Cleaning sheet

Abstract

To provide a cleaning sheet which is intended to clean away waste on a pad adhered to the tip of a probe pin used for semiconductor electric inspection, and with which cleaning having a function of reducing contact resistance between a probe and an electrode pad, can be performed in short time with high efficiency.SOLUTION: In a cleaning sheet, air bubbles or air layers in a sponge sheet composed of a material such as melanin resin or urethane rubber are substituted with polishing gel in which gel or fine abrasive grains having a size of several tens of microns or less are mixed.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a cleaning sheet for cleaning the tip of a probe for electrical inspection of semiconductor devices. [Background technology]

[0002] The tip of the probe used for semiconductor electrical testing becomes dust from the pads being tested, and as this accumulates it causes noise in the test signal. Therefore, it is necessary to periodically clean the tip of the probe with a cleaning sheet to remove the dust.

[0003] Conventionally, commonly used cleaning sheets are sponge sheets made of materials such as melamine resin or urethane rubber, and generally have air bubble holes on the surface and an air layer and air bubbles inside, with an abrasive gel applied to the surface of the sheet or with abrasive grains sprinkled and adhered to it.

[0004] In addition, instead of a sponge sheet, there are also examples in which a sheet made of a material such as silicone rubber or liquid silicone rubber having appropriate hardness, elasticity and breaking strength mixed with abrasive grains is used as a cleaning sheet.

[0005] Below are two typical examples of cleaning sheets that have been used in the past, as shown in Figure 8. This will be explained with reference to FIG. 9 and FIG.

[0006] Fig. 8 is a diagram explaining the structure and action of a generally widely used cleaning sheet for probes. In the figure, cleaning sheet 51 is configured by applying abrasive gel 54 mixed with minute abrasive grains to sponge sheet 52 made of melamine resin or urethane rubber or the like and having multiple air bubbles or air spaces 53, and then applying the abrasive gel to substrate sheet 55.

[0007] 13(a) and 13(b) respectively show the state before and after the probe 56 is inserted into the cleaning sheet 51. 13(b) shows the state in which the probe 56 is inserted into the cleaning sheet 51 in the direction of the arrow 59, and the tip 57 of the probe has wrapped a part 58 of the abrasive gel 54 around the sponge sheet 52.

[0008] At this time, a portion 58 of the abrasive gel cleans the surface of the probe tip 57 while being sandwiched between the probe tip 57 and the sponge sheet 52 .

[0009] The probe 56 is moved alternately in the directions of arrows 59 and 60 in FIGS. 1(a) and 1(b) while changing the insertion position, whereby the tip 57 of the probe is cleaned.

[0010] However, cleaning the probe with the above-mentioned cleaning sheet 51 has the following problems. The first problem is that the thickness of the abrasive gel 54 is small, so that when the probe tip 57 passes through the abrasive gel 54 and reaches the sponge sheet, it is not cleaned, and the cleaning effect is small. As a result, debris from the pad (not shown) at the probe tip is likely to remain, and contact resistance increases.

[0011] The second problem will be described with reference to Fig. 9. The lower end 61 of the probe tip 57 is unevenly worn, increasing in size, and the lower end is no longer sharp, as shown in Fig. 62. When the shape of the lower end 61 is no longer sharp, as shown in 62, the surface pressure at the contact surface with the test pad (not shown) decreases, making it difficult to break the oxide film on the surface of the electrode pad (not shown) of the test object and the lower end 62, and increasing the contact resistance.

[0012] The first and second defects are both defects that arise due to the small thickness of the abrasive gel 54. However, increasing the thickness of the abrasive gel 54 causes the abrasive gel 54, which is a viscous fluid, to be washed away and causes contamination of the surrounding area, so it is practically difficult to increase the thickness.

[0013] Next, another problem with the conventional example will be described with reference to Fig. 10. In Fig. 8, cleaning sheet 71 has a structure in which a substrate sheet 74 is bonded to elastic sheet 72 made of silicone rubber or liquid silicone mixed with abrasive grains 73.

[0014] 10, when the tip 76 of the probe 75 is pierced into the elastic sheet 72, pad debris (not shown) adhering to the tip 76 is removed by contact with the abrasive grains 73. Therefore, when the probe 75 is repeatedly moved in the directions of the arrows 77 and 78, the debris adhering to the electrode pad (not shown) on the tip 76 is removed.

