Vacuum chamber insert and vacuum chamber housing

Abstract

According to various embodiments, a vacuum chamber insert (152) comprises: at least one interaction component (144) which is configured for processing a substrate; a chassis (106) which has several wheels and by means of which the interaction component (144) is movably supported; two vacuum chamber lids (102b) between which the interaction component (144) and the chassis (106) are arranged and of which each vacuum chamber lid (102b) couples the chassis (106) with the at least one interaction component (144).

Description

Various embodiments relate to a vacuum chamber insert and a vacuum chamber housing. In general, a substrate can be treated (processed) in a vacuum, e.g., coated, so that its chemical and / or physical properties are altered. Various coating processes are available for coating a substrate, which are either physical vapor deposition (PVD) or chemical vapor deposition (CVD). The vacuum is usually provided in a vacuum chamber in which the substrate is placed and subjected to the coating process. For general technical context, see also: GAIL, Lothar (ed.) [et al.]: Cleanroom Technology, 3rd, updated and expanded edition. Berlin: Springer, 2012 (VDI Book), ISBN 978-3-642-19434-4. In addition to the substrate, the interior of the vacuum chamber and its components (also referred to as the process environment) are often parasitically coated, including, for example, the transport rollers used to move the substrate within the vacuum chamber. Cleaning these components increases maintenance effort and the downtime of the coating process. Particularly in the production of photovoltaic components, coating processes are used that lead to toxic contamination of the process environment. Cleaning and / or replacing contaminated components of the process environment is often difficult due to poor accessibility and is time-consuming. This makes it challenging to meet high requirements for the proportion of productive process time (also referred to as uptime) to the overall service life. The same applies to other malfunctions, such as substrate breakage. According to various embodiments, a vacuum chamber insert and a vacuum chamber housing are provided, which simplify maintenance and reduce the time during which the coating process and / or transport process is interrupted. The following are various examples that relate to what is described herein and depicted in the figures. Example 1 is configured according to one of the appended claims, including a vacuum chamber insert comprising: at least one (i.e., one or more than one) interaction component (also referred to as an influencing component) configured to interact with (e.g., influence) a substrate (e.g., to process it); a chassis having multiple wheels by means of which the interaction component is movably supported; two vacuum chamber lids (also referred to as chamber doors) between which the interaction component and the chassis are arranged, each vacuum chamber lid coupling the chassis to the at least one interaction component. Example 2 (e.g. a vacuum chamber insert) is set up according to Example 1, wherein the at least one interaction component has one or more than one transport roller (e.g. of a transport system) and / or one or more than one heating device (e.g. radiator). Example 3 (e.g. a vacuum chamber insert) is set up according to one of Examples 1 to 2, further comprising a storage device which has the two vacuum chamber lids. Example 4 (e.g. a vacuum chamber insert) is set up according to one of Examples 1 to 3, wherein the two vacuum chamber lids are supported so as to be movable by means of the chassis. Example 5 (e.g. a vacuum chamber insert) is set up according to one of Examples 1 to 4, wherein one or more than one vacuum chamber lid of the two vacuum chamber lids has a rotary bearing which is coupled to the transport roller and / or by means of which the transport roller is rotatably mounted. Example 6 (e.g. a vacuum chamber insert) is set up according to one of Examples 1 to 5, wherein the rotary bearing of one or more than one (e.g. each) vacuum chamber lid of the two vacuum chamber lids is provided by means of a rotary feedthrough which is set up to exchange a torque with the transport roller through the vacuum chamber lid. Example 7 (e.g., a vacuum chamber insert) is configured according to Example 1 or 6, further comprising (e.g., the bearing device): for one or more than one (e.g., each) vacuum chamber cover, or of the two vacuum chamber covers, a joint by means of which the vacuum chamber cover is coupled to the chassis, wherein the joint preferably provides the vacuum chamber cover with one or more degrees of freedom relative to the chassis, wherein the one or more degrees of freedom comprises: one or more degrees of rotational freedom and / or one or more degrees of translational freedom. Example 8 (e.g. a vacuum chamber insert) is set up according to one of Examples 1 to 7, wherein the one or more than one transport roller has several transport rollers, wherein each vacuum chamber cover of the two vacuum chamber covers has a rotary bearing per transport roller of the several transport rollers which is coupled to the transport roller. Example 9 (e.g. a vacuum chamber insert) is set up according to one of Examples 1 to 8, wherein a first vacuum chamber cover (e.g. outer cover) of the two vacuum chamber covers has a sealing device facing the interaction component (e.g. transport roller) and / or the chassis. Example 10 (e.g. a vacuum chamber insert) is set up according to one of Examples 1 to 9, wherein a second vacuum chamber cover (e.g. inner cover) of the two vacuum chamber covers has a sealing device facing away from the interaction component (e.g. transport roller) and / or the chassis, which preferably has a smaller circumference than the sealing device facing it. Example 11 (e.g. a vacuum chamber insert) is set up according to one of Examples 1 to 10, further comprising a spring device which is set up to provide a restoring force to one (e.g. the second) vacuum chamber cover of the two vacuum chamber covers, which is directed against a deflection of the vacuum chamber cover from a rest position (e.g. arranged stationary to the chassis), e.g. relative to the chassis. Example 12 (e.g., a vacuum chamber insert) is configured according to one of Examples 1 to 11, furthermore, e.g., for one or more than one vacuum chamber cover, or the two vacuum chamber covers, comprising an actuator (e.g., a gear unit) which is configured to influence a position (e.g., location and / or position), e.g., rest position, of the vacuum chamber cover relative to the chassis (e.g., chassis) and / or to transmit a force between the vacuum chamber cover and the chassis, e.g., to change the position (e.g., rest position) of the vacuum chamber cover relative to the chassis and / or in response to actuation of the actuator. Example 13 (e.g. a vacuum chamber insert) is set up according to one of Examples 1 to 12, wherein the chassis has several wheels and a frame (e.g. chassis) by means of which the several wheels are coupled together. Example 14 (e.g. a vacuum chamber insert) is set up according to one of Examples 1 to 13, wherein an axis of rotation of the chassis (e.g. of each wheel thereof) is transverse to an axis of rotation of the transport roller and / or is transverse to a distance between the two vacuum chamber lids. Example 15 (e.g. a vacuum chamber insert) is configured according to one of Examples 1 to 14, further comprising a drive device which is configured to transmit a torque to the transport roller (e.g. by means of a rotary feedthrough), wherein one of the two vacuum chamber lids is preferably arranged