Apparatus and method for measuring substrate

Abstract

To provide a method and an apparatus that are improved to measure a multi-layer substrate.SOLUTION: A method includes a step (110) of manufacturing a substrate having a pattern on the surface of a top layer, a step (120) of measuring the substrate, particularly the pattern, by using at least one measurement technique, a step (130) of creating a simulation of the substrate by using a measurement result from the measurement of the substrate, a step (140) of comparing the measurement result with a simulation result from the simulation of the substrate, and a step (150) of calculating a parameter of another substrate when the measurement result corresponds to the simulation result. When there is a deviation between the measurement result and the simulation result, step (130) optimizes the simulation and creates the simulation of the substrate again by using the measurement result from the measurement of the substrate (120).SELECTED DRAWING: Figure 1a

Description

[Technical field]

[0001] The present invention relates to an apparatus and method for measuring a substrate.

[0002] The dramatic reduction in critical dimensions (CD) of features fabricated on substrates using photolithography or nanoimprint lithography increases the challenges for metrology and inspection techniques in the manufacturing process.

[0003] Conventional imaging methods such as optical microscopy are limited to pattern dimensions greater than half the optical wavelength, often well above 100 nm, due to the Abbe resolution limit - the diffraction-limited resolution. Characterization of patterns with critical dimensions in three dimensions is only possible to a limited extent with optical microscopy. Geometric parameters such as pattern width, pattern height, edge angle, and also the roughness of patterns in three dimensions become increasingly important as the patterns become smaller and smaller. Alternative methods such as transmission electron microscopy (TEM), scanning electron microscopy (SEM), or atomic force microscopy (AFM) for measuring patterns are too laborious (time-consuming) in the semiconductor industry and are therefore not suitable for process monitoring and mass production. Similarly, surface profilometry on large areas is only limitedly suitable for determining topology.

[0004] In the prior art, traditional imaging methods, such as optical microscopy, are combined with non-imaging scatterometry measurement methods.

[0005] However, conventional imaging methods are being abrogated by the drastically reduced critical dimensions of patterns fabricated on substrates using, for example, photolithography or nanoimprint lithography.

[0006] In the prior art, traditional ellipsometry is used to measure layer thicknesses and optical material properties such as refractive index and reflectivity. It is necessary to perform the measurement of the coating without destroying the layer in order to prevent damage to the substrate or wafer. Spectroscopic ellipsometry and reflectromtry, among others, are established as measurement systems for process control and process optimization in the semiconductor industry. Basically, relative changes or deviations are detected. The programs required for the simulation and evaluation from the measurements of simple systems are known in the prior art.

[0007] A detailed overview on the subject of spectroscopic ellipsometry and polarimetry for the analysis of materials and systems in the nm range, including thin films, is given, for example, in J. Nanopart. Res. (2009) 11:1521-1554 and will not be described in further detail.

[0008] For example, US Pat. No. 6,912,056 describes an apparatus and method for measuring a multi-layer on a substrate. The apparatus includes a measurement unit for measuring reflected light, the reflected light being reflected by a substrate on which the multi-layer is formed. A plurality of recipe data are input by an input unit, each of the plurality of recipe data corresponding to a plurality of virtual multi-layers, one of the virtual multi-layers being initially assumed to be a multi-layer actually formed on the substrate. Using a set of the plurality of recipe data, a control unit calculates a plurality of theoretical spectra, each of the plurality of theoretical spectra indicating the thickness of at least one of the respective constituent layers of the virtual multi-layer assumed to be a multi-layer actually formed on the substrate, and the measured spectrum is compared with the plurality of theoretical spectra, thereby determining a provisional thickness of the multi-layer. The calculated provisional thickness should be within an acceptable range, otherwise the selection of the provisional thickness is repeated after changing the recipe data. The physical information includes the refractive index and the extinction coefficient of each constituent layer.

[0009] US Pat. No. 7,196,793 also uses, for example, the change in polarization of radiation (Ψ(λ i ) and Δ(λ i These data are compared with simulated spectra, which are based on simulated values ​​(Ψ M (λ i ) and Δ M (λ i )) and the measured value (Ψ E (λ i ) and Δ E (λ i )) is fitted in the model until the difference between (best) and the incidence angle Φ (best) will be changed.

[0010] In US Pat. No. 7,289,219 and US Pat. No. 7,502,101 polarimetric scatterometry is used to measure the critical dimensions of periodic patterns on a wafer or on a semiconductor component.

[0011] In US Pat. No. 7,268,876, a nonlinear regression or Levenberg-Marquardt minimization algorithm is used to characterize in-situ the removal or deposition of the outermost layer of a sample using spectroscopic ellipsometry.

[0012] In “Aetherometry for nanoimprint lithography”, Journal of Vacuum Science & Technology B, Vol. 34, No. 06K503, 2016, by Zhu, R., Brueck, SRJ, Dawson, N., Busani, T., Joseph, P., Singhai, S., and Sreenivasan, SV, variable angle scatterometry is used to characterize patterns fabricated using nanoimprint lithography. These patterns are wire grid polarizers (WGPs) and photoresist grids. For model generation, the RCWA algorithm was used.

[0013] In “aetherometry for in situ measurement of pattern reflow in nanoimprinted polymers” by Patrick, HJ, Germer, TA, Ding, Y., Ro, HW, Richter, LJ, and Soles, CL, Applied Physics Letters, Vol. 93, No. 233105, 2008, spectroscopic ellipsometry is used to characterize polystyrene grating patterns generated by NIL.

