure control unit 9 performs pressurized deep cooling, which improves the condensation effect, reduces the load and scale of downstream processing devices, and significantly reduces investment costs.

[0028] II. The silane emergency release treatment system provided by this utility model uses high pressure control (pressure of 0.2-0.3MPa) in pressure control unit 9 to condense more silane release tail gas and reduce the processing volume of the scrubbing system.

[0029] III. The present invention provides a silane emergency release treatment system in which the condensate in the first condenser 2 and the second condenser 6 is discharged into the condensate storage tank 10 through the first condensate pipe and the second condensate pipe 8, respectively; the condensate main pipe 11 is inserted into the condensate in the condensate storage tank 10 to avoid pressure leakage.

[0030] IV. The present invention provides a silane emergency release treatment system, wherein the balancing pipeline 12 is configured to ensure that the exhaust pipe 4 and the condensate storage tank 10 are pressure-equalized.

[0031] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Any simple modifications or equivalent changes made to the above embodiments based on the technical essence of the present utility model shall fall within the protection scope of the present utility model.

Claims

1. A silane emergency release treatment system, characterized in that: It includes a silane tail gas pipe (1), which is connected to a first condenser (2). The first condenser (2) is provided with a first condenser pipe (3), an exhaust pipe (4) and a first uncondensed gas pipe (5). The exhaust pipe (4) is provided with a pressure control unit (9). The first uncondensed gas pipe (5) is connected to a second condenser (6). The second condenser (6) is provided with a second uncondensed gas pipe (7) and a second condensate pipe (8). The second uncondensed gas pipe (7) is connected to the first condenser (2).

2. The silane emergency release treatment system according to claim 1, characterized in that: The pressure control unit (9) includes a pressure transmitter (91) and a pressure regulating valve (92) disposed on the exhaust pipe (4).

3. The silane emergency release treatment system according to claim 1, characterized in that: The first condenser pipe (3) and the second condensate pipe (8) are connected to the condensate storage tank (10).

4. The silane emergency release treatment system according to claim 1, characterized in that: The second condenser (6) is provided with a low-temperature refrigerant inlet pipe (61) and a low-temperature refrigerant outlet pipe (62).

5. The silane emergency release treatment system according to claim 1, characterized in that: The first condenser (3) and the second condensate pipe (8) are connected to the condensate main pipe (11).

6. The silane emergency release treatment system according to claim 5, characterized in that: The lower end of the condensate main pipe (11) is inserted into the condensate in the condensate storage tank (10).

7. A silane emergency release treatment system according to claim 3 or 6, characterized in that: A balance line (12) is provided between the condensate storage tank (10) and the exhaust pipe (4).

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