Dry cleaning device and dry cleaning method

Abstract

To provide a dry cleaning device suitable for cleaning a container component in a container of a semiconductor manufacturing process and for cleaning the container component with CO2 snow.SOLUTION: A dry cleaning device first inspects a container component before and after cleaning, then cleans the container component with CO2 snow according to a predetermined cleaning working set, and after the container component is cleaned, it can be used again for the next process. The dry cleaning device according to the present invention is fast and effective, and is suitable for the container cleaning needs of a semiconductor manufacturing process that does not require a liquid phase solvent.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention provides a dry cleaning apparatus and method, particularly for cleaning parts or containers. [Background technology]

[0002] In the semiconductor industry, semiconductor containers are often used to protect, store and transport semiconductor components, and need to be cleaned because the inside of the container in the semiconductor manufacturing process may be contaminated due to factors such as the manufacturing process and the environment. The semiconductor components may be wafers, photomasks, PCBs, carrier boards or other electronic components. The semiconductor container may be a wafer carrier, photomask carrier, PCB carrier or other electronic component carrier. The components used to work in combination with the semiconductor components are provided inside the semiconductor manufacturing process container, and the components are repeatedly in contact with the semiconductor components and are contaminated due to factors such as environmental dust, evaporation of gases in the manufacturing process, etc. In addition, the components that are applied in combination with the automated production line or machine are also provided outside the semiconductor manufacturing process container, so cross-contamination of the components or semiconductor components inside the container will occur due to contamination outside the container. Conventional cleaning methods for semiconductor containers and their components are all based on cleaning with liquid solvents, which not only require a large amount of liquid medium during the washing process, but also require a drying and baking process after the washing process to remove residual solvent. Summary of the Invention [Problem to be solved by the invention]

[0003] However, the components in the containers of semiconductor manufacturing process have a special design structure, which is not only more likely to adhere to contaminants, but also needs to be washed, dried and heated many times, and this cleaning method requires more liquid phase solvent and long drying and heating time. Therefore, how to provide a dry cleaning device or method that is fast and effective and does not require liquid phase solvent is important to meet the cleaning needs of containers of a large number of semiconductor manufacturing processes and reduce the use of liquid phase solvent and the working time of the manufacturing process.

[0004] In view of this, the dry cleaning apparatus and the dry cleaning method provided by the present invention can effectively provide a suitable cleaning process for different contamination conditions, and does not require liquid phase solvent cleaning materials and time waste. [Means for solving the problem]

[0005] In one aspect of the present invention, there is provided a dry cleaning module adapted to clean container parts with CO2 snow, an inspection module adapted to inspect the container parts to obtain inspection results, a storage module adapted to store container parts and corresponding cleaning working sets, and a Programmable Logic Controller (PLC) signal-coupled with the dry cleaning module, the inspection module, and the storage module. a programmable logic controller (PLC) for performing the following steps: cleaning the container parts with CO2 snow according to a cleaning working set by a dry cleaning module; inspecting the container parts before and after cleaning by an inspection module to obtain an inspection result; determining a part type of the container part according to the inspection result before cleaning, selecting a pre-defined cleaning process corresponding to the part type from the cleaning working set according to the part type, and cleaning the container parts with CO2 snow by the dry cleaning module according to the pre-defined cleaning process; determining whether cleaning of the container parts is completed according to the inspection result after cleaning and issuing a determination result; and selecting an additional cleaning process corresponding to the inspection result from the cleaning working set according to the determination result, and cleaning the container parts with CO2 snow by the dry cleaning module according to the additional cleaning process, or using the container parts for a next process.

[0006] In the above dry cleaning apparatus, the dry cleaning module may include a chamber, a cleaning stage provided in the chamber and suitable for maintaining the container parts, a filter provided in the chamber and suitable for filtering gas to flow clean gas into the chamber, and a dry cleaning nozzle provided in the chamber and for blowing CO2 snow onto the container parts according to the cleaning working set.

[0007] In the above dry cleaning apparatus, the dry cleaning nozzles may be multiple and positioned at different positions within the chamber and controllable to be rotatable and pointed in different directions for cleaning the container parts.

[0008] In the above dry cleaning apparatus, the dry cleaning module may further comprise a cleaning movement module controlled by the programmable logic controller for adjusting the relative position of the dry cleaning nozzle and the container part.

[0009] In the above dry cleaning apparatus, the inspection module may include an inspection stage adapted to load the container parts, an inspection camera adapted to inspect the container parts, and an inspection and analysis device used to analyze the condition of the container parts after inspection to obtain an inspection result.

[0010] In the above dry cleaning machine, the inspection module may further comprise an inspection movement module controlled by the programmable logic controller for adjusting the relative positional relationship between the inspection camera and the container part.

[0011] In the above dry cleaning apparatus, the programmable logic controller may segregate the container parts into areas of the container parts in a grid format according to the pre-wash or post-wash inspection results, and indicate the state of contamination.

[0012] In the above dry cleaning apparatus, the programmable logic controller may determine the number of defective materials per unit area in the post-cleaning inspection result and compare it with a predetermined inspection standard to determine whether the cleaning is complete.

[0013] In the above dry cleaning apparatus, the programmable logic controller may obtain an additional washing process from the washing working set according to the post-wash inspection result to enhance the washing of some areas.

[0014] In the above-mentioned dry cleaning apparatus, the memory module stores multiple part types of container parts and the corresponding contamination status aspects in the cleaning working set, default cleaning processes, and additional cleaning processes, and the programmable logic controller may determine the part type and its contamination status aspects according to the inspection results before or after cleaning, and select the default cleaning process or additional cleaning process corresponding to the contamination status aspects.