[0014] The above method was used to detect the change in the pattern after heat treatment (annealing). For model generation, the RCWA algorithm was used. The results were compared with AFM measurements.

[0015] Reflection ellipsometry is well established in the measurement of thin layers, especially in the semiconductor industry, and will therefore only be briefly described. In the prior art, single layers are mostly characterized. Here, for example, the reflection of linearly polarized, parallel and monochromatic light is measured in a three-phase system: substrate / layer / air. In a three-phase system, reflection and refraction occur at two interfaces. In the case of reflection in (multi)layer systems, reflection and refraction must be taken into account at each individual phase boundary. From the measurable ellipsometric characteristic quantities describing the polarization change - the loss angle Ψ and the phase difference Δ - the material-specific complex refractive index of the layer system can be calculated.

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[0016] In contrast to monochromatic ellipsometry, variable angle spectral ellipsometry (VASE) offers a wide range of wavelength coverage. With a large amount of data or information, more accurate models can be calculated. With VASE, the following parameters can be measured or calculated, among others, for organic and inorganic materials: Layer thickness from sub-nanometer to several micrometers Surface roughness Refractive Index Electrical conductivity Absorption rate Polymerization state Mixture composition ·defect Optical anisotropy Material doping ·form

[0017] However, in the prior art, individual transparent or semi-transparent thin layers or double layer systems are mostly measured. When multi-layer systems are inspected, there are no patterned surfaces. Due to the complexity, in the prior art, either multi-layer systems or periodic patterns are measured. For multi-layer systems, a smooth surface is a prerequisite in the prior art. A further problem in the prior art is that the accuracy of simulation from the measurement of complex samples is often insufficient. It becomes even more difficult when the patterns also have more complex pattern shapes. In that case, the coordination of measurement and simulation remains a problem.

[0018] The problem to be solved by the present invention is to solve the problems of the prior art, in particular to provide an improved method and an improved device for measuring multilayer boards.

[0019] The above-mentioned problem is solved by the subject matter of the independent claims. Advantageous developments of the invention are described in the dependent claims. All combinations of at least two of the features presented in the description, the claims and / or the drawings also fall within the scope of the invention. Where value ranges are stated, values ​​inside the stated limits are also to be disclosed as limiting values ​​and can be claimed in any combination.

[0020] The present invention relates to a method for measuring a multilayer substrate having at least one feature with, inter alia, a critical dimension, the method comprising the steps of: The method comprises at least the following steps, in particular the following sequence: - manufacturing a substrate having several layers, the substrate having, in particular, a pattern, in particular on the surface of a top layer, the dimensions of the several layers, in particular the dimensions of the pattern, being known; - measuring the substrate, in particular the pattern, using at least one measurement technique; - creating a simulation of the board using the measurement results from the measurement of the board; comparing the measurement results with simulation results from a simulation of the board; if there is a deviation between the measurement results and the simulation results, optimizing the simulation and regenerating the simulation of the board using the measurement results from the measurement of the board, or if the measurement results correspond to the simulation results, calculating further parameters of the substrate using the generated simulation. The present invention relates to a method comprising the steps of:

[0021] Advantageously, the generated simulations can be used to optimize desired layer thicknesses, patterns, and materials.

[0022] The invention further relates to an apparatus for measuring a multilayer substrate having at least one feature, in particular having a critical dimension, in particular having a surface feature, in particular having a critical dimension, comprising: The device comprises: means for measuring the substrate, in particular the pattern, by means of at least one measurement technique; - means for generating a simulation of the board using measurement results from the measurement of the board; means for comparing the measurement results with simulation results from a simulation of the board; means for optimizing the simulation and regenerating a simulation of the board using measurement results from measuring the board; means for evaluating and optimizing the further substrate (1,1',1'') by reconstructing layer parameters and / or pattern parameters using the generated simulation based on measurement results from measurements of the further substrate (1,1',1''); The present invention relates to an apparatus having the following structure:

[0023] Advantageously, transparent or semi-transparent thin layers or bi-layer or multi-layer systems can be measured, as well as patterned surfaces, thus making it possible to measure complex substrates with high precision.

[0024] In particular, it is proposed to provide a simultaneous reconstruction of layer and pattern parameters by combining measurements and simulations. By adding multiple measurement variables and / or multiple measurement methods, the amount of information increases. Such combined measurement techniques, preferably used with RCWA as a computational method, allow to characterize complex samples containing multiple layers and patterns by obtaining diffraction and phase information as well as topology information. The newly used techniques provide results with realistic computational performance and short computation times acceptable for process monitoring.

[0025] Alternative computational methods for electromagnetic simulation are, for example, the FDTD method (Finite Difference Time Domain) and the FE method (Finite Element Method: FEM).

[0026] Preferably, the measurement techniques are the following techniques: · VUV-UV-Vis-NIR Variable Angle Spectroscopic Ellipsometry (VASE) in reflection or transmission mode with a measurement range from Vacuum Ultraviolet (VUV) to Near Infrared (NIR), i.e. 146nm to 1700nm IR variable angle spectroscopic ellipsometry (VASE) in reflection or transmission mode with a spectroscopic measurement range of 1.7μm to 30μm (Polarized) Reflectometry (Polarized) Scatterometry ·UV-Vis spectroscopy ·THz spectroscopy At least one, preferably exactly one of:

[0027] These measurement techniques are known in the prior art and will not be described in more detail. In particular in the IR or MIR (mid-infrared) range, in addition to reflection or transmission measurements, measurements by attenuated total reflection in ATR mode are also possible (ATR spectroscopy).

