Air supply structure

Abstract

The utility model discloses a gas supply structure, including valve island subassembly, first flowmeter and second flowmeter, mixing cavity and main exhaust port, the mixing cavity with the main exhaust port intercommunication, a plurality of gas inlets and a plurality of main road channels, a plurality of main road channels with a plurality of gas inlets one-to-one intercommunication, every main road channel all is through the first flowmeter intercommunication mixing cavity, auxiliary exhaust port and auxiliary road channel, the auxiliary road channel intercommunication a plurality of gas inlets, and the auxiliary road channel passes through the second flowmeter intercommunication auxiliary exhaust port, the utility model discloses a mixing cavity is arranged in the valve island subassembly, makes each main road channel's gas to enter the mixing cavity and mixes, then is transported to vacuum plating film cavity through main exhaust port.

Description

Technical Field

[0001] This utility model relates to the field of gas supply equipment technology, and in particular to gas supply structure. Background Technology

[0002] In the photovoltaic coating industry, especially in chemical vapor deposition and magnetron sputtering deposition, special process gases are the core medium of vacuum coating processes. Their working principle involves key physicochemical processes such as gas ionization, chemical reaction, and plasma-assisted deposition. In this process, how to accurately control the content of a certain process gas in the coating operation becomes a key indicator for evaluating the performance of a coating equipment. In the vacuum coating process, the gas supply device plays a role in distributing gas sources, controlling flow rates, and adjusting ratios in the entire gas supply system. For the coating process, the quality of the film is closely related to the gas supply system.

[0003] Existing vacuum coating equipment typically uses bottled oxygen, argon, or other special gases connected to the equipment via their respective process pipelines and flow meters or valves. When a single gas is supplied, the operator can control it using a mass flow controller and valves. However, when multiple gases need to be supplied, multiple process pipelines need to be arranged, making it more difficult to check for gas leaks. Utility Model Content

[0004] To solve at least one of the above-mentioned technical problems, this utility model provides a gas supply structure in which the gas from multiple main channels is mixed in a mixing chamber and then discharged from the main exhaust port, reducing the difficulty of leak detection.

[0005] The technical solution adopted in this utility model is to design a gas supply structure, including a valve island assembly, a first flow meter, and a second flow meter. The valve island assembly is equipped with:

[0006] A mixing chamber and a main exhaust port, wherein the mixing chamber is connected to the main exhaust port;

[0007] Multiple air inlets and multiple main channels, with each main channel corresponding to one of the multiple air inlets, and each main channel connected to the mixing chamber via the first flow meter;

[0008] An auxiliary exhaust port and an auxiliary passageway, wherein the auxiliary passageway connects to multiple air inlets and is connected to the auxiliary exhaust port via a second flow meter.

[0009] In some embodiments, there are multiple auxiliary exhaust ports and multiple auxiliary road channels, and the multiple auxiliary exhaust ports correspond one-to-one with the multiple auxiliary road channels;

[0010] The valve island assembly is also provided with a collection channel, which is connected to multiple air inlets and multiple auxiliary channels.

[0011] In some embodiments, the air supply structure further includes a plurality of second solenoid valves, each of which is configured to correspond one-to-one with a plurality of air inlets, and each air inlet is connected to the collecting channel through a second solenoid valve.

[0012] In some embodiments, the collection channel extends through the valve island assembly in a first direction, and the two ports of the collection channel are provided with first seals.

[0013] In some embodiments, the auxiliary channel extends along a second direction from one side wall of the valve island assembly into the interior of the valve island assembly, the port of the auxiliary channel is provided with a second seal, and the auxiliary channel is connected to the auxiliary exhaust port through a second flow meter.

[0014] In some embodiments, the air supply structure further includes a plurality of first solenoid valves, each of which is configured in a one-to-one correspondence with a plurality of air inlets, and each air inlet is connected to the main channel through a first solenoid valve.

[0015] In some embodiments, the main road corridor includes:

[0016] An air intake passage, one end of which is connected to the air intake port;

[0017] A transition channel extends along a second direction from one side wall of the valve island assembly into the interior of the valve island assembly. The port of the transition channel is provided with a third seal. The air intake channel is connected to the transition channel through the first solenoid valve. The transition channel is connected to the mixing chamber through the first flow meter.

