High-resolution reflection tomographic measurement system and method

Abstract

To provide a high-resolution reflection tomographic measurement system and method.SOLUTION: The high-resolution reflection tomographic measurement system of the present disclosure includes an objective lens, a tube lens, a camera, an illumination element configured to introduce temporally coherent and spatially incoherent light, and a semi-reflective surface element configured to split the light into a sample and a reference beam between the tube lens and the camera, such that a sample beam from the sample and the reference beam cause interference for tomographic measurement.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present disclosure relates to high resolution reflectance tomography measurement systems and methods. [Background technology]

[0002] Optical inspection is an essential technology in the manufacturing and quality assurance processes of semiconductors and display devices. Such techniques provide non-destructive testing to assess the integrity and quality of products, thus helping to ensure their performance and reliability. Pivotal techniques in this regard include confocal microscopy and white light interferometry (WLI). These techniques provide high-resolution imaging and surface profiling, allowing precise inspection of device structures and materials. Confocal microscopy offers the advantage of depth sectioning and improved resolution, which is essential for detailed defect detection. WLI provides accurate 3D surface tomography to measure thin film thickness, which is important in the inspection of semiconductors and display devices.

[0003] Depth-resolved reflectance measurements are based mainly on three techniques: white light interferometry, reflectance confocal microscopy (or confocal reflectance microscopy), and optical coherence tomography. Reflectance confocal microscopy and optical coherence tomography mainly rely on focus scanning, which is slow and difficult to implement. Such limitations triggered the development of white light interferometers, which allow the acquisition of the entire field of view without scanning. WLI is based on two interferometer configurations, as shown in Figures 1a and 1b. The first configuration uses a special objective lens called the Mirau objective. However, Mirau objective lenses have limited resolution and poor aberration correction. Furthermore, Mirau objective lenses are only commercially available at visible wavelengths. An alternative configuration is the Linnik interferometer configuration, when using a common objective lens. This setup uses two objective lenses around a beam splitter to generate the sample and reference beams. This configuration offers flexibility in optics selection but has limited compatibility with microscopes as it requires precise alignment.

[0004] Confocal microscopy works by using a point illumination and a pinhole in an optical conjugate plene in front of the detector to remove out-of-focus signals. This results in high-resolution images, allowing 3D surface profiling. However, it is slower than other imaging techniques due to the point-by-point scanning process. WLI uses the interference of white light to measure surface height with nanometer precision. However, its precision can be sensitive to changes in surface reflectance, and optically non-smooth or highly reflective surfaces may not provide adequate results. Recently, quantitative phase imaging techniques have been demonstrated in reflectance geometry, but the use of spatially and temporally coherent light cannot provide depth-selective imaging. Summary of the Invention [Problem to be solved by the invention]

[0005] TomographyThere is a growing demand for high-resolution non-destructive measurements. Inspection systems must be able to provide not only surface profiles but also three-dimensional internal images of semiconductor and display devices. This allows multi-layer structures to be inspected non-destructively. The ability to analyze and quantify properties at the nanoscale level, coupled with increased automation and inspection speed, will be key points in solving the challenges of shrinking devices and their ever-increasingly complex architectures. In other words, future optical inspection techniques must quickly and efficiently provide detailed insight into device structures and materials to keep pace with the rapidly developing semiconductor and display industries.

[0006] Therefore, the present disclosure proposes a system that exploits temporally coherent but spatially incoherent light to perform quantitative phase image measurements of reflected signals. The quantitative phase image information provides information about the surface profile of the reflecting surface. This is achieved by generating a reference beam at a conjugate image plane far away from the sample. By utilizing off-axis detection, the signal can be measured at once. The configuration of the present disclosure eliminates the need for a specific objective lens and can be designed additionally for all microscope camera ports. The use of a high numerical aperture objective lens with temporally coherent but spatially incoherent light would allow the acquisition of optically split quantitative phase images at diverse axial positions, since there is an optical splitting function that allows the synthesis of tomographic reconstructions of three-dimensional objects by axially scanning the sample or the objective lens or the virtual focal lens. [Means for solving the problem]

[0007] The present disclosure provides high resolution reflectance tomography metrology systems and methods.