[0028] A spectroscopic ellipsometer arrangement is the preferred arrangement and is used as the first measurement technique in the first embodiment of the present invention.

[0029] Preferably, the angle of incidence and / or the wavelength and / or the polarization state are changed and measured.

[0030] Preferably, rigorous coupled-wave analysis (RCWA) is used to generate the simulation.

[0031] Preferably, according to the invention, only one measurement technique is used, where the independent measurement variables angle of incidence and wavelength, and state of polarization, are altered and measured.

[0032] In a further embodiment, where the system to be inspected is less complex, the angle is not changed.

[0033] In a third embodiment of the invention, where the system to be inspected is very complex, in addition to variable angle spectroscopic ellipsometry a second measurement technique is used, and if necessary also a third measurement technique, etc. Which and how many measurement techniques are combined depends on the substrate to be inspected and has to be selected case-specifically during the model generation. According to the invention, the combination of wavelength-resolved and angle-resolved measurement techniques, such as scatterometry or ellipsometry, leads to an improved accuracy of the simulation.

[0034] Optical properties over a wide spectral range: Refractive index (n) Extinction coefficient (k) · Real and imaginary parts of the dielectric function (ε1, ε2) Absorption coefficient (α) Real and imaginary parts of complex photoconductivity (σ1, σ2) Optical anisotropy can be determined.

[0035] These optical properties are known to those skilled in the art and will not be described in further detail.

[0036] Preferably, the means for measuring comprises at least one optical device, especially an ellipsometer and / or a reflectometer and / or a scatterometer and / or a spectrometer.

[0037] Preferably, the apparatus comprises at least one data processing unit and at least one data processing system for processing and storing data obtained from the means for measuring the substrate.

[0038] Preferably, the means for measuring comprises at least one radiation source, in particular a laser or a broadband radiation source, at least one monochromator, at least one polarizer, at least one compensator, at least one substrate holder, at least one analyzer and at least one detector, the at least one polarizer allowing to adjust the selected elliptical polarization state, in particular linear or circular.

[0039] Preferably, all the means for measuring the substrate are located within the apparatus.

[0040] Method Steps The present invention describes, inter alia, a method for characterizing a multi-layer system with (surface) patterning, comprising several steps:

[0041] In a first step, a sufficiently large number of measurements are performed on a selected known system (hereinafter also called substrate), i.e. a fabricated sample. The sample may be a multi-layer system with or without a pattern or surface patterning. According to the invention, inter alia, wavelength-resolved and / or angle-resolved measurements are performed and the polarization state is measured and modified.

[0042] The selected sample is measured using at least one measurement technique depending on the complexity, preferably all components for carrying out different measurement techniques are provided in the device according to the invention. Individual instrument components can be replaced, added or omitted as required. By adding multiple measurement methods, the information content of the recorded reference signature is increased. In a less preferred alternative embodiment, the sample to be measured is transferred to a further measurement device, whereby further measurements can be carried out using different measurement techniques.

[0043] Suitable measurement techniques for obtaining information are, according to the invention, inter alia, scatterometry, ellipsometry, reflectometry, spectroscopy and / or diffractometry. Measurements can be performed, for example, at variable polarization, at varying angles of incidence and at varying wavelengths of the measurement radiation. According to the invention, inter alia, a combination of wavelength-resolved and angle-resolved measurement techniques leads to an improved accuracy of the simulation. Furthermore, measurements can be performed in reflection mode as well as in transmission mode to obtain additional information and data, depending on the type of sample and the measurement technique.

[0044] The measurement technique is also selected based on the optical properties of the individual layers of the layer system: in a certain wavelength range, for example, one layer may be sufficiently transparent, while one or more other layers may absorb or reflect more strongly.

[0045] In a further step, a suitable model is created based on the recorded data, preferably using RCWA (Rigorous Coupled Wave Analysis) as a calculation method. For the model generation, newly developed complex simulation algorithms are used. The simulation allows various influences in the metrology to be taken into account, by which a comparison between measured and simulated results is performed for a known sample. For this purpose, a model-based measurement is performed. If the measured sample consists of several layers and (surface) patterns, the complexity of the system and the number of parameters to be determined increase.

[0046] According to the invention, an iterative step of measurement, model generation or optimization, and simulation is required. If the measurement and simulation results do not match within an acceptable range, the model needs to be further optimized. If the measurement and simulation results match within an acceptable range, the simulation can be used for the analysis of further samples.

[0047] A configuration using a spectroscopic ellipsometer, e.g. a VASE, is a preferred configuration according to the invention and is used as the first measurement technique in the first embodiment according to the invention. Which and how many measurement techniques are used must be determined individually for each system to be characterized. The measurement techniques must provide experimental measurement data that are sensitive to many of the parameters of interest without too high correlation between the parameters. Examples of parameters are e.g. height and width in the case of a surface pattern, layer thickness in the case of the nth layer.

[0048] RCWA is used to calculate the diffraction of a diffraction grating, and the sample is divided into a number of individual layers. The RCWA algorithm, according to the invention, makes it possible to determine the critical dimensions of the pattern to be inspected. The critical dimensions of the pattern to be inspected are, for example, the height or depth of the pattern, the width and length of the pattern, the angles (e.g. sidewall angles), the thickness of the residual layer, and the surface roughness. The measurements can be performed on periodic positive patterns and / or periodic negative patterns.