[0018] In some embodiments, the air inlet and the third seal are located on the same side of the valve island assembly.

[0019] In some embodiments, the main exhaust port and the auxiliary exhaust port are located on the same side of the valve island assembly.

[0020] In some embodiments, the mixing chamber extends along a first direction from one side wall of the valve island assembly into the interior of the valve island assembly, and the port of the mixing chamber is provided with a fourth seal.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] This invention incorporates a mixing chamber within the valve island assembly. Gases from multiple inlets enter the mixing chamber via their respective interconnected main channels and are mixed under the control of a first flow meter. The mixture is then delivered to the vacuum coating chamber via the main exhaust port. Different gases are mixed within the mixing chamber before entering the vacuum coating chamber. Since all gases are mixed within the mixing chamber, a predetermined number of main exhaust connectors are inserted into the main exhaust port according to actual conditions. Process pipes are then connected between the main exhaust connectors and the vacuum coating chamber. The number of process pipes and main exhaust connectors is controlled within a predetermined range, reducing the risk of leakage and simplifying leak detection. An auxiliary channel connects multiple inlets and, under the control of a second flow meter, outputs the mixed gas through an auxiliary exhaust port. This provides auxiliary gas supply under different operating conditions, enhancing the system's flexibility and stability. Attached Figure Description

[0023] The present invention will now be described in detail with reference to specific embodiments and accompanying drawings. To illustrate the details and facilitate understanding of its principles, the drawings are not necessarily to scale, and similar reference numerals may describe similar components in different views. The accompanying drawings generally illustrate the embodiments discussed herein by way of example and not limitation. Wherein:

[0024] Figure 1 This is a three-dimensional schematic diagram of the gas supply structure of the embodiment;

[0025] Figure 2 This is a schematic diagram of the gas supply structure from another angle in the embodiment;

[0026] Figure 3 This is a top view of the air supply structure of the embodiment;

[0027] Figure 4 yes Figure 3 Schematic diagram of AA section;

[0028] Figure 5 yes Figure 3 Schematic diagram of the BB cross section;

[0029] Figure 6 yes Figure 3 Schematic diagram of the CC section;

[0030] Figure 7 yes Figure 6 Schematic diagram of the DD cross section;

[0031] Figure 8 yes Figure 7 Schematic diagram of the EE cross section;

[0032] Figure 9 yes Figure 3 Schematic diagram of the FF cross section;

[0033] Figure 10 This is a schematic diagram of the gas supply principle of the gas supply structure in the embodiment.

[0034] In the diagram, 1 is the valve island plate; 101 is the mixing chamber; 102 is the main exhaust port; 103 is the air inlet; 104 is the main channel; 141 is the air inlet channel; 142 is the transition channel; 105 is the auxiliary exhaust port; 106 is the auxiliary channel; and 107 is the converging channel.

[0035] 2. First flow meter; 3. Second flow meter; 4. Second solenoid valve; 5. First seal; 6. Second seal; 7. First solenoid valve; 8. Third seal; 9. Fourth seal; 10. Main exhaust connector; 11. Auxiliary exhaust connector; 12. Inlet connector. Detailed Implementation

[0036] The following are specific embodiments of this utility model, and the technical solution of this utility model will be further described with reference to the accompanying drawings. However, this utility model is not limited to these embodiments, and the following embodiments do not limit the utility model involved in the claims. In addition, all combinations of features described in the embodiments are not necessarily necessary for the solution of the utility model.

[0037] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0038] Example

[0039] like Figures 1 to 10 As shown, this embodiment provides an air supply structure including a valve island assembly, a first flow meter 2, and a second flow meter 3. The valve island assembly includes a mixing chamber 101, a main exhaust port 102, an auxiliary exhaust port 105, and an auxiliary channel 106. The mixing chamber 101 is connected to the main exhaust port 102. Multiple air inlets 103 and multiple main channels 104 are provided, each corresponding to one of the air inlets 103. Each main channel 104 is connected to the mixing chamber 101 via the first flow meter 2. The auxiliary channel 106 connects to the multiple air inlets 103 and is connected to the auxiliary exhaust port 105 via the second flow meter 3.

