Short path nondispersive infrared gas concentration end point detection device

Abstract

1. The name of the design product: short optical path non-dispersive infrared gas concentration end point detection device. 2. The use of the design product: chamber cleaning end point detection in the field of semiconductor. 3. The design points of the design product: the combination of shape and pattern. 4. The picture or photo that best indicates the design points: perspective view.

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