[0049] If a certain parameter is changed in the substrate to be characterized, this change must cause a change in the spectral recording. If several different parameters cause the same change in the experimental recording, the correlation is too high and an unambiguous correspondence is impossible or difficult. In that case, the choice of the measurement technique must be optimized even further. The possibility of correlation with unknown parameters is an additional challenge in the model generation. A high reproducibility in the manufacturing process of the sample to be examined is a prerequisite.

[0050] According to the invention, inter alia correlation and sensitivity analyses are performed to assess the quality of the reconstruction based on the measurements performed.

[0051] In a further step, the optimized model is used to characterize an unknown sample, which must be matched to a known sample system. By comparing the measured spectrum with the simulated spectrum, the dimensions of the layers and patterns are reconstructed. The simulated spectrum is used as a data set to reconstruct the parameters being searched for.

[0052] These parameters are, for example: Layer thickness from sub-nanometer to several micrometers Surface roughness Refractive Index Electrical conductivity Absorption rate Polymerization state Mixture composition ·defect Optical anisotropy Material doping ·form Critical dimensions of the pattern to be inspected. Critical dimensions of the pattern to be inspected are, for example, the height or depth of the pattern, the width and length of the pattern, angles (e.g., sidewall angles), residual layer thickness, and surface roughness.

[0053] The developed and optimized model is used to calculate the desired parameters of further similar substrates and similar (layer) materials, as well as to optimize the desired layer thicknesses, patterns, and materials. Thus, for example, layer thicknesses or pattern dimensions can be optimized using the model according to the invention based on the desired parameter quantities.

[0054] Substrates with multilayer systems and / or (surface) patterning By sample is meant a substrate which has been processed or treated using methods known in the semiconductor industry, in particular a substrate which has been coated and / or imprinted and / or bonded and / or etched and / or treated by plasma and / or treated by light, e.g. by laser, or master stamps, working stamps and microfluidic assemblies are also understood as samples.

[0055] Substrates or semiconductor substrates are understood to mean semi-finished products, not yet individualized, in particular round, of the semiconductor industry. Wafers are also understood to be substrates. The substrates can have any arbitrary diameter, but the diameter of the substrate is in particular 1 inch, 2 inches, 3 inches, 4 inches, 5 inches, 6 inches, 8 inches, 12 inches or 18 inches or more. In special embodiments, the substrate can also have a rectangular shape or at least a shape different from the circular shape.

[0056] The sample to be characterized includes, among others, one or more of the following components and / or coatings: Resists, especially photoresists ·Anti-sticking layer (ASL) First layers, e.g. adhesion promoter layers (primers) Polymer layer Working stamp materials (soft or hard stamp materials) for imprint and nanoimprint methods Master stamp material A patterned master stamp or hard stamp and a patterned hard material, fabricated by electron beam lithography and / or chemical etching processes. A layer having an imprinted pattern Patterned coating Semiconductor layer Oxide layer

[0057] The technique according to the invention is not limited to the above-mentioned samples and is generally suitable for multilayer systems with or without patterned features with critical dimensions, as long as the sample can be measured using at least one of the measurement techniques according to the invention (ellipsometry, scatterometry, spectroscopy, diffractometry, and reflectometry).

[0058] Preferred Uses In addition to determining layer thicknesses and patterns with critical dimensions, analytical techniques (especially RCWA) can be used for the following applications: Characterization of multi-layer systems Error analysis and detection (fault analysis) Characterization of anti-adhesion and first layers Monitoring the chemical stability of materials, e.g. resists, working stamp materials, first layers, anti-adhesion materials etc. Monitoring the wear or corrosion of materials such as resists, working stamp materials, master stamp materials, first layers, anti-adhesion materials etc. Monitoring environmental wear of materials such as resists, working stamp materials, master stamp materials, first layers, anti-adhesive materials, etc. Monitoring of oxidation or reduction processes of materials, e.g. resists, working stamp materials, master stamp materials, first layers, anti-adhesion materials, etc. Characterization of the chemical composition of materials, e.g. resists, working stamp materials, master stamp materials, first layers, anti-adhesion materials, etc. Characterization of the radiation stability of materials, e.g. resists, working stamp materials, master stamp materials, first layers, anti-adhesion materials, etc. Characterization of the thermal stability of materials, e.g. resists, working stamp materials, master stamp materials, first layers, anti-adhesion materials, etc. Characterization of the durability (aging) of materials, e.g. resists, working stamp materials, master stamp materials, first layers, anti-adhesive materials, etc. Characterization of electrical conductivity of materials, e.g. resists, working stamp materials, master stamp materials, first layers, anti-adhesive materials, etc. Characterization of the degree of cure of resists, working stamp materials, and imprint materials in general Characterization of the miscibility of materials, e.g. resist or working stamp materials Characterizing mixtures and monitoring separations Isotropic characterization of materials Monitoring of coating processes, e.g. resist coating, working stamp material layer, master stamp material, first layer, anti-adhesive coating, etc. and layer and / or film formation Characterization of 1D, 2D and 3D diffractive optical elements (DOEs) with critical dimensions (directly printed on transparent substrates or on polymer masters), imprinted NIL patterns, working stamps, hot imprinted nanopatterns, lithographic patterns and microfluidic assemblies Characterization and testing of patterned master stamps, patterned hard stamps, and patterned hard materials produced by electron beam lithography and / or chemical etching processes Characterization of spatial uniformity of patterns with critical dimensions Characterization of layer formation and layer growth mechanisms (e.g., Volmer-Weber growth regime, etc.) Characterization of the shrinkage behavior of 1D, 2D, and / or 3D diffractive optical elements (DOEs) with critical dimensions, of imprinted NIL patterns, of working stamps, of hot imprinted nanopatterns, of lithographic patterns, of microfluidic assemblies Characterization of additive coatings on 1D, 2D and / or 3D diffractive optical elements (DOEs) with critical dimensions, on imprinted NIL patterns, on working stamps, on master stamps, on hot imprinted nanopatterns, on lithographic patterns, on microfluidic assemblies Monitoring and characterization of cleaning processes for 1D, 2D, and / or 3D diffractive optical elements (DOEs) with critical dimensions, imprinted NIL patterns, working stamps, master stamps, high-temperature imprinted nanopatterns, lithography patterns, and microfluidic assemblies Identification of defects (e.g., voids) in 1D, 2D, and / or 3D diffractive optical elements (DOEs) with critical dimensions, imprinted NIL patterns, working stamps, master stamps, hot-imprinted nanopatterns, lithographic patterns, microfluidic assemblies, and other multilayer systems In situ etching process characterization