[0015] However, the elastic sheet 72 is made of silicone rubber or liquid silicone, which has high viscosity and adhesiveness. Therefore, when the probe 75 is moved at a high speed, a part of the elastic sheet 72 adheres to the probe 75, which reduces cleaning efficiency. [Prior art documents] [Patent documents]

[0016] [Patent Document 1] Japanese Patent Application Publication No. 11-345846 [Patent Document 2] JP 2008-039706 A Summary of the Invention [Problem to be solved by the invention]

[0017] To provide a cleaning sheet mainly intended for cleaning pad debris adhering to the tip of a probe pin used in semiconductor electrical testing, capable of performing cleaning with a function of reducing contact resistance between a probe and an electrode pad in a short time and with high efficiency. [Means for solving the problem]

[0018] According to claim 1 of the present invention, there is provided a cleaning sheet for cleaning the tip of a probe for electrical testing of semiconductors, characterized in that the air layer and air in the bubbles inside a sponge sheet made of materials such as melamine resin or urethane rubber are replaced with gel or abrasive gel.

[0019] According to claim 2 of the present invention, in the cleaning sheet of claim 1, when the air layer and air in the bubbles inside the sponge sheet made of materials such as melamine resin or urethane rubber are replaced with gel or abrasive gel, the sponge sheet is impregnated with a low-viscosity liquid such as low-viscosity liquid silicone or low-viscosity liquid epoxy resin, or a low-viscosity abrasive liquid obtained by mixing abrasive grains with the low-viscosity liquid, and the low-viscosity liquid or low-viscosity abrasive liquid is heated and hardened to form a low-viscosity gel or a low-viscosity abrasive gel. Effect of the Invention

[0020] The cleaning sheet to which the present invention is applied has the following effects: First, since the probe is inserted deeply into the thick sponge sheet filled with abrasive gel or gel, the frequency of contact between the tip of the probe and the abrasive gel or the gel and sponge fibers increases, and debris adhering to the electrode pad is sufficiently removed, making it possible to maintain low contact resistance between the electrode pad and the probe.

[0021] The second effect is that the contact area between the lower end of the probe and the electrode pad is reduced, the Hertzian stress on the contact surface is increased, and the oxide film on the contact surface is broken, making it easier to obtain good contact conduction.

[0022] Since the probe is inserted deeply into a thick sponge sheet filled with abrasive gel or gel, not only the lower end of the probe tip but also the entire length of the outer circumferential surface of the probe tip comes into contact with the abrasive gel or the sponge fibers that hold the gel, which has the effect of adjusting the shape of the probe and maintaining the sharpness of the tip. If the probe tip can maintain its sharp shape, the contact area between the lower end of the probe and the electrode pad will be smaller and the Hertzian stress on the contact surface will be greater.

[0023] Furthermore, even if the bubbles or air spaces in the sponge sheet are filled with a gel that does not contain abrasive grains rather than an abrasive gel, if the sponge is a melamine sponge, the fibers of the sponge have the effect of abrading the probe surface, so even if a gel is used instead of an abrasive gel, it has a cleaning effect on the probe tip.

[0024] The third effect is that the probe is inserted deeply, so that the frequency of contact between the tip of the probe and the abrasive gel or gel increases, and the debris adhering to the electrode pad is sufficiently removed, so that the contact resistance between the electrode pad and the probe can be maintained low even if the number of times the probe is inserted into the sponge sheet is reduced. This has the effect of shortening the time required for cleaning and increasing the efficiency of cleaning. In particular, shortening the time required for cleaning in an expensive prober increases the operating rate of the prober and reduces cleaning costs. [Brief description of the drawings]