[0008] The disclosed high-resolution reflectance tomography measurement system may include an objective lens, a tube lens, a camera, an illumination element that introduces temporally coherent, spatially incoherent light, and a semi-reflective surface element that splits the light between the tube lens and the camera into sample and reference beams such that the sample beam from the sample and the reference beam generate interference for tomography measurement.

[0009] The high-resolution reflection tomography measurement system of the present disclosure includes a microscope apparatus and a camera including an objective lens and a tube lens and having a camera port formed therein, and a camera apparatus detachable to the camera port, the camera apparatus may further include an illumination element that introduces temporally coherent and spatially incoherent light, and a semi-reflective surface element that splits the light into a sample and a reference beam between the tube lens and the camera such that the sample beam from the sample and the reference beam generate interference for tomography measurement.

[0010] A method of operating a high-resolution reflection tomography measurement system having an objective lens, a tube lens, and a camera of the present disclosure may include introducing temporally coherent and spatially incoherent light, a semi-reflective surface element between the tube lens and the camera splitting the light into a sample and a reference beam, and the camera acquiring a three-dimensional image for tomography measurement based on interference generated by the sample beam and the reference beam from the sample. Effect of the Invention

[0011] The present disclosure provides a high-resolution reflection tomography measurement system and its operation method based on an optical setup that enables reflection quantitative phase imaging measurements of a sample. The present optical setup uses light that is temporally coherent but spatially incoherent, allowing interference to occur even if the reference and sample beams do not have the same path length. This allows the present optical setup to obtain three-dimensional images for tomography measurements based on the interference generated by the sample and reference beams. The present optical setup therefore has the following advantages: First, the present optical setup uses one general-purpose objective lens, allowing the use of high numerical aperture objectives and immersion objectives. Lenses with spherical aberration correction can also be used to image samples behind a cover glass. Second, the setup is much easier to set up than Linnik and Mirau interferometer setups, since the reflection is generated at the plane of the magnified image. Finally, the setup can be manufactured as a camera device that can be attached to the camera port of a commercially available microscope, since the optical path lengths of the sample and reference beams do not need to be matched. [Brief description of the drawings]

[0012] [Figure 1a] FIG. 1 shows the configuration of a conventional Mirau interferometer. [Figure 1b] FIG. 1 is a diagram showing the configuration of a conventional Linnik interferometer. [Diagram 2] FIG. 1 is a diagram showing a high-resolution reflection tomography measurement system in a first embodiment. [Diagram 3] FIG. 13 is a diagram showing a high-resolution reflection tomography measurement system in a second embodiment. [Figure 4] 13 is a diagram showing a high-resolution reflection tomography measurement system in a third embodiment. [Diagram 5] FIG. 13 is a diagram showing a high-resolution reflection tomography measurement system in a fourth embodiment. [Figure 6] FIG. 1 illustrates a method of operation of a high-resolution reflection tomography measurement system according to various embodiments. [Figure 7] FIG. 1 illustrates an example tomographic image of a micropatterned microelectrical device acquired by a high-resolution reflectance tomographic metrology system according to various embodiments. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] Various embodiments of the present disclosure will now be described with reference to the accompanying drawings.

[0014] In this disclosure, the optical setup proposed for reflectance quantitative phase imaging measurements of a sample has a reference beam moving away from the sample in the plane of the conjugate image. Unlike conventional white light interferometry or full-field optical coherence topography, where a temporally incoherent light is used and the path lengths of the reference and sample beams must match, here a spatially incoherent but temporally coherent light allows interference to occur even if the reference and sample beams do not have the same path length. In this disclosure, this advantage is taken by moving a semi-reflective surface that generates the reference beam in the plane of the conjugate image. Such a configuration allows the use of demagnification of the system to slightly tilt the reference beam allowing off-axis signal measurements. The use of spatially incoherent light has previously been used for interferometric reflectance measurements but was limited to the Linnik interferometer configuration. Here, off-axis measurements have also been proposed but require complex optical setups or suffer from numerical aperture losses.

