Electro-optical device and method for making an electro-optical device

FR3149699A1Active Publication Date: 2024-12-13COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
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Patent Information

Application Number
FR2023005745
Authority / Receiving Office
FR · FR
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-06-07
Publication Date
2024-12-13
Estimated Expiration
2043-06-07

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Abstract

Title: Electro-optical Device and Method for Improving an Electro-optical Device. The invention relates to a device (1) comprising, stacked along a vertical (z) direction, a silicon-based substrate (10), a nucleation layer (20) of a nitride-based refractory material, and a portion (30) of a lithium niobate-based layer, called the LNO portion, mesa over the nucleation layer (20), said LNO portion being bordered by a masking layer. The device (1) further comprises at least one electrode (51, 51b, 52) configured to apply an electric field to the LNO portion (30). The invention also relates to a method for implementing such a device, comprising localized epitaxial formation of the LNO portion. Figure for the abstract: Fig. 12
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