Substrate conveying holding device
CN309734033SActive Publication Date: 2026-01-13HIRATA CORPORATION
View PDF 0 Cites 0 Cited by
Patent Information
- Application Number
- CN202530265279.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2025-03-11
- Filing Date
- 2025-05-13
- Publication Date
- 2026-01-13
- Estimated Expiration
- 2040-05-13
Smart Images
Figure 000001_ABST
Abstract
1. Name of the designed product: holding device for substrate transport. 2. Use of the designed product: The product is used for transporting substrates such as glass substrates, semiconductor substrates, etc. By holding the substrate from below, it can be removed from a substrate storage container or a substrate processing device and transported to another substrate storage container or substrate processing device. 3. Design points of the designed product: in shape. 4. Picture or photo that best shows the design points: perspective view.
Need to check novelty before this filing date? Find Prior Art