between the drive device and the transport roller. Example 16 (e.g. a vacuum chamber insert) is set up according to one of Examples 1 to 15, further comprising an energy chain which is set up to supply electrical power to the drive device and / or to supply electrical power to the interaction component (e.g. the heating device). Example 17 (e.g. a vacuum chamber insert) is configured according to one of Examples 1 to 16, having an additional chassis (e.g. outer chassis) which is coupled to the chassis by means of a vacuum chamber cover (e.g. the first vacuum chamber cover) of the two vacuum chamber covers, wherein the additional chassis is preferably arranged on a side of the vacuum chamber cover (e.g. the outer cover) opposite the chassis. Example 18 (e.g., a vacuum chamber insert) is configured according to one of Examples 1 to 17, further comprising an additional actuator (e.g., gear unit) configured to influence a position (e.g., orientation and / or location) of the additional chassis and the vacuum chamber cover relative to each other and / or to transmit a force between the vacuum chamber cover (e.g., the outer cover) and the additional chassis, e.g., to change a position of the vacuum chamber cover relative to the additional chassis and / or in response to being actuated thereto. Example 19 is a vacuum chamber housing according to claim 9, comprising, among other things: a chamber interior (e.g., in which a, e.g., straight, track is arranged), two chamber side walls bounding the chamber interior, between which the chamber interior is arranged, each chamber side wall being penetrated (e.g., along the track) by a chamber opening which opens into the chamber interior (also referred to as the chamber interior), a chamber floor (which preferably bounds the chamber interior and / or which preferably connects the two chamber side walls), and a (e.g., planar) track surface which is provided by means of the chamber floor or is arranged at a distance from the chamber floor in the chamber interior; wherein the track surface adjoins the chamber opening of at least one chamber side wall of the two chamber side walls (e.g., flush).to a surface of the chamber side wall that limits the chamber opening), so that a chassis resting on the running surface can be moved through the chamber opening; preferably having the vacuum chamber insert according to one of examples 1 to 18. Example 20 (e.g. a vacuum chamber housing) is set up according to Example 19, wherein the running surface is provided by means of one or more than one rail. Example 21 (e.g. a vacuum chamber housing) is configured according to Example 19 or 20, further comprising one or more than one chamber end wall, which preferably connects the two chamber side walls together and / or which (e.g. along a transport direction) is penetrated by (e.g. along a transport direction) a substrate transfer opening, wherein the substrate transfer opening preferably has a greater distance from the chamber floor than the transport floor and / or than the chamber opening. Example 22 (e.g. a vacuum chamber housing) is set up according to one of Examples 19 to 21, wherein each chamber side wall of the two chamber side walls is penetrated by the chamber opening along a direction of travel (e.g. a straight travel path), wherein the direction of travel (e.g. the travel path) is preferably transverse to the transport direction. Example 23 (e.g. a vacuum chamber housing) is configured according to one of Examples 19 to 22, wherein a first chamber side wall of the two chamber side walls has a first sealing device facing away from the driving surface (e.g. circumferentially the chamber opening), which preferably adjoins the chamber opening and / or is configured to receive the outer cover. Example 24 (e.g. a vacuum chamber housing) is configured according to one of Examples 19 to 23, wherein a second chamber side wall of the two chamber side walls has a second sealing device facing the floor (e.g. circumferentially the chamber opening), which preferably adjoins the chamber opening and / or is configured to receive the inner cover. Example 25 (e.g. a vacuum chamber housing) is set up according to one of Examples 19 to 24, wherein a first chamber side wall of the two chamber side walls has a first fold facing away from the road surface for receiving a vacuum chamber cover (e.g. outer cover), wherein the first fold preferably provides the first sealing device. Example 26 (e.g. a vacuum chamber housing) is configured according to one of Examples 19 to 25, wherein a second chamber side wall of the two chamber side walls has a second fold facing the road surface for receiving a vacuum chamber cover (e.g. inner cover), wherein the second fold preferably provides the second sealing device. Example 27 (e.g. a vacuum system comprising the vacuum chamber insert and the chamber housing) is set up according to one of Examples 1 to 26, wherein the vacuum chamber insert is set up to be moved on the road surface. Example 28 (e.g. a vacuum system) is set up according to Example 27, furthermore having an additional driving surface which extends away from one chamber side wall of the two chamber side walls (e.g. along the driving path) and / or is arranged offset from the driving surface. Example 29 is set up according to one of Examples 1 to 28, wherein the sealing device or each sealing device extends along a closed path. Example 30 is configured according to one of Examples 1 to 29, wherein one of the two vacuum chamber lids has a first mounting device and / or wherein the vacuum chamber housing has a second mounting device (e.g., complementary to the first locking component) which is configured to be positively engaged (also referred to as mounting) with the first coupling device to form a locking mechanism. The locking mechanism is configured, for example, to be brought into a first state (also referred to as the locked state) to block any movement of the vacuum chamber lid relative to the vacuum chamber housing (also referred to as locking), and, brought into a second state, to release the blockage. Example 31 is set up according to one of Examples 1 to 30, wherein the locking mechanism implements an actuator (e.g., a gear) that is set up (e.g., in the first state) to generate a force (e.g., in response to actuation of the actuator), whereby the vacuum chamber lid is pressed against the vacuum chamber housing by means of the force. Example 32 is a vacuum system comprising the vacuum chamber housing and vacuum chamber insert according to one of Examples 1 to 31. Example 33 is set up according to one of Examples 1 to 32, wherein each of the two vacuum chamber lids provides a chamber door. Example 34 is set up according to one of Examples 1 to 33, wherein the multiple transport rollers provide a transport system and / or adjoin a planar transport surface, which is, for example, along the axis of rotation of the transport rollers. Example 35 is set up according to one of Examples 1 to 34, wherein each of the vacuum chamber lids has a door leaf. Example 36 (e.g. a vacuum system) is set up according to one of Examples 1 to 35, further comprising an additional running surface (e.g. provided by means of one or more than one rail) which extends (e.g. along the running path) away from the vacuum chamber housing (e.g. its chamber side wall), wherein the additional running surface is, for example, offset from the running surface. Example 37 is configured according to one of Examples 1 to 36, wherein a first chamber side wall of the two chamber side walls has a first sealing device facing away from the chamber interior (e.g., its chamber opening circumferentially along a closed path); and / or wherein a second chamber side