Method and apparatus for measuring a solid

Abstract

Method (100) for measuring a solid body (408), comprising the method: • gas-conducting coupling (101) of a collection container (302) with a first surface area of ​​the permeable solid (408) and then with a second surface area of ​​the solid (408); • Feeding (103) a test fluid through the solid (408) into the collection container (302); • Detection (105) of a time-dependent state representing a quantity of the test fluid in the collection container (302) when the collection container (302) is coupled to the first surface area and then when the collection container (302) is coupled to the second surface area.

Description

[0001] Various embodiments relate to a method and a device.

[0002] In general, a substrate can be treated (processed), e.g. coated, in such a way that the chemical and / or physical properties of the substrate can be changed. In general, flexible substrates in the form of a strip (e.g. metal strip, foil strip or glass strip) can be processed in a continuous process system, e.g. in a foil coating system. The coating system can have a vacuum chamber so that the strip substrate can be processed in a vacuum. For some processing operations, it may be necessary for the substrate to be tempered (i.e. cooled and / or heated). One possibility for this is to thermally couple the substrate to a transport roller. To ensure the best possible thermal contact, a gas is conventionally introduced between the substrate and the transport roller to bridge the lack of thermal conductivity in the vacuum.One possibility is to bring the gas directly to the substrate through a porous outer shell of the transport roller.

[0003] DE 10 1005 057 031 A1 relates to a device for permeation or substance transmission tests. DE 103 43 913 A1 relates to a device and method for determining the permeability of a circulating belt. DE 36 41 821 A1 relates to an automatic method for measuring the water vapor diffusion properties of porous fabrics, especially textile fabrics. DE 28 48 049 C2 relates to a device for measuring the flow resistance in porous molded bodies.

[0004] According to various embodiments, it has been clearly recognized that heat transfer requires a delicate balance. On the one hand, the gas should flow evenly from the transport roller (e.g., roller surface) in a sufficient amount. On the other hand, the amount of gas should be such that it does not cause the substrate to lift off the transport roller (e.g., roller surface).

[0005] In this context, it was recognized that the actual permeability of the porous outer shell strongly influences the equilibrium, but is difficult to access as a process parameter and difficult to precisely adjust. Although all components, at least the transport roller and the gas supply, are initially coordinated, if the permeability of the porous outer shell changes over time, it is difficult to respond to this, so the entire transport roller is often replaced or the outer shell is completely renewed.

[0006] For example, it has so far been difficult to determine whether the permeability or its homogeneity still meets the specification. The specification may, for example, require that the permeability is particularly evenly distributed spatially (e.g., exhibits no local deviations) and / or lies within a specified range of values. Likewise, it has so far been difficult to determine whether and to what extent a cleaning process changes the permeability.

[0007] According to various embodiments, a method and a device are provided which facilitate access to the permeability as a process parameter, for example to detect the permeability (e.g. its spatial distribution) and / or to change the permeability (e.g. to increase it).

[0008] A clear measurement configuration is provided that facilitates the measurement of the permeability of the transport roller at various locations on the porous outer shell (also referred to as the roller shell). Furthermore, a cleaning configuration is provided that facilitates the modification of the permeability of the transport roller at various locations. This allows both the targeted setting of the permeability as a process parameter and the determination of the result of the setting. The process of setting and determining the result can be repeated as often as necessary until the permeability of the transport roller meets the specification.

[0009] However, the aspects described herein are not necessarily limited to a transport roller. The description can apply more generally by analogy to any permeable solid.

[0010] It shows Fig. 1 shows a method according to various embodiments in a schematic flow diagram; Fig. 2 the method according to various embodiments in a schematic diagram; Fig. 3A and Fig. 3B shows a detection device according to various embodiments in a schematic side view or cross-sectional view; Fig. 4A and Fig. 4B shows a detection device according to various embodiments in a schematic side view or cross-sectional view; Fig. 5 shows a collecting container according to various embodiments in a schematic sectional side view; Fig. 6 shows the detection device according to various embodiments in different views; Fig. 7 shows a measuring arrangement according to various embodiments in a schematic cross-sectional view; Fig. 8 shows a method according to various embodiments in a schematic flow diagram; Fig. 9 shows the solid body according to various embodiments in a schematic cross-sectional view; Fig. 10 and Fig. 11 each shows the method according to various embodiments in a schematic diagram; and Fig. 12 and Fig. 13 shows a cleaning device according to various embodiments in a schematic side view.

[0011] In the following detailed description, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology such as "top," "bottom," "front," "back," "fore," "rear," etc., will be used with reference to the orientation of the described figure(s). Since components of embodiments can be positioned in a number of different orientations, the directional terminology is for purposes of illustration and is in no way limiting. It is to be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention.It is understood that the features of the various exemplary embodiments described herein may be combined with one another unless specifically stated otherwise. The following detailed description is therefore not to be construed in a limiting sense, and the scope of the present invention is defined by the appended claims.

[0012] Throughout this description, the terms "connected," "attached," and "coupled" are used to describe both a direct and an indirect connection (e.g., resistive and / or electrically conductive, e.g., an electrically conductive connection), a direct or indirect connection, and a direct or indirect coupling. In the figures, identical or similar elements are provided with identical reference numerals where appropriate.

[0013] According to various embodiments, the term "coupled" or "coupling" can be understood in the sense of a (e.g. mechanical, hydrostatic, thermal and / or electrical), e.g. direct or indirect, connection and / or interaction. Several elements can, for example, be coupled to one another along an interaction chain, along which the interaction (e.g. a signal) can be transmitted. For example, two coupled elements can exchange an interaction with one another, e.g. a mechanical, hydrostatic, thermal and / or electrical interaction. According to various embodiments, "coupled" can be understood in the sense of a mechanical (e.g. physical) coupling, e.g. by means of direct physical contact. A coupling can be configured to transmit a mechanical interaction (e.g. force, torque, etc.).