[0015] FIG. 2 is a diagram showing a high-resolution reflection tomography measurement system 100 in the first embodiment.

[0016] Referring to FIG. 2, the high-resolution reflectance tomography measurement system 100 may include an objective lens 110 , a tube lens 120 , a camera 130 , an illumination element 140 , and a semi-reflective surface element 150 .

[0017] The objective lens 110, the tube lens 120, and the camera 130 are components for a typical microscope optical setup. The objective lens 110 may be located near the sample and may magnify the sample. The tube lens 120 may be located between the objective lens 110 and the camera 130 and may focus an image related to the sample onto the camera 130. The camera 130 may acquire the focused image.

[0018] The illumination element 140 may introduce light that is temporally coherent and spatially incoherent into the high-resolution reflectance tomography measurement system 100. In one embodiment, as shown, the illumination element 140 may include a light source 141 and a small mirror 143. The light source 141 may generate light that is temporally coherent and spatially incoherent. The mirror 143 may reflect the light generated by the light source 141 toward the semi-reflective surface element 150. For example, the mirror 143 may be positioned opposite the semi-reflective surface element 150 with the tube lens 120 in between. This allows the tube lens 120 to project the light from the illumination element 140 onto the semi-reflective surface element 150. In another embodiment, although not shown, the illumination element 140 may include a beam splitter (not shown) instead of the mirror 143. The beam splitter may reflect a portion of the light generated by the light source 141 toward the semi-reflective surface element 150.

[0019] The semi-reflective surface element 150 may be disposed between the tube lens 120 and the camera 130. In this embodiment, the semi-reflective surface element 150 may be coupled to the camera sensor of the camera 130 and may be in direct contact with the camera sensor. The semi-reflective surface element 150 may split the light from the illumination element 140 into a sample and a reference beam, so that the sample beam and the reference beam from the sample generate interference for tomography measurement. Specifically, the semi-reflective surface element 150 may provide a portion of the light from the illumination element 140 to the sample via the objective lens 110 to generate a sample beam. Here, the semi-reflective surface element 150 may reflect the light toward the tube lens 120, so that the light is provided to the sample via the tube lens 120 and the objective lens 110 to generate a sample beam. This allows the tube lens 120 to project the sample beam onto the semi-reflective surface element 150. Furthermore, the semi-reflective surface element 150 may generate a reference beam with the remaining light from the light source 140 of the illumination element. As a result, the sample beam and the reference beam have different path lengths, but can generate interference. This allows the camera 130 to obtain a three-dimensional image for tomography measurement based on the interference generated by the sample beam and the reference beam. For example, the semi-reflective surface element 150 may be selected from a variety of optical elements, such as a half mirror, a plate beam splitter, a wire-grid polarizer, a cube beam splitter with a mirror, or any other semi-reflective surface element.

[0020] FIG. 3 is a diagram showing a high-resolution reflection tomography measurement system 200 in the second embodiment.

[0021] 3, the high-resolution reflection tomography measurement system 200 may include an objective lens 210, a tube lens 220, a camera 230, an illumination element 240, a semi-reflective surface element 250, and a relay lens 260. In this embodiment, the objective lens 210, the tube lens 220, the camera 230, and the illumination element 240 are substantially similar to the objective lens 110, the tube lens 120, the camera 130, and the illumination element 140 of the first embodiment described above, respectively, and therefore detailed descriptions thereof will be omitted.

