Spectrometry device and method for displaying spectrometry result

Abstract

To provide a spectrometry device which evaluates a distribution state of a metallic feel on a surface to be measured, with high positional accuracy, and to provide a method for displaying a spectrometry result with which a distribution state of a metallic feel on a surface to be measured, can be displayed with high positional accuracy.SOLUTION: A spectrometry device comprises: a spectrometry unit for applying multi-angle spectrometry to a surface to be measured of an object, in order to acquire a multi-angle spectral image; and an FI value processing unit for calculating an FI value for each region of the multi-angle spectral image, and generating FI value distribution information that shows a distribution of the FI value.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a spectroscopic measurement device and a spectroscopic measurement result display method.

Background Art

[0002] Metallic coatings used in automotive painting and the like contain flaky pigments called pearlescent pigments and exhibit a metallic feel. In the quality control of such metallic coatings, it is required to accurately evaluate the distribution state of the metallic feel, that is, the degree of unevenness of the metallic feel.

[0003] For example, Patent Document 1 discloses using an FI value to represent the degree of flip-flop property of a coating film containing a filler. The FI value is calculated from the lightness index L*15°, the lightness index L*45°, and the lightness index L*110° measured by a multi-angle colorimeter. The lightness index L*15°, the lightness index L*45°, and the lightness index L*110° are the lightness index L* at the light receiving angles of 15°, 45°, and 110° when light is incident on the surface of the coating film at an incident angle of 45°.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] With the multi-angle colorimeter described in Patent Document 1, it is possible to measure the FI value of the surface to be measured, but it is difficult to easily evaluate the distribution state of the metallic feel on the surface to be measured.

Means for Solving the Problems

[0006] The spectroscopic measurement device according to an application example of the present invention is A spectroscopic measurement unit that performs spectroscopic measurements of an object's measurement surface from multiple angles and acquires a multi-angle spectroscopic image, An FI value processing unit that calculates an FI value for each region of the multi-angle spectroscopic image and generates FI value distribution information representing the distribution of the FI values, is provided.

[0007] The spectroscopic measurement result display method according to an application example of the present invention, includes the steps of sequentially irradiating light from a plurality of different directions onto the measurement surface of the object, spectroscopically analyzing the measurement surface irradiated with the light using a spectroscopic camera, sequentially imaging the measurement surface, and acquiring a multi-angle spectroscopic image, calculating an FI value for each region of the multi-angle spectroscopic image and generating FI value distribution information representing the distribution of the FI values, visualizing and displaying the FI value distribution information. is included.

[0008] The spectroscopic measurement result display method according to an application example of the present invention, includes the steps of sequentially irradiating light from a plurality of different directions onto the measurement surface of the object, spectroscopically analyzing the measurement surface irradiated with the light using a spectroscopic camera, sequentially imaging the measurement surface, and acquiring a first multi-angle spectroscopic image, rotating the relative orientation of the object with respect to the irradiation direction of the light and the position of the spectroscopic camera by 180° within a plane including the measurement surface, after rotating the object, sequentially irradiating light from a plurality of different directions onto the measurement surface, spectroscopically analyzing the measurement surface irradiated with the light using the spectroscopic camera, sequentially imaging the measurement surface, and acquiring a second multi-angle spectroscopic image, calculating a first FI value for each region of the first multi-angle spectroscopic image and generating first FI value distribution information, calculating a second FI value for each region of the second multi-angle spectroscopic image and generating second FI value distribution information, calculating the difference between the first FI value and the second FI value for each region and generating difference FI value distribution information representing the distribution of the differences, visualizing and displaying the difference FI value distribution information. including

Brief Description of the Drawings

[0009]

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Modes for Carrying Out the Invention

[0010] Hereinafter, the spectroscopic measurement device and the spectroscopic measurement result display method of the present invention will be described in detail based on the embodiments shown in the accompanying drawings.

[0011] 1. First Embodiment First, the spectroscopic measurement apparatus and the spectroscopic measurement result display method according to the first embodiment will be described.

[0012] 1.1. Spectroscopic measurement apparatus FIG. 1 is a schematic diagram showing a spectroscopic measurement apparatus 1 according to the first embodiment. FIG. 2 is a functional block diagram of the spectroscopic measurement apparatus 1 shown in FIG. 1.

[0013] 1.1.1. Outline of the apparatus The spectroscopic measurement apparatus 1 shown in FIG. 1 is an apparatus for evaluating the distribution state of the metallic feeling on the measurement surface W1 of the object W. When the object W contains a light-emitting material having optical anisotropy, the brightness mainly changes greatly depending on the orientation state, the light-receiving state of the light-emitting material, the angle for observing the reflected light, and the like. Generally, when the light-reflecting surfaces of the light-emitting materials are arranged in parallel with the measurement surface W1 and the light reflection by the light-emitting materials is close to specular reflection, the glossiness becomes prominent and the appearance exhibits a metallic feeling. In the spectroscopic measurement apparatus 1, by evaluating the distribution state of this metallic feeling, it contributes to the efficiency of the inspection of the measurement surface W1. Examples of the light-emitting material include flaky pigments such as aluminum flake pigment and pearl mica flake pigment.

[0014] The spectroscopic measurement apparatus 1 shown in FIG. 1 includes a control unit 2, a spectroscopic measurement unit 3, a rotary table 4, an input unit 52, a display unit 54, and a storage unit 56.

[0015] The control unit 2 controls the operation of the spectroscopic measurement unit 3. Further, the control unit 2 has functions such as receiving an input from the input unit 52, displaying information on the display unit 54, and writing and reading information to and from the storage unit 56.

[0016] The spectroscopic measurement unit 3 performs spectroscopic measurement at multiple angles with respect to the measurement surface W1 and acquires a spectroscopic image. Spectroscopic measurement refers to obtaining a spectrum (spectroscopic data) by splitting the reflected light reflected from the measurement surface W1 for each region. Further, the spectroscopic image refers to a data cube that combines images (planar images) for each spectroscopic wavelength. Note that the spectroscopic image has spectroscopic data for each of the above regions, and the "region" referred to by "for each region" may be a group of a plurality of pixels, but is preferably one pixel. That is, the spectroscopic image preferably has spectroscopic data for each pixel. Thereby, the distribution state of the metallic feeling can be easily evaluated with high positional accuracy.