[0059] The method according to the invention can be used more generally for the quality control of manufactured samples with multilayer systems and / or patterned parts. For example, the quality of working stamps for nanoimprint lithography is characterized. These working stamps can consist of several layers with different thicknesses and materials. One of the several layers is patterned (for example, a soft stamp material layer). Several parameters respectively can be important for the quality. The quality control can be performed immediately after the production and / or after a certain time interval to control wear or aging, for example during use.

[0060] The method according to the invention can be used to monitor the manufactured products and to optimize the manufacturing process until the desired properties, i.e. the desired parameters, are reproducibly achieved. The spatial uniformity of a selected parameter can, for example, also be determined by the method according to the invention and used as a selection criterion.

[0061] Applications according to the present invention are not limited to the multi-layer systems described above (with or without patterning).

[0062] Device The apparatus includes an optical device such as an ellipsometer and / or a reflectometer and / or a scatterometer and / or a spectrometer, and a data processing unit or system for processing and storing data obtained from the optical device.

[0063] The essential components of the optical device are at least one radiation source (e.g. laser or broadband radiation source), at least one monochromator, at least one polarizer, at least one compensator, a sample holder, at least one analyzer and at least one detector. The polarization optics allows to adjust the selected elliptical polarization state (linear, circular, etc.). The measurements are not limited to reflection but can also be performed in transmission or ATR mode. In case of ATR measurements, a substrate and / or a corresponding ATR holder for the ATR crystal and the ATR optics are added as additional or alternative components.

[0064] According to the invention, inter alia, wavelength-resolved and angle-resolved measurements are carried out, with the polarization state being variable. If the system to be tested is not too complex, the angle is not changed, since the wavelength and the polarization state are sufficient information.

[0065] The spectroscopic ellipsometer setup, of which variable angle spectroscopic ellipsometry is preferably chosen, is according to the invention the preferred setup and is used as the first measurement technique in the first embodiment according to the invention.

[0066] The selected sample can be measured using several measurement techniques depending on the complexity, and preferably all components for carrying out the different measurement techniques are provided in the device according to the invention. If necessary, individual instrument components can be exchanged, added or omitted. According to the invention, the addition of several measurement methods increases the information content of the recorded reference signature. In an alternative embodiment, the sample to be measured is transferred to a further measurement device, whereby further measurements can be carried out using different measurement techniques.

[0067] Typical components of an ellipsometer are, for example, a light source, a polarizer, possibly a compensator (eg, a λ / 4 plate), a sample holder, an analyzer, optionally a monochromator, and a detector.

[0068] Further advantages, features and details of the invention will become apparent from the following description of preferred embodiments taken in conjunction with the drawings. [Brief description of the drawings]

[0069] [Figure 1a] 2 is a flow chart with method steps of an exemplary embodiment of the method according to the invention; [Figure 1b] 3 is a flow chart with method steps of an exemplary method according to the invention; [Figure 2a] FIG. 2 is a cross-sectional view of a substrate having a multilayer system and a surface patterning having a periodic positive pattern. [Figure 2b] FIG. 2 is a cross-sectional view of a second substrate having a multilayer system and a surface patterning having a periodic negative pattern. [Figure 2c] FIG. 2 is a cross-sectional view of a third substrate having a multilayer system and a surface patterning having a periodic trapezoidal positive pattern. [Figure 2d] 1 shows plan views of four exemplary embodiments of periodic patterns (rectangular 7, linear 7''', circular 7IV, and irregular shape 7V). [Diagram 3] 2 is a schematic diagram of optical components of an apparatus according to the invention in an exemplary embodiment;

[0070] Components that are the same or have the same function in each figure are provided with the same reference numerals.Figures 2 and 3 are not drawn to scale for improved illustration.

[0071] Fig. 1a shows a flow chart of the method according to the invention. For a known specimen (a multi-layer system with patterned (structured) features), a comparison between measurement and simulation results is performed. Iterative method steps of measurement 120, model generation 130 or model optimization 140 and simulation again are required.

[0072] In a first method step 110, a substrate (hereinafter also called a sample) is manufactured with a number of thin layers and (surface) patterning (structuring). The system to be inspected is thus known and used for model generation and model optimization. If necessary, a number of precisely known reference substrates are manufactured, the measurement results of which are used to verify and optimize the developed simulation model.

