Film deposition device, film deposition method, container manufacturing method, and container

Abstract

To provide a film deposition device for restraining thermal alteration of a container.SOLUTION: A film deposition device 1 for depositing a barrier film 5A on an inner face of a container 5 by a plasma system comprises: a vacuum chamber 10, in which the container 5 is arranged; an anode electrode 21 and a cathode electrode 22 arranged in the vacuum chamber 10, the container 5 being arranged in a space R between the anode electrode 21 and the cathode electrode 22; a raw material gas supply mechanism 30 for supplying raw material gas of the barrier film 5A to the space R between the anode electrode 21 and the cathode electrode 22 in the vacuum chamber 10 outside the container 5; and an exhaust mechanism 40 for exhausting air from the vacuum chamber 10. The exhaust mechanism 40 extends to inside of the container 5, and has a tubular member 41 for exhausting air from inside of the container 5.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a film forming apparatus for forming a barrier film on the inner surface of a container, a film forming method using the film forming apparatus, a container manufacturing method using the film forming method, and a container having a barrier film formed on its inner surface. [Background technology]

[0002] There is known a film forming technique for forming a barrier film on the inner surface of a container in order to protect contents contained in the container from the environment outside the container such as moisture, gas, or light, or to protect the container from contents contained in the container such as liquid, gas, etc. For example, Patent Document 1 discloses a film forming apparatus for forming a barrier film on the inner surface of a container.

[0003] The film forming apparatus disclosed in Patent Document 1 includes a first electrode (anode electrode) that surrounds the outside of a container, and a second electrode (cathode electrode) that is inserted inside the container and also serves as a supply pipe for raw material gas for the barrier film, and generates plasma inside the container to form a barrier film inside the container. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent Publication No. 2021-8669 Summary of the Invention [Problem to be solved by the invention]

[0005] In the film forming apparatus disclosed in Patent Document 1, since plasma is generated inside a container, it is conceivable that electrons in the plasma collide with the container, causing the container to heat up. Therefore, if the container is made of a material that is weak against heat, it is conceivable that the container may be thermally altered.

[0006] An object of the present invention is to provide a film forming apparatus, a film forming method, a container manufacturing method, and a container that suppress thermal deterioration of the container. [Means for solving the problem]

[0007] The film forming apparatus according to the present invention is a film forming apparatus for forming a barrier film on the inner surface of a container by a plasma method, and includes a vacuum chamber in which the container is placed, an anode electrode and a cathode electrode in the vacuum chamber, the anode electrode and the cathode electrode in which the container is placed, a source gas supply mechanism for supplying a source gas for the barrier film to the space between the anode electrode and the cathode electrode in the vacuum chamber and outside the container, and an exhaust mechanism for exhausting the vacuum chamber. The exhaust mechanism has a tubular member extending to the inside of the container and for exhausting the inside of the container.

[0008] The film forming method of the present invention is a film forming method using the above-mentioned film forming apparatus to form a barrier film on the inner surface of a container, comprising the steps of: (1) evacuating the vacuum chamber using the exhaust mechanism; (2) supplying a raw material gas for the barrier film to the space outside the container, which is the space between the anode electrode and the cathode electrode in the vacuum chamber, using the raw material gas supply mechanism; (3) generating plasma in the space outside the container using the anode electrode and the cathode electrode to generate active species of the raw material gas; (4) evacuating the inside of the container by exhausting using the exhaust mechanism, drawing the active species of the raw material gas generated in the space outside the container into the inside of the container, and forming the barrier film inside the container; and (5) electrons in the plasma moving toward the anode electrode without colliding with the container.

[0009] The method for producing a container according to the present invention uses the above-mentioned film forming method to produce a container having a barrier film formed on its inner surface.