[0014] The term "permeable" or "permeability" in the context of a solid can be understood as permeable to fluids. In other words, a permeable solid can be configured to allow fluids to pass through it. If the permeable solid is arranged between two regions, these regions can exchange a fluid (i.e., a gas and / or liquid or a mixture thereof) with each other through the solid, driven, for example, by a pressure difference between the two regions. The fluid can then enter the solid on one side and exit on the other side.

[0015] The terms "porosity" and "porous" in the context of a solid (e.g., a layer, a layer stack, a roll shell, or the like) can refer to the physical nature of the solid and can be understood as the solid having a plurality of pores (e.g., cavities and / or channels). According to various embodiments, porosity can be understood as a dimensionless measurement that describes the ratio of void volume to total volume. The mass density of a unit cube inside the solid can decrease with increasing porosity of the solid, illustratively since the pores and their contents are taken into account.

[0016] A porous solid can also be considered part of a heterogeneous mixture, i.e., a mixture of two substances, of which the solid is the first substance in a solid state and the second substance in a fluid (i.e., liquid or gaseous) state. Illustratively, the second substance can be the contents of the pores. The first substance, i.e., the solid, forms the so-called matrix of the heterogeneous mixture, i.e., a coherent framework in which the second substance is embedded. The matrix and the multitude of pores, or their contents, can penetrate each other.

[0017] The pores of the solid can optionally be formed as a network of interconnected pores, so that interconnected pores can exchange the second fluid substance with one another. For example, the network of interconnected pores can penetrate the porous solid from a first side of the solid to a second (e.g. opposite) side of the solid, so that the solid can be permeable (i.e., fluid-conducting). The permeable solid can thus absorb a fluid (i.e., a liquid and / or a gas) via the first side and release it again via the second side, so that the fluid is conducted through the solid. Thus, a heterogeneous mixture of the solid and fluid can be formed in the pores of the solid.

[0018] The solid may, for example, have micropores and / or macropores. Micropores of the solid may have a size (e.g., pore diameter) of less than about 2 nm. Mesopores may have a size in the range of about 2 nm to about 50 nm. Macropores of the solid may have a size of more than about 50 nm but less than 1 micrometer (µm). The size of a pore can be understood as the diameter of a sphere having the same volume as the pore.

[0019] According to various embodiments, a method is provided that facilitates the determination of a permeability (i.e., fluid permeability) of a solid by measuring a time-varying gas concentration (also referred to as test gas concentration) over time and calculating the permeability (e.g., gas permeability) based thereon. According to various embodiments, a measurement setup is provided for performing a method that facilitates the measurement of the permeability of a porous solid or the corresponding volume flow from the surface of the porous solid.

[0020] To illustrate, the test gas escaping from the solid is collected in a collection container, and its quantity is recorded. For example, any porosity or gas permeability of the solid can be determined, as the collection container is scalable and / or as it covers the solid well. For example, the permeability of a porous layer can be measured.

[0021] The measurement setup enables the measurement of the distribution / uniformity of the test gas on the surface and the recording of the test gas quantity per area and unit of time. By geometrically adapting the detection device, both flat plates and rollers, as well as any conceivable geometric surface, can be detected. The gas sensor enables operational use on-site. Furthermore, various influences on gas permeability can be determined, for example, influences from drying the solid, influences from heating the solid, influences from cooling the solid, influences from wear mechanisms of the solid, influences from friction reduction, influences from cleaning the solid, etc.

[0022] For ease of understanding, reference is made here to a test gas. What is described can generally apply to a test fluid, for example, a test liquid. By analogy, what is described here for a gas can also apply to a liquid.

[0023] Fig. 1 illustrates a method 100 according to various embodiments in a schematic flow diagram. The method 100 comprises, in 101, gas-conductively coupling a collection container to a first surface region of a permeable (e.g., gas-permeable) solid and then to a second surface region of the permeable solid; in 103, supplying a test gas through the permeable solid into the collection container; in 105, detecting a time-dependent state representing an amount of the test gas in the collection container when the collection container is coupled to the first surface region and then when the collection container is coupled to the second surface region.

[0024] The first surface region of the permeable solid and the second surface region of the permeable solid may, for example, have one or more than one opening from which the test gas passing through the solid emerges.

[0025] In principle, any sensory detectable chemical compound that is gaseous (e.g., comprising exactly one gas or a gas mixture) is suitable as a test gas. Examples of test gases include: carbon dioxide (CO2), methane, carbon monoxide (CO), hydrogen (e.g., molecular hydrogen), oxygen (e.g., molecular oxygen), or a gas mixture comprising several of these gases. Carbon dioxide, for example, is non-toxic and can be provided cost-effectively in high purity. The test gas can, for example, be provided oil-free. Alternatively or additionally, the test gas can be provided anhydrous (dried).

[0026] According to various embodiments, the solid body can be porous, i.e., have a plurality of pores. The porous (e.g., permeable) solid body has, for example, a plurality of interconnected pores, which can, for example, provide channels penetrating the solid body. For example, the solid body can have pores interconnected to form channels, so that it is fluid-permeable (e.g., gas-permeable).

[0027] According to various embodiments, a porosity of the solid (ie, the partial volume of the pores provided in the solid to the total volume) may be less than about 75% (eg, less than about 50%, eg, less than about 25%, eg, less than about 10%, eg, less than about 5%, eg, less than about 1%) and / or greater than about 10% (eg, greater than about 25%, eg, greater than about 50%).

[0028] In the following, reference is made by way of example to a chemical gas composition inside the collection container 302 as a time-dependent state, which represents the amount of test gas in the collection container. The chemical gas composition can, for example, be detected by using the test gas concentration in the collection container 302 as a measured variable. What has been described can generally also apply analogously to one or more other measured variables, which represent the amount of test gas in the collection container. Examples of the one or more measured variables include one or more chemical variables and / or one or more physical variables. The measured variable can generally be detected resistively, chemo-resistively, capacitively, potentiometrically, amperometrically, thermally, thermochemically, thermally-physically, gravimetrically (e.g., measured using a quartz crystal), optically (e.g., spectrally), and / or biochemically, i.e.by means of an appropriately configured sensor (herein also referred to as a gas sensor).