[0022] The semi-reflective surface element 250 may be disposed between the tube lens 220 and the camera 230. In this embodiment, the semi-reflective surface element 250 may be disposed at a plane of a conjugate image between the tube lens 220 and the camera 230. The semi-reflective surface element 250 may split the light from the illumination element 240 into a sample beam and a reference beam, so that the sample beam and the reference beam from the sample generate interference for tomography measurement. Specifically, the semi-reflective surface element 250 may provide a portion of the light from the illumination element 240 to the sample via the objective lens 210 to generate a sample beam. Here, the semi-reflective surface element 250 may reflect the light toward the tube lens 220, so that the light is provided to the sample via the tube lens 220 and the objective lens 210 to generate a sample beam. This allows the tube lens 220 to project the sample beam onto the semi-reflective surface element 250. Additionally, the semi-reflective surface element 250 may generate a reference beam with the remainder of the light from the illumination element 240. As a result, the sample beam and the reference beam have different path lengths, but can cause interference. For example, the semi-reflective surface element 250 may be selected from a variety of optical elements, such as a half mirror, a plate beam splitter, a wire-grid polarizer, a cube beam splitter with a mirror, or any other semi-reflective surface element.

[0023] The relay lens 260 may be disposed between the semi-reflective surface element 250 and the camera 230. The relay lens 260 may project the interference generated by the sample beam and the reference beam onto a camera sensor of the camera 230. This allows the camera 230 to obtain a three-dimensional image for tomography measurement based on the interference generated by the sample beam and the reference beam.

[0024] FIG. 4 is a diagram showing a high-resolution reflection tomography measurement system 300 in the third embodiment.

[0025] 4, the high-resolution reflectance tomography measurement system 300 may include an objective lens 310, a tube lens 320, a camera 330, an illumination element 340, and a semi-reflective surface element 350. In this embodiment, the objective lens 310, the tube lens 320, the camera 330, and the semi-reflective surface element 350 may be substantially similar to the objective lens 110, the tube lens 120, the camera 130, and the semi-reflective surface element 150 of the first embodiment described above, and in such a case, the semi-reflective surface element 350 may be coupled to and in direct contact with a camera sensor of the camera 330. However, unlike what is shown in the figure, in this embodiment, the objective lens 310, the tube lens 320, the camera 330, and the semi-reflective surface element 350 may be substantially similar to the objective lens 210, the tube lens 220, the camera 230, and the semi-reflective surface element 250, respectively, of the second embodiment described above, and in such a case, the semi-reflective surface element 350 may be disposed at a surface of a conjugate image between the tube lens 320 and the camera 330, and a relay lens (not shown) may additionally be disposed between the semi-reflective surface element 350 and the camera 330.

[0026] The illumination element 340 may introduce a temporally coherent and spatially incoherent light into the high-resolution reflection tomography measurement system 300. In one embodiment, as shown in the figure, the illumination element 340 may include a light source 341, a small mirror 343, and a wavefront shaper 345. Here, in this embodiment, the light source 341 and the mirror 343 are substantially similar to the light source 141 and the mirror 143 of the first embodiment, respectively, and therefore a detailed description thereof will be omitted. The wavefront shaper 345 may be disposed between the light source 341 and the mirror 343. The wavefront shaper 345 may be used to minimize aberrations used in the high-resolution reflection tomography measurement system 300, optimize the optical transfer function of the used high-resolution reflection tomography measurement system, or modulate the illumination pattern. In another embodiment, although not shown in the figure, the illumination element 340 may include a beam splitter (not shown) instead of the mirror 343. The beam splitter may reflect a portion of the light generated by the light source 341 towards the semi-reflective surface element 350 .

[0027] FIG. 5 is a diagram showing a high-resolution reflection tomography measurement system 400 in the fourth embodiment.

[0028] Referring to FIG. 5, the high-resolution reflection tomography measurement system 400 includes a microscope device 401 and a camera device 405, and the camera device 405 is detachable from the microscope device 401. The microscope device 401 may include a microscope body 402 and a first camera port 403. The microscope body 402 may include an objective lens 410 and a tube lens 420. Optionally, the microscope body 402 may further include at least one mirror 425 between the objective lens 410 and the tube lens 420. The first camera port 403 may be formed on one side of the microscope body 402. The camera device 405 may include a camera body 406 and a second camera port 407. The camera body 406 may include a camera 430, an illumination element 440, a semi-reflective surface element 450, and a relay lens 470. The second camera port 407 may be formed on one side of the camera body 406. Here, the second camera port 407 is detachable from the first camera port 403 , and the camera device 405 may be coupled to the microscope device 401 by attaching the second camera port 407 to the first camera port 403 .