[0010] The container according to the present invention is a container having a barrier film formed on its inner surface using the above-mentioned film forming apparatus. Effect of the Invention

[0011] According to the present invention, even if the container is made of a material that is sensitive to heat, a barrier film can be formed on the inner surface of the container while suppressing thermal deterioration of the container. [Brief description of the drawings]

[0012] [Figure 1] FIG. 2 is a schematic diagram showing a film forming apparatus and a container according to the present embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. In each drawing, the same or corresponding parts are denoted by the same reference numerals. For convenience, hatching and reference numerals may be omitted, in which case other drawings shall be referred to.

[0014] (film forming equipment) Fig. 1 is a schematic diagram showing a film forming apparatus and a container according to the present embodiment. The film forming apparatus 1 shown in Fig. 1 is an apparatus for forming a barrier film 5A on the inner surface of a container 5 by a plasma method such as plasma CVD (Chemical Vapor Deposition). The film forming apparatus 1 includes a vacuum chamber 10, an anode electrode 21, a cathode electrode 22, a raw material gas supply mechanism 30, and an exhaust mechanism 40.

[0015] The vacuum chamber 10 is a chamber that provides a vacuum environment for performing film formation on the container 5. The vacuum chamber 10 is made of a metal material and may be connected to, for example, a ground potential. The container 5 is placed inside the vacuum chamber 10.

[0016] The anode electrode 21 and the cathode electrode 22 are disposed in the vacuum chamber 10. Specifically, the anode electrode 21 and the cathode electrode 22 are flat plate-shaped electrodes, and are disposed opposite to each other so as to sandwich the container 5. The anode electrode 21 may function as a stand (stage) for the container 5.

[0017] The anode electrode 21 is connected to, for example, a ground potential. On the other hand, the cathode electrode 22 is connected to, for example, a power source 7, and is supplied with, for example, AC power. When AC power is supplied to the cathode electrode 22, plasma is generated in the space R (plasma generation region) between the anode electrode 21 and the cathode electrode 22, which is outside the container 5, and active species of the raw material gas are generated.

[0018] The raw material gas supply mechanism 30 supplies the raw material gas for the barrier film 5A to the vacuum chamber 10. For example, the raw material gas supply mechanism 30 supplies the raw material gas for the barrier film 5A to the space R between the anode electrode 21 and the cathode electrode 22 in the vacuum chamber 10, that is, the space R outside the container 5.

[0019] The exhaust mechanism 40 is connected to a vacuum pump (not shown) and evacuates the vacuum chamber 10. Specifically, the exhaust mechanism 40 has a tubular member 41 extending to the inside of the container 5 and evacuates the inside of the container 5. As a result, the active species of the source gas generated in the space R outside the container 5 are drawn into the container, and a barrier film 5A is formed on the inner surface of the container 5.

[0020] The film forming apparatus 1 may or may not form a film on the outer surface of the container 5. When a film is not formed on the outer surface of the container 5, for example, the outer surface of the container 5 may be masked.

[0021] (Method of producing film and method of producing container) Next, a film forming method and a container manufacturing method according to the present embodiment will be described.

[0022] First, the vacuum chamber 10 is evacuated by the exhaust mechanism 40. Furthermore, the source gas supply mechanism 30 supplies a source gas for the barrier film 5A to the space R between the anode electrode 21 and the cathode electrode 22 in the vacuum chamber 10, which is outside the container 5.

[0023] Next, for example, AC power is supplied to the cathode electrode 22. This causes the anode electrode 21 and the cathode electrode 22 to generate plasma in the space R outside the container 5, thereby generating activated species of the source gas.

[0024] At this time, the inside of the container 5 is evacuated by the exhaust mechanism 40, and the activated species of the source gas generated in the space R outside the container 5 are drawn into the container 5. As a result, a barrier film 5A is formed inside the container 5.

[0025] At this time, electrons in the plasma move toward the anode electrode 21 having the ground potential without colliding with the vessel 5 or with the collision being suppressed. Also, the electrons in the plasma are attracted to the wall surface of the vacuum chamber 10 having the ground potential.