[0015] In the above dry cleaning apparatus, the programmable logic controller may feedback adjust a washing working set including a default washing process and an additional washing process in the memory module according to the inspection result.

[0016] In the above dry cleaning apparatus, the programmable logic controller may further comprise a decision making artificial intelligence engine used to adjust the cleaning working set in the memory module according to the test results.

[0017] In the above dry cleaning machine, the inspection module may include an inspection artificial intelligence engine for further processing to obtain an inspection result.

[0018] As one aspect of the present invention, a dry cleaning method is provided which is suitable for cleaning containers and their container parts in a semiconductor manufacturing process, and includes the steps of inspecting the part type of the container parts before cleaning, selecting a pre-defined cleaning process corresponding to the part type from a cleaning working set according to the part type, cleaning the container parts with CO2 snow according to the pre-defined cleaning process, inspecting the cleaning status of the container parts after cleaning to obtain an inspection result, judging whether the cleaning of the container parts is completed according to the inspection result and issuing a judgment result, and if the cleaning of the container parts is incomplete according to the judgment result, selecting an additional cleaning process corresponding to the inspection result from the cleaning working set, cleaning the container parts with CO2 snow again until the cleaning of the container parts is completed, and if the cleaning of the container parts is completed, using the container parts for the next process.

[0019] In the above-mentioned dry cleaning method, the step of determining whether the cleaning of the container part is completed may include using an inspection artificial intelligence engine to classify the container part into areas of the container part in a grid format, indicate the number of defective materials in the area, and compare it with a predetermined inspection standard to produce a judgment result.

[0020] In the above dry cleaning method, the step of inspecting the part type of the container part before cleaning may further include a step of storing the contamination status patterns of multiple part types of the container part and their corresponding cleaning working sets, default cleaning processes, and additional cleaning processes.

[0021] In the above-mentioned dry cleaning method, the step of inspecting the container parts before and after cleaning may include using a programmable logic controller to determine the type of parts and the state of their contamination status according to the inspection results before or after cleaning, and selecting a default cleaning process or an additional cleaning process corresponding to the state of contamination status.

[0022] The above dry cleaning method may be performed by a dry cleaning apparatus including a dry cleaning module for cleaning container parts with CO2 snow, an inspection module for inspecting the container parts to obtain inspection results, a memory module for storing the container parts and their corresponding cleaning working sets, and a programmable logic controller for connecting the dry cleaning module, the inspection module, and the memory module with signals and used to perform the above dry cleaning method. Effect of the Invention

[0023] The dry cleaning apparatus and method of the present invention can achieve a dry cleaning apparatus or method that is fast and effective and does not require a liquid phase solvent, thereby meeting the container cleaning needs of a large number of semiconductor manufacturing processes and reducing the use of liquid phase solvents and the working time of the manufacturing process. Since the dry cleaning apparatus or method of the present invention does not require a liquid phase solvent, it is possible to avoid the waste of a large amount of DI water and to avoid the generation of a large amount of cleaning wastewater. In addition, compared to the conventional cleaning process that requires processes such as cleaning, drying, and heating, the dry cleaning apparatus or method of the present invention only requires the dry cleaning process. In addition to saving time in the manufacturing process, it is also possible to reduce the costs of materials and parts related to the cleaning apparatus, thereby further improving the efficiency and quality of the container cleaning process required in the semiconductor manufacturing process. [Brief description of the drawings]

[0024] [Figure 1] 1 is a block diagram showing a dry cleaning apparatus according to one embodiment of the present invention; [Diagram 2] 1 is a schematic diagram showing a dry cleaning module of a dry cleaning apparatus in accordance with one embodiment of the present invention; [Figure 3A]FIG. 2 is a schematic diagram showing an inspection module of a dry cleaning machine in one embodiment of the present invention. [Figure 3B] FIG. 2 is a schematic diagram showing areas in a grid format and aspects of contamination status by an inspection module of a dry cleaning machine in one embodiment of the present invention. [Figure 4] 1 is a block diagram showing a dry cleaning apparatus according to one embodiment of the present invention; [Diagram 5] 2 is a flow chart illustrating a dry cleaning method in one embodiment of the present invention. [Figure 6] 2 is a flow chart of an application of a dry cleaning method in one embodiment of the present invention. [Figure 7] FIG. 1 is a schematic diagram of a dry cleaning apparatus adapted to inspect different container parts in one embodiment of the present invention. [Figure 8] 1 is a schematic diagram of a dry cleaning device storing different soiling status aspects in one embodiment of the present invention; [Figure 9A] 2 is a schematic diagram showing a surface of a container part prior to dry cleaning in one embodiment of the present invention. FIG. [Figure 9B] FIG. 2 is a schematic diagram showing the surface of a container part after dry cleaning in one embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] In order to explain the technical contents of the present invention in detail, the following will further describe it with reference to the embodiments and drawings. It should be noted that in the description, terms such as "first", "second" and "third" are used to distinguish components, and are not used to limit the components themselves or indicate a particular order of the components. In addition, unless a specific number is specified in the description, the article "a" refers to one or more components.

[0026] In order to fully understand the objectives, features and advantages of the present invention, the present invention will be described in detail below with reference to the following specific embodiments and accompanying drawings.

[0027] In one aspect of the present invention, a dry cleaning apparatus is disclosed that is suitable for cleaning containers and components thereof in semiconductor manufacturing processes, such as, but not limited to, wafer carriers, photomask carriers, carrier board carrier boxes or other component containers and container cases, supports, limiters, door panels, trays, etc.