[0025] [Figure 1] FIG. 2 is an explanatory diagram of a cleaning sheet as an example of an application of the present invention according to claim 1, in which the air layer and air in the bubbles inside the sponge sheet are replaced with an abrasive gel. [Diagram 2] FIG. 1 is an explanatory diagram of a method for producing a sponge sheet in which the air layers and air bubbles inside the sponge sheet are replaced with an abrasive gel. [Diagram 3]FIG. 1 is a comparative diagram of a sponge sheet before production begins and a sheet in which the present invention has been applied to remove the air layers and bubbles inside the sponge sheet by scattering or fixing an abrasive gel or gel therein. [Figure 4] 6 is an explanatory diagram of the operation and effect when cleaning a probe using a sponge sheet to which the present invention is applied. FIG. [Diagram 5] FIG. 13 is an explanatory diagram for comparing the difference in effect in terms of change in contact resistance when a conventional probe cleaning sheet and a sponge sheet according to the present invention are applied. [Figure 6] FIG. 11 is an explanatory diagram of a second embodiment as an application example of the present invention according to claim 2. [Figure 7] FIG. 11 is an explanatory diagram of a second embodiment as an application example of the present invention according to claim 2. [Figure 8] FIG. 1 is an explanatory diagram of the structure and function of a conventional cleaning sheet for a probe. [Figure 9] FIG. 1 is an explanatory diagram of defects in a conventional cleaning sheet for a probe. [Figure 10] FIG. 1 is an explanatory diagram of a conventional cleaning sheet in which abrasive grains are mixed into an elastic body made of silicone rubber or liquid silicone. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0026] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. A first embodiment of the present invention will be described with reference to FIGS. 1, 2, 3, 4, 5, and 6. FIG.

[0027] <First Example> FIG. 1 shows, as a first embodiment of an application example of the present invention, a sponge sheet in which the air layers and air in the bubbles inside the sponge sheet are replaced with an abrasive gel mixed with fine abrasive grains.

[0028] In Fig. 1, 1 is a sponge sheet with built-in abrasive gel bubbles, in which the air layer and air in the bubbles inside the sponge sheet are replaced with abrasive gel, and 2 is a plurality of abrasive gel bubbles in which the air bubbles or air layer are replaced with abrasive gel. The plurality of abrasive gel bubbles 2 are composed of gel 3 and a plurality of abrasive grains 4, and are connected to other abrasive gel bubbles.

[0029] The sponge sheet 1 containing the abrasive gel foam is surrounded on five sides other than the top by a case 5 to prevent the abrasive gel from leaking out. The top surface of the sponge sheet 1 containing the abrasive gel foam is covered with a thin plastic film 6, and the periphery of the plastic film 6 is bonded to the case 5.

[0030] Next, a method for producing the sponge sheet 1 shown in FIG. 1 will be described with reference to FIG.

[0031] 2, an abrasive gel 12a containing a plurality of fine abrasive grains 11a is filled to the middle of the height of a container 13a. A sponge sheet 15a made of melamine resin containing a plurality of air layers or bubbles 14a is sunk in the bottom of the container 13a, and is prevented from floating up by a rotating roller 16a.

[0032] The rotating roller 16a is rotatably supported near the lower end of the handle 17a, and when the handle 17a is pressed against the bottom of the container 13a and reciprocated in the direction of the arrow 18a, the rotating roller 16a squeezes out the air layer or air inside the air bubbles 14a inside the sponge sheet 15a.

[0033] After the air inside the air layer or bubbles 14a inside the sponge sheet 15a has been sufficiently squeezed out by the squeezing action of the rotating roller 16a, the sponge sheet 15a is left at the bottom of the container 13a for a while, and the abrasive gel 12a in the container 13a is sucked into the sponge sheet 15a by the elastic recovery action of the sponge sheet 15a. Thus, the air layer or bubbles 14a in the sponge sheet 15a can be replaced with the abrasive gel 12a.

[0034] The sponge sheet 15a, whose internal air layer or bubbles have been replaced with the abrasive gel 12a, is transferred to the case 5 shown in FIG. 1 and the upper surface is covered with the plastic film 6, thereby forming the sponge sheet 1 with the abrasive gel bubbles built in, as shown in FIG. 1.

[0035] Thus, a sponge sheet 21 containing a plurality of air layers or bubbles 20 as shown in FIG. 3(1) can be converted into abrasive gel bubbles 23a in which the insides of the bubbles 20 have been replaced with an abrasive gel as shown in FIG. 3(2).

[0036] Next, the action and effect of the sponge sheet for cleaning the tip of the probe to which the present invention is applied will be described with reference to FIG. 4 and FIG.

[0037] Fig. 4 shows a structure in which the sponge sheet 1 containing the abrasive gel foam shown in Fig. 1 is stored in a case 5 and covered with a thin plastic film 6 to prevent water evaporation. The action and effect of the sponge sheet 1 when applied to cleaning a probe 25 will be explained with reference to Fig. 4.

[0038] The probe 25 is composed of a straight portion 26, a conical portion 27, and a lower end portion 28. The probe 25 is inserted into and removed from the sponge sheet 1 alternately multiple times in the directions of arrows 29 and 30 shown in Figures 4(1) and 4(2). At this time, the conical portion 27 is inserted into the sponge sheet 1 over its entire length.

