Vacuum valve

Abstract

vacuum valve including - a valve housing (1) with a first valve opening (4) having a first axis (6) and a second valve opening (5) having a second axis (7) perpendicular to the first axis (6), wherein the first and second axes (6, 7) intersect at a point of intersection (8), and - a closing element (10) which is arranged in an interior (9) of the valve housing (1) and is movable parallel to the first axis (6) between an open position and a closed position and, in the closed position, rests against a valve seat (19) of the valve housing (1) surrounding the first axis (6) and, in the open position, is lifted from the valve seat (19), wherein, in the open position of the closing element (10), a passage channel extending from the first valve opening (4) to the second valve opening (5) through the vacuum valve is released, characterized in that the passage channel extending through the valve housing (1) in the open position of the closing element (10) has a section,the pipe section (24) is formed by a pipe section (24) lying parallel to the first axis (6) and extending with respect to the axial direction of the first axis (6) at least from the region of the valve seat (19) to the region of the intersection point (8) between the first axis (6) and the second axis (7), wherein the valve housing (1) or the closing element (10) comprises the pipe section (24) and the pipe section (24) is open at a first end facing the first valve opening (4) and is closed at an opposite second end and has a side opening (26) in the axial region of the intersection point (8) between the first axis (6) and the second axis (7) directed towards the second valve opening (4).

Description

[0001] The invention relates to a vacuum valve comprising a valve housing with a first valve opening having a first axis and a second valve opening having a second axis at an angle to the first axis, wherein the first and second axes intersect at an intersection point, and a closure member which is arranged in an interior of the valve housing and is movable parallel to the first axis between an open position and a closed position and, in the closed position, rests against a valve seat of the valve housing surrounding the first axis and, in the open position, is lifted off the valve seat, wherein, in the open position of the closure member, a through-channel running from the first valve opening to the second valve opening is released through the vacuum valve.

[0002] Vacuum valves in which the first and second valve openings of the valve housing are at an angle, in particular at right angles, to each other, and the closure member can be moved in a straight line parallel to one of the axes of the valve opening between the open and closed positions, are also referred to as angle valves and are known in various designs. For example, US 2015 / 0285396 A1, US 2006 / 0169940 A1, and US 6,669,170 B2 disclose angle valves with a manual drive, and US 6,289,932 B1, US 2009 / 0194728 A1, US 5,678,595 A, and US 9,851,012 B2 disclose angle valves with a pneumatic drive in the form of a piston-cylinder unit.

[0003] In vacuum systems in which aggressive process gases are used, for example in the semiconductor industry, there is the problem that seals on vacuum valves are damaged relatively quickly, necessitating frequent maintenance and corresponding downtimes of the system. Measures have therefore already been taken to reduce maintenance costs. In the angle valve known from US 7,527,238 B2, the closure element comprises a plate-shaped main part which has an elastic sealing ring for sealing against the valve seat in the closed position of the closure element, and on the rear side remote from the valve seat, in a recess in the main part, a plate-shaped additional part which has an elastic additional sealing ring. In the open position of the closure element, this additional sealing ring rests against a sealing surface of the valve housing.Seals for a linear feedthrough of the valve rod carrying the closure element, through which the latter is led out of the interior of the valve housing, are thus protected against an aggressive process gas used.

[0004] In the angle valve known from JP 3210186 U, an additional seal is also arranged on the rear of the closure member, which interacts with a sealing surface of the valve housing when the closure member is in the open position. At the front, the closure member has a sealing surface that interacts with a sealing ring arranged on the valve seat. The valve seat is arranged on the inside of a front wall of the valve housing, from which a connecting piece projects outwards, forming one of the valve openings of the vacuum valve. On the inside of the housing, the front wall has an annular extension that slightly extends the channel formed by the connecting piece and is surrounded by the valve seat. The closure member has a recess on its front side facing the valve seat in order to prevent collision with the annular extension in the closed position.This annular extension directs any gas flow entering through the valve opening past the area where the sealing ring is located, reducing the amount of aggressive process gas deposited on the sealing ring. However, this only provides limited protection for the sealing ring.