[0029] Examples of such a measured variable, which represents the amount of test gas in the collection container, include: partial pressure, permittivity in the collection container (e.g. measured by means of a capacitor of the gas sensor), molecular mass, diffusion behavior, molecular structure, conductivity in the collection container (e.g. measured by means of a gas-sensitive layer of the gas sensor), thermal conductivity in the collection container, etc. In order for the measured variable to also represent the amount of test gas in the collection container, the measured variable can be a function of the amount of test gas in the collection container.

[0030] The gas sensor can, for example, be configured to detect the test gas itself (i.e., to quantify its quantity) or at least a measured variable influenced by the test gas. A metal-oxide semiconductor gas sensor, for example, can be used as a low-complexity gas sensor. Optionally, multiple gas sensors can be used, e.g., multiple different gas sensors. This improves the measurement accuracy. Alternatively or additionally, different test gases and corresponding gas sensors can be used. This improves the measurement accuracy.

[0031] Fig. 2 illustrates the method 100 according to various embodiments in a schematic diagram 200, in which the chemical gas composition 203 in the collection container 302 is illustrated over time 201. The chemical gas composition 203 is specified here as the proportion of the test gas (also referred to as concentration or test gas concentration) in the collection container. The method 100 comprises detecting the time dependence m=dy / dx of the chemical gas composition 203, e.g., by means of time-discrete measured values. Examples of the concentration include: a molar amount-related concentration (also referred to as molar concentration, (e.g., molar fraction in percent)), a mass-related concentration (e.g., mass fraction in percent), or a volume-related concentration (e.g., standard volume fraction in percent).

[0032] According to method 100, the time-varying test gas concentration is detected over time. Furthermore, based on the detected temporal change in the test gas concentration, a permeability of the solid can be determined, e.g., its fluid permeability (e.g., gas permeability).

[0033] Permeability of a solid describes its ability to allow a fluid (e.g., one or more gases and / or one or more liquids) to pass through it. Darcy is often used as a unit of permeability.

[0034] In the following, reference is made to CO2 as an example test gas. The description can be applied analogously to any other test gas.

[0035] The test gas concentration 203 (also referred to as "y" in relations) is measured, e.g., by means of the gas sensor, as a function of time 201 (also referred to as "x" in relations). In other words, y = y(x). For this purpose, the following relation (3) can also be used, for example, where m denotes the time dependence and the covered quantities are mean values. m=∑(x−x¯)(y−y¯)∑(x−x¯)2

[0036] In the following, reference is made to examples of a device (also referred to as a detection device) for implementing the method. In other words, the method 100 can be carried out using the detection device. It should be understood that the method 100 can also be implemented using a differently configured detection device.

[0037] As explained above, the test gas concentration 203 can be detected by means of the gas sensor. The gas sensor can be part of a measuring chain that has a corresponding infrastructure (e.g., comprising a processor, storage medium, and / or bus system, or the like). The measuring chain can be configured to control the corresponding gas sensor, process its detected measurement variable as an input variable, and, based thereon, provide an electrical signal as an output variable that represents the actual state of the input variable at the time of detection. The part of the measuring chain that is configured to process the input variable and, based thereon, provide an electrical signal as an output variable is also referred to herein as the evaluation unit.

[0038] As an output variable, for example, an indication of the gas composition and / or an indication of the permeability of the solid (e.g. its gas permeability) can be output, e.g. its spatial distribution.

[0039] Fig. 3A illustrates the detection device 300 according to various embodiments in a schematic side view or cross-sectional view. The detection device 300 comprises: a collection container 302 for collecting a test gas; a gas receiving opening 302o configured to supply test gas collected via the gas receiving opening 302o to an interior 302i of the collection container 302; a gas sensor 304 (e.g., a chemical sensor) configured to detect the time-dependent state representing the amount of test gas in the interior 302i of the collection container 302.

[0040] As illustrated, the collection container 302 (e.g., its housing) may include a hood that includes the gas intake opening 302o. In this case, the gas intake opening 302o may expose the interior 302i of the collection container 302. This reduces the volume into which the test gas flows and thus improves the measurement of the test gas (e.g., increases the accuracy of the measurement).

[0041] The gas-conducting coupling may then comprise covering the surface area by means of the collecting container 302.

[0042] Fig. 3B illustrates a detection device 300 according to various embodiments 300b in a schematic side view or cross-sectional view, in which the detection device 300 has a (e.g., flexible) gas line 308 that gas-conductively couples the gas receiving opening 302o to the interior 302i of the collection container 302. This facilitates the measurement because only the gas line and not the entire collection container 302 needs to be relocated. Optionally, the gas line 308 can have the hood 306 (e.g., a bell or cap) that has the gas receiving opening 302o. This facilitates adaptation and scaling to the solid to be measured.

[0043] The gas-conducting coupling may then comprise covering the surface area by means of the hood 306.

[0044] Fig. 4A illustrates the detection device 300 according to various embodiments 400a in a schematic side view or cross-sectional view, in which the detection device 300 further comprises a circulation mechanism 604, 402.

[0045] The circulation mechanism 406, 402 is configured to circulate the interior 302i (ie, the internal volume, e.g., the gas therein) of the collection container 302. The circulation or the circulation mechanism 406, 402 can facilitate the detection of the test gas concentration (e.g., without a time delay) and / or enable a more accurate detection of the test gas concentration (e.g., by inhibiting spatial concentration fluctuations).

[0046] In general, the circulation mechanism 406, 402 may include one or more fluid energy machines 406 (also referred to as gas displacement devices 406) that drive circulation, ie, impart kinetic energy to the gas inside 302i of the containment vessel 302.

