Test device for testing a dirt-sensitive, electrical or electronic component

Abstract

Test device for testing a dirt-sensitive electrical or electronic component (12), comprising a test table (20) which has a storage device (22) with a storage surface (24) for placing the electrical or electronic component (12) and an extraction device (30), wherein the storage device (22) has several protrusions (26) on the storage surface (24) and at least one extraction opening (32) of the extraction device (30) is arranged between the protrusions (26), wherein the electrical or electronic component (12) can be placed on the protrusions (26) and an extraction airflow can be generated by the extraction device (30) such that any dirt present on the storage device (22) and / or on the electrical or electronic component (12) is extracted.

Description

[0001] The invention relates to a test device for testing a dirt-sensitive electrical or electronic component. The test device comprises a test table which has a storage device with a storage surface for placing the electrical or electronic component and an extraction device.

[0002] The manufacturing process for electrical or electronic components typically includes a final quality inspection. This involves, for example, a visual inspection to check the component for external damage. For this purpose, the electrical or electronic component is placed on a test bench and the quality inspection is carried out.

[0003] Such a test bench is disclosed, for example, in DE 10 2022 106 618 A1, wherein the test bench serves to hold a semiconductor substrate. The test bench comprises a storage device and a suction device. The storage device serves to hold the semiconductor substrate to be tested. The suction device has a suction opening which is fluidically connected to a cavity bounded by the storage device and the semiconductor substrate, wherein the suction device serves to fix the semiconductor substrate to the storage device by generating a vacuum within the cavity.

[0004] When testing electrical or electronic components, it is crucial that the component under test maintains sufficient technical cleanliness even after the test. Technical cleanliness refers to a sufficiently low level of contamination with harmful particles on cleanliness-sensitive technical components. A component is considered technically clean when unavoidable particle contamination is so minimal that it does not cause any short- or long-term functional impairments or system damage.

[0005] From DE 10 2004 062 592 B3, a system for examining a disc-shaped substrate is known, wherein the system is enclosed by a housing through which an airflow passes. The airflow through the housing serves to prevent abrasion particles from settling on the substrate.

[0006] DE 10 2006 108 474 A1 discloses a test device for semiconductor elements on a semiconductor wafer, wherein a test chamber is permeated with a protective gas or air.

[0007] WO 2022 / 017607 A1 discloses a table with a tabletop which has exhaust air openings, wherein the exhaust air openings are connected to a ventilation system.

[0008] Furthermore, from JP 2009206417 A a system for the production of semiconductor devices is known, wherein the system has an air extraction device to create a negative pressure in the assembly area of ​​a wafer.

[0009] The object of the invention is to provide a testing device by which contamination of the component to be tested can be reliably avoided.

[0010] The problem is solved by the features of claim 1.

[0011] Because the storage device has several raised sections on the storage surface, and at least one extraction opening of the extraction device is arranged between these sections, allowing the electrical or electronic component to be placed on the raised sections, and because the extraction device generates an extraction airflow sufficient to remove any dirt present on the storage device and / or the electrical or electronic component, contamination of the electrical or electronic component under test can be reliably prevented during testing. During testing, an airflow is present on almost all sides of the electrical or electronic component, carrying away and carrying away the dirt particles. Alternatively, the airflow around the component would prevent any dirt particles from settling on it, as these would be carried away by the airflow.

[0012] The cavity between the protrusions is open to the outside environment and permanently fluidically connected to it, so that the extraction does not serve to draw in the electrical or electronic component.

[0013] Preferably, the raised sections are arranged in a grid pattern. The storage device, for example, has nine raised sections arranged in a grid pattern. This grid-like arrangement of the raised sections creates a storage surface on which the component can be securely placed.

[0014] Preferably, the extraction device has several extraction openings, with each extraction opening arranged between two adjacent protrusions. In this way, homogeneous extraction can be provided across the entire storage area. This reliably prevents contamination of the component.

[0015] Preferably, the test table has a central air extraction duct which is fluidically connected to all extraction openings, the central extraction duct being fluidically connected to a blower via an outlet opening. The central air extraction duct extends through the entire test table, with the extraction openings fluidically connected to the air extraction duct via branches. In this way, an extraction device can be provided in a simple and cost-effective manner.

[0016] Preferably, the protrusions have a spherical segment shape, particularly a hemispherical shape. This allows the electrical or electronic component to be securely placed on the receiving device.

[0017] In a preferred embodiment, the storage device is made of an ESD / EPA-compliant plastic, which reliably prevents electrostatic charging of the storage device. Additionally, to prevent electrostatic charging, the storage device can have an electrically conductive metal grid that is electrically connected to an ESD / EPA ground. By preventing electrostatic charging, dirt or dust particles are prevented from adhering to the storage device. Furthermore, this prevents damage to the electrical or electronic component caused by electrostatic charging.

[0018] Preferably, the storage device is transparent, with at least one light source arranged on a side facing away from the storage surface to illuminate the electrical or electronic component under test. This allows the component to be illuminated during testing, making it easier to detect any abnormalities.