[0029] The objective lens 410, the tube lens 420, and the camera 430 are components for a typical microscope optical setup. The objective lens 410 may be located near the sample and may magnify the sample. The tube lens 420 may be located between the objective lens 410 and the camera 430 and may focus an image related to the sample onto the camera 430. The camera 430 may acquire the focused image.

[0030] The illumination element 440 may introduce light that is temporally coherent and spatially incoherent into the high-resolution reflectance tomography measurement system 400. In one embodiment, as shown in the figure, the illumination element 440 may include a light source 441 and a small mirror 443. The light source 441 may generate light that is temporally coherent and spatially incoherent. The mirror 443 may reflect the light generated by the light source 441 toward the semi-reflective surface element 450. For example, the mirror 443 may be disposed opposite the semi-reflective surface element 450 with a relay lens 470 therebetween. This allows the relay lens 470 to project the light from the illumination element 440 onto the semi-reflective surface element 450. In another embodiment, although not shown in the figure, the illumination element 440 may include a beam splitter (not shown) instead of the mirror 443. The beam splitter may reflect a portion of the light generated by the light source 441 toward the semi-reflective surface element 450. In yet another embodiment, not shown, the illumination element 440 may further include a wavefront shaper (not shown), which may be disposed between the light source 441 and the mirror 443 or the beam splitter.

[0031] The semi-reflective surface element 450 may be disposed between the tube lens 420 and the camera 430. In this embodiment, the semi-reflective surface element 450 may be coupled to and directly contact with the camera sensor of the camera 430. The semi-reflective surface element 450 may split the light from the illumination element 440 into a sample beam and a reference beam, so that the sample beam and the reference beam from the sample generate interference for tomography measurement. Specifically, the semi-reflective surface element 450 may provide a portion of the light from the illumination element 440 to the sample via the tube lens 420 and the objective lens 410 to generate the sample beam. Here, the semi-reflective surface element 450 may reflect the light toward the tube lens 420, so that the light is provided to the sample via the objective lens 410 to generate the sample beam. Furthermore, the semi-reflective surface element 450 may generate the reference beam with the remaining light from the illumination element 440. As a result, the sample beam and the reference beam have different path lengths, but can generate interference. This allows the camera 430 to acquire a three-dimensional image for tomography measurement based on the interference generated by the sample beam and the reference beam. For example, the semi-reflective surface element 450 may be selected from a variety of optical elements such as a half mirror, a plate beam splitter, a wire grid polarizer, a cube beam splitter with a mirror, or any other semi-reflective surface element.

[0032] The relay lenses 470 may be disposed between the tube lens 420 and the semi-reflective surface element 450, where one of the relay lenses 470 may be disposed between the illumination element 440 and the semi-reflective surface element 450. The relay lens 470, together with the tube lens 420, may project the interference generated by the sample beam and the reference beam onto a camera sensor of the camera 430, so that the camera 430 can obtain a three-dimensional image for tomography measurement based on the interference generated by the sample beam and the reference beam.

[0033] Alternatively, although not shown in the figure, in this embodiment, the semi-reflective surface element 450 may be disposed at a plane of a conjugate image between the tube lens 420 and the camera 430, and in such a case, an additional relay lens (not shown) may be additionally disposed between the semi-reflective surface element 450 and the camera 430. The additional relay lens may be disposed between the semi-reflective surface element 450 and the camera 430. The additional relay lens may project the interference generated by the sample beam and the reference beam onto the camera sensor of the camera 430.

[0034] FIG. 6 illustrates a method of operation of the high resolution reflectance tomography measurement systems 100, 200, 300, 400 according to various embodiments.

[0035] 6, in step 510, the illumination element 140, 240, 340, 440 may introduce light that is temporally coherent and spatially incoherent. Specifically, the light source 141, 241, 341, 441 may generate light that is temporally coherent and spatially incoherent. Then, the mirror 143, 243, 343, 443 or a beam splitter (not shown) may reflect the light generated by the light source 141, 241, 341, 441 toward the semi-reflective surface element 150, 250, 350, 450. This allows the light from the illumination element 140, 240, 340, 440 to be projected onto the semi-reflective surface element 150, 250, 350, 450.