[0040] The mixing chamber 101 serves to collect gas. The number of main exhaust ports 102 can be set according to actual needs. When only one main exhaust port 102 is set, only one main exhaust connector 10 is needed to connect to the main exhaust port 102. Fewer connectors result in a lower probability of leakage, reducing the risk of leakage and simplifying the detection of leaks. In this embodiment, multiple main exhaust ports 102 are provided. One main exhaust connector 10 is selectively inserted into one of the main exhaust ports 102, while the remaining main exhaust ports 102 are sealed with seals. When detecting leaks, the main exhaust ports 102 sealed with seals do not require leak testing, thus reducing the difficulty.

[0041] The gas supply structure incorporates a mixing chamber 101 within the valve island assembly. Gases from multiple inlets 103 enter the mixing chamber 101 via their respective main channels 104 and are thoroughly mixed under the control of the first flow meter 2. The mixture is then delivered to the vacuum coating chamber via the main exhaust port 102. This ensures that different gases form a uniform mixture before entering the vacuum coating chamber, improving the uniformity of gas distribution on the target surface and avoiding localized concentration differences caused by traditional single-path gas supply. Simultaneously, the auxiliary channel 106 connects the multiple inlets 103 and, under the control of the second flow meter 3, outputs the mixed gas through the auxiliary exhaust port 105. This can be used as an auxiliary gas supply or exhaust channel under different operating conditions, enhancing the system's flexibility and stability. This overall solution not only reduces the complex layout of traditional multiple independent gas paths, decreasing the number of pipes and interface points, facilitating leak detection and maintenance, but also effectively reduces manufacturing and operating costs and improves the uniformity of film deposition and product quality during vacuum coating.

[0042] Furthermore, there are multiple auxiliary exhaust ports 105 and multiple auxiliary passages 106, with each of the multiple auxiliary exhaust ports 105 corresponding to one of the multiple auxiliary passages 106; the valve island assembly is also provided with a collection passage 107, which is connected to multiple air inlets 103 and also connected to multiple auxiliary passages 106; the collection passage 107 serves to collect gas.

[0043] In this embodiment, the valve island assembly includes a valve island plate 1, with a mixing chamber 101, a main exhaust port 102, an air inlet 103, a main channel 104, an auxiliary exhaust port 105, an auxiliary channel 106, and a collection channel 107 all located on the valve island plate 1. The connections between each gas path can be completed within the same plate, avoiding the problems of large space occupation, complex interfaces, and numerous sealing points associated with traditional distributed piping arrangements, thus significantly reducing the risk of leakage. Gas can be collected, distributed, and mixed within the valve island plate 1, reducing the number of external pipes and making the gas supply structure more compact and modular, facilitating overall equipment installation and maintenance. Simultaneously, this integrated design shortens the gas transmission path, improves gas mixing efficiency and response speed, further ensuring the uniformity of gas distribution within the vacuum coating chamber, which helps improve film deposition quality and reduce system operating costs.

[0044] Multiple auxiliary exhaust ports 105 and auxiliary channels 106 are provided, with each corresponding to the other. This allows different gases to be independently controlled within the auxiliary channels 106 before entering various corners of the vacuum coating chamber through their respective auxiliary exhaust ports 105, thus achieving multi-point gas supply and further improving the dispersion and uniformity of the gas within the vacuum coating chamber. Simultaneously, a collecting channel 107 is added to the valve island assembly. The collecting channel 107 connects to multiple air inlets 103 and is interconnected with multiple auxiliary channels 106, enabling the concentration and distribution of gases from different air inlets 103. This ensures that the gases are pre-mixed to a certain extent before entering the auxiliary channels 106, guaranteeing good concentration consistency during multi-point gas supply. This structure not only effectively improves the gas flow field distribution during the coating process, avoiding uneven film layers caused by local concentration differences, but also simplifies gas path switching and control methods, enhances the stability and flexibility of the gas supply system, and further improves coating quality and equipment operational reliability.

[0045] In some other embodiments, the valve island assembly includes a mixing element, with a mixing chamber 101 disposed inside the mixing element and connected to the mixing element by a pipe having a main channel 104, through which gas can enter the mixing chamber 101.