[0017] The spectroscopic measurement unit 3 includes a multi-angle illumination light source 32 and a spectroscopic camera 36. The multi-angle illumination light source 32 includes a plurality of illumination light sources 321, 322, 323, and irradiates the measurement surface W1 with light from mutually different directions. The light irradiated from the multi-angle illumination light source 32 is reflected by the measurement surface W1 and enters the spectroscopic camera 36 as reflected light. The illumination light sources 321, 322, 323 are configured to irradiate light mutually exclusively. For this reason, by imaging the reflected light of the light sequentially irradiated from different directions with the spectroscopic camera 36 respectively (performing multi-angle spectroscopic measurement), a set of spectroscopic images (multi-angle spectroscopic images) with different incident angles of the illumination light is obtained.

[0018] The rotary table 4 is a table on which the object W is placed and rotates the object W within a plane including the measurement surface W1. By using the rotary table 4, the object W can be easily rotated. The control unit 2 may have a function of controlling the operation of the rotary table 4.

[0019] The input unit 52 receives an input operation by the user of the spectroscopic measurement device 1. The input information received by the input unit 52 is transmitted to the control unit 2.

[0020] The display unit 54 displays the display information output from the control unit 2. Thereby, the user of the spectroscopic measurement device 1 can visually recognize the display information.

[0021] The memory unit 56 stores programs, data, setting values, etc. necessary for the operation of the control unit 2. The memory unit 56 responds to the reading of programs etc. from the control unit 2 and the writing of data etc.

[0022] 1.1.2. Control Unit As shown in FIG. 2, the control unit 2 includes, as functional units, a measurement control unit 202, an environment setting value reception unit 204, an FI value processing unit 206, a normalization processing unit 208, and a display control unit 210.

[0023] The measurement control unit 202 controls the operation of the spectroscopic measurement unit 3 and causes the spectroscopic measurement unit 3 to acquire multi-angle spectroscopic images and preview images. The measurement control unit 202 stores the acquired multi-angle spectroscopic images and preview images in the memory unit 56. The acquisition of the multi-angle spectroscopic images and preview images is executed, for example, by an input operation via the input unit 52.

[0024] The environment setting value reception unit 204 receives environment setting values used when generating an L image, an a image, or a b image from a multi-angle spectroscopic image. The L image is planar distribution data of L values. The a image and the b image are planar distribution data of a values and b values. In this specification, the "L value" refers to the L* value representing lightness in the L*a*b* color space standardized by the International Commission on Illumination (CIE) in 1976. Also, in this specification, the "a value" refers to the a* value representing chromaticity in the L*a*b* color space. Further, in this specification, the "b value" refers to the b* value representing chromaticity in the L*a*b* color space. Examples of the environment setting values include metamerism functions, illumination light sources, etc., and one or both of these are used. In the following description, "Lab value" is also used to refer to at least one of the L value, a value, and b value. Also, "Lab image" is also used to refer to at least one of the L image, a image, and b image.

[0025] The metamerism function is a function representing the spectral sensitivity to the human eye. Examples of the metamerism function include types such as the metamerism function of the CIE1931 colorimetric standard observer (2-degree field of view metamerism function), the metamerism function of the CIE1964 colorimetric supplementary standard observer (10-degree field of view metamerism function), etc.

[0026] The illumination light source is a standard light source defined to reproduce the illumination environment. Examples of the illumination light source include types such as CIE standard light source D50, CIE standard light source D65, incandescent light A, standard illuminant C, cool white fluorescent CWF, fluorescent lamp TL84, etc.

[0027] Note that in this embodiment, the control unit 2 is configured to generate a Lab image defined in the L*a*b* color space from the multi-angle spectroscopic image, but it may be configured to generate an image defined in another color space. Examples of other color spaces include, for example, the L*C*h color space, etc.

[0028] The FI value processing unit 206 generates a Lab image based on the multi-angle spectroscopic image and the environment setting value. Specifically, based on the environment setting value, first, for each pixel in the multi-angle spectroscopic image, the spectroscopic data is used to extract the L value, a value, and b value for each pixel. Thereby, a multi-angle Lab image representing the distribution state in the plane of the Lab values is obtained.

[0029] Next, the FI value is calculated for each pixel from the multi-angle Lab values. The FI value is the meaning of the flop index value and is an index value that quantitatively represents the metallic feeling. Although various definitions are known for the FI value, any index value based on any definition may be used as long as it quantitatively represents the metallic feeling. Therefore, various calculation formulas are used for calculating the FI value and it is not limited to one. Here, the following formula is used.

[0030]

Equation

[0031] In the above formula, FI is the FI value. L*15° is, as will be described later, the L value obtained from the spectral image acquired with light irradiated from the direction where the separation angle from the reference angle is 15°. L*45° is the L value obtained from the spectral image acquired with light irradiated from the direction where the separation angle from the reference angle is 45°. L*110° is the L value obtained from the spectral image acquired with light irradiated from the direction where the separation angle from the reference angle is 110°. L*15° is the L value extracted from the reflected light of the light irradiated from the highlight angle and mainly contributes to the improvement of the metallic feeling. On the other hand, L*110° is the L value extracted from the reflected light of the light irradiated from the shade angle and is less likely to contribute to the improvement of the metallic feeling. Also, L*45° is the L value extracted from the reflected light of the light irradiated from the normal direction of the measurement surface W1.

[0032] Since the above formula is calculated based on the L value, it is a formula for calculating the FI value defined by the lightness. And the larger the FI value defined by the above formula, the higher the metallic feeling can be quantitatively evaluated. By calculating the FI value for each pixel, FI value distribution information representing the distribution of the FI value is generated.

[0033] Note that the above formula may be a formula in which the L value is replaced with the a value or the b value. In this case, the FI value defined by the chromaticity can be calculated instead of the lightness. Thereby, not only the metallic feeling but also the quantitative evaluation of the pearl feeling (metallic feeling with the addition of chromaticity elements) becomes possible. The pearl feeling is a characteristic in which the chromaticity also changes according to the orientation state, light receiving state of the brightening material, the angle for observing the reflected light, etc.

[0034] Next, the FI value is converted into luminance to generate an FI image. For example, when the FI image is a 256 - tone bitmap image, the minimum value of the calculated FI value may be made to correspond to luminance 0, and the maximum value of the FI value may be made to correspond to luminance 255. Thereby, an FI image that can be visually recognized by humans is obtained. In this FI image, since the FI value is visualized, it is useful for allowing the user to intuitively understand the FI value. Note that the FI image is an example of visualized FI value distribution information, and the form of visualization is not limited to this. Also, the method of associating the FI value and luminance in the FI image is not limited to the above - described method.