wall of the two chamber side walls has a sealing device facing the chamber interior (e.g., its chamber opening circumferentially along a closed path). Example 38 is set up according to one of Examples 1 to 37, where the travel path is along the direction of travel. Example 39 is set up according to one of Examples 1 to 38, wherein the two vacuum chamber lids differ from each other, e.g. in their geometry (or at least their circumference), e.g. height and / or width. For example, the inner lid may be smaller than the rebate of the outer lid. Example 40 (e.g. a vacuum system) is set up according to one of Examples 1 to 39, wherein the interaction component is set up to carry out a transport process by means of which, for example, a substrate can be transported. Example 41 (e.g. a vacuum system) is set up according to one of Examples 1 to 40, wherein the interaction component is set up to carry out a heating process by means of which thermal power is supplied to a substrate (e.g. by means of thermal radiation). Example 42 (e.g. a vacuum system) is set up according to one of Examples 1 to 41, wherein the processing device is set up to carry out a coating process (e.g. gas phase deposition). Example 43 is set up according to one of Examples 1 to 42, wherein the two chamber openings differ from each other, e.g. in their geometry (or at least their circumference), e.g. height and / or width. For example, one of the chamber openings may be smaller than the other of the chamber openings. Example 44 is set up according to one of Examples 1 to 43, wherein a circumference (or at least height and / or width) of the inner cover is smaller than a circumference (or at least height and / or width) of the outer cover, e.g. a sealing device of the outer cover. Figures 1A to 1E each show a vacuum chamber insert according to different embodiments in different schematic views; Figure 1F shows a vacuum chamber housing according to different embodiments in a schematic view; Figure 1G shows a vacuum system according to different embodiments in a schematic view; Figure 1H shows a method according to different embodiments in a schematic flowchart; and Figures 2A to 4C each show a vacuum system according to different embodiments in different schematic views. The following detailed description refers to the accompanying drawings, which form part thereof and illustrate specific embodiments in which the invention can be implemented. In this context, directional terminology such as "top," "bottom," "front," "back," "anterior," "rear," etc., is used with reference to the orientation of the described figure(s). Since components of embodiments can be positioned in a number of different orientations, the directional terminology serves only for illustration and is in no way limiting. It is understood that other embodiments may be used and structural or logical modifications may be made without deviating from the scope of protection of the present invention.It is understood that the features of the various exemplary embodiments described herein can be combined with one another, unless specifically stated otherwise. The following detailed description is therefore not to be interpreted in a limiting sense, and the scope of protection of the present invention is defined by the appended claims. Within the scope of this description, the terms "connected," "connected," and "coupled" are used to describe both direct and indirect connections (e.g., resistive and / or electrically conductive, such as an electrically conductive connection), direct or indirect connections, and direct or indirect couplings. In the figures, identical or similar elements are designated with identical reference numerals where appropriate. According to various embodiments, the term "coupled" or "coupling" can be understood as a connection and / or interaction (e.g., mechanical, hydrostatic, thermal, and / or electrical), e.g., direct or indirect. For example, several elements can be coupled to one another along an interaction chain, along which the interaction can be exchanged, e.g., a fluid (then also referred to as fluid-conducting coupled).For example, two coupled elements can interact with each other, e.g., a mechanical, hydrostatic, thermal, and / or electrical interaction. A coupling of several vacuum components (e.g., valves, pumps, chambers, etc.) can involve fluid coupling. Depending on the specific embodiment, "coupled" can be understood as a mechanical (e.g., physical) coupling, for example, by means of direct physical contact. A coupling can be designed to transmit a mechanical interaction (e.g., force, torque, etc.). The term "actuator" can be understood as a component designed to influence the system or process in response to an action. A mechanical actuator may incorporate a gearbox as a converter, which is designed to convert mechanical movements into one another. An electromagnetic actuator may incorporate an actuator (also called a motor) as its converter. The actuator, for example, an electromechanical converter, may be designed, for instance, to convert electrical power into mechanical energy (e.g., through movement) in response to a control signal. According to various embodiments, a storage device can be configured to hold (e.g., guide and / or position) one or more components. For example, the storage device can have one or more bearings per component for holding (e.g., guide and / or position) the component. Each bearing of the storage device can be configured to provide the component with one or more degrees of freedom (e.g., translational or rotational) according to which the component can be moved. Examples of bearings include: radial bearings, thrust bearings, radial-axial bearings, and linear bearings (also called linear guides). Each linear bearing can, for example, provide the component with exactly one translational degree of freedom. In this context, an assembly device is understood to be a device designed for assembly, for example, for mounting on a complementary assembly device (also referred to as a counter-assembly device). During assembly, several components are connected to one another (e.g., rigidly) using their respective assembly devices. Assembly can be (e.g., exclusively) positive-locking and / or detachable. The assembly device preferably has a (e.g., planar) mounting surface which, during assembly, rests against a complementary mounting surface of the counter-assembly device. The assembly device can, for example, have one or more (e.g., integral) mounting profiles (e.g., positive-locking profiles), which are provided, for example, by means of a feature (e.g., a projection or recess) on the assembly device. Examples of mounting profiles include: a thread, a groove (e.g.,for keyway mounting and / or dovetail groove), a locking lug, a bayonet fitting, a pin, etc. Examples of unevenness include: an opening (e.g., through hole and / or threaded hole), a bolt (e.g., a threaded bolt). According to various embodiments, the vacuum chamber can be provided by means of a chamber housing in which one or more chambers are provided. The chamber housing can, for example, be coupled to a pump arrangement, e.g., a vacuum pump arrangement (e.g., gas-conducting), to provide a negative pressure or a vacuum (vacuum chamber housing) and be designed to be stable enough to withstand the effects of atmospheric pressure in the evacuated state. The pump arrangement (comprising at least one vacuum pump, e.g., a high-vacuum pump, e.g., a turbomolecular pump) can enable the removal of some of the gas from the interior of the processing chamber, e.g., from the processing space. Accordingly, one or more vacuum chambers can be provided in a chamber housing. In other words, the chamber