[0046] In some other embodiments, the auxiliary channel 106 and the auxiliary exhaust port 105 are located outside the valve island plate 1, and only a two-way connector is needed to connect the pipeline with the auxiliary channel 106 and the main channel 104.

[0047] Furthermore, the gas supply structure also includes multiple second solenoid valves 4, which are configured one-to-one with multiple air inlets 103. Each air inlet 103 is connected to the collection channel 107 through a second solenoid valve 4, and each second solenoid valve 4 is independently controlled.

[0048] The gas supply structure is equipped with an independent second solenoid valve 4 between each air inlet 103 and the collecting channel 107, allowing for individual control of the connection between each air inlet 103 and the collecting channel 107. During operation, the operator or control system can select to open or close the corresponding second solenoid valve 4 according to actual process requirements, thus flexibly determining which gases enter the collecting channel 107 and are further delivered to the auxiliary channel 106 or the coating chamber. This independent control method not only enables selective supply of multiple gases but also allows for precise adjustment of the proportions of each gas, improving the accuracy of mixed gas composition control. On the one hand, it reduces unnecessary gas consumption and lowers operating costs; on the other hand, it enhances the adjustability and adaptability of the gas supply system, enabling it to meet the diverse gas type and concentration requirements of different coating processes, thereby ensuring coating quality and process stability.

[0049] Furthermore, the collecting channel 107 extends through the valve island assembly along the first direction, and the two ports of the collecting channel 107 are provided with first sealing elements 5, which facilitates the processing of the collecting channel 107 on the valve island plate 1.

[0050] The collecting channel 107 penetrates the valve island assembly along a first direction, and its two ends are equipped with first sealing elements 5. This allows the collecting channel 107 to be directly obtained through-processing during the machining of the valve island plate 1, avoiding the complex internal tortuous channel machining process and significantly improving manufacturing feasibility and precision. By setting sealing elements at both ends of the channel, gas leakage from the ports can be effectively prevented, ensuring the sealing and stability of the gas inside the channel during transmission and distribution. This structural design not only simplifies the machining process of the valve island plate 1, reducing manufacturing difficulty and cost, but also improves the smoothness of gas flow through a straight-through approach, reducing flow resistance and stagnation. It ensures the uniformity and reliability of gas during collection and distribution, facilitates the batch processing and assembly of the valve island assembly, and improves the overall engineering applicability and economy of the gas supply structure.

[0051] Furthermore, the auxiliary channel 106 extends along the second direction from one side wall of the valve island assembly into the interior of the valve island assembly. A second seal 6 is provided at the port of the auxiliary channel 106, and the auxiliary channel 106 is connected to the auxiliary exhaust port 105 via a second flow meter 3. This facilitates the machining of the auxiliary channel 106 on the valve island plate 1.

[0052] The auxiliary channel 106 extends inward from the side wall of the valve island assembly along the second direction, and a second sealing element 6 is provided at its port. This allows the auxiliary channel 106 to be directly formed during the processing of the valve island plate 1 by side drilling or milling, simplifying the processing technology and improving processing accuracy. The second sealing element 6 effectively prevents gas leakage while ensuring processing convenience, guaranteeing the sealing and stability of the auxiliary channel 106 during gas transmission. The auxiliary channel 106 is further connected to the auxiliary exhaust port 105 via a second flow meter 3, enabling precise control of the auxiliary gas flow rate. This structural design not only facilitates batch and high-precision processing on the valve island plate 1, reducing manufacturing costs, but also improves the safety and reliability of the gas transmission process. Its technical advantages lie in improving the forming and sealing method of the auxiliary channel 106, making the gas supply structure more compact and efficient, and enhancing the stability of equipment operation and the uniformity of the coating process.

[0053] Furthermore, the gas supply structure also includes multiple first solenoid valves 7, which are configured one-to-one with multiple air inlets 103. Each air inlet 103 is connected to the main channel 104 through a first solenoid valve 7; the multiple first solenoid valves 7 are independently controlled.