[0026] Here, the film forming apparatus disclosed in Patent Document 1 includes a first electrode (anode electrode) surrounding the outside of the container, and a second electrode (cathode electrode) inserted into the container and serving as a supply pipe for the raw material gas of the barrier film, and generates plasma inside the container. Therefore, it is considered that electrons in the plasma, that is, electrons that contribute to turning the raw material gas into plasma, collide with the container, causing the container to heat up. Therefore, if the container is made of a material that is weak against heat, it is considered that the container will be thermally altered.

[0027] In this regard, according to the film forming apparatus 1, film forming method, and container manufacturing method of this embodiment, the anode electrode 21 and the cathode electrode 22 are arranged to sandwich the container 5, i.e., outside the container 5, so that plasma is generated in the space R outside the container 5 and active species of the source gas are generated. In addition, the exhaust mechanism 40 extends to the inside of the container 5, so that the inside of the container 5 is exhausted and the active species of the source gas generated in the space R outside the container 5 are drawn into the container 5. As a result, a barrier film 5A is formed inside the container 5 by the active species of the source gas drawn in.

[0028] On the other hand, since no plasma is generated inside the container 5, it is possible to prevent electrons in the plasma, i.e., electrons that contribute to turning the raw material gas into plasma, from colliding with the container 5. Specifically, in the space R outside the container 5, the electrons in the plasma are attracted to the anode electrode 21 or the wall surface of the vacuum chamber 10, and are prevented from colliding with the container 5. This prevents the container 5 from generating heat, and prevents thermal deterioration of the container 5 even if the container is made of a material that is weak against heat.

[0029] Thus, according to the film forming apparatus 1, film forming method, and container manufacturing method of this embodiment, a barrier film 5A can be formed on the inner surface of a container 5 while suppressing thermal deterioration of the container, even if the container is made of a heat-sensitive material.

[0030] (container) The shape of the container that is the target of film formation by this film forming apparatus 1 is not particularly limited, and may be any container that is three-dimensionally shaped and can contain liquid, gas, or other contents therein. Examples of materials for the container include polyethylene terephthalate resin (PET), polyethylene terephthalate copolymer resin (copolymer resin using cyclohexane dimethanol or the like instead of ethylene glycol as the alcohol component of polyester), polybutylene terephthalate resin, polyethylene naphthalate resin, aliphatic polyester resin such as polylactic acid (PLA), polyethylene resin (PE), polypropylene resin (PP), cycloolefin resin such as cycloolefin polymer resin (COP) and cycloolefin copolymer resin (COC), ionomer resin, poly-4-methylpentene-1 resin, polymethyl methacrylate resin, polystyrene resin (PS), ethylene-vinyl alcohol copolymer resin, acrylonitrile resin, polyvinyl chloride resin, polyvinylidene chloride resin, polyamide resin, polyamideimide resin, polyacetal resin, polycarbonate resin (PC), polysulfone resin, fluorinated ethylene resin, styrene-butadiene resin, acrylonitrile-styrene resin, acrylonitrile-butadiene-styrene resin, biodegradable resin, and the like. Among these, the present invention is effective for containers formed from materials that are relatively sensitive to heat, such as polyethylene terephthalate resin (PET), polystyrene resin (PS), polyvinyl chloride resin, and biodegradable resin, and is particularly effective when applied to biodegradable resin.