[0035] Also, the FI value processing unit 206 performs various analysis processes such as statistical processing, data comparison processing, and pass / fail determination processing on the FI image. Examples of statistical processing include processes for calculating statistical values such as the minimum value, maximum value, average value, and variance value. Examples of data comparison processing include processes for comparing the FI image generated from the multi - angle spectroscopic image with reference data. Examples of pass / fail determination processing include processes for determining whether the processing result of the data comparison processing satisfies the pass criteria.

[0036] The normalization processing unit 208 performs a process of normalizing the correspondence relationship between the FI value and luminance. This normalization process is performed, for example, based on the range of the FI value. Note that this range is usually the range from the minimum value to the maximum value of the calculated FI value, but it may be an arbitrarily specified range.

[0037] For example, the normalization processing unit 208 may perform a process of determining the above - described range based on the range of the FI value in the two - dimensional region specified by the input unit 52. Also, the normalization processing unit 208 may perform a process of determining the above - described range based on the specified value input in text by the input unit 52. In this specification, these two - dimensional regions and specified values are also referred to as "normalization parameters".

[0038] The display control unit 210 causes the display unit 54 to display the FI image and the preview image described above. Further, the display control unit 210 may have a function of causing the display unit 54 to display, for example, a GUI (Graphical User Interface) screen for accepting input and selection of environment setting values, a GUI screen for accepting input of normalization parameters, and the like.

[0039] FIG. 3 is a diagram showing a hardware configuration example for realizing the functions of the respective functional units included in the spectroscopic measurement apparatus 1 of FIG. 2.

[0040] The functions of the respective functional units of the spectroscopic measurement apparatus 1 are realized, for example, by hardware including a CPU 41, a memory 42, a hard disk 43, a mouse 44, a keyboard 45, a monitor 46, an external interface 47, and an external bus 48 shown in FIG. 3. Among these, the CPU 41, the memory 42, the hard disk 43, the external interface 47, and the external bus 48 are, for example, a computer.

[0041] The CPU 41 is the Central Processing Unit. Examples of the memory 42 include any non-volatile memory element (ROM), any volatile memory element (RAM), a removable external memory element, etc. Examples of the external interface 47 include digital input / output ports such as USB (Universal Serial Bus), Ethernet (registered trademark) ports, video output ports, etc. The hard disk 43 stores the program 432, the data 434, and the OS 436. The program 432 includes a program for realizing the spectroscopic measurement result display method. The data 434 is, for example, multi-angle spectroscopic images, FI images, environment setting values, normalization parameters, etc. The OS 436 is an operating system. The hard disk 43 may be a storage medium such as a flash memory, an SSD (Solid State Drive), etc. Also, all or part of the hardware may be configured by an FPGA (Field-Programmable Gate Array), an ASIC (Application Specific Integrated Circuit), etc. Further, instead of or in addition to at least one of the mouse 44 and the keyboard 45, for example, a touch panel, a touch pad, a microphone, etc. may be provided.

[0042] The program 432 is expanded in the memory 42 and executed by the CPU 41. By the CPU 41 executing the program 432, the functions of each of the above-described functional units are realized.

[0043] Note that the program 432 and the data 434 may be stored in a non-volatile storage medium (a computer-readable storage medium). Also, the program 432 and the data 434 may be provided from the outside via a network.

[0044] 1.1.3. Spectrometry Unit The spectroscopic measurement unit 3 shown in FIG. 1 includes a multi-angle illumination light source 32 and a spectroscopic camera 36. By using these, a spectroscopic measurement device 1 can be realized that can more accurately and quickly evaluate the distribution state of the metallic feeling of the surface W1 to be measured.

[0045] The multi-angle illumination light source 32 includes illumination light sources 321, 322, and 323. Examples of the illumination light sources 321, 322, and 323 include a bar illumination light source and a line illumination light source.

[0046] The spectroscopic camera 36 includes a spectroscopic unit (not shown) and an imaging device. The spectroscopic unit is an optical element having a function of selecting light in a specific wavelength region from the reflected light. The selected light is incident on the imaging device. The imaging device is an image sensor that detects the two-dimensional distribution of the intensity of the incident light. By switching the specific wavelength selected by the spectroscopic unit, the imaging device can capture a two-dimensional image at various wavelengths. Thereby, a spectroscopic image is obtained. Also, by acquiring a spectroscopic image for each angle of the illumination light, a multi-angle spectroscopic image is obtained. Note that the spectroscopic camera 36 may have a function of acquiring, for example, a monochrome image, an RGB image, etc. Since these images can be acquired in a shorter time than the spectroscopic image, they can be used as, for example, preview images.

[0047] The spectroscopic camera 36 is installed at an angle of 45° from the plane including the surface W1 to be measured. Also, in FIG. 1, the angle at which the optical axis AX of the spectroscopic camera 36 is specularly reflected by the surface W1 to be measured is defined as the reference angle B. The illumination light source 321 is installed at an angle rotated 15° from the reference angle B shown in FIG. 1 toward the spectroscopic camera 36. The illumination light source 322 is installed at an angle rotated 45° from the reference angle B toward the spectroscopic camera 36. The illumination light source 323 is installed at an angle rotated 110° from the reference angle B toward the spectroscopic camera 36. Note that the configuration of the spectroscopic measurement unit 3 is not limited to the above.

[0048] 1.2. Spectroscopic Measurement Result Display Method Next, the spectroscopic measurement result display method according to the first embodiment will be described.

[0049] Figure 4 is a flowchart showing the configuration of the spectroscopic measurement result display method according to the first embodiment. The spectroscopic measurement result display method shown in Figure 4 is performed, for example, when the CPU 41 executes the program 432 and the OS 436. Note that it may be performed by the CPU 41 executing only the program 432.

[0050] The spectroscopic measurement result display method shown in Figure 4 includes a preview image acquisition step S102, an environment setting value reception step S104, a spectroscopic image acquisition step S106, an FI value distribution information generation step S108, an FI value distribution information display step S110, a normalization processing step S120, and an analysis processing step S130.

[0051] 1.2.1. Preview Image Acquisition Step In the preview image acquisition step S102, a preview image acquisition process and a preview image display process are performed.

[0052] Figure 5 is an example of a display screen 702 including a preview image 703 displayed in the preview image acquisition step S102. In this embodiment, a coating film containing a flaky brightening material is used as the object W.

[0053] The display screen 702 shown in Figure 5 has a preview image 703, a preview image acquisition button 707, a spectroscopic image acquisition button 708, an FI value distribution information acquisition button 709, a normalization processing button 711, and an analysis processing button 712.

