Boat structure, phosphorus diffusion system and solar cell manufacturing production line
By designing baffles and frames in the boat structure to form a complex airflow output path, the problem of insufficient density and uniformity of silicon wafer phosphosilicate glass in the phosphorus diffusion reaction is solved, thereby improving the yield of silicon wafer production.
Patent Information
- Application Number
- CN202522315569.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-31
- Publication Date
- 2026-11-03
- Estimated Expiration
- 2035-10-31
AI Technical Summary
In existing phosphorus diffusion reactions, the airflow rapidly converges and flows through the inlet end of the boat structure near the exhaust pipe, resulting in poor density and uniformity of the phosphosilicate glass on the silicon wafer, increasing the probability of defective wafers.
Design a boat structure including a baffle and a frame. The baffle is mounted on the frame and covers part of the cutout, forming a complex airflow output path to extend the contact time and uniformity between the airflow and the silicon wafer.
It improves the density and uniformity of phosphosilicate glass, reduces the risk of phosphosilicate glass being washed away during the etching process, and improves the yield of silicon wafer production.
Smart Images
Figure CN224936010U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of photovoltaic technology, specifically to a boat structure, a phosphorus diffusion system, and a solar cell manufacturing production line. Background Technology
[0002] On the solar cell manufacturing production line, a boat structure is used to carry silicon wafers and transfer them into the furnace chamber of a phosphorus diffusion furnace for the phosphorus diffusion reaction. During the phosphorus diffusion process, air needs to be continuously pumped into the furnace chamber to guide the airflow that is undergoing the phosphorus diffusion reaction within the furnace chamber, and to complete the phosphorus diffusion reaction on the silicon wafer.
[0003] In existing phosphorus diffusion reactions, the gas flow is rapid and relatively concentrated at the end of the boat structure near the air inlet of the exhaust pipe. In this case, the contact time between the gas flow and the silicon wafer is short and the contact with the silicon wafer cannot be uniform. As a result, the density and uniformity of the phosphosilicate glass (PSG) formed on the silicon wafer at this end of the boat structure are poor. Consequently, the phosphosilicate glass is easily washed away during subsequent etching, increasing the probability of defective wafers. Utility Model Content
[0004] Therefore, it is necessary to provide a boat structure, phosphorus diffusion system, and solar cell manufacturing production line that can improve the yield of silicon wafer production in response to the above problems.
[0005] A boat structure, the boat structure comprising:
[0006] The boat body includes a bottom rod assembly, two frames, and two connecting rod assemblies. The two frames are spaced apart along the length direction of the boat body, and the two connecting rod assemblies are spaced apart along the width direction of the boat body. The bottom rod assembly is connected between the two connecting rod assemblies and defines an accommodating cavity for accommodating silicon wafers with the two connecting rod assemblies and the two frames. The frame has a hollow portion that extends through the length direction of the boat body.
[0007] A baffle is installed on the frame and is spaced apart from both the connecting rod assembly and the frame. The orthographic projection of the baffle along the length of the boat at least partially covers the hollow portion.
[0008] In some embodiments, the baffle is detachably connected to the frame.
[0009] In some embodiments, the frame detachably connected to the baffle is defined as a first frame;
[0010] The first frame includes two horizontal beams arranged opposite each other along the height direction of the boat body, and two vertical beams spaced apart along the width direction of the boat body. The two horizontal beams and the two vertical beams together define the hollow part.
[0011] The baffle includes a main body and a hook part. The main body is spaced apart from the crossbeam and the vertical beam, and the orthographic projection of the main body in the length direction of the boat body at least partially covers the hollow part. The hook part is disposed on the main body and hooked to the crossbeam at the top layer.
[0012] In some embodiments, the hook portion includes a first sub-part and a second sub-part, the first sub-part being connected to the main body and extending along the length of the hull, the second sub-part being bent relative to the first sub-part toward the bottom crossbeam, and the second sub-part pressing against the top crossbeam on the side facing away from the main body.
[0013] In some embodiments, the main body is located within the accommodating cavity, and the second sub-part abuts against the outer side of the top beam facing away from the main body.
[0014] In some embodiments, the baffle further includes a mounting portion that protrudes from one side of the main body along the width direction of the boat body, and a hook portion is disposed at the end of the mounting portion away from the main body and spaced apart from the main body in the width direction of the boat body.
[0015] In some embodiments, there are two hooks and two mounting parts, each disposed on opposite sides of the main body along the width direction of the boat hull.
[0016] In some embodiments, the baffle further includes an abutment portion located between the main body and the bottom crossbeam, and abutting against the bottom crossbeam.