[0054] Each air inlet 103 is connected to the corresponding main channel 104 via an independent first solenoid valve 7, and multiple first solenoid valves 7 are independently controlled. During operation, the control system can select to open or close the corresponding first solenoid valve 7 according to process requirements, thereby flexibly adjusting whether each air inlet 103 supplies gas to the main channel 104, achieving precise management of different gas types and flow rates. Through this independent control method, not only can multiple gases be flexibly combined, but the gas path can also be completely cut off when a specific gas is not needed, avoiding ineffective consumption. In this way, on the one hand, the controllability of gas supply and the accuracy of mixing ratio adjustment are improved, ensuring that the gas composition entering the mixing chamber 101 is stable and consistent; on the other hand, gas waste is reduced, operating costs are lowered, and the process adaptability and stability of the gas supply system are enhanced, thereby further improving the uniformity of the coating process and the quality of the final product.

[0055] Furthermore, the main channel 104 includes an intake channel 141 and a transition channel 142; one end of the intake channel 141 is connected to the intake port 103; it extends along the second direction from one side wall of the valve island assembly into the interior of the valve island assembly; the port of the transition channel 142 is provided with a third seal 8; the intake channel 141 and the transition channel 142 are connected through a first solenoid valve 7; the transition channel 142 is connected to the mixing chamber 101 through a first flow meter 2; this facilitates the processing of the intake channel 141 and the transition channel 142 on the valve island plate 1.

[0056] The main channel 104 consists of an intake channel 141 and a transition channel 142. One end of the intake channel 141 is connected to the intake port 103. The transition channel 142 extends inward from the side wall of the valve island assembly along a second direction, and its port is equipped with a third seal 8 to ensure both ease of processing and good sealing. The intake channel 141 and the transition channel 142 are connected by a first solenoid valve 7, enabling independent control of whether gas enters the transition channel 142. The transition channel 142 is connected to the mixing chamber 101 via a first flow meter 2, thereby precisely regulating the gas flow rate. This design allows the valve island plate 1 to be machined into the intake channel 141 and the transition channel 142 using either linear drilling or milling, simplifying the manufacturing process and improving machining accuracy. Its technical advantages are: firstly, it enhances the modularity and maintainability of the gas supply structure, reducing processing difficulty and cost; secondly, while ensuring gas transmission stability, it allows for precise control and regulation of the gas before it enters the mixing chamber 101, contributing to improved gas mixing uniformity and the reliability of the coating process.

[0057] Furthermore, the air inlet 103 and the third seal 8 are located on the same side of the valve island assembly.

[0058] The air inlet 103 and the third seal 8 are both located on the same side of the valve island assembly, allowing the air inlet channel 141 and the transition channel 142 to be arranged and machined on the same side panel. This facilitates the formation of channels using straight or lateral machining methods, improving machining accuracy and efficiency. Simultaneously, this arrangement simplifies the installation and maintenance of the seals, ensuring the sealing and stability of the gas entering the transition channel 142. The technical benefits lie in optimizing the structural layout and manufacturing process of the valve island assembly, improving the compactness and maintainability of the gas supply structure, and ensuring the reliability and uniformity of gas flow.

[0059] Furthermore, the main exhaust port 102 and the auxiliary exhaust port 105 are located on the same side of the valve island assembly.

[0060] Both the main exhaust port 102 and the auxiliary exhaust port 105 are located on the same side of the valve island assembly, which concentrates the outlet layout of the main and auxiliary paths. This facilitates the one-time machining of the exhaust ports and corresponding channels on the valve island plate 1, while simplifying the installation, sealing, and maintenance of the exhaust ports. This design not only improves machining and assembly efficiency but also reduces the number of openings and interface complexity on the plate, which helps maintain the air circuit sealing and system stability. This ensures the uniformity of gas flow and mixing effect when the gas is delivered to the coating chamber, thereby improving the reliability of the coating process and product quality.

[0061] Furthermore, the mixing chamber 101 extends along a first direction from one side wall of the valve island assembly into the interior of the valve island assembly, and the port of the mixing chamber 101 is provided with a fourth seal 9.

[0062] The mixing chamber 101 extends inward from the side wall of the valve island assembly along a first direction, and its port is provided with a fourth sealing element 9 to ensure that the gas inside the mixing chamber 101 maintains good sealing performance during transmission and distribution. This structure facilitates the formation of the mixing chamber 101 on the valve island plate 1 using a straight-through or lateral machining method, improving machining accuracy and efficiency, while ensuring that the gas is fully mixed before entering the main exhaust port 102, thus improving the uniformity of gas distribution. The optimized structural layout and machining process of the mixing chamber 101 enhance the sealing reliability and gas mixing uniformity of the gas supply system, thereby improving the stability of the coating process and the quality of the coating layer.

