focusing ring
CN310005996SActive Publication Date: 2026-05-29TOKYO ELECTRON LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- TOKYO ELECTRON LTD
- Filing Date
- 2025-10-13
- Publication Date
- 2026-05-29
Smart Images

Figure 000007_ABST
Abstract
1. The name of the design product: focusing ring. 2. The use of the design product: the product is a focusing ring used in semiconductor manufacturing equipment, which is used to spread the distribution of plasma generated in the chamber to the surface of the product from the surface of the semiconductor wafer. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: design 1 perspective view. 5. Design 1 is designated as the basic design.
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