[0047] As illustrated in embodiments 400a, the circulation mechanism 406, 402 may comprise a pump 406 as a fluid energy machine. For example, the pump 406 may be configured to extract gas from the interior 302i of the collection container 302 and return the extracted gas to the collection container 302, thus providing a self-contained gas circuit 402. The gas circuit 402 may, for example, comprise two gas lines, which are coupled to one another on one side by means of the pump 406 and to one another on the other side by means of the collection container 302. The pump 406 may, for example, be a positive displacement pump or a flow pump.

[0048] Alternatively or in addition to the pump, the circulation mechanism 406, 402 may comprise a propeller (not shown) as a fluid energy machine, which is arranged in the interior 302i of the collecting container 302. In this case, the gas circuit 402 is not absolutely necessary.

[0049] As illustrated in embodiments 400a, the one or more gas sensors 304 of the detection device 300 can be configured to detect the chemical composition flowing through the gas circuit 402. Alternatively or additionally (e.g., if no gas circuit 402 is present), one or more gas sensors 304 can be configured to detect the chemical composition in the interior 302i of the collection container 302. For example, the one or more gas sensors 304 can be arranged in the interior 302i of the collection container 302.

[0050] Fig. 4B illustrates a detection device 400 according to various embodiments 400b in a schematic side view or cross-sectional view while performing the method 100. Reference is made below to two surface regions 408a, 408b of the solid body 408. The description can also apply analogously to more than two surface regions 408a, 408b.

[0051] The gas-conducting coupling of the collecting container 302 may include covering a first surface area 408a of the gas-permeable solid body 408 by means of the receiving opening 302o. The gas-conducting coupling of the collecting container 302 may further include covering a second surface area 408b of the gas-permeable solid body 408 after the first surface area 408a by means of the receiving opening 302o (not shown).

[0052] The test gas 410 flows through the porous solid body 408, e.g., from one side of the solid body 408 to the side of the solid body 408 (arrows 410) on which the two surface regions 408a, 408b are arranged. The gas escaping from the first surface region 408a can be supplied to the collecting container 302 via the receiving opening 302o if the collecting container covers the first surface region 408a. The gas escaping from the second surface region 408b can be supplied to the collecting container 302 via the receiving opening 302o if the collecting container covers the second surface region 408b.

[0053] The second surface region 408b may, for example, be spaced apart from the first surface region 408a or may only partially overlap it.

[0054] The solid body 408 can have a plurality of pores. The pores of the solid body 408 can be exposed at the second surface region 408b and / or the first surface region 408a, such that they form openings in the second surface region 408b and / or the first surface region 408a. This allows gas supplied to the solid body 408 to escape from the second surface region 408b and / or the first surface region 408a.

[0055] The method 100 may further comprise determining an indication of the permeability of the solid 408 at the second surface region 408b and / or the first surface region 408a based on the detected time-dependent test gas concentration in the collection container 302.

[0056] For example, the following relations (1) and (2) can be used to determine an indication of the permeability of the solid 408. L(CO2)=qpV(CO2)Δp qpV=p×Vt

[0057] Here, Δp is the pressure drop across the solid body 408, p is the pressure inside 302i of the collecting container 302, V is the volume of the inside 302i of the collecting container 302 (also referred to as internal volume), and t is the time.

[0058] Using relations (1), the conductance L(CO2) can be determined as an indication of the permeability of the solid 408, e.g., at the location covered by the receiving opening 302o. This allows an indication of the permeability of the solid 408 to be determined for each of the surface areas 408a, 408b. On this basis, the spatial distribution of the permeability of the solid 408 can optionally be determined.

[0059] In one example, the detection device 400 comprises a measuring bell 302, a circulation pump 406, and a gas concentration sensor 304. According to the method 100, the measuring bell 302 can be placed sequentially on each surface area of ​​the solid to be measured. The test gas can flow through the surface area of ​​the solid. The measuring bell 302 contains an internal volume of a first chemical composition (e.g., an initial gas concentration of the test gas). The internal volume can be continuously circulated past the gas concentration sensor 304. The gas concentration sensor 304 can detect the test gas concentration circulated past it as a time-dependent state. For example, the change in concentration over time can be detected, and the conductance L(CO2) can be calculated from this.

[0060] The volume and / or pressure in the collection container 302 can optionally be kept constant, e.g., by maintaining a gap between the receiving opening 302o and the solid body 408, through which gas can escape from the collection container 302. Alternatively or additionally, the volume and / or pressure in the collection container 302 can be kept constant by providing the collection container 302 with a pressure relief valve, through which gas can escape from the collection container 302. Keeping the volume constant reduces the number of unknowns and thus improves the measurement.

[0061] Fig. 5 illustrates a collecting container 302 of the detection device 300 according to various embodiments 500 in a schematic sectional side view. The gas intake opening 302o can have an annular contour that spans an uneven (e.g., curved and / or angled) surface 301. This facilitates the intake of test gas from an uneven surface, e.g., from a transport roller, as will be described in more detail later. The annular contour can run along a self-contained path that does not necessarily have only sections that are the same distance from a common point (e.g., does not have to lie on a body of revolution). For example, the annular contour can also be angular.

[0062] For example, the gas intake opening 302o can be surrounded (e.g. limited) by a wall 504 (illustratively a hollow cylinder) of the collecting container 302, the end face 301s of which spans the uneven surface 301.

[0063] The surface 301 may, for example, be curved, for example with a radius that is greater than an extension of the gas intake opening 302o in the surface 301.

[0064] If the gas circuit 402 is to be provided, the collecting container 302 can have two connections 502 to which the gas lines of the gas circuit 402 can be connected.

[0065] In principle, the gas intake opening 302o described herein can be held by hand against the permeable solid 408. For example, the gas intake opening 302o can be held against the surface of the solid 408, and the concentration development of the gas volume in the measurement setup can be recorded for several minutes. With this procedure, it is possible to measure the conductance of the permeable solid at different locations. The following describes how this process can be made more reproducible and / or simplified by movably mounting the hood, which has the gas intake opening 302o. For this purpose, reference is made to the collecting container as a hood. The description can apply analogously to those embodiments according to which the hood is coupled to the collecting container by means of a gas line (see, for example, Fig. 3B).