[0073] In a second method step 120, the substrate is illuminated with electromagnetic radiation at a defined angle of incidence and the reflected radiation is measured, for example in dependence on the wave number and / or the angle. This measurement is not limited to reflection but may also be performed in transmission. To increase the reliability and / or accuracy of the calculation method, several measurement techniques can be used. Suitable measurement techniques for obtaining the information are, inter alia, scatterometry, ellipsometry, reflectometry, spectroscopy and / or diffractometry. These various measurement techniques are, inter alia, based on measuring the reflected or diffracted light at micropatterned (microstructured) and / or (sub)nanopatterned (structured) samples as a function of instrumental parameters, such as, for example, the angle of incidence or the wavelength of light, exploiting the polarization dependence of the measured quantities. Similarly, the individual layers of a multilayer system are detected directly or indirectly by reflection and / or diffraction and / or scattering of light at the interfaces.

[0074] For the development of a simulation model, depending on the layer thicknesses and refractive indices of the individual layers of a known defined sample, either the entire multilayer system is measured after completion of fabrication or each individual layer is fabricated step by step and measured sequentially.

[0075] In a first embodiment, the individual layers of the multilayer system have a layer thickness of more than 20 nm (20 nm or more) and the refractive index of the individual layers is known. In this embodiment, the entire multilayer system is measured after completion of the fabrication, for example an imprint stamp for imprint lithography or nanoimprint lithography with a patterned imprint layer.

[0076] In a second embodiment, the sample comprises very thin layers with a layer thickness of less than 20 nm with a known refractive index. In the case of very thin layers, especially layers with layer thicknesses in the sub-nm range to the sub-nm range, each individual layer is produced and measured before the next layer is produced thereon. In this embodiment, the sample is measured after each layer, for example an ASL layer, has been deposited. All measurement data of the sample measured layer by layer are taken into account for the model generation.

[0077] If necessary, layers with layer thicknesses above 20 nm can also be measured individually during the manufacturing process of the sample, depending on the refractive index and on existing material information.

[0078] In a third embodiment, the sample comprises an intermediate layer, which has a layer thickness of more than 20 nm but an unknown refractive index, in which measurements are performed after each individual layer having a layer thickness of more than 20 nm is deposited, as well as on the entire multi-layer system after fabrication is completed.

[0079] In ellipsometry, the polarization change is described using measurable ellipsometric characteristic quantities - the loss angle Ψ and the phase difference Δ. Since the optical parameters cannot be determined directly using Ψ and Δ, a parameterized model needs to be developed for the sample system to be examined. To calculate the interaction of light with multilayer systems and nano- and micropatterns, according to the present invention, RCWA (Rigorous Coupled Wave Analysis) is preferably used as a calculation method. RCWA is used to calculate the diffraction of a diffraction grating, where the sample is divided into several individual layers. This model concept has been developed and complemented by the present invention.

[0080] A development of the invention advantageously allows for a simultaneous evaluation of the diffraction of an incident (plane) wave in the multilayer system and of the diffraction of an incident (plane) wave in the pattern using the simulation model from method step 130. Advantageously, the multilayer system and the non-planar layers, i.e. the pattern, are characterized with very high reliability and precision using polarized light by means of ellipsometry.

[0081] In a third method step 130, the data set of selected measurement variables is used for model generation, which allows to calculate a simulation of the multi-layer system with (surface) patterning. The deviation between the experimental data and the simulation data should be as small as possible (140). For a complex system according to the invention, such as that shown in FIG. 2a with several layers and surface patterns, the model developed in the method according to the invention is able to provide a correct physical description of the sample. This allows a simulation with a high degree of reliability.

[0082] In a fourth method step 140, a comparison is performed between the measurement results and the simulation results for the known sample produced in step 110. An iterative step of measurement, model creation or model optimization (model fitting) and simulation again is required. The aim of the adjustment is to fit the model, i.e. the generated data set, as best as possible to the measured data set (i.e. the experimental data). If this is (still) not the case, the model is further optimized in method step 130. If this is the case, the developed model can be used to identify the desired parameters in method step 150.

[0083] The mathematical analysis of the developed model systems can be used additionally, if desired, particularly in the development of general model systems.

[0084] Fig. 1b shows a flow chart of the method according to the invention when using a completed simulation model according to the invention for a multi-layer system with (surface) patterning. Here, after system optimization, the developed model can be used for routine simulations. The system parameters are predefined. According to the invention, in method step 120, a known sample - i.e. the number of planar and / or non-planar (i.e. patterned) layers and the material of the layers - is measured, the experimental data set is compared (140) with the generated data set, and the desired parameters are identified (150).

[0085] FIG. 2a shows a cross-section of a substrate 2 according to the invention with a number of thin coatings 3-6 and a surface patterning 7. The number and thickness of the coatings are not limited to the embodiment of FIGS. 2a-2c. The thicknesses of the coatings are not drawn to scale to improve the illustration. FIGS. 2a-2c show similar embodiments with different surface patternings 7, 7', 7'', respectively. The last coatings 6, 6', 6'' can consist of photoresist or imprint material patterned for example using lithography or nanoimprint lithography. The patterns 7, 7', 7'' have dimensions in the nanometer range. The surfaces 6o, 6'o, 6''o of the patterned coatings define the thickness of the residual layer.

[0086] FIG. 2 a shows a multi-layer system 1 with a surface patterning with a periodic positive pattern 7 .