[0039] Generally, debris that adheres to the probe when it comes into contact with the electrode pad concentrates and adheres near the lower end 28 of the probe. Conventional cleaning sheets have a problem in that the abrasive layer is thin, so the debris cannot be sufficiently removed.

[0040] However, as shown in Figures 4(1) and (2), by repeatedly inserting the conical portion 27 of the probe over its entire length into the sponge sheet 1 containing the abrasive gel foam, the following effects can be obtained.

[0041] The first effect is that since the number of times the probe tip 28 comes into contact with the fine abrasive grains inside the sponge sheet increases, the electrode pad debris that accumulates around the probe tip 28 can be reliably removed, thereby reducing the contact resistance caused by the electrode pad debris.

[0042] The second effect is that since cleaning is repeatedly performed by inserting the conical portion 27 over its entire length into the sponge sheet 1 containing the abrasive gel foam, the conical shape is maintained, the shape of the tip is kept sharp, the area of ​​contact with the pad electrode is reduced, the oxide film on the pad surface is broken, and the contact resistance can be kept low.

[0043] As a third effect, the contact resistance between the probe and the electrode pad can be kept small due to the above-mentioned first and second effects, so that the life of the probe is extended.

[0044] The above first, second, and third effects are shown diagrammatically in Figure 5. Figure 5(a) is a diagram showing a schematic representation of the transition of the contact resistance of the probe when a conventional cleaning sheet is used.

[0045] In the chart of Fig. 5(a), the horizontal axis represents the number of times the probe contacts the electrode pad, and the vertical axis represents the contact resistance value. The sawtooth line 31a indicates that the contact resistance value varies greatly before and after cleaning. The dashed-dotted line 32a connects the minimum values ​​of the contact resistance value immediately after cleaning, where the contact resistance value has dropped sharply. The dashed line 33a connects the maximum values ​​of the contact resistance value before cleaning. When the contact resistance value reaches the allowable upper limit value 34a of the contact resistance value, it is considered that the probe has reached the end of its life.

[0046] Arrow 35a indicates the contact resistance value caused by the oxide film on the probe surface when the probe reaches the end of its life, and arrow 36a indicates the contact resistance value caused by the electrode pad debris accumulated on the tip of the probe when the probe reaches the end of its life.

[0047] In the probe cleaned with the conventional cleaning sheet shown in Figure 5(a), the contact resistance caused by both the oxide film on the probe surface and the adhesion debris from the electrode pad accumulated at the tip of the probe was large. The reason for this is as follows.

[0048] When using a conventional cleaning sheet, the abrasive layer on the cleaning sheet is thin, and the number of times and duration that the probe tip comes into contact with the abrasive grains that remove the adhering debris is small, so the adhering debris is not sufficiently removed, resulting in a large contact resistance caused by the adhering debris on the electrode pad that accumulates on the probe tip.

[0049] In addition, when using a conventional cleaning sheet, the abrasive layer on the cleaning sheet is thin, so that the tip of the probe is worn in a concentrated manner, losing its sharpness and becoming blunt. As a result, the contact Hertzian stress for breaking down the oxide film related to the contact resistance with the electrode pad and obtaining good electrical conduction is reduced, and the oxide film cannot be made toothed. As a result, the contact resistance with the electrode pad increases, and the resistance value indicated by the arrow 35a increases.

[0050] On the other hand, when the cleaning sponge sheet of the present invention is applied to cleaning the tip of a probe, both the contact resistance caused by the electrode pad debris accumulated on the tip of the probe and the contact resistance caused by the oxide film on the surface of the probe are reduced. The reason for this will be explained with reference to Figures 4 and 5(b).

[0051] As the cleaning sponge sheet, a sponge sheet 24 shown in FIG. 3(2) is used, in which an abrasive gel 23 is filled into the air space and the inside of the air bubbles 20 inside the sponge sheet.

[0052] 4 is inserted into the sponge sheet 1 in the direction indicated by the arrow 29 so that the entire length of the conical portion 27 is inserted, and then repeatedly pulled out in the direction indicated by the arrow 30 to perform a cleaning operation, and compared to the use of a conventional cleaning sheet, both the contact resistance caused by the electrode pad debris accumulated on the tip of the probe and the contact resistance caused by the oxide film on the probe surface and the electrode pad surface (not shown) become smaller. The reason for this is as follows.