[0066] Fig. 6 illustrates the detection device 300 according to various embodiments 600 in a schematic perspective view and detailed view 600b.

[0067] The detection device 300 can include a guide device 604 having one or more joints 604 with which the collecting container 302 is movably mounted. The guide device 604 (e.g., the one or more joints 604) can provide the collecting container 302 with one or more degrees of freedom, e.g., one or more translational degrees of freedom and / or one or more rotational degrees of freedom. For example, the guide device can include one or more translational joints (also referred to as linear guides) and / or one or more rotational joints.

[0068] In the illustrated embodiments 600, the guide device 602 comprises a frame 602 that holds the guide device 604. The guide device 604 has a guide rail 604a that provides exactly one translational degree of freedom. This ensures that the collecting container 302 can be reproducibly positioned, allowing the same surface area of ​​the solid to be covered several times in succession.

[0069] Optionally, the detection device 300 may include an actuator (e.g., a motor) configured to displace the collecting container 302 according to one or more degrees of freedom. Optionally, the detection device 300 may include a control device configured to control the actuator, e.g., according to a measurement sequence.

[0070] The measurement sequence can comprise multiple phases, each of which comprises moving the collection container 302 toward a surface region of the solid until the collection container 302 covers the surface region. The multiple phases can differ from one another in the location of the surface region. For example, the solid body 408 can be scanned automatically. Optionally, each phase can comprise purging the collection container 302 with a purge gas different from the test gas. The purge gas can, for example, comprise or be formed from air.

[0071] The detection device 300 according to various embodiments 600 enables a significantly more reproducible measurement result. In this measurement setup, the measurement setup is guided, for example, along a rail 604a with constant contact pressure on the surface of the solid body 408. Latching points 604b can be arranged on the rail 604a, enabling reproducible measurements at a single location.

[0072] Fig. 7 illustrates a measuring arrangement 700 according to various embodiments in a schematic cross-sectional view (viewed along a rotational axis 701), which comprises the detection device 300 and a transport roller 702. The transport roller 702 can generally comprise a rotating body, on whose outer surface 712 (also referred to as the lateral surface) a plurality of openings are formed, from which a fluid (e.g., a gas) can exit.

[0073] The transport roller 702 (also referred to as a transport roller) can have the rotational axis 701, around which the transport roller 702 is rotatably mounted. The transport roller 702 can further have a permeable roller cover 702o as a solid body, which has the surface 712 of the transport roller 702. The or each surface area 408a that is covered by the collecting container can be a region of the surface 712 of the transport roller 702.

[0074] The transport roller 702 can have a supply connection 706 (e.g., fluid connection 706) and a gas line 704, wherein the gas line 704 fluidly couples the supply connection 706 to the roller sleeve 702o. A gas supplied to the supply connection 706 can be guided by the roller sleeve 702o to the surface 712 of the transport roller 702 and discharged there (ie, exit).

[0075] The roller sleeve 702o can have a plurality of pores that make the roller sleeve 702o fluid-conductive in the radial direction of the transport roller 702. The pores can be exposed on the surface 712 of the transport roller 702, i.e., form openings.

[0076] The roller sleeve 702o can, for example, have one or more than one layer, as described in more detail below. The roller sleeve 702o can, for example, have a porous ceramic layer, which, for example, comprises the surface of the transport roller 702. The roller sleeve 702o can alternatively or additionally have a perforated metal layer (e.g., a sheet metal). The roller sleeve 702o can alternatively or additionally have a plurality of gas channels that interconnect the pores of the roller sleeve 702o. The metal layer can, for example, fluidically couple the pores of the ceramic layer to one another. Alternatively or additionally, the metal layer can fluidically couple the gas channels to the porous ceramic layer.

[0077] The method 100 may include: supplying the test gas to the supply port 706 of the transport roller 702 when the receiving opening 302o is fluidly coupled to the first surface region of the transport roller 702; then displacing the receiving opening 302o and the transport roller 702 relative to one another (e.g., by rotating the transport roller 702 and / or displacing the receiving opening 302o); and then supplying the test gas to the supply port 706 of the transport roller 702 when the receiving opening 302o is fluidly coupled to the second surface region of the transport roller 702.

[0078] The rotation axis 701 may, for example, be parallel to a translational degree of freedom which the joint 604 provides to the collecting container 302 and / or according to which the receiving opening 302o is displaced.

[0079] In one example, the transport roller comprises: a cylindrical roller shell 702o having a plurality of gas outlet openings; a temperature control device (e.g., cooling device) configured to supply and / or remove thermal energy from the cylindrical roller shell; a gas connection 706; and a gas line 704 that connects the gas connection 706 and the plurality of gas outlet openings to one another in a gas-conducting manner.

[0080] Fig. 8 illustrates a method 800 according to various embodiments in a schematic flowchart. For example, the method 800 can be performed before and / or after the method 100. For example, the method 100 can be used to determine a result of the method 800, a change resulting from the method 800, and / or a starting point of the method 800.

[0081] The method 800 can be applied to the solid body 408 having a network of interconnected pores exposed at a surface region of the solid body 408. The surface region can have a contaminant adjacent to at least one of the pores. For example, the contaminant can extend into the pore and / or at least partially cover it, such that the pore is at least partially blocked.

[0082] The method 800 comprises, in 801, disposing a liquid (also referred to as a barrier liquid) in the interconnected pores, e.g., until they are completely filled with the barrier liquid; and in 803, etching the contamination by means of an etching fluid when the barrier liquid is disposed in the interconnected pores, such that the barrier liquid disposed in the pores inhibits penetration of the etching fluid into the interconnected pores.

[0083] The barrier liquid may, for example, comprise or be formed from water, e.g. distilled water and / or demineralized water (also referred to as deionized water or DI water).

[0084] Illustratively, the barrier fluid arranged in the pores can serve as a blocker, inhibiting the penetration of the etching fluid. This ensures that the interior of the pores is not attacked by the etching fluid.