[0005] The object of the invention is to provide an advantageous vacuum valve of the type mentioned above, which is particularly advantageous when using aggressive process gases. According to the invention, this is achieved by a vacuum valve having the features of claim 1.

[0006] In the vacuum valve according to the invention, the through-channel running through the valve housing in the open position of the closure member has a section formed by a tubular piece lying parallel, preferably coaxial, to the first axis, with which the valve housing or the closure member is equipped and which extends at least from the region of the valve seat to the region of the intersection point between the first and second axes of the first and second valve openings. This tubular piece is open at a first end facing the first valve opening and closed at an opposite second end. In the axial region of the intersection point between the first and second axes of the first and second valve openings, the tubular piece has a side opening directed towards the second valve opening.

[0007] Due to the design according to the invention, a gas flow of an aggressive process gas can be effectively guided past the sealing ring, by means of which the closure element is sealed against the valve seat when the vacuum valve is closed, so that as little of the process gas as possible comes into contact with the sealing ring.

[0008] In a first possible embodiment of the invention, the valve housing has the tubular piece, wherein the tubular piece is attached with its first end to the inner side (= inside of the housing) of a housing front wall of the closure member or is formed integrally with the housing front wall. The tubular piece therefore extends from the housing front wall into the interior of the valve housing. The closure member is cup-shaped and, in the closed position in which it rests against the valve seat, surrounds the tubular piece. In the closed position of the closure member, the tubular piece is therefore received by the interior of the cup-shaped closure member. The valve seat is advantageously arranged on the inner side of the housing front wall and surrounds the tubular piece in the region of its first end.

[0009] In a second possible embodiment of the invention, the closure member comprises the tubular piece, wherein the tubular piece is attached with its second end to a base part of the closure member or is formed integrally therewith and is closed at its second end by the base part of the closure member. The first end of the tubular piece projects into a channel extending from the first valve opening and through a connecting piece of the valve housing, to a lesser extent in the open position of the closure member than in the closed position. The valve seat is advantageously arranged on the inside of the front wall of the valve housing and surrounds the tubular piece. The outer diameter of the tubular piece advantageously corresponds to the inner diameter of the connecting piece, apart from a necessary play in order to form a sliding guide for the tubular piece in the connecting piece.The outer diameter of the pipe section is therefore slightly smaller than the inner diameter of the connecting piece, preferably by less than 1mm.

[0010] The elastic sealing ring, which seals the closure member against the valve seat in the closed position, is preferably arranged on the valve seat. However, an arrangement on the closure member would also be conceivable and possible, as will be explained in more detail in the description of the figures.

[0011] A preferred embodiment of the invention provides for an additional elastic sealing ring to be arranged on the rear side of the closure member facing away from the first valve opening. When the closure member is in the open position, the additional elastic sealing ring is pressed against a sealing surface of the valve housing. This provides a seal against the penetration of aggressive process gas into the area of ​​the sliding passage for the valve rod, which supports the closure member.

[0012] Further advantages and details of the invention are explained below with reference to the accompanying drawings, in which: Fig. 1 is an oblique view of a vacuum valve according to an embodiment of the invention; Fig. 2 the vacuum valve of Fig. 1 in partially exploded condition; Fig. 3 an oblique view of the housing front wall with the attached connection piece and pipe section from a Fig. 1 and Fig. 2 different viewing directions; Fig. 4 a view of the back of the vacuum valve; Fig. 5 a section along the line AA of Fig. 4 in the open position of the locking link; Fig. 6 a section along line AA of Fig. 4 in the closed position of the locking link; Fig. 7 and Fig. 8 cuts analogous to the Fig. 5 and Fig. 6 of a front part of the vacuum valve in the open position and closed position of the closure member for a second embodiment of the invention (a rear part of the valve housing and the drive are not shown for the sake of simplicity).