[0053] In Fig. 4, the probe 25 is inserted deeply into the sponge sheet 1 of Fig. 1, so that the debris of the electrode pad (not shown) concentrated near the lower end 25 of the probe has a long contact distance and a high contact frequency with the abrasive grains 4 scattered in the abrasive gel foam 2 of the sponge sheet 1 of Fig. 1. As a result, the debris of the electrode pad is sufficiently removed, and the contact resistance value caused by the debris of the electrode pad is reduced.

[0054] In addition, since the probe 25 is deeply inserted into the sponge sheet 1, the conical portion 27 of the probe is in contact with the abrasive grains 4 not only at the tip and the lower end 28 but also over the entire length of the conical portion, and is subjected to a polishing action for reshaping over the entire length of the conical portion 27. As a result, the sharp shape of the conical portion 27 is maintained, and the stress on the contact surface between the electrode pad (not shown) and the probe lower end 28 increases, and the contact resistance caused by the oxide film on the surface of the probe lower end 28 and the surface of the electrode pad (not shown) decreases. The effect of decreasing the contact resistance of the probe obtained as a result will be described with reference to FIG. 5(b).

[0055] In the chart of Fig. 5(b), the horizontal axis represents the number of times the probe contacted the electrode pad, and the vertical axis represents the contact resistance value. The sawtooth line 31b indicates that the contact resistance value fluctuated greatly before and after cleaning. The dashed and double-dashed line 32b connects the minimum values ​​of the contact resistance value immediately after cleaning, where the contact resistance value dropped sharply. The dashed line 33b connects the maximum values ​​of the contact resistance value before cleaning. The contact resistance value 34b indicates the contact resistance value immediately before the sixth cleaning.

[0056] When the contact resistance value 34b immediately before the sixth cleaning is performed is compared with the result 34a in FIG. 5(a) obtained when the conventional cleaning sheet was used, a large difference is evident. The reason for this is that when the sponge sheet 7 to which the present invention is applied is applied, the contact resistance caused by the electrode pad debris accumulated on the tip of the probe and the contact resistance caused by the oxide film on the probe surface and the electrode pad surface (not shown) are both reduced.

[0057] <Second Example> In the first embodiment, the gel 3 shown in FIG. 1 is made of a highly fluid material, so in order to prevent the gel from leaking out, the top surface of the cleaning sheet 1 was covered with the plastic film 5, and the other five surfaces had to be covered with the case 5a.

[0058] This not only makes it inconvenient to set the cleaning sheet, but also impairs the flatness of the upper surface of the cleaning sheet, preventing, for example, accurate cleaning of the tip of a fine MEMS probe using the cleaning sheet.

[0059] The second embodiment described in Figures 6 and 7 corresponds to claim 2 of the present invention. In Figure 6(a), 7a denotes a sponge sheet containing a low-viscosity abrasive liquid, 8a denotes the low-viscosity liquid, 9a denotes abrasive grains mixed in the low-viscosity liquid 8a, and 10a denotes a bubble or layer of the low-viscosity abrasive liquid.

[0060] The low-viscosity liquid 8a is, for example, a low-viscosity liquid silicone, and when the abrasive grains 9a are impregnated into the sponge sheet 7a, the low-viscosity liquid is likely to form bubbles or layers 10a of the low-viscosity abrasive liquid. However, because of its low viscosity, the low-viscosity liquid is likely to seep out and leak from the sponge sheet 7a, so it must be stored in the case 5a. In this state, it is difficult to use it as a cleaning sheet.

[0061] Fig. 6(b) is a diagram illustrating the process of changing the sponge sheet 7a containing the low-viscosity abrasive liquid described in Fig. 6(a) into a sponge sheet 7b containing a practical low-viscosity abrasive gel. The low-viscosity liquid silicone 8a of the sponge sheet 7a containing the low-viscosity abrasive liquid is heated to become a gel-like low-viscosity silicone rubber, i.e., a low-viscosity abrasive gel 8b. 9b indicates the abrasive grains in the low-viscosity abrasive gel, and 10b indicates the bubbles or layers of the low-viscosity abrasive gel in which the gel is the low-viscosity silicone rubber. The sponge sheet 7b containing the low-viscosity abrasive gel described above is more convenient for transportation and easier to handle as a cleaning sheet at the customer's site. This will be explained with reference to FIG.