housing can be configured as a vacuum chamber housing.A coating chamber can be set up as a vacuum chamber. The term "vacuum pressure" here refers to a negative pressure in the range of a vacuum (i.e., a pressure of less than 0.3 bar), e.g., a pressure in a range of approximately 10 mbar to approximately 1 mbar (in other words, rough vacuum) or less, e.g., a pressure in a range of approximately 1 mbar to approximately 10⁻³ mbar (in other words, fine vacuum) or less, e.g., a pressure in a range of approximately 10⁻³ mbar to approximately 10⁻⁷ mbar (in other words, high vacuum) or less, e.g., a pressure of less than high vacuum, e.g., less than approximately 10⁻⁷ mbar. A drive device can be understood here as a converter designed to transform electrical power into mechanical energy. A drive device can, for example, comprise an electric motor (e.g., with electrical coils). A drive device can, for example, comprise a compressor and a piston coupled to it. A drive device can, for example, comprise one or more piezoelectric elements. For example, the drive device can be configured to output the mechanical energy by means of torque or rotary motion. A sealing device (also referred to as a sealing assembly) is understood here to be a device for sealing. Exemplary components (also referred to as sealing components) of the sealing device include: one or more sealing surfaces (e.g., lapped); a sealing groove; one or more seals (e.g., a metal gasket or a plastic gasket); and one or more wipers. The plastic gasket may, for example, include or consist of an elastomer and / or a sealing lip (e.g., made of the elastomer) (also referred to as an elastomeric seal). The sealing device (or at least one or more sealing components thereof) may, for example, extend along a closed path (also referred to as annular). Exemplary types of seals include: O-rings, lip seals, and double-lip seals.Exemplary properties of a seal include: a hardness of less than 85 Shore A; annular shape; and / or having a sealing lip. The terms used here, such as "inside," "outside," "right," and "left," are for ease of understanding and to better distinguish individual components and sides. For example, the terms "inside" and "outside" refer to a vacuum chamber. In this context, a "transport system" is understood to be a set of interacting components, examples of which include: transport rollers, a bearing device (by which, for example, each transport roller is rotatably mounted), a coupling device, a drive train, a gearbox, a drive device, etc. A vacuum chamber insert, for example, can be configured to transport a load (e.g., comprising a substrate and / or a substrate carrier), for instance, by means of the transport rollers. A transport device comprises, for example, the vacuum chamber insert and optionally a substrate carrier by means of which the substrate can be transported. The term "processing device" here refers to a device configured for processing a substrate. Examples of processing devices and / or processing include devices configured to modify the substrate (e.g., geometrically, chemically, and / or physically), to coat, clean, etch, etc. Examples of processing include additive (i.e., adding a material) and / or subtractive (i.e., removing material). Examples of processing devices include: a heating device, a coating device, an etching device, etc. Herein, a coating device is used as an exemplary processing device, but what is described for it may apply by analogy to a processing device of another type, e.g., a heating device, a coating device, an etching device, etc. Fig. 1A illustrates a vacuum chamber insert according to various embodiments 100a in a schematic side view or cross-sectional view, preferably set up according to Example 1. An exemplary implementation of the interaction component 144 has several transport rollers 104 and at least one heating device 114 (see Fig. 4A), which is arranged, for example, between two of the transport rollers. An exemplary implementation of the heating device has a heating wire and a glass tube in which the heating wire is arranged. An exemplary implementation of the bearing device 102 (e.g., according to Example 3) has several rotary bearings (also referred to as roller bearings) which provide a rotary axis 113 (also referred to as roller rotary axis) and by means of which the transport roller 104 is rotatably mounted about the rotary axis 113. The transport roller 104 can, for example, be arranged between two of the several rotary bearings, each of which is integrated into one of the vacuum chamber covers 102b. An exemplary implementation of the transport roller 104 has a (e.g., cylindrical) lateral surface which is a surface of rotation of the axis of rotation 113. The lateral surface can be provided, for example, by means of a metallic roller body of the transport roller 104, which is rotatably mounted. An exemplary implementation of the chassis 106 (also referred to as the internal chassis 106) has a frame 106g (also referred to as the chassis) which couples the several wheels 106r together. The chassis 106g has, for example, a pivot bearing for each wheel 106r, by means of which the wheel 106r is rotatably mounted, e.g., about a pivot axis (also referred to as the wheel pivot axis) that is transverse to the roller pivot axis 113 and / or parallel to a plane to which the wheels 106r abut. The chassis 106 is configured to stand on a surface by means of the wheels 106r and to be moved along the roller pivot axis 113 relative to the surface (also referred to as driving or the traversing process). An exemplary implementation of the two vacuum chamber lids (also referred to as inner and outer lids for clarity) features a sealing device for each lid, enabling it to be pressed against a chamber housing to create a vacuum seal. The sealing device on the outer lid, for example, faces the inner lid, while the sealing device on the inner lid faces away from the outer lid. Furthermore, the outer lid extends beyond the inner lid, facilitating its ability to seal a chamber opening through which the inner lid can pass. Fig. 1B illustrates a vacuum chamber insert according to various embodiments 100b in a schematic detailed side view or cross-sectional view, preferably configured according to embodiments 100a and / or according to Example 2. An exemplary implementation of the bearing device 102 has, for example, for one or more than one vacuum chamber cover (e.g., the outer cover) of the two vacuum chamber covers, a (e.g., plate-shaped) support 102p (also referred to as a door leaf) into which the rotary feedthrough 102d is received. Furthermore, the bearing device has a shaft 102w which extends along the roller axis of rotation 113 through the rotary feedthrough 102d and is coupled (e.g., rigidly) to the transport roller 104. An exemplary implementation of the shaft 102w can have an end section protruding from the rotary feedthrough 102d on one side opposite the transport roller. During operation, a torque transmitted to the end section can be transferred via the shaft 102w through the rotary feedthrough 102d to the transport roller 104, so that the transport roller 104 can be set into a rotary motion by means of the torque. An exemplary implementation of the rotary feedthrough 102d has one or more rotary bearings by means of which the shaft 102w is rotatably mounted about the roller axis of rotation 113. Fig. 1C illustrates a vacuum chamber insert according to various embodiments 100c in a schematic detailed side view or cross-sectional view, preferably configured according to one of the embodiments 100a to 100b and / or Example 10. An exemplary implementation of the bearing device 102, for example for one or more than one vacuum chamber