[0054] The preview image acquisition process is a process in which the measurement control unit 202 shown in FIG. 2 controls the operation of the spectroscopic measurement unit 3 and acquires the preview image 703 shown in FIG. 5. The preview image display process is a process in which the display control unit 210 shown in FIG. 2 causes the preview image 703 to be displayed on the display unit 54. When the preview image acquisition button 707 shown in FIG. 5 is pressed, the preview image acquisition process and the preview image display process are executed. Since the acquisition time of the preview image 703 is shorter than that of the spectroscopic image, the appearance of the object W is represented almost in real time. Therefore, the user of the spectroscopic measurement apparatus 1 can efficiently adjust the arrangement of the object W, the distance between the object W and the spectroscopic measurement unit 3, the focus, the replacement of the lens, the adjustment of the spectroscopic measurement unit 3, etc. while viewing the preview image 703.

[0055] 1.2.2. Environmental setting value reception step In the environmental setting value reception step S104, environmental setting value reception processing is performed.

[0056] The environmental setting value reception processing is a process in which the environmental setting value reception unit 204 shown in FIG. 2 receives the environmental setting value. The environmental setting value may be stored in the storage unit 56 in advance, or may be input via the input unit 52.

[0057] FIG. 5 includes a setting field 730 that supports the input of environmental setting values in the environmental setting value reception step S104.

[0058] In the setting field 730 shown in FIG. 5, the input of the setting value of each setting item is received. Examples of the setting items include environmental setting values such as isochromatic functions and illumination light sources, normalization parameters, various thresholds, and the like. These setting values are stored in the storage unit 56.

[0059] 1.2.3. Spectroscopic image acquisition step In the spectroscopic image acquisition step S106, spectroscopic image acquisition processing is performed.

[0060] The spectral image acquisition process is a process in which the measurement control unit 202 shown in FIG. 2 controls the operation of the spectroscopic measurement unit 3 to acquire multi-angle spectral images. When the spectral image acquisition button 708 shown in FIG. 5 is pressed, the spectral image acquisition process is executed. The acquired multi-angle spectral images are stored in the storage unit 56.

[0061] Note that the configuration of the spectroscopic measurement unit 3 is suitable for calculating the FI value using the above-described calculation formula. Therefore, the configuration of the spectroscopic measurement unit 3 can be appropriately changed according to the definition of the FI value.

[0062] 1.2.4. FI value distribution information generation step In the FI value distribution information generation step S108, the FI value distribution information generation process is performed.

[0063] The FI value distribution information generation process is a process in which the FI value processing unit 206 shown in FIG. 2 generates FI value distribution information based on the multi-angle spectral image and visualizes the FI value distribution information. When the FI value distribution information acquisition button 709 shown in FIG. 5 is pressed, the FI value distribution information generation process is executed, the FI value is calculated for each pixel, and the FI value distribution information representing the distribution of the FI values is generated. Further, following the FI value distribution information generation process, the FI value distribution information display process is executed. As a result, an FI image, which is an example of the visualized FI value distribution information, is generated. The FI image can represent the FI value corresponding to the position within the measurement surface W1. Visualization refers to performing, for example, imaging, graphing, patterning, etc. on the FI value.

[0064] 1.2.5. FI value distribution information display step In the FI value distribution information display step S110, the FI value distribution information display process is performed.

[0065] FIG. 6 is an example of a display screen 702 including the FI image 704 displayed in the FI value distribution information display step S110.

[0066] The FI value distribution information display process is a process in which the display control unit 210 shown in FIG. 2 displays the FI image 704 on the display unit 54. In the FI image 704 shown in FIG. 6, the FI value that quantitatively represents the metallic feeling due to the brightening material is converted into luminance. Therefore, it can be estimated that the bright points dispersed in the FI image 704 are due to the presence of the brightening material. By displaying the FI image 704 in this way, it becomes easier for the user to intuitively understand the distribution state of the metallic feeling on the measurement surface W1. As a result, the degree of unevenness of the metallic feeling on the measurement surface W1 can be accurately evaluated. Also, in the FI image 704, the FI value for each pixel (each region) is represented by being converted into luminance. That is, in the FI image 704, the FI value can be represented corresponding to the position within the measurement surface W1. For this reason, the distribution state of the metallic feeling can be easily evaluated with high positional accuracy.

[0067] 1.2.6. Normalization processing step In the normalization processing step S120, normalization processing is performed. This step can be performed as necessary when the luminance of the FI image 704 generated by the FI value distribution information display process is not appropriate, etc.

[0068] The normalization processing is a process in which the normalization processing unit 208 shown in FIG. 2 normalizes the correspondence relationship between the FI value and the luminance based on the normalization parameter. When the normalization processing button 711 shown in FIG. 5 is pressed, the normalization processing is executed on the FI image 704. Thereby, the understanding of the distribution state of the metallic feeling by the FI image 704 is improved.

[0069] The method of inputting the normalization parameter is not particularly limited. In the example shown in FIG. 5, the normalization parameter is determined by designating a two-dimensional region in the preview image 703. When the preview image acquisition button 707 shown in FIG. 5 is pressed, the search window SW and the model window MW shown in FIG. 5 are displayed together with the preview image 703. The search window SW is used to designate a two-dimensional region for acquiring a multi-angle spectroscopic image by being enlarged or reduced via the input unit 52. The model window MW is used to designate a two-dimensional region for calculating the FI value by being enlarged or reduced via the input unit 52. Specifically, the minimum value and the maximum value of the FI value included in the model window MW are assigned to the minimum value and the maximum value of the luminance. This enables accurate normalization processing.

[0070] 1.2.7. Analysis Processing Step In the analysis processing step S130, analysis processing is performed.

[0071] The analysis processing is statistical processing, data comparison processing, pass / fail determination processing, etc. performed by the FI value processing unit 206 shown in FIG. 2. When the analysis processing button 712 shown in FIG. 5 is pressed, analysis processing is executed on the FI value distribution information.

[0072] FIG. 6 includes, as an example, the result of the statistical processing (analysis result 705). In the example of FIG. 6, the maximum value, the minimum value, the average value, and the variance value are shown as analysis items.

[0073] By performing such analysis processing, the FI value distribution information can be evaluated more accurately. As a result, the inspection of the measurement surface W1 and the like can be performed more accurately.

[0074] Also, in the pass / fail determination processing, for example, the pass / fail determination of the object W can be performed based on whether the difference between the maximum value and the minimum value and the variance value are within the respective threshold values.

[0075] As described above, the spectral measurement result display method according to the first embodiment has been described. However, some of the above steps may be omitted, or may be replaced by steps having an equivalent configuration. Further, the order of each step may be changed.

[0076] 2. Second Embodiment Next, the spectral measurement result display method according to the second embodiment will be described.