[0013] A first embodiment of a vacuum valve according to the invention is shown in the Fig. 1 to 6. The vacuum valve has a valve housing 1 with a first connection piece 2 and a second connection piece 3. The connection pieces 2, 3 serve to connect the vacuum valve to other parts of the vacuum system. For example, the second connection piece 3 can be connected to a vacuum chamber in a vacuum-tight manner, and a supply line for a process gas can be connected to the first connection piece 2. The free end of the first connection piece 2 has a first valve opening 4, and the free end of the second connection piece 3 has a second valve opening 5. The vacuum valve is designed as an angle valve, and the first axis 6 of the first valve opening 4 is at a right angle to the second axis 7 of the second valve opening 5. Other angles, in particular in the range from 45° to 135°, are conceivable and possible, but less preferred.

[0014] The first axis 6 of the first valve opening 4 simultaneously represents the longitudinal center axis of the first connecting piece 2 and the second axis 7 of the second valve opening simultaneously represents the longitudinal center axis of the second connecting piece 3. The connecting pieces 2, 3 each have a pipe socket protruding from the respective housing wall and a connecting flange arranged at the free end of the respective pipe socket.

[0015] The first axis 6 and the second axis 7 intersect at an intersection point 8.

[0016] The valve housing 1 has an interior space 9. A closure member 10 is arranged therein. The closure member 10 can be moved between an open position ( Fig. 5), in which the vacuum valve is open, and a closed position ( Fig. 6), in which the vacuum valve is closed, in a straight line and parallel to the first axis 6. The closure member 10 is carried by a valve rod 11. The first axis 6 forms the longitudinal center axis of the valve rod 11, so the valve rod 11 is coaxial with the first valve opening 4. The valve rod 11 is guided out of the interior 9 of the vacuum valve by means of a sliding feedthrough, i.e. the valve rod 11 can be moved relative to the valve housing 1 parallel to the first axis 6, wherein it is sealed relative to the valve housing 1. In the exemplary embodiment, annular elastic seals 12, 13, 14 are used to seal the valve rod 11 relative to the valve housing 1. These seals are arranged in annular grooves which surround the opening in the valve housing 1 through which the valve rod 11 extends. Sealing by means of a bellows, in particular a folding bellows, would also be possible, as is known.

[0017] In the exemplary embodiment, the valve rod 11 simultaneously represents the piston rod of a pneumatic piston-cylinder unit 15, which forms the drive of the vacuum valve.

[0018] Between the seal 12 closest to the interior 9 and the adjoining seal 13, an annular space 17 is provided, vented through a bore 16 and surrounding the valve rod 11. This annular space 17 is formed by a groove in the wall of the bore through the valve housing 1, through which the valve rod 11 passes. The seal 12 is thus protected against any excess pressure from the piston-cylinder unit 15 that might overcome the seals 13, 14. The annular space 17 could also be pumped out through the bore 16.

[0019] In the exemplary embodiment, the piston-cylinder unit 15 has a double-acting piston. A single-acting piston could also be provided in conjunction with a spring acting in the other direction (particularly in the closing direction), as is known.

[0020] Other types of drives or even manual operation could also be provided.

[0021] In the closed position of the closure member 10, a sealing surface 18 of the closure member 10 is pressed against an elastic sealing ring 20 arranged on the valve seat 19. The valve seat 19 surrounds the first axis 6. In particular, the valve seat 19 is arranged on the inside of a front wall 21 of the valve housing. The first connection piece 2 is located on the outside of this front wall 21.

[0022] In the exemplary embodiment, the front wall 21 of the valve housing 1 is connected in a vacuum-tight manner to the side walls of the valve housing via a screw connection and an intermediate annular seal 22. The second connection piece 3 is arranged on one of these side walls.