[0036] Next, in step 520, the semi-reflective surface element 150, 250, 350, 450 between the tube lens 120, 220, 320, 420 and the camera 130, 230, 330, 430 may split the light into a sample and a reference beam. The semi-reflective surface element 150, 250, 350, 450 may split the light from the illumination element 140, 240, 340, 440 into a sample and a reference beam so that the sample beam and the reference beam from the sample generate interference for tomography measurement. Specifically, the semi-reflective surface element 150, 250, 350, 450 may provide a portion of the light from the illumination element 140, 240, 340, 440 to the sample via the objective lens 110, 210, 310, 410 to generate the sample beam. Here, the semi-reflective surface element 150, 250, 350, 450 may reflect light toward the tube lens 120, 220, 320, 420, and the light may be provided to the sample via the tube lens 120, 220, 320, 420 and the objective lens 110, 210, 310, 410 to be generated as a sample beam. This allows the tube lens 120, 220, 320, 420 to project the sample beam onto the semi-reflective surface element 150, 250, 350, 450. Furthermore, the semi-reflective surface element 150, 250, 350, 450 may generate a reference beam with the remaining light from the illumination element 140, 240, 340, 440. As a result, the sample beam and the reference beam have different path lengths, but interference can occur.

[0037] Next, in step 530, the camera 130, 230, 330, 430 may acquire a three-dimensional image for tomographic measurement based on the interference generated by the sample beam and the reference beam from the sample. Some of the advantages of the optical setup obtained from the present disclosure are as follows:

[0038] The first is the numerical aperture. The Mirau interferometer is a structure that requires a long working distance of the objective lens, which can limit the numerical aperture. However, the optical setup of this disclosure uses one general-purpose objective lens, so high numerical aperture objectives and immersion objectives can be used. Lenses with spherical aberration correction can also be used to image samples behind a cover glass.

[0039] Second, it is robust to alignment: because the reflection is generated at the plane of the magnified image, it is much easier to set up than the Linnik or Mirau interferometer configurations. The semi-reflective surface elements 150, 250, 350, 450 can typically be positioned to within 100 μm without loss of performance, whereas in the Linnik or Mirau interferometer configurations the semi-reflectors must be positioned to an accuracy of about 1 μm.

[0040] Thirdly, since there is no need to match the optical path lengths of the sample beam and the reference beam in the microscope apparatus, as in the fourth embodiment, it can be manufactured with the settings of a camera apparatus (camera apparatus 405 in FIG. 5) that can be attached to the camera port of a commercially available microscope (microscope apparatus 401 in FIG. 5).

[0041] The new method for interferometric measurement of sample reflectance as disclosed herein is of great importance in industrial applications. Figure 7 shows an example of a tomographic image of a micropatterned microelectrical device acquired from the high-resolution reflection tomographic measurement system 100, 200, 300, 400 according to various embodiments.

[0042] The present disclosure works for electromagnetic waves of any wavelength. For example, the use of shorter wavelengths such as ultraviolet (UV) can provide higher imaging resolution compared to using visible wavelengths. The high numerical aperture and the flexibility to use UV light are particularly useful in the semiconductor industry where high resolution is important. Furthermore, such an optical setup is useful in industries that require measurements of samples behind glass such as the observation of biological samples and the manufacturing of displays. Unlike existing Mirau interferometers, the optical setup of the present disclosure can be corrected for spherical aberration by rotating the correction collar. Another advantage of the optical setup of the present disclosure is that it can be manufactured as a device that can be easily attached to the camera port of any microscope. Such a feature allows it to be easily used simultaneously with other microscopy methods, increasing its versatility and potential for parallel imaging applications.

[0043] In summary, the present disclosure provides high resolution reflectance tomography measurement systems 100, 200, 300, 400 and methods of operation thereof.