[0028] Please refer to Fig. 1, which is a block diagram showing a dry cleaning apparatus according to an embodiment of the present invention. The dry cleaning apparatus 10 includes a dry cleaning module 100, an inspection module 200, a memory module 300, and a programmable logic controller (PLC) 400. The programmable logic controller 400 is connected to the dry cleaning module 100, the inspection module 200, and the memory module 300 by signals.

[0029] The dry cleaning module 100 is adapted to clean a container and / or its container parts in a semiconductor manufacturing process with CO2 snow. The inspection module 200 is adapted to inspect the container parts to obtain an inspection result. In an embodiment of the present invention, the inspection result may include inspection of the part type, appearance inspection, inspection of the type and size of the cleaning object, inspection of the amount, type and area of ​​contamination, etc. In addition, the arrow in FIG. 1 indicates a transport path 901 of the container and / or its container parts in a semiconductor manufacturing process. In an embodiment of the present invention, the inspection is performed by optical or image detection. The storage module 300 is adapted to store different containers and different container parts and their corresponding cleaning processes, and cleaning working sets combined in the cleaning processes. That is, the cleaning working set stored in the storage module 300 includes multiple cleaning workings to correspond to cleaning conditions corresponding to any parts such as the case, support, limiter, door panel, etc. of the container. In addition, the items included in the cleaning conditions include, for example, a cleaning mode, a preset value (such as cleaning time, strength, area, etc.) that satisfies the cleaning conditions, but are not limited to these examples. In one embodiment of the present invention, the cleaning working set includes a default cleaning process and an additional cleaning process. The various cleaning processes in the cleaning working set have different classifications and secondary cleaning processes for different containers and container parts, and the default cleaning process may refer to a cleaning process corresponding to the primary cleaning of the cleaning target. The additional cleaning process may refer to a cleaning process when cleaning is strengthened again according to the inspection result. In practice, these cleaning processes may be the same or different.

[0030] In one embodiment of the present invention, the cleaning working set includes multiple cleaning processes to accommodate different vessel configurations.

[0031] In one embodiment of the present invention, there may be multiple additional cleaning processes to accommodate different post-inspection cleaning needs.

[0032] In one embodiment of the present invention, the storage module 300 stores the contamination status, default cleaning process, additional cleaning process, and the like in the container parts including a plurality of part types and the corresponding cleaning working sets.

[0033] In one embodiment of the present invention, the storage module 300 is a storage medium such as a database, a hard disk, a memory, a memory card, a cloud, a server, a workstation, an electronic device on the Internet, and the like.

[0034] The programmable logic controller 400 is adapted to perform the following steps: cleaning the container parts with CO2 snow according to the cleaning working set by the dry cleaning module 100; inspecting the container parts before and after cleaning by the inspection module 200 to obtain inspection results; determining the part type of the container parts according to the inspection results, selecting a predefined cleaning process corresponding to the part type from the cleaning working set according to the part type, and cleaning the container parts with CO2 snow by the dry cleaning module 100 according to the predefined cleaning process; determining whether the cleaning of the container parts is complete according to the inspection results and generating a judgment result; selecting an additional cleaning process corresponding to the inspection result from the cleaning working set according to the judgment result, and cleaning the container parts with CO2 snow by the dry cleaning module 100 according to the additional cleaning process, or using the container parts for the next process. Wherein, during the operation of determining the additional process according to the judgment result, if it is determined that the cleaning is incomplete according to the judgment result, the cleaning is further strengthened, and a cleaning process corresponding to the inspection result is selected from the cleaning working set, and the cleaning process is performed again, for example, with the corresponding additional cleaning process. If it is determined that the cleaning is complete according to the above-mentioned determination result, the process moves to the next step, for example, the next other process or manufacturing step is performed.

[0035] In one embodiment of the present invention, the inspection results include, but are not limited to, visual inspection, inspection of the type and size of the cleaning object, and inspection of the amount and area of ​​contamination. For example, before cleaning, the inspection module 200 can inspect the container parts to determine which type of container and part it belongs to, so that the programmable logic controller 400 can select a predefined cleaning process corresponding to the type of container part and control the dry cleaning module 100 to perform cleaning with the predefined cleaning process. In addition, the inspection module 200 can inspect the result of the container parts after cleaning to inspect the cleaning result, for example, whether the cleaning is complete or whether any contamination aspect or area needs further cleaning to be strengthened, and accordingly, the programmable logic controller 400 can select a corresponding additional cleaning process to further strengthen the cleaning. That is, the programmable logic controller 400 can determine the type of part and the state of its contamination status according to the inspection result before or after cleaning, and can select the default cleaning process or the additional cleaning process corresponding to the state of contamination status from the multiple part types of container parts and the corresponding states of contamination status, default cleaning processes, additional cleaning processes, etc. in the cleaning working set stored in the memory module 300. It is worth noting that the dry cleaning module 100 or the inspection module 200 can be provided with a computing device, processor, or microprocessor such as the programmable logic controller 400 to perform the computing judgment. The programmable logic controller 400 can be provided outside the dry cleaning module 100, the inspection module 200, or the memory module 300, and can be connected thereto by a signal.