[0017] A phosphorus diffusion system, the phosphorus diffusion system comprising:
[0018] A phosphorus diffusion furnace, comprising a furnace body and an exhaust pipe, wherein the furnace body has a furnace cavity and the exhaust pipe is located within the furnace body; and
[0019] The boat structure as described in any of the above embodiments is disposed within the furnace cavity, and the baffle is installed on the frame near the air inlet of the exhaust pipe.
[0020] A solar cell manufacturing production line includes a phosphorus diffusion system as described in the above embodiments.
[0021] Compared with the prior art, this application has the following beneficial effects:
[0022] In the aforementioned boat structure, phosphorus diffusion system, and solar cell manufacturing production line, a baffle and a frame for mounting the baffle are positioned near the air inlet of the extraction pipe. The orthographic projection of the baffle along the length of the boat at least partially covers the perforated portion of the frame. Due to the obstruction of the baffle, most of the airflow does not exit directly from the perforated portion, but rather exits along the first gap formed between the baffle and the connecting rod, and the second gap formed between the baffle and the frame. In this configuration, the path of the airflow exit cavity becomes more complex, the output time is extended, and uniform contact with the silicon wafer is achieved. Therefore, the phosphosilicate glass formed on the silicon wafer at the end of the boat structure near the air inlet of the extraction pipe exhibits better density and uniformity. During subsequent etching, the phosphosilicate glass is not easily washed away, significantly improving the yield of silicon wafer production. Attached Figure Description
[0023] Figure 1 This is a schematic diagram of the overall structure of the boat structure in one embodiment of this application;
[0024] Figure 2 for Figure 1 The diagram shows the structure of the baffle in the boat structure.
[0025] Icon labels:
[0026] 100. Boat structure;
[0027] 10. Hull; 20. Baffle;
[0028] 11. Base rod assembly; 12. Frame; 13. Connecting rod assembly;
[0029] 111. Base rod;
[0030] 12a. First frame; 12b. Second frame; 121. Openwork section; 122. Horizontal beam; 123. Vertical beam;
[0031] 131. Connecting rod; 132. First opening; 133. Second opening; 134. Third opening;
[0032] 21. Main body; 22. Hook and hanger part; 221. First sub-part; 222. Second sub-part; 23. Mounting part; 24. Abutment part;
[0033] A. Receiving cavity; B. First gap; C. Second gap; X. Length direction; Y. Width direction; Z. Height direction. Detailed Implementation
[0034] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.
[0035] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.
[0036] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0037] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0038] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0039] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.
[0040] On the solar cell manufacturing production line, a boat structure is used to carry silicon wafers and transfer them into the furnace chamber of a phosphorus diffusion furnace for the phosphorus diffusion reaction. During the phosphorus diffusion process, air needs to be continuously pumped into the furnace chamber to guide the airflow that is undergoing the phosphorus diffusion reaction within the furnace chamber, and to complete the phosphorus diffusion reaction on the silicon wafer.
[0041] In existing phosphorus diffusion reactions, the gas flow is rapid and relatively concentrated at the end of the boat structure near the air inlet of the exhaust pipe. In this case, the contact time between the gas flow and the silicon wafer is short and the contact with the silicon wafer cannot be uniform. As a result, the density and uniformity of the phosphosilicate glass (PSG) formed on the silicon wafer at this end of the boat structure are poor. Consequently, the phosphosilicate glass is easily washed away during subsequent etching, increasing the probability of defective wafers.
[0042] Please see Figure 1 and Figure 2 To alleviate the aforementioned problems, the applicant, after in-depth research, designed a boat structure 100, which includes a boat body 10 and a baffle 20. The boat body 10 includes a bottom rod assembly 11, two frames 12, and two connecting rod assemblies 13. The two frames 12 are spaced apart along the length direction X of the boat body 10, and the two connecting rod assemblies 13 are spaced apart along the width direction Y of the boat body 10. The bottom rod assembly 11 is connected between the two connecting rod assemblies 13 and defines an accommodating cavity A for accommodating a silicon wafer with the two connecting rod assemblies 13 and the two frames 12. The frame 12 has a hollow portion 121 that extends through the length direction X of the boat body 10. The baffle 20 is mounted on one of the frames 12 and is spaced apart from both the connecting rod assemblies 13 and the frames 12. The orthographic projection of the baffle 20 in the length direction X of the boat body 10 at least partially covers the hollow portion 121.
[0043] Specifically, the hull 10 and the baffle 20 can both be made of quartz, graphite or other materials with good mechanical strength and resistance to acid and alkali corrosion.
