Mapping device

Abstract

To use simple means to more reliably prevent erroneous determinations regarding the storage status of substrates.SOLUTION: A load port 4 is capable of detecting information relating to the storage state of a substrate S stored in a FOUP 100 having an opening 114 on the side. The load port 4 has a light 62 and a camera 61. The camera 61 is disposed such that, when capturing an image of the imaging region 200, a virtual straight line VL passing through the light receiving point RP and the detection target point SP intersects with a non-opposing surface that is a surface other than the back surface 113B facing the opening 114 side.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a mapping device.

Background Art

[0002] Patent Document 1 discloses a load port (mapping device) including a mapping sensor (detection unit). The detection unit is configured to be able to detect the accommodation state of a plurality of semiconductor wafers (substrates) vertically arranged and accommodated in a container having an opening formed on one side surface. More specifically, the detection unit includes a light emitting unit and an imaging unit respectively arranged near the opening. The reflected light of the light emitted by the light emitting unit, which is reflected by the substrate or the like, is sensed by the imaging unit. Thereby, an imaging image for determining the accommodation state of each substrate is acquired.

[0003] Here, when the reflected light from the container is strong and the reflected light is sensed by the imaging unit, it is difficult to distinguish the reflected light from the light reflected by the substrate, so there is a risk of misjudgment regarding the accommodation state of the substrate. In particular, the reflected light specularly reflected by the inner wall surface of the container located on the side opposite to the opening across the center of the container (hereinafter referred to as the opposing surface) can be a major factor in false detection. Therefore, by tilting the imaging axis of the imaging unit to the side opposite to the optical axis of the light emitting unit, it is intended to suppress the sensing of the reflected light.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Even if the above configuration is applied to the detection unit, when strong reflected light from the opposing surface travels toward the imaging unit, the strong reflected light is sensed by the imaging unit. For this reason, there is still a possibility of an incorrect determination regarding the accommodation state of the substrate. However, for example, it is not practical to apply an antireflection treatment to the opposing surfaces of all containers that are already in widespread use.

[0006] An object of the present invention is to more surely suppress an incorrect determination regarding the accommodation state of a substrate by simple means.

Means for Solving the Problem

[0007] A mapping device according to a first invention is a mapping device that detects the accommodation state of a substrate housed in a container having an opening on a side surface, and includes a light emitting unit that emits light at least toward the inside of the container, and an imaging unit that images an imaging region including a predetermined detection target point set in advance for detecting the substrate by sensing at least reflected light reflected toward the opening side by the substrate among the light emitted from the light emitting unit. When imaging the imaging region, the imaging unit is arranged such that a virtual straight line passing through a predetermined light receiving point determined in advance by a light receiving unit that receives the reflected light of the imaging unit and the detection target point intersects a non-opposing surface, which is a surface different from the opposing surface facing the opening side, among the inner wall surfaces of the container.

[0008] With the arrangement of the imaging unit as in the present invention, it is possible to avoid, as much as possible, imaging the opposing surface as a background in the detection target point and the region in the vicinity thereof. For this reason, the influence of the reflected light from the opposing surface can be suppressed as much as possible. In addition, the reflected light emitted from the light emitting unit and reflected by the non-opposing surface is suppressed from directly reaching the imaging unit as compared with the reflected light from the opposing surface. Thereby, the occurrence of an incorrect determination regarding the accommodation state of the substrate at the detection target point can be avoided as much as possible. Therefore, an incorrect determination regarding the accommodation state of the substrate can be more surely suppressed by simple means.

[0009] In the mapping device of the second invention, in the first invention, a determination unit is provided that determines the accommodation state of the substrate using determination information included in imaging information, which is information acquired by the imaging unit imaging the imaging region. The determination unit uses, as the determination information, non-opposing surface inclusion information that does not include information on the region of the imaging region related to the opposing surface and includes information on the regions of the imaging region related to both the non-opposing surface and the detection target point.

[0010] In the present invention, information on the region imaged with the opposing surface as the background among the imaging regions can be excluded from the target of determination by the determination unit. Therefore, erroneous determination regarding the accommodation state of the substrate can be effectively suppressed.

[0011] The mapping device of the third invention, in the first or second invention, is characterized in that the imaging unit images a region including a plurality of the detection target points related to the substrate.