[0023] In the exemplary embodiment, the side walls of the valve housing 1 are formed integrally with a rear wall 23 of the valve housing. The rear wall 23 could also be formed as a separate part and connected in a vacuum-tight manner to the side walls of the valve housing via a seal and a screw connection. In this case, in particular, the front wall 21 could also be formed integrally with the side walls of the valve housing.

[0024] In the exemplary embodiment, the valve housing 1 is essentially cuboid-shaped. Instead, it could, for example, be essentially cylindrical, with a cylindrical side wall.

[0025] A pipe section 24 is arranged on the inside of the front wall 21 of the valve housing 1 (=on the side that delimits the interior space 9 of the valve housing). The first axis 6 of the first valve opening 4 represents the longitudinal center axis of the pipe section 24, i.e., the pipe section 24 is coaxial with the first valve opening 4, as is preferred. The channel formed by the pipe section 24 continues the channel formed by the first connecting piece 2, preferably in a continuous manner.

[0026] The figures depict a one-piece design of the unit formed by the front wall 21, the first connecting piece 2, and the pipe section 24. Alternatively, this unit could also be constructed in multiple parts, with the two or more parts being connected to one another, in particular by welding. For example, the first connecting piece 2 and the pipe section 24 could be constructed in one piece and welded into an opening in the housing front wall 21.

[0027] The tube section 24 is thus attached to the front wall 21 on the inside of the housing with a first end or is formed integrally with the front wall 21. At its opposite second end, the tube section 24 is closed by a cover 25, which is formed, for example, integrally with the tube section 24.

[0028] Relative to the direction of the first axis 6, the pipe section 24 has a side opening 26 in the axial region of the intersection point 8 between the first axis 6 and the second axis 7. This side opening 26 is formed by a window recess in the wall surrounding the longitudinal axis of the pipe section 24. This side opening 26 is directed toward the second valve opening 5. Preferably, the axis of the side opening 26 is coaxial with the second axis 7. A certain offset between the two axes is also conceivable and possible.

[0029] The valve seat 19 surrounds the pipe section 24 in the region of its first end, at which it extends from the front wall 21 of the valve housing 1. The pipe section 24 thus protrudes from the front wall 21 into the interior 9 of the valve housing 1 and extends, with respect to the axial direction of the first axis 6, at least from the region of the valve seat 19 to the region of the intersection point 8 between the first axis 6 and the second axis 7.

[0030] The sealing ring 20 is spaced from the side opening 26 relative to the direction of the first axis 6, preferably by at least a quarter of the diameter of the side opening 26 relative to the direction of the first axis 6.

[0031] The closure member 10 is cup-shaped and, in the exemplary embodiment, has a disc-shaped base part 27, from which a wall 28 with an annular cross-section protrudes in the direction of the valve seat 19. At the end opposite the base part 27, the sealing surface 18 is arranged on the end face of the wall 28, which is thus annular.

[0032] In the closed position of the closure member, in which the closure member 10 rests with the sealing surface 18 on the sealing ring 20, the closure member 10 surrounds the pipe section 24. This means that in the closed position of the closure member 10, the pipe section 24 lies in the interior of the cup-shaped closure member 10.

[0033] In the open position of the closure member, it is withdrawn from the tube section 24 at least far enough that the side opening 26 of the tube section 24 is exposed.

[0034] In the open position of the closure member 10, a through-channel runs through the valve housing 1, extending from the first valve opening 4 to the second valve opening 5. Starting from the first valve opening 4, a first section of this through-channel runs through the channel formed by the first connecting piece 2. A subsequent section runs through the pipe section 24, starting from its open first end to its side opening 26. Starting from the side opening 26, the through-channel runs through the region of the interior of the valve housing 1 that lies between the side opening 26 and the channel formed by the connecting piece 3. The through-channel then runs through the channel formed by the second connecting piece 3 to the second valve opening 5.

[0035] In the closed state of the closure member 10, the passage channel is vacuum-tightly closed by the closure member 10.