[0019] In a preferred embodiment, the lighting device is arranged such that it is cooled by the exhaust airflow. Lighting devices heat up during operation and must be cooled. Because the lighting device is surrounded by the exhaust airflow, it is cooled by the airflow, and a separate cooling device for the lighting device is not required.

[0020] Preferably, an optical detection device is provided for the optical detection and testing of the electrical or electronic component placed on the storage device, wherein the storage surface has at least one reference point for carrying out the test with the optical detection device. The test can be automated using the optical detection device, in particular a camera, wherein the images from the optical detection device are automatically evaluated in an evaluation device.

[0021] An embodiment of the invention is explained in more detail with reference to the drawing.

[0022] Fig. Figure 1 schematically shows a test device in perspective view.

[0023] The Fig. Figure 1 shows a test device 10 for testing an electronic or electrical component 12 for external damage. The component 12 to be tested is, in this case, a battery cell. Such testing of the component 12 is carried out, for example, during quality assurance. Because the electrical or electronic component 12 is sensitive to dirt, it is important that the test does not cause any contamination of the component 12, especially by dust.

[0024] The test device 10 has a test table 20, which has a storage device 22 and a suction device 30.

[0025] The storage device 22 is made of a transparent, ESD / EPA (Electrostatic Discharge / Electrostatic Protected Area) compliant plastic. Because the storage device 22 is transparent, the component 12 under test can be illuminated during testing by lighting devices 40 arranged within the test table 20. The lighting devices 40 can be switched on and off by means of a device 42. Furthermore, the storage device 22 has an electrically conductive metal grid 36, which is electrically connected to an ESD / EPA ground 38.

[0026] For placing the component 12 to be tested, the storage device 22 has a storage surface 24. A plurality of protrusions 26 are provided on the storage surface 24. The protrusions 26 are hemispherical and arranged in a grid pattern. A cavity or space 28 is provided between each of the protrusions 26.

[0027] The extraction device 30 comprises several extraction openings 32, which are arranged between the protrusions 26 and thus in the region of the cavity 28. Each extraction opening 32 is fluidically connected to a central extraction channel 34, the central extraction channel 34 being connected to a [missing information] in the Fig. 1. The blower (not shown) is fluidically connected.

[0028] The electrical or electronic component 12 can be tested either manually by a visual inspection carried out by a person or by a device integrated into the Fig. The optical detection device 50 shown in Figure 1 is used for the inspection. The optical detection device 50 is preferably a camera connected to an evaluation unit. In order to perform the inspection using the optical detection device 50, at least one reference point 52 is provided on the storage surface 24, which is also detected by the optical detection device 50.

[0029] When testing the electrical or electronic component 12, the component 12 to be tested is placed on the protrusions 26 forming the storage surface 24, whereby an airflow is generated in the area of ​​the cavities 28 located between the protrusions 26 by the extraction device 30 and in this way air and in particular the contaminant particles are extracted from the component 12 and the storage device 22.

[0030] Such a test device 10 can reliably prevent contamination of the dirt-sensitive component 12 to be tested.

Claims

[1] Test device for testing a dirt-sensitive, electrical or electronic component (12), comprising a test table (20) which has a storage device (22) with a storage surface (24) for depositing the electrical or electronic component (12) and a suction device (30), characterized by in that the storage device (22) has a plurality of elevations (26) on the storage surface (24) and at least one suction opening (32) of the suction device (30) is arranged between the elevations (26), wherein the electrical or electronic component (12) can be placed on the elevations (26) and a suction air flow can be generated by the suction device (30) such that dirt present on the storage device (22) and / or on the electrical or electronic component (12) is sucked away. [2] Test device according to claim 1, characterized bythat when an electrical or electronic component (12) is placed on the storage device (22), the cavity (28) between the elevations (26) is fluidically connected to the external environment. [3] Test device according to claim 1 or 2, characterized by that the elevations (26) are arranged in a grid pattern. [4] Test device according to one of the preceding claims, characterized by that the suction device (30) has a plurality of suction openings (32), wherein in each case one suction opening (32) is arranged between two mutually adjacent elevations (26). [5] Test device according to claim 4, characterized by that the test table (20) has a central suction channel (34) which is fluidically connected to all suction openings (32), wherein the central suction channel (34) is fluidically connected to a blower. [6] Test device according to one of the preceding claims, characterized bythat the elevations (26) have a spherical segment shape. [7] Test device according to one of the preceding claims, characterized by that the storage device (22) is made of an ESD / EPA-compliant plastic. [8] Test device according to claim 7, characterized by that the storage device (22) has an electrically conductive metal grid (36) which is electrically connected to an ESD / EPA ground (38). [9] Test device according to one of the preceding claims, characterized by that the storage device (22) is designed to be transparent, wherein at least one lighting means (40) is arranged on a side facing away from the storage surface (24) for illuminating the electrical or electronic component (12) to be tested. [10] Test device according to claim 9, characterized by that the lighting means (40) is arranged such that the lighting means (40) is cooled by the exhaust air flow. [11] Test device according to one of the preceding claims, characterized by that an optical detection device (50) is provided for optically detecting and testing the electrical or electronic component (12) deposited on the deposit device (22), wherein the deposit surface (24) has at least one reference point (52).

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