[0063] In this embodiment, the valve island plate 1 is provided with four air inlets 103, each air inlet 103 is provided with an air inlet connector 12, the valve island plate 1 is provided with five main exhaust ports 102, one of the main exhaust ports 102 is provided with a main exhaust connector 10, and the other four main exhaust ports 102 are sealed with sealing elements. The valve island plate 1 is also provided with three auxiliary exhaust ports 105, each auxiliary exhaust port 105 is provided with an auxiliary exhaust connector 11; there are four main channels 104, each main channel 104 is provided with a first flow meter 2 and a first solenoid valve 7; there are three auxiliary channels 106, each auxiliary channel 106 is provided with a second flow meter 3, and there are four second solenoid valves 4, each of the four second solenoid valves 4 corresponds to one of the four air inlets 103, and the four second solenoid valves 4 are connected to a corresponding converging channel 107.

[0064] The specific embodiments described herein are merely illustrative examples illustrating the spirit of this utility model. Those skilled in the art to which this utility model pertains may make various modifications or additions to the described specific embodiments or use similar methods to replace them, without departing from the spirit of this utility model or exceeding the scope defined by the appended claims.

Claims

1. A gas supply structure, characterized in that, The valve island assembly includes a valve island assembly, a first flow meter, and a second flow meter. The valve island assembly is provided with: A mixing chamber and a main exhaust port, wherein the mixing chamber is connected to the main exhaust port; Multiple air inlets and multiple main channels, with each main channel corresponding to and connected to one of the multiple air inlets, and each main channel connected to the mixing chamber via the first flow meter; An auxiliary exhaust port and an auxiliary passageway, wherein the auxiliary passageway connects to multiple air inlets and is connected to the auxiliary exhaust port via a second flow meter.

2. The gas supply structure according to claim 1, characterized in that, Multiple auxiliary exhaust ports and multiple auxiliary road channels are provided, and each of the multiple auxiliary exhaust ports corresponds to one of the multiple auxiliary road channels. The valve island assembly is also provided with a collection channel, which is connected to multiple air inlets and multiple auxiliary channels.

3. The gas supply structure according to claim 2, characterized in that, The gas supply structure also includes a plurality of second solenoid valves, each of which is configured in a one-to-one correspondence with a plurality of air inlets. Each air inlet is connected to the collecting channel through a second solenoid valve.

4. The gas supply structure according to claim 2, characterized in that, The collection channel extends through the valve island assembly along a first direction, and the two ports of the collection channel are provided with first seals.

5. The gas supply structure according to claim 1, characterized in that, The auxiliary channel extends from one side wall of the valve island assembly into the interior of the valve island assembly along a second direction. The port of the auxiliary channel is provided with a second seal. The auxiliary channel is connected to the auxiliary exhaust port through the second flow meter.

6. The gas supply structure according to claim 1, characterized in that, The gas supply structure also includes a plurality of first solenoid valves, each of which is configured in a one-to-one correspondence with a plurality of air inlets, and each air inlet is connected to the main channel through a first solenoid valve.

7. The gas supply structure according to claim 6, characterized in that, The main road corridor includes: An air intake passage, one end of which is connected to the air intake port; A transition channel extends along a second direction from one side wall of the valve island assembly into the interior of the valve island assembly. The port of the transition channel is provided with a third seal. The air intake channel is connected to the transition channel through the first solenoid valve. The transition channel is connected to the mixing chamber through the first flow meter.

8. The gas supply structure according to claim 7, characterized in that, The air inlet and the third seal are located on the same side of the valve island assembly.

9. The gas supply structure according to claim 1, characterized in that, The main exhaust port and the auxiliary exhaust port are located on the same side of the valve island assembly.

10. The gas supply structure according to claim 4, characterized in that, The mixing chamber extends along a first direction from one side wall of the valve island assembly into the interior of the valve island assembly, and the port of the mixing chamber is provided with a fourth seal.

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