cover 102b or two vacuum chamber covers, has a joint 108 by means of which the vacuum chamber cover 102b is coupled (e.g., movable) to the chassis. The joint 108 provides the vacuum chamber cover 102b with two translational degrees of freedom perpendicular to each other, each translational degree of freedom being perpendicular to the roller axis of rotation 113. Furthermore, the joint 108 provides the vacuum chamber cover 102b with two rotational degrees of freedom perpendicular to each other, each rotational degree of freedom being perpendicular to the roller axis of rotation 113. The degrees of freedom facilitate handling and compensate for manufacturing tolerances. An exemplary implementation of the spring device 112 (preferably according to Example 9) comprises one or more springs that couple the (e.g., inner) vacuum chamber cover 102b to the chassis 106g and provide the vacuum chamber cover 102b with a fixed rest position (e.g., orientation and / or location) relative to the chassis 106g. If the vacuum chamber cover is deflected from its rest position, e.g., by rotating and / or sliding the vacuum chamber cover, the spring device generates a restoring force opposing the deflection of the vacuum chamber cover from its rest position. The actuator (preferably according to Example 10) comprises a gearbox configured to transmit a force between the spring device 112 and the chassis 106g, e.g., to change the rest position relative to the chassis 106g. Fig. 1D illustrates a vacuum chamber insert according to various embodiments 100d in a schematic detailed side view or cross-sectional view, preferably configured according to one of the embodiments 100a to 100c, wherein the sealing devices 110a, 110b are shown. An exemplary implementation of the two vacuum chamber covers has an outer cover (also referred to as the outer vacuum chamber cover) which has a sealing device 110a (also referred to as the inner sealing device) facing the chassis 106, which is provided by or mounted on the door leaf 102p of the outer cover. The two vacuum chamber covers further have an inner cover (also referred to as the inner vacuum chamber cover) which has a sealing device 110b (also referred to as the outer sealing device) facing away from the transport roller 104, which is provided by or mounted on the door leaf 102p of the inner cover. An exemplary implementation of the sealing devices of the outer cover and / or the inner cover extends along a closed path, for example, around the roller pivot axis 113. The sealing device 110a of the outer cover has a larger circumference than the sealing device 110b of the inner cover. Fig. 1E illustrates a vacuum chamber insert according to various embodiments 100e in a schematic detailed side view or cross-sectional view with a viewing direction along the roller rotation axis 113. Fig. 1F illustrates a vacuum chamber housing according to various embodiments 100f in a schematic detailed side view or cross-sectional view (looking at the chamber bottom), preferably configured according to one of the embodiments 100a to 100e and / or according to Example 19. An exemplary implementation of the vacuum chamber housing 802 has two chamber side walls 802s and two chamber end walls 802g, which are connected to each other and define the chamber interior 802i (also referred to as the housing interior 802i). Each of the two chamber side walls is penetrated along a direction of travel 101 by a chamber opening 802o to accommodate the vacuum chamber insert. With respect to the vacuum chamber housing, the direction of travel 101 is transverse to a transport direction 103, along which each of the chamber end walls 802g is penetrated by a substrate transfer opening 802t. With respect to the vacuum chamber insert, the direction of travel 101 is along the roller rotation axis 113. An exemplary implementation of the running surface has one or more flat running surfaces 802f (e.g., provided by a rail) which adjoin each of the chamber side walls and extend into one of the chamber openings 802o. During operation, the wheels 106r rest on the running surface 802f and can be driven through the chamber opening 802o. Fig. 1G illustrates a vacuum system according to various embodiments 100g in a schematic detailed side view or cross-sectional view (looking at the chamber bottom), preferably set up according to one of the embodiments 100a to 100f and / or Example 27. The vacuum system comprises a vacuum chamber housing 802 (e.g. according to Example 19) and one or more than one vacuum chamber insert 152 (e.g. according to Example 1, e.g. Example 13). An exemplary implementation of the vacuum chamber housing 802 provides several receiving positions. Each of the two chamber side walls is penetrated by a chamber opening along the direction of travel 101 for each receiving position, in order to receive a vacuum chamber insert 152 in the receiving position. Fig. 1H illustrates a method for operating a vacuum system according to various embodiments 100h in a schematic flowchart. The method comprises, in 181, carrying out a coating process in a vacuum chamber to which a first vacuum chamber insert and / or (e.g. subsequently) a second vacuum chamber insert are subjected, and; in 183, exchanging the first vacuum chamber insert for the second vacuum chamber insert, e.g. by removing the first vacuum chamber insert from a position (also referred to as the operating position) in the vacuum chamber and inserting the second vacuum chamber insert into the operating position (also referred to as exchanging). Fig. 2A illustrates a vacuum system according to various embodiments 200a in a schematic side view or cross-sectional view, preferably set up according to one of the embodiments 100a to 100h and / or Example 27. The vacuum system comprises a vacuum chamber housing 802 (e.g. according to Example 19) and a vacuum chamber insert (e.g. according to Example 1, e.g. Example 13). An exemplary implementation of the vacuum chamber housing 802 has, for example, a chamber opening 802o per vacuum chamber cover 102b of the vacuum chamber insert, which penetrates a chamber side wall of the vacuum chamber housing 802 and which can be sealed by means of the vacuum chamber cover. Furthermore, the vacuum chamber housing 802 has a running surface provided by the chamber base 802b, on which the chassis can be moved. Optionally, the running surface has rails or similar features. An exemplary implementation of the chamber side wall, against which the inner cover can be placed, has a (e.g., frame-shaped) frame 802z, which is penetrated by the chamber opening 802o and provides a sealing surface facing the interior of the chamber and adjacent to the chamber opening 802, surrounding the chamber opening 802o along a closed path. The frame 802z provides a shoulder that adjoins the chamber floor and projects upwards from the chamber floor 802b, so that the outer sealing device 110b of the inner cover (also referred to as an internally hinged vacuum chamber cover) can rest against the inside of the frame. An exemplary implementation of the frame 802z features a rebate for receiving the vacuum chamber lid 102b. This facilitates handling. The sealing device of the frame can, for example, extend around the rebate. An exemplary implementation of the vacuum chamber insert features a hood-shaped enclosure 212 (also referred to as a hood) which is attached to the side of the vacuum chamber cover 102b opposite the transport roller 104. The enclosure 212 can, for example, house the joint 108, the drive device, and / or the spring device. An exemplary implementation of the joint 108 has one or more linkage mechanisms that provide several axes of rotation 202 (also referred to as pivot points) and