[0036] FIG. 2 is a schematic diagram showing the dry cleaning module 100 of the dry cleaning apparatus 10 in one embodiment of the present invention. Please refer to FIG. 2. In one embodiment of the present invention, the dry cleaning module 100 may include a chamber 110, a cleaning stage 120, a filter 130, and a programmable dry cleaning nozzle 140. The programmable may be controlled by a programmable logic controller 400 or other electronic devices, computing devices, network devices, etc., or may be controlled by a computing device such as a microprocessor of the dry cleaning module 100 itself. The chamber 110 is adapted to receive the container part 900. The cleaning stage 120 is adapted to load or hold the container part 900, and in one embodiment of the present invention, the cleaning stage 120 is adapted to fix, clamp, suck, load the container part 900, but is not limited thereto. The cleaning stage 120 is adapted to hold the container part 900 in any manner. The filter 130 may be a HEPA filter and may be located above the chamber 110. After the gas passes through the filter 130, it becomes filtered clean gas CG and flows into the chamber 110. The container part 900 is provided in the chamber 110. The dry cleaning nozzle 140 can remove contaminants or defective materials (such as dust, impurity particles, etc.) from the container part 900 by blowing CO2 snow toward the container part 900 according to a cleaning working set under program control. The parameters and cleaning conditions that the programmable dry cleaning nozzle 140 can control include, but are not limited to, condition parameters such as time, flow rate, position, angle, etc. The defective materials released by cleaning become dirty gas DG mixed with dust after cleaning together with the clean gas airflow filtered by the filter 130, and are discharged downward from the chamber 110. It is to be noted that the flow direction of the airflow is not limited to the example of this embodiment. In one embodiment of the present invention, the dry cleaning module 100 may be multiple so as to perform a cleaning process in a multitask manner.In one embodiment of the present invention, the filters 130 are not limited in number and may be installed at different positions within the chamber 110 according to needs.

[0037] In one embodiment of the present invention, the dry cleaning module 100 can be adapted to accommodate various sizes and types of semiconductor manufacturing process vessels or vessel components 900 by adjusting the size and number of chambers 110 accordingly for different semiconductor manufacturing process vessels or different types of vessel components 900.

[0038] In one embodiment of the present invention, depending on the different semiconductor manufacturing process vessels or vessel parts thereof 900, the dry cleaning module 100 can set different cleaning processes of the cleaning working set by the programmable logic controller 400 or the dry cleaning module 100's own microprocessor or user interface to suit the characteristics or needs of the different vessels or vessel parts thereof 900.

[0039] In one embodiment of the present invention, the dry cleaning module 100 may have multiple dry cleaning nozzles 140 arranged at different angles and at different positions within the chamber 110, and the multiple dry cleaning nozzles 140 may be controlled to be rotatable and oriented in different directions to spray clean the container part. In one embodiment of the present invention, multiple programmable dry cleaning nozzles 140 may be arranged in opposing positions. For example, a set of dry cleaning nozzles 140 may be adapted to clean a first surface of the container part 900, and another set of dry cleaning nozzles 140 may be adapted to clean a second surface of the container part 900, and the opposing dry cleaning nozzles 140 may be moved to simultaneously clean multiple surfaces of the container part 900.

[0040] In one embodiment of the present invention, the dry cleaning nozzle 140 of the dry cleaning module 100 is mounted on a programmable cleaning and moving module 150. The term "programmable" refers to programmable control by a programmable logic controller 400 or other electronic devices, computing devices, network devices, etc., and may also be controlled by a computing device such as a microprocessor installed in the dry cleaning module 100 or the cleaning and moving module 150 itself. The cleaning and moving module 150 is adapted to provide three-dimensional spatial movement of the dry cleaning nozzle 140 in the chamber 110, so that the dry cleaning nozzle 140 can be moved to different positions, distances, and angles for cleaning according to program control, and can freely adjust their relative positions. The arrows in the figure show an example of the moving direction MD. In one embodiment of the present invention, the dry cleaning nozzle 140 moves above the cleaning and moving module 150. In one embodiment of the present invention, the dry cleaning nozzle 140 moves with the cleaning and moving module 150. In one embodiment of the present invention, the dry cleaning nozzle 140 can move above the cleaning and moving module 150 and also move with the cleaning and moving module 150. In one embodiment of the present invention, the cleaning transport module 150 may be in the form of, but is not limited to, a rail, pulley, automated arm, telescopic mechanism, miniature autonomous vehicle, and the like.

[0041] FIG. 3A is a schematic diagram of the inspection module 200 of the dry cleaning machine 10 in one embodiment of the present invention. FIG. 3B is a schematic diagram of an exemplary embodiment of the inspection result obtained by the inspection module 200 of the dry cleaning machine 10 in one embodiment of the present invention, in which the inspection module 200 or a programmable logic controller 400 connected thereto displays the inspection result through a user interface or other electronic device, and distinguishes areas of the container part in a grid format to indicate the contamination status. Please refer to FIG. 3A. In one embodiment of the present invention, the inspection module 200 may include a chamber 210, an inspection stage 220 suitable for inspecting the container part 900, a programmable inspection camera 240, and an inspection and analysis device (not shown). Wherein, the programmable may be program-controlled by the programmable logic controller 400 or other electronic devices, computing devices, network devices, etc., or may be controlled by a computing device such as a microprocessor of the inspection module 200 itself. The inspection and analysis device is used to analyze the state of the container part after inspection, thereby obtaining the inspection result. The condition of the container parts includes, but is not limited to, appearance inspection before and after cleaning, the type and size of the container parts (i.e., the parts to be cleaned) before cleaning, and / or the manner, level, amount and area of ​​contamination of the container parts after cleaning. For example, before cleaning, the inspection module 200 can inspect the part type of the container parts, and obtain the inspection result of which type of container or part it belongs to through the inspection and analysis device, and the programmable logic controller 400 can select a predetermined cleaning process corresponding to the type of the container parts, and control the dry cleaning module 100 to perform cleaning with the corresponding predetermined cleaning process. The chamber 210 is suitable for receiving the container parts 900. The inspection stage 220 is suitable for loading and maintaining the container parts 900, and the loading and maintaining method thereof may be the same as that of the cleaning stage 120.Wherein, the chamber 210 of the inspection module 200 and the chamber 110 of the dry cleaning module 100 may be the same chamber or different chambers. See FIG. 3B. In one embodiment of the present invention, the inspection module 200 or the programmable logic controller 400 connected thereto can display the inspection result by a user interface or other electronic device or display module (e.g., a screen or an operation panel), and can distinguish the container part 900 into areas of the container part 900 in a grid format. In one embodiment of the present invention, the inspection module 200 or the programmable logic controller 400 can distinguish the container part 900 into areas of the container part in a grid format, and can indicate the type of the contamination state aspect (type of defect aspect). For example, the watermark area and the scratch area are shown. The above-mentioned distinguishing the areas of the container part in the grid format and indicating the contamination state aspect can, for example, identify the area having contamination according to the outline feature, pattern shape, grayscale change feature, predefined reference feature, predefined threshold, etc. of the contamination state aspect, and can indicate the area having contamination according to a predefined or dynamic standard or condition. For example, when a linear grayscale change with a long and thin contour feature appears in a part of the area, it may be a scratch and indicates the area where the scratch appears. In one embodiment of the present invention, the inspection camera 240 is an optical lens. In one embodiment of the present invention, there may be a plurality of inspection modules 200 for multitasking inspection. In one embodiment of the present invention, there may be a plurality of inspection cameras 240 for inspecting from different positions and angles, and the different inspection positions, inspection angles, inspection times, inspection modules, etc. may be manually or automatically controlled by the above program control.