[0044] The connecting rod group 13 includes multiple connecting rods 131. All connecting rods 131 in the same connecting rod group 13 are arranged at intervals along the height direction Z of the boat hull 10. Each pair of adjacent connecting rods 131 in the same connecting rod group 13 directly defines a first opening 132. The two connecting rods 131 at the top layer of the two connecting rod groups 13 define a second opening 133. The two connecting rods 131 at the bottom layer of the two connecting rod groups 13 define a third opening 134.
[0045] The bottom rod assembly 11 includes multiple bottom rods 111, all of which are spaced apart along the length X of the boat hull 10. The bottom plate is installed between the two bottom connecting rods 131 of the two connecting rod assemblies 13 and is used to support the silicon wafer.
[0046] The connecting rod 131 has a first toothed groove with its opening facing the receiving cavity A, and the bottom rod 111 has a second toothed groove with its opening facing the receiving cavity A. When the silicon wafer is placed in the receiving cavity A, the silicon wafer is confined within the first toothed groove and the second toothed groove to prevent the silicon wafer from falling off the boat structure 100.
[0047] The baffle 20 is installed on one of the frames 12. In the width direction Y of the boat body 10, the baffle 20 and the connecting rod 131 are spaced apart to form a first gap B. In the length direction X of the boat body 10, a second gap C is formed between the baffle 20 and the frame 12 on which it is installed. Therefore, the airflow in the accommodating cavity A can be output through the first gap B and the second gap C.
[0048] Taking an example where at least most of the baffle 20 is located outside the receiving cavity A, the airflow within the receiving cavity A passes sequentially through the perforated portion 121, the second gap C, and the first gap B before being output. Alternatively, taking an example where at least most of the baffle 20 is located inside the receiving cavity A, the airflow within the receiving cavity A flows sequentially through the first gap B, the second gap C, and the perforated portion 121 before being output. For ease of explanation, the following embodiments will all be described using the example where most of the baffle 20 is located inside the receiving cavity A, and the airflow within the receiving cavity A flows sequentially through the first gap B, the second gap C, and the perforated portion 121 before being output.
[0049] In actual operation, the airflow can enter through the first opening 132, the second opening 133, the third opening 134 and the hollow part 121 of one of the frames 12, and under the action of the external air pump and air extraction pipe, it flows through the accommodating cavity A and is then output through the first gap B, the second gap C and the hollow part 121 of the other frame 12.
[0050] In the prior art, the other frame 12 is usually located near the exhaust pipe. Since the cutout 121 of the other frame 12 is not obstructed, the airflow in the area near the cutout 121 in the accommodating cavity A will flow through the area quickly and relatively concentrated. In this process, the airflow has a short contact time with the silicon wafer and cannot make uniform and sufficient contact with the silicon wafer, which results in poor density and uniformity of the formed phosphosilicate glass. In the subsequent etching process, the phosphosilicate glass is easily washed away, increasing the probability of defective wafers.
[0051] In this application, the baffle 20 and the frame 12 on which the baffle 20 is mounted are positioned near the air inlet of the suction pipe. The orthographic projection of the baffle 20 in the longitudinal direction X of the boat 10 at least partially covers the cutout portion 121 of the frame 12. Under the obstruction of the baffle 20, most of the airflow is not directly output from the cutout portion 121, but is output along the first gap B formed between the baffle 20 and the connecting rod 131, and the second gap C formed between the baffle 20 and the frame 12. In this case, the path of the airflow output cavity A becomes more complex, the output time is extended, and the silicon wafer can be uniformly contacted. Therefore, the phosphosilicate glass formed on the silicon wafer at the end of the boat structure 100 near the air inlet of the suction pipe has better density and uniformity. The phosphosilicate glass will not be easily washed away during subsequent etching, which greatly improves the yield of silicon wafer production.
[0052] In some embodiments, the baffle 20 is detachably connected to the frame 12 to facilitate the replacement of the baffle 20.
[0053] Optionally, the baffle 20 can be detachably connected to the frame 12 by screws, pins, etc. Preferably, the frame 12 detachably connected to the baffle 20 is defined as the first frame 12a; the first frame 12a includes two crossbeams 122 arranged opposite each other along the height direction Z of the boat hull 10, and two vertical beams 123 spaced apart along the width direction Y of the boat hull 10, the two crossbeams 122 and the two vertical beams 123 together define a hollow portion 121; the baffle 20 includes a main body 21 and a hook portion 22, the main body 21 is spaced apart from the crossbeams 122 and the vertical beams 123, and the orthographic projection of the main body 21 in the length direction X of the boat hull at least partially covers the hollow portion 121, the hook portion 22 is disposed on the main body 21 and hooked to the top crossbeam 122.