are mounted on the chassis 106g by means of a bracket 204. The vacuum chamber lid is movably mounted relative to the chassis 106g by means of the linkage mechanism. An exemplary implementation of the actuator has several turnbuckles integrated into the linkage mechanism, by means of which the rest position of the vacuum chamber lid can be changed, e.g., in (and / or around) one or more directions perpendicular to the roller axis of rotation. By adjusting the turnbuckles differently, the orientation of the rest position can be changed. Fig. 2B illustrates a vacuum system according to various embodiments 200b in a schematic detailed side view or cross-sectional view, preferably set up according to one of the embodiments 100a to 200a and / or according to Example 26. An exemplary implementation of the rotary feedthrough 102d features a ferrofluidic rotary feedthrough by means of which the shaft is rotatably mounted and which is covered by an optional hood 410 (e.g., vacuum-tight). The hood 410 is arranged between two coupling gears. Alternatively or additionally to the hood 410, a drive device (e.g., a gearbox of the drive device) can also be arranged at this position, by means of which the shaft is driven. An exemplary implementation of the spring device 112 comprises a compression spring 112f and two joints 112g, which are coupled to each other by means of the compression spring 112f, a first joint coupling the compression spring 112f to the chassis 106g and a second joint coupling the compression spring 112f to the vacuum chamber lid 102b. For example, the transport device has a frame 112k (also referred to as a spring frame) by means of which the second joint is coupled to the vacuum chamber lid 102b. An exemplary implementation of the vacuum chamber lid 102b has a through-opening 202o (also referred to as a door opening) through which the spring device 112 extends. This facilitates the implementation. An exemplary implementation of the spring frame 112k is set up as a vacuum chamber which is attached to one side of the vacuum chamber cover 102b opposite the transport roller 104 and has a cavity which is bounded by the vacuum chamber cover 102b and in which at least the spring of the spring device 112 is arranged. Fig. 3A illustrates a vacuum system according to various embodiments 300a in a schematic side view or cross-sectional view, preferably set up according to one of the embodiments 100a to 200b and / or Example 27. An exemplary implementation of the locking mechanism is formed by means of a first mounting device 354, which is mounted on the inner cover 102b, and a second mounting device 352, which is mounted on the vacuum chamber housing 802. An exemplary implementation of the first mounting device 354 has a screw anchored to the inner cover 102b, which engages in the second mounting device 352 when the vacuum chamber insert is moved into the vacuum chamber housing. An exemplary implementation of the second mounting device 352 has a U-shaped frame with one or more openings into which the first mounting device 354 engages. Locking is achieved by means of a machine nut that is screwed onto the screw. A gearbox is implemented as an actuator via the machine nut, which allows the inner cover to be pressed against the frame. Fig. 3B illustrates a vacuum system according to various embodiments 300b in a schematic detailed side view or cross-sectional view, preferably set up according to one of the embodiments 100a to 300a and / or according to Example 19. An exemplary implementation of the drive device comprises an electric motor (not shown) and a gearbox 210 that couples the electric motor to the shaft, wherein the electric motor is configured to generate a torque which is transmitted to the transport roller via the gearbox and the shaft. For example, the gearbox of the drive device comprises a toothed belt drive or at least one or more toothed pulleys. An exemplary implementation of the actuator has a first screw connection 372, by means of which the position of the outer cover 102b can be influenced according to one or more degrees of freedom. Alternatively or additionally, the actuator has a second screw connection 374, by means of which the position of the outer cover can be influenced according to one or more degrees of freedom. Optionally, each screw connection of the actuator can be covered by a cap, e.g., vacuum-sealed. An exemplary implementation of the outer cover 102b has, for example, a through-opening (also referred to as a door opening) for each screw connection of the actuator, through which the screw protrudes. This makes it possible to operate the screw connection from the outside. Fig. 4A illustrates a vacuum system according to various embodiments 400a in a schematic side view or cross-sectional view, preferably set up according to one of the embodiments 100a to 300b and / or Example 26. The vacuum system comprises: a vacuum chamber housing 802 (e.g. according to Example 19), a vacuum chamber insert (e.g. according to Example 1, e.g. Example 13), and a processing device 302 arranged in the vacuum chamber housing 802 (e.g. its chamber interior 802i). An exemplary implementation of the vacuum chamber housing 802 has a housing opening 802o, which leads into the interior 802i. Furthermore, a chamber cover 802d is provided, which is designed to seal the housing opening 802o in a vacuum-tight manner. The processing device is mounted on the chamber cover so that it can be moved together with the chamber cover 802d. An exemplary implementation of the processing device includes a sputtering device which is set up to provide a gaseous target material to which the vacuum chamber insert is exposed by means of a sputtering process. An exemplary implementation of the vacuum chamber insert (e.g., according to Example 15) features an additional chassis 304 (also referred to as the outer chassis) and an energy chain 306. The outer chassis is attached to the side of the outer cover 102b opposite the transport roller (also referred to as the outside) and supports the vacuum chamber insert on a surface. The outer chassis facilitates the handling of the vacuum chamber insert during transport (also referred to as the traversing process). An exemplary implementation of the energy chain is attached to the outside of the outer cover 102b and is flexibly arranged so that the energy chain can remain coupled to the outer cover 102b when the vacuum chamber insert is being driven. An exemplary implementation of the outer chassis 304 is coupled to the outer cover 102b (here arranged on the right-hand side) by means of an additional gearbox (also referred to as the external gearbox). The external gearbox is configured to influence the position of the outer chassis 304 relative to the vacuum chamber cover 102b, e.g., in response to being actuated. This makes it possible to align the outer cover relative to the chamber housing 802 so that manufacturing tolerances are compensated for (see also Fig. 3B). An exemplary implementation of the outer landing gear 304 has a distance from each wheel 106r of the landing gear that is greater than the distance between the wheels 106r of the landing gear. Optionally, the processing device can be arranged between two heating devices 312, which are arranged in the vacuum chamber housing and / or mounted on the chamber cover 802d. Figures 4B and 4C each illustrate a vacuum system according to various embodiments 400b, 400c in a schematic, detailed side view or cross-sectional view in a method, preferably set up according to one of embodiments 100a to 400a and / or according to Example 26. The method for operating the vacuum system comprises: A first phase in which: - the wheels 106r of the inner chassis 106 