[0077] FIG. 7 is a flowchart showing the configuration of the spectral measurement result display method according to the second embodiment. FIG. 8 is a schematic diagram showing the concept of the differential FI value distribution information generation step S116 in FIG. 7.

[0078] Hereinafter, the second embodiment will be described. In the following description, the differences from the first embodiment will be mainly described, and the description of the same matters will be omitted. In FIG. 7, the same components as those in FIG. 4 are denoted by the same reference numerals.

[0079] The second embodiment is the same as the first embodiment except that it includes a process of taking the difference of the FI value distribution information obtained by changing the orientation of the object W.

[0080] The spectral measurement result display method shown in FIG. 7 includes a preview image acquisition step S102, an environment setting value reception step S104, a first spectral image acquisition step S106a, an object rotation step S107, a second spectral image acquisition step S106b, a first FI value distribution information generation step S108a, a second FI value distribution information generation step S108b, a differential FI value distribution information generation step S116, a differential FI value distribution information display step S118, a normalization process step S120, and an analysis process step S130.

[0081] 2.1. Preview Image Acquisition Step In the preview image acquisition step S102, a preview image acquisition process and a preview image display process are performed.

[0082] 2.2. Environment Setting Value Reception Step In the environment setting value reception step S104, an environment setting value reception process is performed.

[0083] 2.3. First spectral image acquisition step In the first spectral image acquisition step S106a, a first spectral image acquisition process is performed.

[0084] The first spectral image acquisition process is a process of acquiring a first multi-angle spectral image in the same manner as the spectral image acquisition step S106 of the first embodiment. The acquired first multi-angle spectral image is stored in the storage unit 56.

[0085] 2.4. Object rotation step In the object rotation step S107, an object rotation process is performed.

[0086] The object rotation process is a process in which the control unit 2 controls the operation of the rotation table 4 and rotates the orientation of the object W by 180° within the plane including the measurement surface W1. Specifically, in the object rotation process, the irradiation direction of the light irradiated from the multi-angle illumination light source 32 and the relative orientation of the object W with respect to the position of the spectral camera 36 are rotated by 180°. Therefore, instead of the process of rotating the object W by the operation of the rotation table 4, a process of rotating the multi-angle illumination light source 32 and the spectral camera 36 may be executed.

[0087] 2.5. Second spectral image acquisition step In the second spectral image acquisition step S106b, a second spectral image acquisition process is performed.

[0088] The second spectral image acquisition process is a process of acquiring a second multi-angle spectral image in the same manner as the spectral image acquisition step S106 of the first embodiment for the measurement surface W1 after rotating the object W. The acquired second multi-angle spectral image is stored in the storage unit 56.

[0089] 2.6. First FI value distribution information generation step In the first FI value distribution information generation step S108a, a first FI value distribution information generation process is performed.

[0090] The first FI value distribution information generation process is a process of generating first FI value distribution information based on the first multi-angle spectroscopic image in the same manner as the FI value distribution information generation process of the first embodiment. Specifically, a first FI value is calculated for each pixel of the first multi-angle spectroscopic image, and first FI value distribution information representing the distribution of the first FI values is obtained. The first FI image 704a shown in FIG. 8 is an example of an image obtained by visualizing the first FI value distribution information. By displaying such a first FI image 704a on the display unit 54, it becomes easier to intuitively understand the distribution state of the metallic feeling on the measurement surface W1. As a result, the degree of unevenness of the metallic feeling on the measurement surface W1 can be accurately evaluated.

[0091] 2.7. Second FI value distribution information generation step In the second FI value distribution information generation step S108b, a second FI value distribution information generation process is performed.

[0092] The second FI value distribution information generation process is a process of generating second FI value distribution information based on the second multi-angle spectroscopic image in the same manner as the first FI value distribution information generation process. Specifically, a second FI value is calculated for each pixel of the second multi-angle spectroscopic image, and second FI value distribution information representing the distribution of the second FI values is obtained. The second FI image 704b shown in FIG. 8 is an example of an image obtained by visualizing the second FI value distribution information. By displaying such a second FI image 704b on the display unit 54, it becomes easier to intuitively understand the distribution state of the metallic feeling on the measurement surface W1 when viewed from an angle different from the above case. As a result, the degree of unevenness of the metallic feeling on the measurement surface W1 can be accurately evaluated.

[0093] 2.8. Differential FI value distribution information generation step In the differential FI value distribution information generation step S116, a differential FI value distribution information generation process is performed.

[0094] The differential FI value distribution information generation process is a process of calculating the difference between the first FI value and the second FI value for each pixel and generating differential FI value distribution information representing the distribution of the differences. The differential FI image 704c shown in FIG. 8 is an example of an image obtained by visualizing the differential FI value distribution information.

[0095] The differential FI value distribution information represents the distribution of differential FI values, which are the differences between the first FI value and the second FI value. The difference is the absolute value of the difference between the first FI value and the second FI value. The differential FI value approaches zero if the first FI value and the second FI value are close to each other. In this case, as shown in FIG. 8, the differential FI image 704c has low luminance and is a dark image. On the other hand, when the differential FI value is a large value, the differential FI image has high luminance and is a bright image.

[0096] The first FI value and the second FI value are values calculated by acquiring multi-angle spectroscopic images before and after rotation for the same measurement surface W1. By taking these differences, the orientation state of the luminescent material contained in the object W can be estimated. For example, when the light reflection surface of the luminescent material is oriented parallel to the measurement surface W1, the light reflection angle hardly changes before and after rotation. Therefore, the first FI value and the second FI value are close to each other, and the differential FI value approaches zero. On the other hand, when the light reflection surface of the luminescent material is inclined with respect to the measurement surface W1, the light reflection angle changes before and after rotation. Therefore, the differential FI value becomes a large value. Therefore, if the differential FI value distribution information can be obtained, the distribution of the orientation state of the luminescent material can be accurately evaluated.

[0097] Note that depending on the inclination direction of the luminescent material, not only a 180° rotation but also FI values after rotation at other rotation angles, for example 90° or 270°, may be acquired, and the differential FI value may be calculated before and after rotation. Thereby, the distribution of the orientation state of the luminescent material can be evaluated more accurately.

[0098] 2.9. Normalization processing step In the normalization processing step S120, normalization processing is performed. Thereby, the first FI image 704a, the second FI image 704b, and the differential FI image 704c can be generated with more appropriate luminance.