[0042] In one embodiment of the present invention, the inspection camera 240 of the inspection module 200 is mounted on a programmable inspection movement module 250. The above-mentioned "programmable" is the same as the above description, and the inspection movement module 250 is adapted to provide a three-dimensional spatial movement of the inspection camera 240 in the chamber 210, so that the inspection camera 240 can be moved to different positions, distances, and angles under program control to perform inspection, and the relative positional relationship between them can be freely adjusted. In which, the arrow shows an example of the movement direction MD.

[0043] In one embodiment of the invention, inspection camera 240 moves above inspection mobile module 250. In one embodiment of the invention, inspection camera 240 moves with inspection mobile module 250. In one embodiment of the invention, inspection camera 240 can move above inspection mobile module 250 and move with inspection mobile module 250.

[0044] In one embodiment of the present invention, the test transfer module 250 and the cleaning transfer module 150 are the same shared device.

[0045] In one embodiment of the present invention, the inspection transfer module 250 and the cleaning transfer module 150 are devices that operate independently and separately. It is worth noting that the dry cleaning module 100 and the inspection module 200 may be controlled by the programmable logic controller 400, but the dry cleaning module 100 and the inspection module 200 may be provided with a processor, microprocessor, computing device, etc., such as the programmable logic controller 400, so that the dry cleaning module 100 and the inspection module 200 themselves can complete the above-mentioned judgment, computing, and program control, and also perform the functions of outputting results and receiving inputs through a user interface.

[0046] FIG. 4 is a block diagram showing a dry cleaning apparatus according to an embodiment of the present invention. Please refer to FIG. 4. In an embodiment of the present invention, the dry cleaning apparatus 20 further includes an input module 510, a disassembly module 520, an inspection module 530, a dry cleaning module 540, an assembly module 550, a continuous gas filling module 560, an exhaust module 570, and a transport module 580. The arrows indicate the transport path 901 of the container and / or the container parts in the semiconductor manufacturing process. The inspection module 530 and the dry cleaning module 540 are the same as those described above, and will not be described again here.

[0047] The input module 510 is adapted to introduce a semiconductor manufacturing process container into the dry cleaning apparatus 20, i.e., container introduction 511. The semiconductor manufacturing process container can be, for example, a wafer carrier, a photomask carrier, a carrier box of a carrier board, etc. In one embodiment of the present invention, the input module 510 may be multiple and operate in a multitasking manner. The disassembly module 520 is adapted to disassemble a semiconductor manufacturing process container into multiple container parts 900, for example, disassembling a photomask carrier or a wafer carrier into container parts such as a cover, a base, a stage, or parts. In one embodiment of the present invention, the disassembly module 520 may be multiple and operate in a multitasking manner. The assembly module 550 is adapted to assemble the container parts 900 dry-cleaned by the dry cleaning module 540 into a container, for example, assembling the parts of a cleaned wafer / photomask carrier into a wafer / photomask carrier.

[0048] In one embodiment of the present invention, the assembly module 550 may be multiple and perform multitasking operations. The continuous gas filling module 560 is adapted to continuously fill the assembled container with gas, for example, to remove moisture and keep the inside of the container dry, or to fill with a low-reactive gas for preserving semiconductor components.

[0049] In one embodiment of the present invention, the continuous gas filling module 560 may be multiple and multitask. The discharge module 570 is adapted to discharge containers of the semiconductor component manufacturing process from the dry cleaning apparatus 20, i.e., container discharge 571.

[0050] In one embodiment of the present invention, the discharge modules 570 may be multiple and multitask. The transport module 580 is adapted to move semiconductor manufacturing process containers or disassembled container parts 900 within the dry cleaning apparatus 20.

[0051] In one embodiment of the invention, the transport module 580 may be an automated arm or other such as a conveyor belt, a transport stage, etc. In one embodiment of the invention, the transport modules 580 may be multiple and perform multitasking operations.

[0052] In another aspect of the present invention, a dry cleaning method adapted for use in a dry cleaning apparatus for cleaning containers or container parts thereof in the above-mentioned semiconductor manufacturing process is disclosed.