[0044] The high-resolution reflectance tomography measurement system 100, 200, 300, 400 of the present disclosure may include an objective lens 110, 210, 310, 410, a tube lens 120, 220, 320, 420, a camera 130, 230, 330, 430, an illumination element 140, 240, 340, 440 that introduces temporally coherent but spatially incoherent light, and a semi-reflective surface element 150, 250, 350, 450 that splits the light between the tube lens 120, 220, 320, 420 and the camera 130, 230, 330, 430 into sample and reference beams such that the sample beam and reference beam from the sample generate interference for the tomography measurement.

[0045] According to various embodiments, the lighting element 140, 240, 340, 440 may include a light source 141, 241, 341, 441 that generates light and at least one of a mirror 143, 243, 343, 443 or a beam splitter 143, 243, 343, 443 that reflects light from the light source 141, 241, 341, 441 towards the semi-reflective surface element 150, 250, 350, 450.

[0046] According to one embodiment, the illumination element 340 may further include a wavefront shaper 345 disposed between the light source 341 and either one of the mirror 343 or the beam splitter.

[0047] According to one embodiment, the semi-reflective surface element 150 , 350 , 450 may be coupled to a camera sensor of the camera 130 , 330 , 430 .

[0048] According to another embodiment, the semi-reflective surface element 250 may be positioned at the plane of the conjugate image between the tube lens 220 and the camera 230.

[0049] According to yet another embodiment, the high-resolution reflectance tomography measurement system 200 may further include a relay lens disposed between the semi-reflective surface element 250 and the camera 230 .

[0050] According to various embodiments, the semi-reflective surface element 150, 250, 350, 450 may provide a portion of the light to the sample to generate a sample beam and the remaining light to generate a reference beam, and the camera 130, 230, 330, 430 may acquire a three-dimensional image for tomographic measurement based on the interference generated by the sample beam and the reference beam.

[0051] The high-resolution reflection tomography measurement system 400 of the present disclosure includes a microscope apparatus 401 including an objective lens 410 and a tube lens 420, and having a camera port 403 formed therein, and a camera 430, and may include a camera apparatus 405 that is detachable from the camera port 403.

[0052] According to various embodiments, the camera arrangement 405 may further include an illumination element 440 that introduces temporally coherent, spatially incoherent light, and a semi-reflective surface element 450 that splits the light into sample and reference beams between the tube lens 420 and the camera 430 so that the sample beam 3 from the sample and the reference beam generate interference for tomography measurements.

[0053] According to one embodiment, the semi-reflective surface element 450 is coupled to a camera sensor of the camera 430 , and the camera arrangement 405 may further include a relay lens 470 disposed between the tube lens 420 and the semi-reflective surface element 450 .

[0054] According to another embodiment, the semi-reflective surface element 450 is disposed at a conjugate image plane between the tube lens 420 and the camera 430, and the camera arrangement 405 may further include a relay lens 470 disposed between the tube lens 420 and the semi-reflective surface element 450, and a relay lens 470 disposed between the semi-reflective surface element 450 and the camera 430.

[0055] The method of operation of the high-resolution reflectance tomography measurement system 100, 200, 300, 400 having the objective lens 110, 210, 310, 410, the tube lens 120, 220, 320, 420, and the camera 130, 230, 330, 430 of the present disclosure includes a step 510 in which the illumination element 140, 240, 340, 440 introduces temporally coherent and spatially incoherent light; The method may include a step in which a semi-reflective surface element 150, 250, 350, 450 between the laser 20, 320, 420 and the camera 130, 230, 330, 430 splits the light into a sample and a reference beam (step 520), and a step in which the camera 130, 230, 330, 430 acquires a three-dimensional image for tomographic measurement based on interference generated by the sample beam and the reference beam from the sample (step 530).

