Measuring thin film thickness

GB2641538APending Publication Date: 2025-12-10OXFORD INSTR NANOTECHNOLOGY TOOLS LTD
View PDF 3 Cites 0 Cited by

Patent Information

Application Number
GB2024007938
Authority / Receiving Office
GB · GB
Patent Type
Applications
Current Assignee / Owner
Filing Date
2024-06-04
Publication Date
2025-12-10

Smart Images

  • Figure 00000000_0000_ABST
    Figure 00000000_0000_ABST
Patent Text Reader

Abstract

The thickness of a thin film structure 101 on a substrate mounted on a table 102 inside a chamber 103 of a deposition or etching tool 100 is measured by illuminating the structure with light 108 havin
Need to check novelty before this filing date? Find Prior Art

Citation Information

Patent Citations

  • Apparatus and method for measurement of film thickness

    JP2001133227A

  • Film-thickness measuring apparatus, film-thickness measuring method, and polishing apparatus having the film-thickness measuring apparatus

    US20150017880A1

  • Polishing method and polishing apparatus

    US20170190020A1