[0053] Please refer to Figures 1 and 5 at the same time. Figure 5 is a flow chart showing a dry cleaning method according to an embodiment of the present invention. The dry cleaning method according to an embodiment of the present invention is applied to a dry cleaning apparatus for cleaning container parts of a container in a semiconductor manufacturing process. The dry cleaning apparatus 10 includes a dry cleaning module 100, an inspection module 200, and a memory module 300 for storing cleaning working sets corresponding to the container parts. The dry cleaning method includes a step (S510) of inspecting the part type of the container part before cleaning, a step (S520) of selecting a predefined cleaning process corresponding to the part type from a cleaning working set according to the part type, a step (S530) of cleaning the container part with CO2 snow according to the predefined cleaning process, a step (S540) of inspecting the cleaning status of the container part after cleaning to obtain an inspection result, a step (S550) of judging whether the cleaning of the container part is completed according to the inspection result and issuing a judgment result, a step (S560) of selecting an additional cleaning process corresponding to the inspection result from the cleaning working set and cleaning the container part with CO2 snow again until the cleaning of the container part is completed if it is judged that the cleaning of the container part is incomplete in step (S550) according to the judgment result, and a step (S570) of using the container part for the next process if the cleaning of the container part is completed according to the judgment result if it is judged that the cleaning of the container part is completed in step (S550).

[0054] In one embodiment of the present invention, the step of determining whether the cleaning of the container part is complete involves using an inspection artificial intelligence engine to distinguish areas of the container part in a grid format, indicate the number of defective materials in the area, and compare it with a predetermined inspection standard to produce a judgment result.

[0055] In one embodiment of the present invention, the step of inspecting the part type of the container part before cleaning further includes storing contamination status aspects, default cleaning processes, and additional cleaning processes for multiple part types of the container part and their corresponding cleaning working sets.

[0056] In one embodiment of the present invention, the step of inspecting the container parts before and after cleaning includes determining the part type and its contamination status by the programmable logic controller according to the inspection results before or after cleaning, and selecting the default cleaning process or the additional cleaning process corresponding to the contamination status.

[0057] In one embodiment of the present invention, a dry cleaning method can be performed by the dry cleaning apparatus described above.

[0058] 6 is a flow chart showing a process of applying the dry cleaning method to a container or semiconductor component in an embodiment of the present invention. The dry cleaning method in an embodiment of the present invention includes the steps of introducing the container or semiconductor component (S610), disassembling the container parts (S620), inspecting the appearance before cleaning (S630), dry cleaning with CO2 snow (S640), inspecting the appearance after cleaning (S650), assembling the container parts (S660), continuously filling gas (S670), removing the container (S680), and inspecting and comparing the appearance before cleaning / after cleaning (S690).

[0059] Please refer to FIG. 6. First, a semiconductor manufacturing process container is disassembled into container parts in a disassembly module and transported to an inspection module in a transport module to perform a visual inspection before cleaning. For example, the appearance, type, and size of the container parts are inspected to determine the type and / or contamination status of the container parts before cleaning. After the inspection, the container parts are transported to a dry cleaning module in a transport module to be cleaned with CO2 snow to remove defective substances on the container parts, and then transported to an inspection module in a transport module to perform a visual inspection after cleaning to determine whether the contamination status after cleaning meets the cleaning standard. If the visual inspection after cleaning is NG, the inspection module compares the visual inspection results before and after cleaning, and transports the container parts to a dry cleaning module to clean the areas inspected to have residual contamination of defective substances again, or to strengthen the cleaning for a specific area or contamination type. This is an operation step (S690). If the visual inspection after cleaning is PASS, the container parts are used for the next process, for example, other subsequent processes after cleaning. In one embodiment of the present invention, the transport module transports the container parts to the assembly module for assembly, and the transport module transports the container parts to the discharge module for removal from the dry cleaning apparatus after filling with gas in the continuous gas filling module.

[0060] In one embodiment of the present invention, the inspection module determines whether the visual inspection after cleaning passes according to a predefined inspection criterion. For example, an exemplary inspection criterion may determine that the visual inspection after cleaning fails if the number of defective materials per area is greater than the predefined criterion. For example, an exemplary inspection criterion may determine that the visual inspection after cleaning passes if the number of defective materials per area is less than / equal to the predefined criterion.

[0061] In one embodiment of the present invention, if the appearance inspection after cleaning fails, the inspection module compares the appearance inspection results before and after cleaning, and then reads the corresponding additional cleaning process, for example from a database in a memory module, through a programmable logic controller (controller), and cleans the container with CO2 snow according to the additional cleaning process through a dry cleaning module (CO2 clean).

[0062] In one embodiment of the present invention, cleaning procedures and cleaning processes corresponding to a plurality of different contamination status aspects (e.g., different defect material aspects) are stored in a storage module (e.g., a database), so that the contamination status aspects for different visual inspection results can be determined, and additional cleaning processes corresponding to the different contamination status aspects (e.g., different defect material aspects) can be selected, and an appropriate additional cleaning process can be selected for a specific defect status.

[0063] In one embodiment of the present invention, a storage module (e.g., a database) stores cleaning procedures and cleaning processes corresponding to different contamination types, different contamination areas, and different amounts of contamination. In one embodiment of the present invention, in order to clean different contamination types, different contamination levels, and different contamination areas, cleaning parameters in a plurality of cleaning procedures and cleaning processes in a cleaning working set include, but are not limited to, cleaning time, cleaning distance, flow rate of CO2 snow, moving speed of CO2 snow nozzle, and moving path of CO2 snow nozzle.

[0064] In one embodiment of the present invention, the contamination state of the container part may be, for example, but not limited to, watermarks, dirt, scratches, marks, particles, etc. In one embodiment of the present invention, the defective material may be, for example, but not limited to, carbon-containing, oxygen-containing, metal-containing, silicon-containing, etc.