[0054] Specifically, the main body 21 cooperates with the connecting rod 131 to form a first gap B, and the main body 21 cooperates with the crossbeam 122 and the vertical beam 123 to form a second gap C. The main body 21 is used to block the airflow, making the airflow output path longer and more complex, thereby helping to increase the residence time and uniformity of the airflow distribution in the accommodating cavity A, and thus enabling the formation of dense and uniform phosphosilicate glass on the silicon wafer at the end of the boat body 10 near the air inlet of the suction pipe. The hook-hanging method of the hook part 22 is beneficial to improve the ease of installation of the baffle 20.
[0055] It is worth mentioning that the frame 12 without baffle 20 is defined as the second frame 12b. The first frame 12a and the second frame 12b have the same structure, so they will not be described again here.
[0056] Furthermore, in some embodiments, the hook portion 22 includes a first sub-part 221 and a second sub-part 222. The first sub-part 221 is connected to the main body 21 and extends along the length direction X of the boat hull 10. The second sub-part 222 bends relative to the first sub-part 221 toward the bottom crossbeam 122, and the second sub-part 222 presses against the side of the top crossbeam 122 facing away from the main body 21, thereby forming a hook portion 22 that hooks the top crossbeam 122.
[0057] Furthermore, the main body 21 is located within the accommodating cavity A, and the second sub-part 222 abuts against the outer side of the top beam 122 facing away from the main body 21. In this design, in the longitudinal direction X of the boat hull 10, the space occupied by the main body 21 of the baffle 20 coincides with the space occupied by the boat hull 10, thereby helping to reduce the space occupied by the boat structure 100.
[0058] In some embodiments, the baffle 20 further includes a mounting portion 23, which protrudes from one side of the main body 21 along the width direction Y of the boat 10. A hook portion 22 is disposed at the end of the mounting portion 23 away from the main body 21 and is spaced apart from the main body 21 along the width direction Y of the boat 10. In this design, the mounting portion 23 can separate the main body 21 and the connecting rod 131 along the width direction Y of the boat 10, thereby forming a first gap B between the main body 21 and the connecting rod 131, so that airflow can be output sequentially along the first gap B, the second gap C, and the perforated portion 121.
[0059] In some embodiments, there are two hooks 22 and two mounting parts 23, both disposed on opposite sides of the main body 21 along the width direction Y of the boat hull 10. With this design, the baffle 20 can be stably mounted on the first frame 12a.
[0060] In some embodiments, the baffle 20 further includes an abutment portion 24, which is located between the main body 21 and the bottom crossbeam 122 and abuts against the bottom crossbeam 122.
[0061] As an example, there can be multiple abutment portions 24, which are located along the width direction Y of the hull 10.
[0062] By designing the abutment part 24 and using it in conjunction with the hook part 22, the risk of the baffle 20 swaying relative to the first frame 12a can be reduced, further improving the stability of the baffle 20 installation.
[0063] This application also provides a phosphorus diffusion system, which includes a phosphorus diffusion furnace, an extraction pump, and a boat structure 100 as described in any of the above embodiments. The phosphorus diffusion furnace includes a furnace body and an extraction pipe. The furnace body has a furnace cavity, the extraction pipe is located inside the furnace body, the boat structure 100 is disposed inside the furnace cavity, a baffle 20 is installed on a frame 12 near the air inlet of the extraction pipe, and the extraction pump is located outside the phosphorus diffusion furnace and is connected to the air outlet of the extraction pipe.
[0064] It is understood that in this embodiment, the frame 12 near the air inlet of the exhaust pipe is the first frame 12a, and the second frame 12b is located away from the air inlet of the exhaust pipe.
[0065] Taking the baffle 20 located within the accommodating cavity A of the boat hull 10 as an example, during actual operation, the air pump operates, and the airflow sequentially flows through the accommodating cavity A, the first gap B formed by the cooperation of the baffle 20 and the connecting rod 131, the second gap C formed between the baffle 20 and the first frame 12a, the hollow portion 121 of the first frame 12a, the air inlet of the air extraction pipe, and the air outlet of the air extraction pipe before exiting the furnace cavity. Due to the obstruction of the baffle 20, the path of the airflow exiting the accommodating cavity A becomes more complex, the output time is prolonged, and the distribution is more uniform. Therefore, the phosphosilicate glass formed at the end of the boat structure 100 near the air inlet of the air extraction pipe exhibits better density and uniformity. During subsequent etching, the phosphosilicate glass is not easily washed away, greatly improving the yield of silicon wafer production.
[0066] This application also provides a solar cell manufacturing production line, which includes the phosphorus diffusion system as described in the above embodiments. The solar cell manufacturing production line of this application has the effects of any of the above embodiments, and therefore will not be repeated here.