[0036] In the exemplary embodiment shown, the diameter of the side opening 26 of the pipe section 24 is smaller than the diameter of the through-channel which the latter has in the section from the second valve opening to the opening into the interior of the valve housing. If a process gas is allowed to flow through the first valve opening 4 and the second valve opening 5 is connected to the interior of a vacuum chamber under vacuum, the flow from the side opening 26 of the pipe section 24 runs largely directly into the channel of the second connecting piece 3, i.e. the flow essentially only runs through the region of the interior 9 of the valve housing 1 which lies directly between the side opening 26 and the opening of the second connecting piece 3 into the interior of the valve housing. The sealing ring 20 arranged on the valve seat 19 therefore hardly comes into contact with the process gas.

[0037] A design in which the diameter of the side opening is larger than the diameter of the through-channel, which the latter has in the section from the second valve opening to the opening into the interior of the valve housing, is also conceivable and possible. The process gas is then preferably supplied through the second valve opening, and the first valve opening is then connected to the interior of the vacuum chamber to which the process gas is to be supplied.

[0038] In a modification of the first embodiment, it would also be conceivable and possible to arrange the sealing ring 20 on the closure member 10, specifically on the end face of the annular wall 26 facing the valve seat 19. The valve seat 19 would then have the sealing surface. In this case, the closure member 10 would be further in the open position than in Fig. 5, to such an extent that the sealing ring 20 would be axially spaced from the side opening 26 with respect to the axial direction of the first axis 6, preferably by at least a quarter of the diameter of the side opening 26.

[0039] On the rear side of the closure member 10 facing away from the first valve opening 1, an elastic additional sealing ring 29 is arranged, which surrounds the first axis 6. In the open position of the closure member, it rests against a sealing surface 30 of the valve housing 1. The sealing surface 30 is arranged on the inside of the rear wall 23 of the valve housing and surrounds the opening in the rear wall 23 through which the valve rod 11 is led out of the interior space 9 of the valve housing 1. In the open position of the closure member 10, the seal 12 is protected from residues of process gas, which could otherwise penetrate into this area.

[0040] A second embodiment of the invention is described below with reference to Fig. 7 and Fig. 8. Apart from the differences described below, the design corresponds to that of the first embodiment, and the description of the first embodiment can also be applied to the second embodiment.

[0041] A significant difference between the second embodiment and the first embodiment is that in the second embodiment, the closure member 10 is equipped with the tubular piece 24, which has the side opening 26. The tubular piece 24 is thus attached with its second end to the base part 27 of the closure member 10 or (as shown) is formed integrally therewith and is closed at the second end by the base part 27 of the closure member. The tubular piece 24, which is coaxial with the first axis 6, projects with its first end into the channel extending from the first valve opening 4 and through the first connecting piece 2, specifically in the open position of the closure member ( Fig. 7) less than in the closed position of the locking link ( Fig. 8). The outer diameter of the pipe section 24 is preferably only slightly smaller than the inner diameter of the channel, preferably by less than 1 mm. This means that the outer diameter of the pipe section 24 corresponds to the inner diameter of the connecting piece 2, apart from a clearance for forming a sliding guide between the pipe section 24 and the first connecting piece 2.

[0042] As shown, the sealing ring 20 can again advantageously be arranged on the valve seat 19 and the sealing surface 18 on the closure member 10, specifically on the base part 27 of the closure member 10 (on the side facing the valve seat 19), wherein the sealing surface 18 surrounds the second end of the pipe section 24.

[0043] The front wall 21 of the valve housing 1 is formed integrally with the side walls, and a rear wall 23 of the valve housing is sealed to the side walls (an intermediate seal and connecting screws are not shown for simplicity). However, analogous to the first embodiment, a sealed screw connection could again be provided for the front wall 21, which is formed separately from the side walls, and the rear wall 23 could be formed integrally with the side walls.