[0065] In one embodiment of the present invention, the programmable logic controller can compare the visual inspection result after cleaning and / or the visual inspection results before and after cleaning, and feedback-adjust the cleaning procedure, cleaning process and / or its cleaning parameters of the cleaning working set in the memory module to optimize the cleaning procedure, cleaning process and / or its cleaning parameters corresponding to different visual inspection results, and automatically adjust the parameters of the cleaning procedure, cleaning process corresponding to different contamination situation aspects. Wherein, the above-mentioned cleaning procedure, cleaning process includes the above-mentioned default cleaning process and additional cleaning process, and the actual cleaning contents and parameters in the default cleaning process and additional cleaning process may be the same, but the conditions of the actual cleaning parameters required for classification as default or additional are not distinguished.

[0066] In one embodiment of the present invention, the programmable logic controller further includes a judgment artificial intelligence engine for adjusting the cleaning working set in the storage module according to the inspection result, so as to feedback-adjust and optimize the cleaning sequence, cleaning process and / or cleaning parameters in the cleaning working set. For example, if contaminants always remain in the corners of the cleaned parts after cleaning, the cleaning working set can be adjusted and strengthened to enhance the cleaning of the corners.

[0067] In one embodiment of the present invention, the inspection module further includes an inspection artificial intelligence engine, which can automatically adjust and optimize the analysis judgment on the aspects of the contamination situation according to different appearance inspection results through a machine learning model or a deep learning model.

[0068] In one embodiment of the present invention, a machine learning model or a deep learning model can provide feedback updates to an inspection module and / or a storage module (e.g., a database) on analysis criteria relating to aspects of the contamination situation, thereby optimizing the criteria relating to the aspects of the contamination situation.

[0069] In one embodiment of the invention, the operations of the test module may be performed by a programmable logic controller. In another embodiment of the invention, the operations performed by the programmable logic controller may be performed by a test analysis device or a test artificial intelligence engine of the test module itself. In a further embodiment of the invention, the programmable logic controller may be included in the test module.

[0070] Please refer to Fig. 7, which is a schematic diagram of a dry cleaning apparatus adapted to inspect different container parts, such as a cover, a base, a stage or a part, by an inspection module in one embodiment of the present invention.

[0071] In one embodiment of the present invention, the inspection module can preset different inspection areas for different container parts, for example, different inspection ROIs can be set for different areas of the container part.

[0072] Please refer to FIG. 8, which is a schematic diagram of a dry cleaning machine storing different contamination aspects in one embodiment of the present invention. An exemplary container part defect category diagram is shown with respect to different contamination aspects (e.g., different defect material aspects) stored in the inspection module and / or database in one embodiment of the present invention. The container part contamination aspects include, but are not limited to, watermarks, stains, scratches, marks, particles, etc.

[0073] FIG. 9A is a schematic diagram showing the surface of a container part before dry cleaning in one embodiment of the present invention. FIG. 9B is a schematic diagram showing the surface of a container part after dry cleaning in one embodiment of the present invention. Please refer to FIG. 9A. FIG. 9A is a schematic diagram showing two different areas on the surface of the container part before dry cleaning, where contaminants remain on the surface of the container part, as can be seen in the areas indicated by the dotted lines. FIG. 9B is a schematic diagram showing the same two areas on the surface of the container part after dry cleaning, where contaminants originally remaining on the surface have been removed by dry cleaning, as can be seen in the same areas.

[0074] As a result, the dry cleaning apparatus or method of the present invention can achieve a dry cleaning apparatus and method that is fast and effective and does not require a liquid phase solvent, thereby satisfying the cleaning of containers in a large number of semiconductor manufacturing processes and reducing the use of liquid phase solvents and the working time of the manufacturing process. Since the dry cleaning apparatus or method of the present invention does not require a liquid phase solvent, it is possible to avoid the waste of a large amount of DI water and to avoid the generation of a large amount of cleaning wastewater. In addition, compared to the conventional cleaning process that requires processes such as cleaning, drying, and heating, the dry cleaning apparatus or method of the present invention only requires the dry cleaning process. In addition to saving time in the manufacturing process, it is also possible to reduce the cost of materials and parts related to the cleaning apparatus, shorten the development and assembly schedule of the apparatus, and reduce the installation area of ​​the apparatus, thereby further improving the efficiency and quality of the container cleaning process required in the semiconductor manufacturing process.

[0075] From the above description, the present invention has been disclosed in the preferred embodiment, but it is understood by those skilled in the art that the above embodiment is only used to describe the present invention, and does not limit the scope of the present invention. It is particularly noted that all equivalent modifications and replacements of the above embodiment should be set within the scope of the present invention. Therefore, the scope of protection of the present invention is as described in the claims, and the claims should be interpreted in the broadest sense so as to include such modifications, similar arrangements and processes. [Explanation of symbols]

[0076] 10 Dry cleaning equipment 100 Dry Cleaning Module 110 Chamber 120 Cleaning Stage 130 Filters 140 Dry cleaning nozzle 150 Cleaning Transfer Module 200 Inspection Modules 210 Chamber 220 Inspection Stage 240 Inspection Camera 250 Mobile Inspection Module 300 Memory Module 400 Programmable Logic Controller 510 Input Module 511 Introduction of containers 520 Decomposition Module 530 Inspection Module 540 Dry Cleaning Module 550 Assembly Module 560 Continuous Gas Charging Module 570 Emission Module 571 Container Derivation 580 Transport Module 900 Container parts 901 Transport route of containers or container parts CG Clean gas DG Unclean Gas MD movement direction S510~S570 Step S610~S690 Step