[0085] The method 800 can be used, for example, to clean a porous solid body, e.g., its ceramic surface. The porous solid body can, for example, be a component of a vacuum coating system, e.g., part of a transport roller 702 of the vacuum coating system (e.g., its roller cover).

[0086] The etching fluid can be liquid (also called etching liquid) and / or gaseous. The use of a liquid etching fluid is also referred to as wet chemical etching.

[0087] Examples of the etching fluid include: nitric acid (HNO3), dilute nitric acid, iron(III) chloride solution (FeCl3 solution), saturated iron(III) chloride solution, ammonia-hydrogen peroxide mixture (NH3-H2O2 mixture), or a mixture of several of these.

[0088] The contaminant may, for example, comprise or be formed from copper. Etching the contaminant using the etching fluid may, for example, involve removing one or more copper contaminants from a porous ceramic layer using the etching fluid.

[0089] Alternatively or additionally, the contaminant may comprise or be formed from a material with which a substrate resting on the transport roller is coated. The coating of the substrate may be carried out by means of physical vapor deposition.

[0090] The 800 process is gentler than conventional mechanical cleaning (e.g., using particle blasting or brushing), so the pore structure of the solid is less affected. For example, damage to or changes in the properties of the pore structure (e.g., a ceramic surface) or a porous composite layer can be reduced.

[0091] Alternatively or additionally, cleaning is possible without having to remove the component containing the porous solid. For example, method 800 may include etching the contamination of a transport roller using the etching fluid while the transport roller is arranged in a vacuum chamber.

[0092] Alternatively or additionally, selective cleaning is possible, for example, without mechanical, thermal, or chemical attack on the ceramic surface or an underlying layer. The use of an etching fluid is particularly cost-effective and fast.

[0093] An example of method 800 includes: saturating the porous solid (e.g., the roller shell) with DI water; applying the etching liquid to the surface (e.g., ceramic surface) of a porous coating of a transport roller using a textile (e.g., a nonwoven cloth, a woven fabric, and / or a synthetic material) by hand (e.g., protected by a chemically resistant glove). The etching liquid may comprise or be formed from a chemical solution of diluted NH3 and H2O2. The transport roller may have copper contamination on its surface. The etching liquid may be worked into the surface until the copper contamination is removed or reacted. Finally, the etching liquid, other chemical residues, and / or the reaction product may be removed from the transport roller using a textile soaked in DI water.

[0094] As post-treatment, the method 800 may include: optionally rinsing the solid body (e.g., the roll sleeve) with DI water and / or (e.g., subsequently) with ethanol; optionally heating the solid body (e.g., the roll sleeve) for drying; optionally blowing out the solid body (e.g., the roll sleeve), e.g., with the test gas (e.g., by supplying gas to the supply connection 706 of the transport roller); optionally pumping out the vacuum chamber in which the solid body (e.g., the roll sleeve) is arranged.

[0095] The method 800 may alternatively or in addition to the wet chemical etching include removing the contamination from the solid by means of mechanical cleaning with a fleece brush, dry ice blasting and / or laser ablation, as will be described in more detail later.

[0096] Fig. 9 illustrates the solid body 408 (e.g., the roller shell 702o) according to various embodiments 900 in a schematic cross-sectional view, e.g., the roller shell 702o. The solid body 408 may include a first layer 902 (also referred to as distribution layer 902), which is clearly rapidly attacked by the etching fluid, ie, etched by it.

[0097] The distribution layer 902 may, for example, comprise or be formed from a metal, e.g., the perforated metal layer.

[0098] The distribution layer 902 can, for example, be penetrated by multiple channels 908. The distribution layer 902 can, for example, react chemically with the etching fluid more quickly than the contaminant 911 (e.g., at a multiple of the reaction rate). This reflects a scenario in which an etching fluid is used to remove the contaminant 911, which also attacks the solid body 408, e.g., its distribution layer 902.

[0099] The solid body 408 (e.g., the surface layer 702o) may optionally comprise an additional layer (also referred to as a covering layer 904) which is penetrated by the network of interconnected pores 912 and which is arranged between the contaminant 911 and the distribution layer 902. The covering layer 904 may, for example, be a sintered or sprayed layer, with the pores 912 formed between the sintered or sprayed particles.

[0100] For example, the cap layer 904 may react chemically more slowly with the etching fluid than the contaminant 911 (e.g., at a fraction of the reaction rate) and / or the manifold layer 902. This reflects a scenario in which an etching fluid is used to remove the contaminant 911, to which the cap layer 904 is chemically inert (also referred to as unreactive), e.g., that it is less reactive than the manifold layer 902.

[0101] The cover layer 904 may, for example, comprise or be formed from a ceramic, e.g., the ceramic layer.

[0102] Fig. 10 illustrates the method 100 according to various embodiments in a schematic diagram 1000, in which the time-dependent chemical gas composition 203 is illustrated over time 201, determined by means of the method 100, for different points in time after applying the method 800. As can be seen, the permeability of the solid 408, which is proportional to dy / dx, gradually decreases.

[0103] Fig. 11 illustrates the method 100 according to various embodiments in a schematic diagram 1100 in which the permeability 1103 of the solid 408 is illustrated at several locations 1101 of the solid 408, such that the spatial distribution of the permeability 1103 of the solid 408 is obtained.

[0104] From the values ​​of diagram 1000, the permeability 1103 of the solid can be determined based on the increase dy / dx of the test gas concentration. This increase provides the conductance of each surface area of ​​the solid 408 as an indication of the permeability 1103 of the solid via equations (1), (2), (3).

[0105] For example, the permeability of the roller shell 702o can be measured axially at multiple locations. For this purpose, the rotational axis 701 of the transport roller 702 can be parallel to a translational degree of freedom provided by the joint 604 to the collecting container 302. If the method 100 is performed multiple times at different points in time, between which a substrate is deflected by the transport roller 702 and / or the substrate is coated while resting on the transport roller 702, the temporal development of the permeability of the transport roller 702 can be tracked. This makes it possible to more precisely determine the point in time at which the transport roller 702 should be cleaned or replaced.