[0031] (biodegradable resin) The biodegradable resin used in the present invention is not particularly limited as long as it has biodegradability. In this embodiment, "biodegradability" refers to a property that can be decomposed into low molecular weight compounds by microorganisms in nature. Specifically, the presence or absence of biodegradability can be determined based on tests suitable for each environment, such as ISO 14855 (compost) and ISO 14851 (activated sludge) under aerobic conditions, and ISO 14853 (aqueous phase) and ISO 15985 (solid phase) under anaerobic conditions. In addition, the decomposition by microorganisms in seawater can be evaluated by measuring biochemical oxygen demand. The biodegradable resin is preferably one or more selected from the group consisting of polyhydroxyalkanoate, polylactic acid, polybutylene succinate, polybutylene succinate adipate, polybutylene adipate terephthalate, polybutylene succinate terephthalate, polycaprolactone, modified starch, and modified cellulose. In the present production method, the biodegradable resin may be used alone or in combination of two or more kinds.

[0032] (Barrier film) The material of the barrier film formed by the film forming apparatus 1 is not particularly limited, and may be any material that has the ability to protect the contents stored in the container from the environment outside the container, such as moisture, gas, or light, or the ability to protect the container from the contents stored in the container, such as liquid, gas, etc. Examples of the material of the barrier film include diamond-like carbon (DLC), SiOx, SiOxNy, SiNx, SiOxCy, SiOxNyCz, Si-containing diamond carbon, alumina, etc. x, y, and z indicate the composition ratio of each element, and are not particularly limited.

[0033] Although the embodiment of the present invention has been described above, the present invention is not limited to the above-mentioned embodiment, and various changes and modifications are possible. In the above-mentioned embodiment, the film forming apparatus 1 in which the anode electrode 21 functions as a stand (stage) for the container 5 is exemplified. However, the film forming apparatus of the present invention is not limited to this, and may be in a form in which a stand (stage) for the container is provided separately from the anode electrode. [Explanation of symbols]

[0034] 1 Film forming equipment 5 containers 5A Barrier Film 7 Power 10 Vacuum chamber 21 Anode electrode 22 Cathode electrode 30 Raw gas supply mechanism 40 Exhaust system 41 Tubular member R space (plasma generation region)

Claims

1. A film forming apparatus for forming a barrier film on the inner surface of a container by a plasma method, a vacuum chamber in which the container is disposed; an anode electrode and a cathode electrode disposed in the vacuum chamber, the container being disposed in a space between the anode electrode and the cathode electrode; a source gas supply mechanism that supplies a source gas for the barrier film to the space between the anode electrode and the cathode electrode in the vacuum chamber and outside the container; an exhaust mechanism for exhausting the vacuum chamber; Equipped with The exhaust mechanism includes a tubular member that extends to the inside of the container and exhausts the inside of the container. Film forming equipment.

2. The film forming apparatus according to claim 1 , wherein the anode electrode functions as a stand for the container.

3. The film forming apparatus according to claim 1 , wherein the anode electrode is connected to a ground potential.

4. A film forming method for forming a barrier film on an inner surface of a container using the film forming apparatus according to any one of claims 1 to 3, comprising the steps of: The exhaust mechanism evacuates the vacuum chamber; supplying a source gas for the barrier film to a space between the anode electrode and the cathode electrode in the vacuum chamber and outside the container by the source gas supply mechanism; generating plasma in the space outside the container by the anode electrode and the cathode electrode to generate activated species of the source gas; The inside of the container is evacuated by the exhaust mechanism, and the activated species of the source gas generated in the space outside the container are drawn into the inside of the container, and the barrier film is formed on the inside of the container; Electrons in the plasma travel toward the anode electrode without colliding with the vessel. Film forming method.

5. A method for manufacturing a container, comprising the steps of: manufacturing a container having a barrier film formed on its inner surface, using the film forming method according to claim 4 .

6. The method for manufacturing a container according to claim 5 , wherein the container comprises a biodegradable resin.

7. The method for producing a container according to claim 6 , wherein the biodegradable resin comprises a polyhydroxyalkanoate resin.

8. A container having a barrier film formed on its inner surface by using the film forming apparatus according to any one of claims 1 to 3.

9. The container according to claim 8, which is made of a biodegradable resin.

10. 10. The container according to claim 9, which is made of a polyhydroxyalkanoate resin.

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