[0087] FIG. 2b shows a further embodiment of a multi-layer system 1' with a surface patterning having a periodic negative pattern 7'.

[0088] FIG. 2c shows a third embodiment of a multi-layer system 1'' with a surface patterning having a periodic trapezoidal positive pattern 7''.

[0089] In the case where the surface is patterned with micro- and / or nano- and / or sub-nanometer patterns, the incident light strikes these (mostly) periodic surface coating patterns, which can represent optical diffraction gratings. Critical dimensions of the inspected patterns 7, 7', 7'' include the pattern height or depth, the pattern width and length, angles, e.g. sidewall angles, residual layer thickness, and surface roughness.

[0090] FIG. 2d shows further possible surface patterns according to the invention 7,7''',7 of a sample in a plan view consisting of several sections. IV , and 7 VAccording to the invention a model is developed which allows a reliable characterization of complex multi-layer systems with (surface) patterning according to the patterns of Figs. 2a to 2d. Pattern 7 is a quadrilateral, in particular a square. Pattern 7''' is a periodic linear surface coating pattern. In a further embodiment according to the invention, pattern 7 IV is circular. Pattern 7 in Figure 2d V Patterns having relatively complex or irregular pattern shapes such as the above are not a problem for the method according to the present invention and are detected and correctly reproduced in the model generation. The patterning unit is not limited to the embodiment shown in the figure.

[0091] The non-planar layer with patterning is according to the invention the top layer 6, 6', 6'' of the multi-layer system 1, 1', 1''. In an alternative embodiment, the non-planar layer with patterning is provided between two layers in the multi-layer system. For example, the patterned imprint material is coated with an ASL coating for use as a working stamp after imprinting. In a further alternative embodiment, the multi-layer system comprises two or more non-planar layers with patterning.

[0092] Fig. 3 shows the optical components of a first embodiment according to the invention of the device 13. A polarizer (P) 9 converts the unpolarized light from the radiation source 8 into linearly polarized light. After reflection at the sample 1, the radiation passes through an analyzer (A) 10. The electromagnetic radiation becomes elliptically polarized when reflected at the sample 1. The analyzer 10 again changes the polarization of the reflected electromagnetic radiation, which then hits a detector (D) 11. In a first preferred embodiment, a polychromatic radiation source is used, and therefore a selected wavelength range is used in the measurement method. In an alternative embodiment, monochromatic radiation is used, preferably a laser is used as radiation source. Several radiation sources can be provided simultaneously in the device and / or can be exchanged as required.

[0093] Further optical components, such as optical filters, compensators (e.g. λ / 2 plates), monochromators and various variable optical attenuators, can be used as required depending on the measurement technique and / or wavelength range. These components are known to those skilled in the art and will not be described in further detail.

[0094] The measurement techniques according to the invention differ in the arrangement and type of optical components: The analyzer 10 can, for example, be arranged to rotate.

[0095] In contrast to monochromatic ellipsometry, variable angle spectroscopic ellipsometry (VASE) offers a wide wavelength coverage, which increases the information content of the measured data and the accuracy of the simulation. A goniometer allows variable angle measurements. The combination of wavelength-resolved and angle-resolved measurements is the preferred embodiment and, according to the invention, leads to an improved reliability of the simulation. According to the invention, this combination is performed using VASE as the preferred measurement technique.

[0096] Furthermore, measurements can be performed in transmission mode as well as reflection mode depending on the sample type and measurement technique to obtain additional information and data as needed.

[0097] The apparatus 13 according to the invention comprises an optical device and a data processing unit 12 for processing and storing data acquired from the optical device.

[0098] A holding device (not shown) is used to hold and fix the sample or substrate. In a particular embodiment, the holding device is movable in the Z direction as required. Furthermore, the holding device can be rotated and / or tilted.

[0099] The containment device can be heated and thermostated in a temperature range between 0°C and 1000°C, preferably between 0°C and 500°C, more preferably between 0°C and 400°C, and most preferably between 0°C and 350°C. Alternatively, the containment device can be cooled by a cooling device. For example, in the first embodiment, the containment device can be cooled in a temperature range between -196°C and 0°C. The temperature of the containment device can be adjusted by a temperature control device. The containment device can further comprise sensors (not shown) capable of measuring physical and / or chemical properties. These sensors can be, for example, temperature sensors.

[0100] In a further preferred embodiment of the containment device, or even in an independent embodiment, the containment device comprises a liquid cell, which allows measurements under liquid. In a particular embodiment, the liquid cell is a flow-through cell. Thus, multi-layer systems with or without (surface) patterning can be measured in a liquid environment. In a particular application, according to the invention, the liquid cell can be used to characterize the electrochemical response of multi-layer systems. The liquid cell may be configured as an electrochemical cell with a reference electrode, a counter electrode and an optical window for measurements by spectroscopic ellipsometry.

[0101] The device 13 according to the invention can advantageously also be operated at ambient pressure in a vacuum or under a gas atmosphere. Preferably, the gas atmosphere is an inert gas atmosphere, for example nitrogen (N2). Thus, multi-layer systems with patterned parts, which are sensitive to, for example, moisture or oxygen, can be inspected.

[0102] The device 13 according to the invention is preferably evacuable and heatable. The device has means for introducing one or more gaseous components. A loading device, preferably a sluice, allows loading of the sample. In an alternative embodiment, the device can be configured so that measurements can be performed in situ.