rest on rails inside the vacuum chamber housing 802 (also referred to as inner rails) as a running surface 802f; - the wheels of the outer chassis 304 rest on rails (also referred to as outer rails) outside the vacuum chamber housing 802 as a running surface 314; - each of the two vacuum chamber lids is vacuum-tight against the vacuum chamber housing 802; - optionally (e.g., during operation) a vacuum is provided in the chamber interior 802i, e.g.,by means of one or more than one vacuum pump 802p, to which the processing device 302 and / or the transport roller 104 is exposed; - optionally (e.g. in operation) a substrate is transported in the vacuum chamber housing by means of the transport roller 104 (also referred to as transport process), which is processed (e.g. coated) by means of the processing device 302; - optionally the drive device is electrically supplied by means of the energy chain. A second phase in which: - the vacuum chamber insert is moved in the direction of travel 101 (also referred to as driving) out of the vacuum chamber housing 802, with the wheels 106r of the inner chassis 106 rolling on the inner rails and the wheels of the outer chassis 304 rolling on the outer rails; - during driving, the energy chain 306 is coupled to the outer cover; - an optional mobile rail 314m is attached to the vacuum chamber housing, which continues the inner rail; - the inner cover is moved out of the vacuum chamber housing through the right chamber opening 802o The following describes various work examples (Absp) that relate to what is described herein and depicted in the figures. According to paragraph 1, the vacuum chamber insert and the vacuum chamber housing are used for a horizontal inline vacuum system in which the substrate is transported on transport rollers and coated by means of a dirty coating process, which is associated with high maintenance costs for cleaning or changing components of the process environment. According to Figure 2 (e.g., Figure 1), the vacuum chamber insert and vacuum chamber housing are used in a vacuum system for manufacturing photovoltaic components. These components undergo coating processes that result in significant contamination of the process environment. Cleaning and / or replacing components within the system is often difficult due to poor accessibility and is time-consuming. According to paragraph 3 (e.g., one of paragraphs 1 to 2), the use of a vacuum chamber facilitates the vacuum chamber housing, enabling a proportion of the productive process time (also referred to as uptime) of more than 90% of the total service life. According to section 4 (e.g., one of sections 1 to 3), the health hazard posed to operators during maintenance of toxic processes that have contaminated the process environment is reduced. This applies analogously to all persons present in the vicinity of the vacuum system. This applies not only to cleaning the process environment but also to the occurrence of other sources of interference, such as substrate breakage. According to illustration 5 (e.g., one of illustrations 1 to 4), broken glass can also be removed from the vacuum chamber without the operator having to climb into the vacuum chamber and remove the broken glass in a constrained position. According to Figure 6 (e.g., one of Figures 1 to 5), the use of a vacuum chamber reduces the number of components exposed to the coating process, such as elevated temperature, process gases, and contamination from stray vapors. This also reduces the number of components that must be vacuum-compatible. If the components are not sufficiently vacuum-compatible, the vacuum, and therefore the quality of the coating process, will be negatively affected; for example, outgassing from ball bearing grease or cable insulation may occur. According to paragraph 7 (e.g., one of paragraphs 1 to 6), the vacuum chamber insert requiring maintenance (e.g., cleaning), which has been subjected to a coating process, is replaced with a serviced (e.g., clean) vacuum chamber insert (also referred to as a replacement vacuum chamber insert). The vacuum chamber insert requiring maintenance (e.g., cleaning) can be serviced while the coating process continues with the replacement vacuum chamber insert. According to section 8 (e.g., one of sections 1 to 7), the accessibility of the coating components to be cleaned or replaced is improved, and the time required for maintenance is reduced. This increases uptime. According to paragraph 9 (e.g., one of paragraphs 1 to 8), contaminated components of the process environment are quickly moved to a separate room for maintenance. According to section 10 (e.g., one of sections 1 to 9), quick and good accessibility of the components next to and under the transport rollers is provided, which facilitates the handling of broken glass. According to paragraph 11 (e.g., one of paragraphs 1 to 10), it is advantageous that components not suitable for vacuum and sensitive to temperature and contamination can be mounted on the atmospheric side of the vacuum chamber lid. According to Figure 12 (e.g., one of Figures 1 to 11), two vacuum chamber covers are provided, between which the transport roller is arranged, and for each of the two vacuum chamber covers a joint by means of which the vacuum chamber cover is coupled to the chassis, the joint providing the vacuum chamber cover with one or more degrees of freedom. This makes it easier to change the position (i.e., location and / or orientation) of the vacuum chamber cover to improve the vacuum tightness. According to illustration 13 (e.g., one of illustrations 1 to 12), two vacuum chamber covers are provided, one of which is an inner cover (e.g., its sealing device) pressed against the frame (e.g., its sealing device) of the vacuum chamber housing by means of a screw connection in order to improve the vacuum tightness. According to illustration 14 (e.g. one of illustrations 1 to 13), two vacuum chamber covers are provided, one of which is an inner cover coupled to the chassis by means of a spring in order to provide the inner cover with a rest position and to allow it to be deflected from the rest position by means of the spring. According to paragraph 15 (e.g., one of paragraphs 1 to 14), a quartz glass tube heater is used as a robust heating device because quartz glass is inert to many materials. According to Figure 16 (e.g., one of Figures 1 to 15), each vacuum chamber cover is designed for self-centering in the chamber opening. Alternatively or additionally, each vacuum chamber cover is centered relative to the chamber opening by means of a spindle as an actuator, e.g., in height and horizontal position relative to the axis of rotation. Alternatively or additionally to the spindle, turnbuckles are used. According to illustration 17 (e.g. one of illustrations 1 to 16), the outer cover is mounted freely suspended on the chassis so that it can swing. According to illustration 18 (e.g., one of illustrations 1 to 17), the inner cover can be rotated around a vertical axis by means of turnbuckles and by pre-tensioning the spring. The final position of the inner cover in the chamber opening is locked by means of a screw, which presses the inner cover against the chamber side wall. According to illustration 19 (e.g., one of illustrations 1 to 18), the vacuum chamber insert is pulled out laterally from a vacuum chamber housing and serviced. During servicing, another vacuum chamber insert can be inserted laterally into the vacuum chamber housing to continue operating the vacuum system. According to illustration 20 (e.g., one of illustrations 1 to 19), the vacuum chamber housing has two chamber openings (also referred to as right and left chamber openings for simplicity). The inner