[0106] Fig. 12 illustrates a cleaning arrangement 1200 according to various embodiments in a schematic side view, which has the transport roller 702 and a cleaning device 1210 (viewed transversely to the rotation axis 701) when cleaning a transport roller 702.

[0107] The cleaning device 1210 has a functional unit 1220 for cleaning the roller sleeve 702o, which can be configured optionally for chemical cleaning (e.g., by etching), thermal cleaning (e.g., by laser ablation), and / or mechanical cleaning (e.g., by dry ice blasting and / or by brushing). For example, the functional unit 1220 can be configured for laser ablation cleaning, brush cleaning, wet chemical cleaning, and / or dry ice blasting.

[0108] The cleaning device 1210 further comprises: a frame 1 (e.g., a height-adjustable frame), a step 2 (e.g., a movable step); several wheels 3 (e.g., lockable wheels); a collecting tray 4 with a drain; lighting 5 (e.g., circumferential); a longitudinal guide 6 (also referred to as a guide rail); a transport carriage 7 (e.g., a spring-loaded transport carriage); a collecting tray 8 for the functional unit, a seal 9, a cleaner 10, a drain 11, a suction device 12, and several spray nozzles 13.

[0109] For example, the cleaning device 1210 can be manually or motor-driven.

[0110] For example, the frame 1 can have a lifting device by means of which a vertical position of the functional unit 1220 can be changed (for adaptation to the transport roller).

[0111] For example, the functional unit 1220 can be mounted so that it can be moved and / or pivoted. For example, the functional unit 1220 can be manually movable or motor-driven. For example, the functional unit 1220 can be fixed, adjustable, or spring-loaded on a translation joint by means of the transport roller 702.

[0112] The drip tray and / or drain may be optional components (i.e., they do not necessarily have to be present). Perimeter lighting may be an optional component.

[0113] For example, the functional unit 1220 may include the cleaner, the drip tray or a cover, one or more spray nozzles, and one or more suction devices.

[0114] For example, the cleaner can have one or more sponges, one or more brushes, or one or more textiles. For example, the cleaner can be mounted so that it rotates and / or oscillates. Alternatively, the cleaner can be fixed.

[0115] For example, the cleaning agent (e.g. the etching fluid) can be brought to the cleaner by means of an immersion bath or by means of spray nozzles.

[0116] For example, the functional unit 1220 is moved along the transport roller 702 when cleaning the transport roller 702.

[0117] Fig.13 illustrates a cleaning arrangement 1200 according to various embodiments 1300 in a schematic side view (viewed transversely to the rotation axis 701). The cleaning device 1310 can include a laser 1304 for cleaning the transport roller 702 by means of laser ablation. The laser can be configured to supply a laser beam to the functional unit 1220, which is directed onto the transport roller 702 by means of the functional unit 1220.

[0118] The transport roller 702 can be driven by a motor so that its surface can be scanned by the laser beam. Furthermore, the functional unit can comprise a control device 1302 configured to control the rotation of the transport roller 702 by means of the motor and / or the irradiation of the transport roller by means of the laser beam (e.g., the spatial distribution of the irradiation).

[0119] In the following, various examples are described which refer to those described above and those shown in the figures.

[0120] Example 1 is a method comprising: gas-conductively coupling a collection container to a first surface region of a permeable (e.g., gas-permeable) solid and then to a second surface region of the solid; supplying a test fluid (e.g., test gas) through the solid into the collection container; detecting a time-dependent state representing an amount of the test fluid (e.g., test gas) in the collection container when the collection container is coupled to the first surface region and then when the collection container is coupled to the second surface region.

[0121] Example 2 is the method according to Example 1, with the solid being porous. This reflects a measurement in a challenging environment and thus expands the application possibilities.

[0122] Example 3 is the method according to Example 1 or 2, wherein the time-dependent state is a chemical gas composition in the collection container. This facilitates measurement.

[0123] Example 4 is the method according to any one of Examples 1 to 3, wherein the time-dependent condition is a concentration of the test fluid (e.g., test gas) in the collection container. This facilitates the measurement.

[0124] Example 5 is the method according to any one of Examples 1 to 4, wherein the collecting container has a hood that is pressed against the solid. This makes the measurement more precise.

[0125] Example 6 is the method according to any one of Examples 1 to 5, wherein the test fluid (e.g., test gas) comprises at least carbon and / or hydrogen. This type of test fluid is cost-effective.

[0126] Example 7 is the method according to Example 6, wherein the test fluid (e.g., test gas) comprises at least carbon dioxide or carbon monoxide. These gases are even more cost-effective.

[0127] Example 8 is the method according to any one of Examples 1 to 7, wherein the test fluid (e.g., test gas) contains oxygen. This gas is easier to detect.

[0128] Example 9 is the method according to any one of Examples 1 to 8, wherein the solid body comprises or is formed from a (e.g., cylindrical) roller shell (e.g., a transport roller). This reflects a measurement in a challenging environment and thus expands the application possibilities.

[0129] Example 10 is the method according to any one of Examples 1 to 9, further comprising: circulating the interior of the collection container, e.g., during detection. This makes the measurement more precise.

[0130] Example 11 is the method according to any one of Examples 1 to 10, further comprising: determining an indication of a permeability (e.g., gas permeability) of the solid of the first surface region and the second surface region, respectively. This achieves learning more about the state of the solid.

[0131] Example 12 is a device, e.g., for carrying out the method according to any one of Examples 1 to 11, comprising: a collecting container for collecting a test fluid (e.g., test gas); a gas receiving opening configured to supply test fluid (e.g., test gas) received by means of the gas receiving opening to an interior of the collecting container; a sensor (e.g., chemical sensor) configured to detect a time-dependent state representing a quantity of the test fluid (e.g., test gas) in the interior of the collecting container.