[0067] In the aforementioned boat structure 100, phosphorus diffusion system, and solar cell manufacturing production line, the baffle 20 and the frame 12 on which the baffle 20 is mounted are positioned near the air inlet of the exhaust pipe. The orthographic projection of the baffle 20 along the length X direction of the boat 10 at least partially covers the perforated portion 121 of the frame 12. Due to the obstruction of the baffle 20, most of the airflow does not exit directly from the perforated portion 121, but rather along the first gap B formed between the baffle 20 and the connecting rod 131, and the second gap C formed between the baffle 20 and the frame 12. In this case, the path of the airflow output cavity A becomes complex, the output time is prolonged, and it can uniformly contact the silicon wafer. Therefore, the phosphosilicate glass formed on the silicon wafer at the end of the boat structure 100 near the air inlet of the exhaust pipe exhibits better density and uniformity. During subsequent etching, the phosphosilicate glass is not easily washed away, greatly improving the yield of silicon wafer production.
[0068] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0069] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.
Claims
1. A boat structure, characterized in that, The boat structure includes: The boat body (10) includes a bottom rod assembly (11), two frames (12) and two connecting rod assemblies (13). The two frames (12) are arranged at intervals along the length direction (X) of the boat body (10), and the two connecting rod assemblies (13) are arranged at intervals along the width direction (Y) of the boat body (10). The bottom rod assembly (11) is connected between the two connecting rod assemblies (13) and defines an accommodating cavity (A) for accommodating silicon wafers with the two connecting rod assemblies (13) and the two frames (12). The frame (12) has a hollow portion (121) that extends through the length direction (X) of the boat body (10). A baffle (20) is installed on a frame (12) and is spaced apart from both the connecting rod assembly (13) and the frame (12). The orthographic projection of the baffle (20) on the length direction (X) of the boat body (10) at least partially covers the hollow part (121).
2. The boat structure according to claim 1, characterized in that, The baffle (20) is detachably connected to the frame (12).
3. The boat structure according to claim 2, characterized in that, The frame (12) detachably connected to the baffle (20) is defined as the first frame (12a); The first frame (12a) includes two crossbeams (122) arranged opposite each other along the height direction (Z) of the boat body (10), and two vertical beams (123) spaced apart along the width direction (Y) of the boat body (10). The two crossbeams (122) and the two vertical beams (123) together define the hollow part (121). The baffle (20) includes a main body (21) and a hook (22). The main body (21) is spaced apart from the crossbeam (122) and the vertical beam (123). The orthographic projection of the main body (21) on the length direction (X) of the boat body (10) at least partially covers the hollow part (121). The hook (22) is disposed on the main body (21) and hooked to the crossbeam (122) at the top layer.
4. The boat structure according to claim 3, characterized in that, The hook portion (22) includes a first sub-part (221) and a second sub-part (222). The first sub-part (221) is connected to the main body (21) and extends along the length direction (X) of the boat body (10). The second sub-part (222) bends relative to the first sub-part (221) toward the bottom beam (122), and the second sub-part (222) presses against the top beam (122) on the side away from the main body (21).
5. The boat structure according to claim 4, characterized in that, The main body (21) is located inside the accommodating cavity (A), and the second sub-part (222) abuts against the outer side of the top beam (122) facing away from the main body (21).
6. The boat structure according to claim 3, characterized in that, The baffle (20) also includes a mounting part (23), which protrudes from one side of the main body (21) along the width direction (Y) of the boat body (10). The hook part (22) is disposed at the end of the mounting part (23) away from the main body (21) and is spaced apart from the main body (21) in the width direction (Y) of the boat body (10).
7. The boat structure according to claim 6, characterized in that, There are two hooks (22) and two mounting parts (23), and they are both arranged on opposite sides of the main body (21) along the width direction (Y) of the boat body (10).
8. The boat structure according to claim 3, characterized in that, The baffle (20) also includes an abutment portion (24), which is located between the main body (21) and the bottom beam (122) and abuts against the bottom beam (122).
9. A phosphorus diffusion system, characterized in that, The phosphorus diffusion system includes: A phosphorus diffusion furnace, comprising a furnace body and an exhaust pipe, wherein the furnace body has a furnace cavity and the exhaust pipe is located within the furnace body; and The boat structure as described in any one of claims 1 to 8 is disposed within the furnace cavity, and the baffle (20) is installed on the frame (12) near the air inlet of the exhaust pipe.
10. A solar cell manufacturing production line, characterized in that, Including the phosphorus diffusion system as described in claim 9 above.