Multi-zone cooling of plasma heated window

Abstract

SOLUTION: To provide a substrate processing system that includes a multi-zone cooling device that provides cooling to all or substantially all of the windows in a substrate processing chamber, and includes one or more plenums for covering all or substantially all of the windows in the substrate processing chamber, including under an energy source for a transformer-coupled plasma in the substrate processing chamber, and in which one or more air amplifiers and associated conduits feed air into the one or more plenums to provide airflow to the windows, and the conduits are connected to plenum inlets at various distances from the center to direct airflow across the windows, thus addressing hot center, hot middle, and hot edge conditions depending on the process being performed in the chamber, and the one or more plenums include a central air inlet for directing air to the center of the window to address hot center conditions.SELECTED DRAWING: Figure 1

Images