[0103] Instead of the embodiment shown in Fig. 3, alternative embodiments are conceivable which allow, inter alia, a combination of measurement methods by spectroscopy and / or ellipsometry or scatterometry. All measurement techniques already mentioned are conceivable according to the invention.

[0104] A computer-aided data processing system 12 stores and processes the data acquired from the optical device in order to simulate the multi-layer system according to the invention (with or possibly without patterning) using simulation algorithms further developed according to the invention. The simulation model according to the invention allows for the first time, using the proposed approach, to simultaneously and reliably detect and characterize multiple thin layers and (surface) patterns. [Explanation of symbols]

[0105] 1,1',1'' (surface) patterned substrate / multilayer system 2 Refractive index n s A substrate-based material having 3. A first layer having a refractive index n1 4. A second layer having a refractive index n2 5 Refractive index n3 or n n The third layer (nth layer) has 6,6',6'' Surface patterning and refractive index n O A top layer having 6o,6'o,6''o Top surface 7,7',7'',7''',7 IV ,7 V pattern 8 Radiation source 9 Polarizer 10 Analyzer 11 Detector 12 Control and Computation Unit 13 Optical device according to the present invention 110 Method Steps 120 Method Steps 130 Method Steps 140 Method Steps 150 Method Steps

Claims

1. In particular, at least one pattern (7, 7', 7'', 7''', 7 ＩＶ , 7 Ｖ ), in particular having surface patterns (7, 7', 7'', 7''', 7 ＩＶ , 7 Ｖ A method for measuring a multilayer substrate (1,1',1'') having a The method comprises at least the following steps, in particular the following sequence: A plurality of layers (2, 3, 4, 5, 6, 6', 6''), in particular patterns (7, 7', 7'', 7''', 7 ＩＶ , 7 Ｖ ), in particular on the surface (6o, 6'o, 6''o) of the top layer (6, 6', 6'') are patterns (7, 7', 7'', 7''', 7 ＩＶ , 7 Ｖ 1. A method for manufacturing a substrate (1,1′,1″) having a plurality of layers (1,1′,1″) with dimensions of said layers, in particular dimensions of said patterns, known; using at least one measurement technique, said substrate (1, 1', 1"), in particular said patterns (7, 7', 7", 7'", 7 ＩＶ , 7 Ｖ ) (120); - creating (130) a simulation of said substrate using the measurement results from said measurement of said substrate (1,1',1''); - comparing (140) said measurement results with simulation results from said simulation of said substrate (1,1',1''); optimizing (130) the simulation if there is a deviation between the measurement results and the simulation results and generating again (130) a simulation of the substrate using the measurement results from the measurement of the substrate (1,1',1'') or calculating (150) the parameters of another substrate if the measurement results correspond to the simulation results; The method of claim 1, further comprising:

2. The measurement techniques include the following: VUV-UV-Vis-NIR variable angle spectroscopic ellipsometry (VASE) in reflection or transmission mode with a measurement range from vacuum ultraviolet (VUV) to near infrared (NIR), i.e. 146 nm to 1700 nm IR variable angle spectroscopic ellipsometry (VASE) in reflection or transmission mode with a spectroscopic measurement range of 1.7 μm to 30 μm (Polarized) reflectometry (Polarized) Scatterometry ・UV-Vis spectroscopy ・THz spectroscopy At least one, preferably exactly one of The method of claim 1.

3. The angle of incidence and / or wavelength and / or polarization state are changed and measured; 3. The method according to at least one of claims 1 to 2.

4. To generate the simulation, a mathematical algorithm is used, preferably RCWA (Rigorous Coupled Wave Analysis); 4. The method according to at least one of claims 1 to 3.

5. In particular, at least one pattern (7, 7', 7'', 7''', 7 ＩＶ , 7 Ｖ ), in particular surface patterns having critical dimensions (7, 7', 7'', 7''', 7 ＩＶ , 7 Ｖ In an apparatus for measuring a multilayer substrate (1, 1', 1'') having The device comprises: using at least one measurement technique, said substrate (1, 1', 1"), in particular said patterns (7, 7', 7", 7'", 7 ＩＶ , 7 Ｖ ) means for measuring (120); - means (130) for generating a simulation of said substrate using measurement results from said measurement of said substrate (1,1',1''); means (140) for comparing said measurement results with simulation results from said simulation of said substrate (1,1',1''); - means for optimizing (130) said simulation and regenerating (130) a simulation of said substrate using said measurement results from said measurement of said substrate (1,1',1''); means for evaluating and optimizing said further substrate (1,1',1'') by reconstructing layer parameters and / or pattern parameters using said generated simulation based on measurement results from measurements of other substrates (1,1',1''); An apparatus having the above configuration.

6. the measuring means comprises at least one optical device, in particular an ellipsometer and / or a reflectometer and / or a scatterometer and / or a spectrometer; 6. The apparatus of claim 5.

7. The device comprises: at least one data processing unit; at least one data processing system for processing and storing data obtained from the means for measuring said substrate (1,1',1''); 7. The device according to claim 5 or 6, comprising:

8. said measuring means comprising at least one radiation source, in particular a laser or a broadband radiation source, at least one monochromator, at least one polarizer, at least one compensator, at least one substrate holder, at least one analyzer and at least one detector, the at least one polarizer allows for adjusting a selected elliptical polarization state, in particular linear or circular, 8. Apparatus according to at least one of claims 5 to 7.

9. all means for measuring the substrate (1, 1', 1'') are arranged within the device, 9. Apparatus according to at least one of claims 5 to 8.

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