[0132] In Example 13, the device according to Example 12 further comprises: an evaluation unit configured to determine a gas permeability based on the time-dependent state. This facilitates the measurement.

[0133] Example 14 is the device according to Example 12 or 13, wherein the gas intake opening has a contour such that it can be placed on a curved surface. This facilitates measurement on a curved solid.

[0134] Example 15 is the device according to any one of Examples 12 to 14, further comprising: a gas displacement device (e.g., pump) configured to circulate the interior of the collection container and / or supply it to the sensor. This makes the measurement more precise.

[0135] Example 16 is the device according to any one of Examples 12 to 15, further comprising: a gas line that connects the sensor to the collection container in a gas-conducting manner. This makes the measurement more precise.

[0136] Example 17 is the device according to any one of Examples 12 to 16, further comprising: a frame; a joint (e.g., having a guide rail) that displaceably mounts the gas intake opening and / or the collection container relative to the frame. This makes the measurement more reproducible.

[0137] Example 18 is using the device according to any one of Examples 12 to 17 to determine a gas permeability of a permeable (e.g., gas-permeable) solid.

[0138] Example 19 is a method of processing a solid having a network of interconnected pores exposed at a surface region of the solid, the surface region having an impurity adjacent to at least one of the pores, the method comprising: disposing a liquid in the interconnected pores, etching the impurity using an etching fluid when the liquid is disposed in the interconnected pores, such that the liquid disposed in the pores inhibits penetration of the etching fluid into the interconnected pores.

[0139] Example 20 is the method according to Example 19, wherein the solid has a first permeable layer which gas-conductingly couples the pores of the network to one another, is adjacent to the network or is penetrated by it, and which chemically reacts with the etching fluid, e.g., at more than the reaction rate of the impurity, e.g., 10 times the reaction rate of the impurity.

[0140] Example 21 is the process according to Example 20, wherein the solid comprises a second layer (e.g., ceramic layer) which is penetrated by the network of interconnected pores and which is disposed between the impurity and the first layer.

[0141] Example 22 is a device comprising: a functional unit configured to perform a cleaning process (e.g., according to the method of any one of Examples 19 to 21); a frame for supporting on a base; a joint coupling the functional unit to the frame and by means of which the functional unit is movably mounted relative to the frame.

[0142] Example 23 is a device according to Example 22, wherein the joint comprises a translation joint by means of which the functional unit is displaceably mounted relative to the frame.

[0143] Example 24 is the device according to example 22 or 23, wherein the joint has a rotational joint by means of which the functional unit is displaceably mounted relative to the frame.

[0144] Example 25 is the device according to any one of examples 22 to 24, further comprising: one or more than one actuator (e.g., motor) configured to displace the functional unit (e.g., relative to the ground and / or at least to the frame).

[0145] Example 26 is the device according to example 25, further comprising: a control device which is configured to control the one or more than one actuator, e.g. according to a cleaning sequence which comprises: displacing the functional unit (e.g. relative to the substrate and / or at least to the frame) when carrying out the cleaning process.

[0146] Example 27 is the device according to example 26, wherein the control device is further configured to control an actuator for rotating a transport roller, e.g. according to the cleaning sequence, which comprises: rotating the transport roller when carrying out the cleaning process, wherein, for example, the functional unit is displaced along a rotation axis of the transport roller.

[0147] Example 28 is the device according to Example 27, wherein the rotation of the transport roller and the displacement of the functional unit are synchronized with each other, e.g. such that the transport roller is scanned.

[0148] Example 29 is the device according to any one of examples 22 to 28, wherein the functional unit is configured to perform a chemical (e.g., wet-chemical) cleaning process.

[0149] Example 30 is the device according to Example 29, wherein the functional unit is configured to supply an etching fluid (e.g., supplied by means of a nozzle and / or from a reservoir) or to dispense it for carrying out the cleaning process.

[0150] Example 31 is the device according to any one of examples 22 to 30, wherein the functional unit is configured to stimulate a cyclic movement (e.g., a vibration and / or a rotation) to carry out the cleaning process.

[0151] Example 32 is using the device according to any one of Examples 22 to 31 for cleaning a (e.g., permeable) transport roller.

Claims

[1] Method (100) for measuring a solid body (408), the method comprising: • gas-conducting coupling (101) of a collecting container (302) to a first surface region of the permeable solid body (408) and then to a second surface region of the solid body (408); • feeding (103) a test fluid through the solid body (408) into the collecting container (302); • Detecting (105) a time-dependent condition representing an amount of the test fluid in the collection container (302) when the collection container (302) is coupled to the first surface area and thereafter when the collection container (302) is coupled to the second surface area. [2] The method (100) of claim 1, wherein the solid (408) is porous. [3] The method (100) of claim 1 or 2, wherein the time-dependent condition comprises a concentration of the test fluid in the collection container (302) being detected. [4] Method (100) according to one of claims 1 to 3, wherein the collecting container (302) has a hood (306) which is pressed against the solid body (408). [5] Method (100) according to one of claims 1 to 4, wherein the test fluid comprises at least carbon and / or hydrogen. [6] Method (100) according to one of claims 1 to 5, wherein the solid body (408) is a roller shell (702o). [7] Method (100) according to one of claims 1 to 6, further comprising: Circulating an interior of the collecting container (302). [8] Method (100) according to one of claims 1 to 7, further comprising: Determining an indication of a permeability of the solid body (408) of the first surface area and the second surface area, respectively. [9] Device (300) for measuring a solid body, comprising: • a collecting container (302) for collecting a test fluid, • a fluid receiving opening (302o) which, when coupled to a permeable solid body (408) in a fluid-conducting manner, is configured to supply test fluid received by the solid body (408) to an interior (302i) of the collecting container (302) by means of the fluid receiving opening (302o); • a sensor (304) configured to detect a time-dependent condition representing an amount of the test fluid in the interior of the collection container (302). [10] Using the device (300) according to claim 9 for determining a gas permeability of a permeable solid (408).

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