[0099] 2.10. Analysis processing step In the analysis processing step S130, analysis processing is performed. As a result, the first FI value distribution information, the second FI value distribution information, and the differential FI value distribution information can be evaluated more accurately. In particular, by performing analysis processing on the differential FI value distribution information, the number and distribution of the luminescent materials tilted in a specific direction can be evaluated. As a result, not only the inspection of the object W but also the review of the manufacturing conditions and the sorting of the object W can be efficiently performed. Also in the second embodiment as described above, the same effects as those of the first embodiment can be obtained.

[0100] Note that some of the above steps may be omitted, or may be replaced by steps having equivalent configurations. Also, the order of the steps may be interchanged.

[0101] 3. Third Embodiment Next, a spectroscopic measurement device and a spectroscopic measurement result display method according to the third embodiment will be described.

[0102] FIG. 9 is a schematic diagram showing a spectroscopic measurement device 1 according to the third embodiment. FIG. 10 is a functional block diagram of the spectroscopic measurement device 1 shown in FIG. 9.

[0103] Hereinafter, the third embodiment will be described. In the following description, the differences from the first and second embodiments will be mainly described, and the description of the same matters will be omitted. In FIGS. 9 and 10, the same components as those in FIGS. 1 and 2 are denoted by the same reference numerals.

[0104] 3.1. Spectroscopic Measurement Device First, the spectroscopic measurement device 1 according to the third embodiment will be described.

[0105] The spectroscopic measurement device 1 according to the third embodiment is the same as the spectroscopic measurement device 1 according to the first embodiment, except that the spectroscopic measurement unit 3 further includes a dome-shaped illumination light source 38.

[0106] The spectroscopic measurement device 1 shown in FIGS. 9 and 10 is the same as the spectroscopic measurement device 1 shown in FIGS. 1 and 2, except that the rotary table 4 is omitted and a dome-shaped illumination light source 38 is added.

[0107] The dome-shaped illumination light source 38 shown in FIG. 9 is a light source device having a light source arranged in an annular shape and capable of performing epi-illumination using a light guide plate (not shown). Further, since it has translucency, a spectroscopic image can be acquired through the dome-shaped illumination light source 38. The light emitted from such a dome-shaped illumination light source 38 is incident on the measurement surface W1 from a plurality of directions. Therefore, if the measurement surface W1 is irradiated with light from the dome-shaped illumination light source 38, when the light reflecting surface of the luminescent material is oriented parallel to the measurement surface W1, reflected light can be obtained at a constant intensity. On the other hand, when the light reflecting surface of the luminescent material is non-parallel to the measurement surface W1, the intensity of the reflected light decreases. Therefore, by using the dome-shaped illumination light source 38 and acquiring information representing the intensity distribution of the reflected light, the orientation state of the luminescent material included in the object W can be estimated without rotating the object W. Examples of the dome-shaped illumination light source 38 include a flat dome illumination light source and a ring illumination light source.

[0108] Note that in the dome-shaped illumination light source 38, light from different directions is not sequentially irradiated, but light from different directions is simultaneously irradiated. For this reason, the control unit 2 cannot calculate the FI value. Instead, Lab values are extracted for each pixel. Here, the L value is extracted for each pixel.

[0109] Also, when acquiring the first FI value, since it is necessary to acquire a multi-angle spectroscopic image, as shown in FIG. 9, the dome-shaped illumination light source 38 may be retracted. Thereby, it is possible to prevent the dome-shaped illumination light source 38 from interfering with the imaging of the multi-angle spectroscopic image.

[0110] 3.2. Spectroscopic Measurement Result Display Method Next, the spectroscopic measurement result display method according to the third embodiment will be described.

[0111] The spectral measurement result display method according to the third embodiment is the same as the spectral measurement result display method according to the second embodiment, except that the L value is used instead of the second FI value.

[0112] In this embodiment, in the second spectral image acquisition step S106b, the illumination light sources 321, 322, and 323 are turned off, and the dome-shaped illumination light source 38 is turned on. Then, the reflected light of the light irradiated from the dome-shaped illumination light source 38 is imaged by the spectral camera 36. Thereby, a spectral image is acquired.

[0113] In the second FI value distribution information generation step S108b, L value distribution information is generated based on the spectral image.

[0114] In the differential FI value distribution information generation step S116, the difference between the first FI value and the L value is calculated for each pixel, and differential FI value distribution information representing the distribution of the differences is generated. The obtained differential FI value distribution information is useful for accurately evaluating the distribution of the orientation state of the phosphor, as in the second embodiment. Also in the third embodiment as described above, the same effects as those of the first and second embodiments can be obtained.

[0115] Further, in the third embodiment, by using the dome-shaped illumination light source 38, the differential FI value distribution information can be generated without performing the rotation operation of the object W by the rotary table 4. Therefore, the configuration of the spectral measurement apparatus 1 can be simplified, and the operation in the spectral measurement result display method can be simplified.

[0116] Some of the above steps may be omitted, or may be replaced with steps having equivalent configurations. Also, the order of the steps may be interchanged.

[0117] 4. Fourth Embodiment Next, a spectral measurement result display method according to the fourth embodiment will be described.

[0118] FIG. 11 is an example of a display screen 702 displayed in the FI value distribution information display step S110 included in the spectral measurement result display method according to the fourth embodiment.

[0119] Hereinafter, the fourth embodiment will be described. In the following description, the differences from the first embodiment will be mainly described, and the description of the same matters will be omitted. In FIG. 11, the same components as those in FIG. 6 are denoted by the same reference numerals.

[0120] The fourth embodiment is the same as the first embodiment except that the FI histogram 706 is adopted as the visualized FI value distribution information.

[0121] The display screen 702 shown in FIG. 11 includes the FI histogram 706. The FI histogram 706 shown in FIG. 11 is a histogram obtained by graphing the frequency of FI values for each class. By generating such an FI histogram 706 and displaying it on the display unit 54, the user can easily and intuitively understand the distribution state of the metallic feeling on the measurement surface W1. In particular, according to the FI histogram 706, it is easier to understand the distribution state of the metallic feeling from the perspective of the number of pixels for each FI value, rather than a two-dimensional distribution. Thereby, the degree of unevenness of the metallic feeling on the measurement surface W1 can be accurately evaluated.

[0122] In addition, by performing normalization processing on the FI histogram 706, the frequency resolution of the FI histogram 706 can be increased. Thereby, the evaluation can be performed more accurately using the FI histogram 706.

[0123] Furthermore, by generating the FI histogram 706, the comparison between the measurement data and the reference data can be performed more easily.