[0044] The channel extending from the second valve opening 5 and passing through the second connecting piece 3 has, at least in one end section where it opens into the interior 9 of the valve housing, a diameter that is smaller than the diameter of the side opening 26 in the pipe section 24. The side opening 26 is in turn directed towards the second valve opening 5, with its axis being slightly offset from the second axis 7 of the second valve opening 5 in the open position (it is closer to the first valve opening 4), cf. Fig. 7. The axis of the side opening 26 could also be coaxial with the second axis 7 in the open position of the closure member.

[0045] In the open position of the closure member 10, a through-channel is again formed through the valve housing. Starting from the second valve opening 5, this channel runs through the channel formed by the second connecting piece 3 and further through the region of the interior 9 of the valve housing located between the opening of this channel on the inside of the housing and the side opening 26. A further section of the through-channel runs through the pipe section 24, specifically from the side opening 26 to the open first end of the pipe section. The through-channel then runs through the channel formed by the first connecting piece 2 to the first valve opening 4.

[0046] The sealing ring 20 arranged on the valve seat 19 is spaced apart from the side opening 26 in the pipe section 24 in the open position of the closure member 10, relative to the direction of the first axis 6. This axial distance is correspondingly Fig.7 is relatively small, but could be made larger if this seems appropriate.

[0047] If a process gas is allowed to flow in through the second valve opening 5, the vacuum valve being connected to the interior of a vacuum chamber under vacuum via the first valve opening 4, the largest part of this process gas passes from the inner mouth of the channel running through the second connecting piece 3 through the area of ​​the interior 9 of the valve housing 1 located directly between this mouth and the side opening 26 directly into the pipe section 24, with only a small part of the process gas reaching another area of ​​the interior 9 of the valve housing 1 and thus to the sealing ring 20 arranged on the valve seat 19.

[0048] In this exemplary embodiment, the sealing ring 20 could also be arranged on the closure member 10 instead of on the valve seat 19, whereby it would surround the second end of the tubular section 24. The valve seat 19 would then have the sealing surface that interacts with the sealing ring 20. The sealing ring 20 would be arranged axially spaced from the side opening 26 relative to the first axis 6. For this purpose, the side opening 26 could be arranged further away from the second end of the tubular section 24.

[0049] In this second embodiment of the invention, the diameter of the side opening 26 could be configured, analogously to the first embodiment, to be smaller than the diameter of the section of the through-channel extending from the second valve opening to the opening into the interior 9 of the valve housing 1. In this case, the process gas could expediently be supplied through the first valve opening 4, and the vacuum valve could be connected to the interior of the vacuum chamber via its second valve opening 5.

[0050] In both the first and second described embodiments, the second connection piece 3 could be omitted. The second valve opening would then be provided directly in the corresponding side wall of the valve housing 1, and the valve housing 1 could be connected directly to this side wall with another part of a vacuum system.

[0051] In the first described embodiment, the first connection piece 2 could be omitted and the first valve opening 4 would then be arranged directly in the front wall 21 of the valve housing 1 and another part of a vacuum system could be connected directly to the front wall 21 of the valve housing in a vacuum-tight manner. legend 1 valve housing 2 first connection piece 3 second connection piece 4 first valve opening 5 second valve opening 6 first axis 7 second axis 8 Intersection 9 Interior 10 connecting link 11 Valve rod 12 Seal 13 Seal 14 Seal 15 piston-cylinder unit 16 Hole 17 Annular space 18 Sealing surface 19 Valve seat 20 sealing ring 21 Front wall 22 Seal 23 Rear wall 24 pipe section 25 lids 26 side opening 27 Base part 28 Wall 29 Additional seal 30 Sealing surface QUOTES CONTAINED IN THE DESCRIPTION

[0000] This list of documents submitted by the applicant was generated automatically and is included solely for the convenience of the reader. This list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions. Cited patent literature

[0000] US 2015 / 0285396 A1

[0002] US 2006 / 0169940 A1

[0002] US 6,669,170 B2

[0002] US 6,289,932 B1

[0002] US 2009 / 0194728 A1

[0002] US 5,678,595 A

[0002] US 9,851,012 B2

[0002] US 7,527,238 B2

[0003] JP 3210186 U

[0004]