[0056] The various embodiments of the present disclosure and the terms used herein should not be understood to limit the technology described herein to a particular embodiment, but should be understood to include various modifications, equivalents, and / or substitutes of this embodiment. In connection with the description of the drawings, similar reference numerals are used for similar components. A singular expression may include a plural expression unless the context clearly indicates otherwise. In this specification, expressions such as "A or B," "at least one of A and / or B," "A, B, or C," or "at least one of A, B, and / or C" may include all possible combinations of the items listed together. Expressions such as "first," "second," "first," or "second" modify the corresponding component regardless of order or importance, and are used only to distinguish a certain component from other components, and are not intended to limit the corresponding component. When a (e.g., a first) component is described as being "(functionally or communicatively) coupled" or "connected" to another (e.g., a second) component, the one component may be directly coupled to the other component, or may be coupled via another component (e.g., a third component).

[0057] According to various embodiments, each of the components described may include one or more individuals. According to various embodiments, one or more of the components or steps described above may be omitted, or one or more other components or steps may be added. Alternatively or additionally, multiple components may be integrated into one component. In such a case, the integrated component may perform one or more functions of each of the multiple components in a manner that is the same or similar to that performed by the corresponding component of the multiple components before integration. According to various embodiments, the steps performed by a module, program, or other component may be performed sequentially, in parallel, iteratively, or heuristically, and one or more of the steps may be performed in a different order, omitted, or one or more other steps may be added.

Claims

1. A high-resolution reflection tomography measurement system having an objective lens, a tube lens, and a camera, Lighting elements that introduce light that is temporally coherent and spatially incoherent; a semi-reflective surface element between the tube lens and the camera that splits the light into a sample and a reference beam such that the sample beam from the sample and the reference beam generate interference for tomography measurements; Including, High-resolution reflection tomography measurement system.

2. The lighting element comprises: A light source that generates the light; at least one of a mirror or a beam splitter that reflects the light from the light source towards the semi-reflective surface element; Including, The high resolution reflection tomography measurement system according to claim 1 .

3. The lighting element comprises: a wavefront shaper disposed between the light source and either the mirror or the beam splitter; Further comprising: The high resolution reflection tomography measurement system according to claim 2 .

4. The semi-reflective surface element comprises: coupled to a camera sensor of the camera; The high resolution reflection tomography measurement system according to claim 1 .

5. The semi-reflective surface element comprises: located at a conjugate image plane between the tube lens and the camera; The high resolution reflection tomography measurement system according to claim 1 .

6. A relay lens disposed between the semi-reflective surface element and the camera. Further comprising:

6. The high resolution reflection tomography measurement system according to claim 5.

7. The semi-reflective surface element comprises: providing a portion of the light to the sample to generate the sample beam and a remainder of the light to generate the reference beam; The camera includes: obtaining a three-dimensional image for the tomography measurement based on the interference generated by the sample beam and the reference beam; The high resolution reflection tomography measurement system according to claim 1 .

8. 1. A high-resolution reflection tomography measurement system, comprising: a microscope apparatus including an objective lens and a tube lens, the microscope apparatus defining a camera port; a camera device including a camera and detachably connected to the camera port; Including, The camera device includes: Lighting elements that introduce light that is temporally coherent and spatially incoherent; a semi-reflective surface element between the tube lens and the camera that splits the light into a sample and a reference beam such that the sample beam and the reference beam from the sample generate interference for tomography measurements; Further comprising: High-resolution reflection tomography measurement system.

9. The semi-reflective surface element comprises: coupled to a camera sensor of the camera; The camera device includes: A relay lens disposed between the tube lens and the semi-reflective surface element. Further comprising: The high resolution reflection tomography measurement system according to claim 8.

10. The semi-reflective surface element comprises: located at a surface of a conjugate image between the tube lens and the camera; The camera device includes: a relay lens disposed between the tube lens and the semi-reflective surface element, and between the semi-reflective surface element and the camera; Further including: The high resolution reflection tomography measurement system according to claim 8.

11. 1. A method of operating a high-resolution reflection tomography measurement system having an objective lens, a tube lens, and a camera, comprising: a lighting element directing light that is temporally coherent and spatially incoherent; a semi-reflective surface element between the tube lens and the camera splitting the light into a sample and a reference beam; The camera acquires a three-dimensional image for tomography measurement based on interference generated by the sample beam and the reference beam from the sample; Including, A method of operation of a high-resolution reflection tomography measurement system.

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