[0124] Figure 12 is a graph showing an example of the result of data comparison processing. The graph shown in Figure 12 is a scatter diagram plotting the ratio of measurement data to reference data, and a regression line obtained by linearly approximating the plot marks. The measurement data is the frequency value based on the FI histogram 706, and the reference data is the frequency value serving as a comparison standard classified into the same class as the measurement data. Then, the ratio of the measurement data to the reference data is calculated for each class, and the scatter diagram shown in Figure 12 is obtained by plotting this ratio. Also shown in Figure 12 is the equation of the regression line and the coefficient of determination R 2 which are shown. In the equation of the regression line, the value on the vertical axis is y and the value on the horizontal axis is x. The coefficient of x is the correlation coefficient of the measurement data with respect to the reference data. The closer the correlation coefficient is to 1, the stronger the correlation between the two, that is, it can be said that the measurement data is close to the reference data. Also, the coefficient of determination represents the degree of approximation by the regression line. By performing such data comparison processing, it becomes possible to inspect the measurement data based on the reference data and the like. Also in the fourth embodiment as described above, the same effects as those of the first embodiment can be obtained.

[0125] Some of the above steps may be omitted, or may be replaced with steps having equivalent configurations. Also, the order of the steps may be interchanged.

[0126] 5. Effects exhibited by the above embodiments As described above, the spectroscopic measurement device 1 according to the above embodiment includes a spectroscopic measurement unit 3 and an FI value processing unit 206. The spectroscopic measurement unit 3 performs spectroscopic measurement at multiple angles on the measurement surface W1 of the object W and acquires a multi-angle spectroscopic image. The FI value processing unit 206 calculates the FI value for each region of the multi-angle spectroscopic image and generates FI value distribution information representing the distribution of the FI values.

[0127] According to such a configuration, a spectroscopic measurement device 1 capable of easily evaluating the distribution state of the metallic feeling on the measurement surface W1 can be obtained. Also, since it is possible to associate a region such as a pixel with the FI value, a spectroscopic measurement device 1 capable of evaluating the distribution state of the metallic feeling with high positional accuracy can be obtained.

[0128] Further, the spectroscopic measurement unit 3 may include a multi-angle illumination light source 32 and a spectroscopic camera 36. The multi-angle illumination light source 32 irradiates light on the measurement surface W1 from different directions. The spectroscopic camera 36 spectrally images the measurement surface W1 irradiated with light from the multi-angle illumination light source 32.

[0129] According to such a configuration, a spectroscopic measurement device 1 capable of more accurately and quickly evaluating the distribution state of the metallic feeling of the measurement surface W1 can be obtained.

[0130] Further, the spectroscopic measurement unit 3 may include a dome-shaped illumination light source 38 that irradiates light on the measurement surface W1.

[0131] According to such a configuration, by using the dome-shaped illumination light source 38, light from different directions can be irradiated simultaneously. Therefore, even without rotating the object W, the orientation state of the luminescent material contained in the object W can be estimated. Thereby, simplification of the configuration of the spectroscopic measurement device 1 and simplification of the operation in the spectroscopic measurement result display method can be achieved.

[0132] Further, the spectroscopic measurement device 1 according to the above embodiment includes a display control unit 210. The display control unit 210 causes the display unit 54 to display the visualized FI value distribution information.

[0133] According to such a configuration, it becomes easier for the user to intuitively understand the distribution state of the metallic feeling on the measurement surface W1. As a result, the degree of unevenness of the metallic feeling on the measurement surface W1 can be accurately evaluated.

[0134] Further, the region of the multi-angle spectroscopic image is preferably a pixel of the multi-angle spectroscopic image. According to such a configuration, a spectroscopic measurement device 1 capable of evaluating the distribution state of the metallic feeling with high positional accuracy can be obtained.

[0135] Further, the visualized FI value distribution information may be an FI image obtained by converting the FI value into luminance.

[0136] According to such a configuration, it becomes easier for the user to intuitively understand the distribution state of the metallic feeling on the measurement surface W1. As a result, the degree of unevenness of the metallic feeling on the measurement surface W1 can be accurately evaluated.

[0137] Further, the visualized FI value distribution information may be an FI histogram obtained by counting the frequencies for each class of FI values and graphing them.

[0138] According to such a configuration, it becomes easier for the user to intuitively understand the distribution state of the metallic feeling on the measurement surface W1. In particular, from the viewpoint of the number of pixels for each FI value, it becomes easier to understand the distribution state of the metallic feeling. Thereby, the degree of unevenness of the metallic feeling on the measurement surface W1 can be accurately evaluated.

[0139] Further, the spectroscopic measurement device 1 according to the embodiment includes a rotary table 4 that rotates the object W in a plane including the measurement surface W1. According to such a configuration, the object W can be easily rotated.

[0140] Further, the spectroscopic measurement result display method according to the embodiment includes a spectroscopic image acquisition step S106, an FI value distribution information generation step S108, and an FI value distribution information display step S110.

[0141] In the spectroscopic image acquisition step S106, light is sequentially irradiated on the measurement surface W1 of the object W from a plurality of different directions, the measurement surface W1 irradiated with light is spectroscopically imaged by the spectroscopic camera 36 in sequence, and a multi-angle spectroscopic image is acquired. In the FI value distribution information generation step S108, the FI values of the multi-angle spectroscopic image are calculated for each region, and FI value distribution information representing the distribution of the FI values is generated. In the FI value distribution information display step S110, the FI value distribution information is visualized and displayed.

[0142] According to such a configuration, the distribution state of the metallic feeling on the surface to be measured W1 can be easily evaluated. Further, since the association between a region such as a pixel and the FI value is possible, the distribution state of the metallic feeling can be evaluated with high positional accuracy.

[0143] Further, the FI value distribution information generation step S108 (the step of generating FI value distribution information) preferably includes a process of calculating the FI value for each pixel of the multi-angle spectroscopic image. According to such a configuration, the distribution state of the metallic feeling can be evaluated with high positional accuracy.

[0144] Further, the spectroscopic measurement result display method according to the above embodiment includes a first spectroscopic image acquisition step S106a, an object rotation step S107, a second spectroscopic image acquisition step S106b, a first FI value distribution information generation step S108a, a second FI value distribution information generation step S108b, a differential FI value distribution information generation step S116, and a differential FI value distribution information display step S118.