Claims

1. a dry cleaning module adapted to clean the container parts with CO2 snow; an inspection module adapted to inspect the container part to obtain an inspection result; a storage module adapted to store said container parts and corresponding cleaning working sets; 1. A dry cleaning apparatus adapted for cleaning container parts in a container of a semiconductor manufacturing process, comprising: a programmable logic controller signal-coupled with said dry cleaning module, said inspection module, and said storage module, said dry cleaning apparatus comprising: the programmable logic controller causes the dry cleaning module to clean the container parts with CO2 snow according to the cleaning working set; inspecting the container parts before and after cleaning with the inspection module to obtain the inspection results; determining a part type of the container part according to the inspection result before cleaning, selecting a pre-defined cleaning process corresponding to the part type from the cleaning working set according to the part type, and cleaning the container part with CO2 snow by the dry cleaning module according to the pre-defined cleaning process; determining whether the cleaning of the container part is complete according to the inspection result after cleaning, and issuing a determination result; The dry cleaning apparatus is characterized by performing a step of selecting an additional cleaning process corresponding to the inspection result from the cleaning working set according to the judgment result, and cleaning the container part with CO2 snow by the dry cleaning module according to the additional cleaning process, or using the container part for a next process.

2. 2. The dry cleaning apparatus according to claim 1, characterized in that the dry cleaning module comprises a chamber, a cleaning stage provided in the chamber and suitable for maintaining the container parts, a filter provided in the chamber and suitable for filtering gas to flow clean gas into the chamber, and a dry cleaning nozzle provided in the chamber and for blowing CO2 snow onto the container parts according to the cleaning working set.

3. 3. The dry cleaning apparatus of claim 2, wherein the dry cleaning nozzles are multiple and positioned at different locations within the chamber and are controllable to be rotatable and pointed in different directions to clean the container parts.

4. 3. The dry cleaning apparatus of claim 2, wherein said dry cleaning module further comprises a wash transfer module controlled by said programmable logic controller for adjusting the relative position of said dry cleaning nozzle and said container component.

5. 2. The dry cleaning apparatus of claim 1, wherein the inspection module comprises an inspection stage adapted to load the container part, an inspection camera adapted to inspect the container part, and an inspection and analysis device used to analyze the condition of the container part after inspection to obtain the inspection result.

6. 6. The dry cleaning machine of claim 5, wherein said inspection module further comprises an inspection movement module controlled by said programmable logic controller for adjusting the relative position of said inspection camera and said container part.

7. 2. The dry cleaning apparatus of claim 1, wherein the programmable logic controller separates the container parts into areas of the container parts in a grid format according to the results of the pre-wash or post-wash inspection and indicates aspects of the contamination status.

8. 2. The dry cleaning apparatus of claim 1, wherein the programmable logic controller determines the number of defective substances per unit area in the inspection result after washing and determines whether washing is complete by comparing it with a predetermined inspection standard.

9. The dry cleaning apparatus according to claim 1 , wherein the programmable logic controller obtains the additional washing process from the washing working set according to the inspection result after washing to strengthen the washing of some areas.

10. The dry cleaning apparatus of claim 1, characterized in that the memory module stores multiple part types of the container parts and the corresponding contamination status conditions in the cleaning working set, the default cleaning process, and the additional cleaning process, and the programmable logic controller determines the part type and its contamination status conditions according to the inspection results before or after cleaning, and selects the default cleaning process or the additional cleaning process corresponding to the contamination status conditions.

11. 2. The dry cleaning apparatus of claim 1, wherein the programmable logic controller feedback adjusts the washing working set, which comprises the default washing process and the additional washing process, in the memory module according to the test result.

12. 12. The dry cleaning apparatus of claim 11, wherein the programmable logic controller further comprises a decision making artificial intelligence engine used to update the cleaning working set in the memory module according to the test results.

13. 6. The dry cleaning apparatus of claim 5, wherein the inspection module comprises an inspection artificial intelligence engine for further processing to obtain the inspection result.

14. Suitable for cleaning containers and their components in semiconductor manufacturing processes; inspecting the part type of the container part before cleaning; selecting a predefined cleaning process corresponding to the part type from a cleaning working set according to the part type; cleaning the container parts with CO2 snow according to the predefined cleaning process; inspecting the cleaning status of the container parts after cleaning to obtain an inspection result; judging whether the cleaning of the container part is completed according to the inspection result and issuing a judgment result; A dry cleaning method characterized by comprising the steps of: if the cleaning of the container part is incomplete according to the judgment result, selecting an additional cleaning process corresponding to the inspection result from the cleaning working set, cleaning the container part with CO2 snow again until the cleaning of the container part is completed, and if the cleaning of the container part is completed, using the container part for the next process.

15. The dry cleaning method of claim 14, wherein the step of determining whether the cleaning of the container part is completed comprises dividing the container part into areas of the container part in a grid format by an inspection artificial intelligence engine, indicating the number of defective materials in the areas, and comparing the number with a predetermined inspection standard to produce the judgment result.

16. The dry cleaning method according to claim 14, characterized in that the step of inspecting the part type of the container part before cleaning further comprises a step of storing a plurality of part types of the container part and their corresponding contamination status in the cleaning working set, the default cleaning process, and the additional cleaning process.

17. The dry cleaning method according to claim 14, characterized in that the step of inspecting the container parts before and after cleaning includes determining the part type and its contamination status by a programmable logic controller according to the inspection results before or after cleaning, and selecting the default cleaning process or the additional cleaning process corresponding to the contamination status.

18. a dry cleaning module for cleaning the container parts with CO2 snow; an inspection module for inspecting the container part to obtain the inspection result; a storage module for storing the container parts and the corresponding cleaning working sets; 15. The method of claim 14, performed by a dry cleaning machine comprising a programmable logic controller signally connecting said dry cleaning module, said inspection module and said storage module and adapted to execute said dry cleaning method.

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