Claims

[1] Vacuum valve comprising - a valve housing (1) with a first valve opening (4) having a first axis (6) and a second valve opening (5) having a second axis (7) at an angle to the first axis (6), the first and second axes (6, 7) intersecting at an intersection point (8), and - a closure member (10) which is arranged in an interior space (9) of the valve housing (1) and is movable parallel to the first axis (6) between an open position and a closed position and, in the closed position, rests against a valve seat (19) of the valve housing (1) surrounding the first axis (6) and, in the open position, is lifted off the valve seat (19), wherein, in the open position of the closure member (10), a through-channel extending from the first valve opening (4) to the second valve opening (5) is released by the vacuum valve, characterized byin that the through-channel running through the valve housing (1) in the open position of the closure member (10) has a section which is formed by a pipe section (24) lying parallel to the first axis (6) and extending, with respect to the axial direction of the first axis (6), at least from the region of the valve seat (19) to the region of the intersection point (8) between the first axis (6) and the second axis (7), wherein the valve housing (1) or the closure member (10) has the pipe section (24) and the pipe section (24) is open at a first end facing the first valve opening (4) and is closed at an opposite second end and has a side opening (26) directed towards the second valve opening (4) in the axial region of the intersection point (8) between the first axis (6) and the second axis (7). [2] Vacuum valve according to claim 1, characterized bythat the pipe section (24) is attached with its first end to a front wall (21) of the valve housing (1) or is formed integrally with the front wall (21) and projects from the front wall (21) into the interior (9) of the valve housing (1), and that the closure member (10) is cup-shaped and surrounds the pipe section (24) in the closed position. [3] Vacuum valve according to claim 2, characterized by that the valve seat (19) is arranged on the inner side of the front wall (21) of the valve housing (1) and surrounds the first end of the pipe section (24). [4] Vacuum valve according to claim 1, characterized bythat the pipe section (24) is attached with its second end to a base part (27) of the closure member (10) or is formed integrally with the base part (27) of the closure member (10) and is closed by the base part (27) of the closure member (10) at the second end and projects with its first end into a channel starting from the first valve opening (4) and running through a connecting piece (2) of the valve housing (1). [5] Vacuum valve according to claim 4, characterized by that the outer diameter of the pipe section (24) is less than 1 mm smaller than the inner diameter of the channel. [6] Vacuum valve according to one of claims 1 to 5, characterized by that an elastic sealing ring (20), by means of which the closure member (10) is sealed in the closed position relative to the valve seat (19), is arranged on the valve seat (19). [7] Vacuum valve according to one of claims 1 to 6, characterized bythat an elastic additional sealing ring (29) is arranged on the rear side of the closure member (10) facing away from the first valve opening (4), which additional sealing ring (29) rests against a sealing surface of the valve housing (1) in the open position of the closure member (10). [8] Vacuum valve according to one of claims 1 to 7, characterized by that the closure member (10) is carried by a valve rod (11) which extends parallel to the first axis (6) of the first valve opening (4) and is led out of the interior (9) of the valve housing (1) in a vacuum-tight and axially displaceable manner. [9] Vacuum valve according to one of claims 1 to 8, characterized by that the diameter of the section of the through-channel through the valve housing (1) extending from the second valve opening (5) to the mouth into the interior (9) of the valve housing (1) in the open position of the closure member (10) is greater than the diameter of the side opening (26) of the pipe section (24). [10] Vacuum valve according to one of claims 1 to 8, characterized by that the diameter of the section of the through-channel formed in the open position of the closure member (10) extending from the second valve opening (5) to the opening into the interior (9) of the valve housing (1) through the valve housing (1) is smaller than the diameter of the side opening (26) of the pipe section (24), at least in the region of the opening into the interior (9) of the valve housing (1).

Images