[0145] In the first spectral image acquisition step S106a, light is sequentially irradiated onto the measurement surface W1 of the object W from a plurality of different directions, the measurement surface W1 irradiated with light is spectrally separated by the spectral camera 36 and sequentially imaged, and a first multi-angle spectral image is acquired. In the object rotation step S107, the relative orientation of the object W with respect to the irradiation direction of light and the position of the spectral camera 36 is rotated by 180° within the plane including the measurement surface W1. In the second spectral image acquisition step S106b, light is sequentially irradiated onto the measurement surface W1 of the object W after rotation from a plurality of different directions, the measurement surface W1 irradiated with light is spectrally separated by the spectral camera 36 and sequentially imaged, and a second multi-angle spectral image is acquired. In the first FI value distribution information generation step S108a, a first FI value is calculated for each region of the first multi-angle spectral image, and first FI value distribution information is generated. In the second FI value distribution information generation step S108b, a second FI value is calculated for each region of the second multi-angle spectral image, and second FI value distribution information is generated. In the differential FI value distribution information generation step S116, the difference between the first FI value and the second FI value is calculated for each region, and differential FI value distribution information representing the distribution of the differences is generated. In the differential FI value distribution information display step S118, the differential FI value distribution information is visualized and displayed.

[0146] According to such a configuration, the distribution state of the metallic feeling on the measurement surface W1 can be easily evaluated. Further, since the association between a region such as a pixel and the FI value is possible, the distribution state of the metallic feeling can be evaluated with high positional accuracy. Furthermore, the distribution of the orientation state of the brightening material contained in the object W can be accurately evaluated.

[0147] As described above, the spectral measurement apparatus and the spectral measurement result display method according to the present invention have been described based on the illustrated embodiments, but the present invention is not limited thereto.

[0148] For example, the spectral measurement apparatus according to the present invention may be one in which each part of the above embodiment is replaced with an arbitrary component having the same function, or one in which an arbitrary component is added to the above embodiment. Further, the spectral measurement result display method according to the present invention may be one in which a process for an arbitrary purpose is added to the above embodiment.

Description of Symbols

[0149] 1... Spectrophotometric device, 2... Control unit, 3... Spectrometry measurement unit, 4... Rotating table, 32... Multi-angle illumination light source, 36... Spectral camera, 38... Dome-shaped illumination light source, 41... CPU, 42... Memory, 43... Hard disk, 44... Mouse, 45... Keyboard, 46... Monitor, 47... External interface, 48... External bus, 52... Input unit, 54... Display unit, 56... Storage unit, 202... Measurement control unit, 204... Environmental setting value reception unit, 206... FI value processing unit, 208... Normalization processing unit, 210... Display control unit, 321... Illumination light source, 322... Illumination light source, 323... Illumination light source, 432... Program, 434... Data, 436... OS, 702... Display screen, 703... Preview image, 704... FI image, 704a... First FI image, 704b... Second FI image, 704c... Difference FI image, 705... Analysis result, 706... FI histogram, 707... Preview image acquisition button, 708... Spectral image acquisition button, 709... FI value distribution information acquisition button, 711... Normalization processing button, 712... Analysis processing button, 730... Setting column, AX... Optical axis, B... Reference angle, MW... Model window, S102... Preview image acquisition step, S104... Environmental setting value reception step, S106... Spectral image acquisition step, S106a... First spectral image acquisition step, S106b... Second spectral image acquisition step, S107... Object rotation step, S108... FI value distribution information generation step, S108a... First FI value distribution information generation step, S108b... Second FI value distribution information generation step, S110... FI value distribution information display step, S116... Difference FI value distribution information generation step, S118... Difference FI value distribution information display step, S120... Normalization processing step, S130... Analysis processing step, SW... Search window, W... Object, W1... Measured surface

Claims

1. A spectroscopic measurement unit that performs multi-angle spectroscopic measurement on a measurement surface of an object and acquires a multi-angle spectroscopic image; An FI value processing unit that calculates an FI value for each region of the multi-angle spectroscopic image and generates FI value distribution information representing the distribution of the FI values; A spectroscopic measurement apparatus, characterized by comprising the above.

2. The spectroscopic measurement unit includes: A multi-angle illumination light source that irradiates light on the measurement surface from mutually different directions; A spectroscopic camera that spectrally images the measurement surface irradiated with light from the multi-angle illumination light source; The spectroscopic measurement apparatus according to claim 1, having the above.

3. The spectroscopic measurement apparatus according to claim 2, wherein the spectroscopic measurement unit has a dome-shaped illumination light source that irradiates light on the measurement surface.

4. The spectroscopic measurement apparatus according to any one of claims 1 to 3, further comprising a display control unit that causes the display unit to display the visualized FI value distribution information.

5. The spectroscopic measurement apparatus according to any one of claims 1 to 3, wherein the region of the multi-angle spectroscopic image is a pixel of the multi-angle spectroscopic image.

6. The spectroscopic measurement apparatus according to any one of claims 1 to 3, wherein the visualized FI value distribution information is an FI image obtained by converting the FI value into luminance.

7. The spectroscopic measurement apparatus according to any one of claims 1 to 3, wherein the visualized FI value distribution information is an FI histogram obtained by counting the frequency for each class of the FI value and graphing it.

8. The spectroscopic measurement apparatus according to any one of claims 1 to 3, further comprising a rotary table that rotates the object within a plane including the measurement surface.

9. A step of sequentially irradiating light on a measurement surface of an object from a plurality of mutually different directions, spectrally imaging the measurement surface irradiated with the light with a spectroscopic camera, and sequentially acquiring a multi-angle spectroscopic image; A step of calculating an FI value for each region of the multi-angle spectroscopic image and generating FI value distribution information representing the distribution of the FI values; A step of visualizing and displaying the FI value distribution information; A spectroscopic measurement result display method, characterized by including the above.

10. The spectroscopic measurement result display method according to claim 9, wherein the step of generating the FI value distribution information includes a process of calculating the FI value for each pixel of the multi-angle spectroscopic image.

11. Sequentially irradiating light onto the measurement surface of the object from a plurality of different directions, spectroscopically imaging the measurement surface irradiated with the light using a spectroscopic camera and sequentially capturing images to obtain a first multi-angle spectroscopic image; Rotating the irradiation direction of the light and the relative orientation of the object with respect to the position of the spectroscopic camera by 180° within the plane including the measurement surface; Sequentially irradiating light onto the measurement surface of the object after rotating the object from a plurality of different directions, spectroscopically imaging the measurement surface irradiated with the light using the spectroscopic camera and sequentially capturing images to obtain a second multi-angle spectroscopic image; Calculating a first FI value for each region of the first multi-angle spectroscopic image and generating first FI value distribution information; Calculating a second FI value for each region of the second multi-angle spectroscopic image and generating second FI value distribution information; Calculating the difference between the first FI value and the second FI value for each region and generating difference FI value distribution information representing the distribution of the differences; Visualizing and displaying the difference FI value distribution information; A spectroscopic measurement result display method characterized by including the above steps.

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