cover seals the left chamber opening, and the outer cover seals the right chamber opening. According to Figure 21 (e.g., one of Figures 1 to 20), a trolley is provided as a chassis, by means of which the heating device, several transport rollers, and optional process environment components can be stored and rolled laterally out of the vacuum chamber housing on rails. The accessibility of the removed components is significantly improved; in the event of glass breakage, everything is moved out, allowing for immediate removal of the broken glass with good accessibility. According to section 22 (e.g., one of sections 1 to 21), a cart is provided with several identical vacuum chamber inserts that can be interchanged. Maintenance of the first vacuum chamber insert takes place in a separate room during production, which significantly increases uptime. According to paragraph 23 (e.g., one of paragraphs 1 to 22), a vehicle with contaminated process environments is quickly moved to a separate room with appropriate protective equipment. According to paragraph 24 (e.g., one of paragraphs 1 to 23), various components of the roller bearing remain exposed to atmosphere when a vacuum is provided in the chamber interior and are thus protected from high temperatures and contamination by means of a vacuum chamber cover. According to paragraph 25 (e.g., one of paragraphs 1 to 24), the door openings in the recipient are supported against the differential pressure of the air by the retracted doors (see 5.). According to Figure 26 (e.g., one of Figures 1 to 25), accessibility is improved by having the actuators (e.g., adjustment devices) extend through openings (also referred to as door openings) in the vacuum chamber lids. The external parts of the actuators and the door openings are covered by hoods and a sealing device and sealed vacuum-tight to facilitate the separation between the atmosphere (outside) and the vacuum (inside the chamber interior). According to Figure 27 (e.g., one of Figures 1 to 26), the inner lid is movably mounted on the chassis and is suspended by springs and bolts. Movement of the inner lid is enabled by means of parallel links acting as actuators. The links are provided by means of turnbuckles, allowing the inner lid to be adjusted vertically and in terms of tilt. According to illustration 28 (e.g. one of illustrations 1 to 27), the inner cover is adjusted by means of pressure-relieving screws as a mounting device on the articulated fork head of the joint in a horizontal direction (e.g. perpendicular to the plane of the drawing in Fig. 3A). According to illustration 29 (e.g., one of illustrations 1 to 28), the over-adjustment of the inner cover is compensated for by the spring device. A slight overrun of the inner cover can be set by adjusting the preload of the compression spring of the spring device. The spring device is mounted via pivot points, thus compensating for positional shifts when adjusting and moving the door. According to illustration 30 (e.g., one of illustrations 1 to 29), the inner cover is screwed on to prevent the differential pressure from pushing the inner cover into the chamber interior. These forces can be absorbed, for example, by screwing the mounting device together. According to illustration 31 (e.g., one of illustrations 1 to 30), the outer cover is rigidly suspended, or at least horizontally adjustable. A bracket absorbs the vertical forces. The outer cover / door can be adjusted horizontally and in its tilt by means of screws. Additional adjusting screws, which couple the outer cover to the additional chassis, allow the door to be adjusted horizontally and vertically.

Claims

Vacuum chamber insert (152), comprising: • at least one interaction component (144) which is configured to interact with a substrate; • a chassis (106) which has several wheels and by means of which the interaction component (144) is movably supported; • two vacuum chamber lids (102b) between which the interaction component (144) and the chassis (106) are arranged and of which each vacuum chamber lid (102b) couples the chassis (106) with the at least one interaction component (144). Vacuum chamber insert (152) according to claim 1, wherein the at least one interaction component (144) has a transport roller, wherein each vacuum chamber lid (102b) of the two vacuum chamber lids (102b) has a rotary bearing by means of which the transport roller is rotatably mounted. Vacuum chamber insert (152) according to claim 1 or 2, further comprising, for one or more than one vacuum chamber cover (102b) of the two vacuum chamber covers (102b): a joint by means of which the vacuum chamber cover (102b) is coupled to the chassis (106), wherein the joint provides the vacuum chamber cover (102b) with one or more than one degree of freedom relative to the chassis (106). Vacuum chamber insert (152) according to one of claims 1 to 3, wherein the two vacuum chamber covers (102b) comprise: • a first vacuum chamber cover (102b) having a sealing device facing the chassis (106) • a second vacuum chamber cover (102b) having a sealing device facing away from the chassis (106) having a smaller circumference than the sealing device of the first vacuum chamber cover (102b). vacuum chamber insert (152) according to claim 4, further comprising a spring device which is configured to provide a restoring force to the second vacuum chamber lid (102b) which is directed against a deflection of the vacuum chamber lid (102b) from a rest position. vacuum chamber insert (152) according to one of claims 1 to 5, furthermore, for one or more than one vacuum chamber lid (102b) of the two vacuum chamber lids (102b), comprising an actuating element which is configured to influence a position of the vacuum chamber lid (102b) relative to the chassis (106). vacuum chamber insert (152) according to one of claims 1 to 6, comprising an additional chassis (106) which is coupled to the chassis (106) by means of a vacuum chamber cover (102b) of the two vacuum chamber covers (102b), wherein the additional chassis (106) is preferably arranged on a side of the vacuum chamber cover (102b) opposite the chassis (106). vacuum chamber insert (152) according to claim 7, further comprising an additional actuator which is configured to influence the position of the vacuum chamber lid (102b) and the additional chassis (106) relative to each other. Vacuum chamber housing comprising: • a chamber interior in which a straight track is arranged; • two chamber side walls bounding the chamber interior, between which the chamber interior is arranged, each chamber side wall being penetrated along the track by a chamber opening which opens into the chamber interior, wherein a first chamber side wall of the two chamber side walls has a first sealing device facing away from the chamber interior, and wherein a second chamber side wall of the two chamber side walls has a second sealing device facing the chamber interior, which has a larger circumference than the first sealing device; • a chamber bottom which bounds the chamber interior;• a planar driving surface, which is provided by means of the chamber floor or is arranged at a distance from the chamber floor in the chamber interior and adjoins the chamber opening of at least one of the two chamber side walls, so that a carriage (106) resting on the driving surface can be moved through the chamber opening; • two chamber end walls, each of which connects the two chamber side walls and is penetrated by a substrate transfer opening, the substrate transfer opening being at a greater distance from the chamber floor than the driving surface.; Vacuum chamber housing according to claim 9, wherein the travel path is transverse to the transport direction.

Images