[0062] In FIG. 7, 5b is a cover for transportation. The sponge sheet 7a is a sponge sheet 7b containing a low-viscosity abrasive gel made of low-viscosity silicone rubber, so the gel will not leak out and a simple transportation cover is sufficient for transportation. In addition, since low-viscosity silicone rubber is sticky, when the sponge sheet 7b is to be used as a cleaning sheet at a customer's site, the sponge sheet 7b is removed from the case 5a. When the sponge sheet 7b is placed on the table top shown as 7c in FIG. 7, it will not move just by placing it on the table, so there is no need to fix it with adhesive tape or the like.

[0063] In the second embodiment of the present invention shown in FIGS. 6 and 7, the following effects can be expected. (1) First, since the sponge sheet contains a low-viscosity abrasive gel made of low-viscosity silicone rubber, the flatness of the upper surface of the sheet can be improved. This allows it to be used not only as a cleaning sheet for the tip of a probe, but also for forming a sharp tip of a fine MEMS probe. This is because the gel of the cleaning sheet according to the present invention is an abrasive gel containing abrasive grains, and the tip of the MEMS probe, which is made of a relatively soft material, can be formed into a sharp shape simply by repeatedly plunging the tip of the fine MEMS probe into the sponge sheet containing a low-viscosity abrasive gel made of low-viscosity silicone rubber. (2) Secondly, it is also possible to regenerate the shape of the worn tip of the MEMS probe. [Explanation of symbols]

[0064] 1 Cleaning sheet with built-in abrasive gel 2. Abrasive gel foam 3 Gel 4. Abrasive grain 5 Cases 5a Case 5b Transport cover 6 Plastic Film 7a Foam sponge sheet with low viscosity abrasive liquid 8a Low viscosity liquid 9a Abrasive particles in low viscosity abrasive liquid 10a Foam or layer of low viscosity abrasive liquid 7b Sponge sheet containing low viscosity abrasive gel 7c Table 8b Low Viscosity Gel 9b Abrasive grains in a low viscosity abrasive gel 10b Foam or layer of low viscosity abrasive gel 11 Abrasive grain 12 Abrasive gel 13 Container 14 Bubbles 15 Sponge Sheet 16 Rotating Rollers 17 Handle 18 Arrow 19 Arrow 20 Multiple air pockets or bubbles 21 Sponge Sheet 22 Abrasive grain 23 Abrasive gel foam 24 Sponge Sheet 25 Probe 26 Straight section 27 Cone-shaped section 28 Lower end 29 Arrow 30 Arrow 31a, 31b Sawtooth lines 32a, 32b: Line connecting the minimum values ​​of the contact resistance immediately after cleaning 33a, 33b A line connecting the maximum values ​​of the contact resistance reached before cleaning 34a Upper limit of contact resistance 34b Contact resistance just before the sixth cleaning 35a, 35b Contact resistance caused by the oxide film on the probe surface 36a Contact resistance caused by accumulated electrode pad debris 36b Contact resistance caused by accumulated electrode pad debris Below, the symbols and names used to explain the conventional example are shown in Figures 8, 9, and 10. 53 Straight pin 54 Cone-shaped tip 54w Worn tip cone 54r Regenerated cone-shaped tip 55 Table 56 Container 57 Chemical Etching Solution 58 Arrow 59 Arrow 60 Abrasive Cleaning Gel 61 Abrasive grain 62 Gel-like fluid 63 Support membrane 64 Adhesive layer 65 Abrasive Cleaning Gel Film 66 Arrow

Claims

1. This cleaning sheet is for cleaning the tip of a probe used in electrical testing of semiconductors, and is characterized in that the air layer and air in the bubbles inside the sponge sheet made of a material such as melamine resin or urethane rubber are replaced with gel or abrasive gel.

2. 2. The cleaning sheet according to claim 1, characterized in that when the air layer and air in the bubbles inside the sponge sheet made of a material such as melamine resin or urethane rubber are replaced with a gel or an abrasive gel, the sponge sheet is impregnated with a low-viscosity liquid such as low-viscosity liquid silicone or low-viscosity liquid epoxy resin, or a low-viscosity abrasive liquid in which abrasive grains are mixed into the low-viscosity liquid, and the low-viscosity liquid or low-viscosity abrasive liquid is heated and hardened to form the low-viscosity gel or low-viscosity abrasive gel.

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