[0012] In a configuration where determination regarding a plurality of detection target points for a certain substrate is required, if even one erroneous determination occurs, an erroneous determination regarding the entire substrate will occur. Therefore, the present invention, which can more reliably suppress erroneous determination, is particularly effective in this configuration.

[0013] The mapping device of the fourth invention, in the third invention, the imaging unit includes a first camera configured to be able to image a first imaging region including two or more of the plurality of detection target points, and a second camera provided separately from the first camera and configured to be able to image a second imaging region including a detection target point different from the two or more detection target points among the plurality of detection target points for detecting the thickness of the substrate.

[0014] In the present invention, at least the first camera can determine a so-called cross state (for details, refer to the embodiments described later). Also, the second camera can determine a so-called double state (for details, refer to the embodiments described later). Therefore, the accommodation state of the substrate can be determined in more detail.

[0015] In the mapping device of the fifth invention, in the first or second invention, the imaging unit is configured to be able to image at least the end face of the substrate, and the non-facing surface is a side surface different from the facing surface.

[0016] Depending on the material of the substrate, light may be irradiated onto the substrate from obliquely above or below the substrate. However, generally, among the light reflected by the substrate, the light reflected by the end face is stronger than the light reflected by portions other than the end face. Therefore, in order to more reliably detect the reflected light from the substrate, it is preferable that, as in the present invention, the imaging unit is configured to image at least the end face of the substrate. In this case, the side surface of the inner wall surface of the container can be imaged by the imaging unit. The reflected light that is reflected by a side surface different from the facing surface and directly travels toward the imaging unit is significantly weaker than the reflected light that directly travels from the facing surface toward the imaging unit. Thereby, the occurrence of an erroneous determination regarding the presence or absence of the substrate at the detection target point can be effectively suppressed.

Brief Description of the Drawings

[0017]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

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Figure 8

Figure 9

Figure 10

Embodiment for Carrying Out the Invention

[0018] An embodiment of the present invention will be described. For convenience of explanation, the directions shown in FIG. 1 are defined as the front-back, left-right directions. More specifically, the direction in which the EFEM1 (described later) and the processing device 6 (described later) are arranged is defined as the front-back direction (predetermined direction). In the front-back direction, the EFEM1 side is defined as the front side. In the front-back direction, the processing device 6 side is defined as the rear side. The direction in which a plurality of load ports 4 are arranged, which is orthogonal to the front-back direction, is defined as the left-right direction. The direction orthogonal to both the front-back direction and the left-right direction is defined as the up-down direction. The up-down direction is a direction parallel to the vertical direction in which gravity acts.

[0019] (Schematic Configuration of Load Port and Its Surroundings) The schematic configuration of the load port 4 (the mapping device of the present invention) according to the present embodiment and its surroundings will be described with reference to FIG. 1. FIG. 1 is a schematic diagram of an EFEM1 including a plurality of load ports 4 and its surroundings. "EFEM" is an abbreviation for "Equipment Front End Module". The EFEM1 is a device for transporting the substrate S between a FOUP100 (the container of the present invention) described later placed on each load port 4 and the processing device 6. On the substrate S, for example, a semiconductor circuit (not shown) is formed. Examples of the type of the substrate S include known semiconductor substrates (including wafers), glass substrates, glass epoxy substrates, etc. The substrate S is, for example, substantially rectangular when viewed from the up-down direction. The substrate S has, for example, an end face SE (see FIG. 2) extending along the up-down direction.

[0020] As shown in FIG. 1, the EFEM1 includes a housing 2, a transfer robot 3, a plurality of load ports 4, and a control device 5. A processing device 6 is arranged on the rear side of the EFEM1.

[0021] The EFEM1 is installed, for example, at a predetermined position within a semiconductor factory. The EFEM1 transfers a substrate S between a FOUP100 placed on a load port 4 and a processing apparatus 6 by a transfer robot 3 disposed in a transfer space 9 within a housing 2. "FOUP" is an abbreviation of "Front-Opening Unified Pod". The FOUP100 is a container capable of accommodating a plurality of substrates S arranged vertically. The FOUP100 is transported, for example, by a FOUP transport apparatus (not shown). The FOUP100 is transferred between the FOUP transport apparatus and the load port 4.

[0022] The housing 2 is a box-shaped member having a transfer space 9 through which the substrate S is transferred. The transfer space 9 is separated from the space outside the housing 2 (external space). A plurality of load ports 4 are connected to the front end portion of the housing 2. A load lock chamber 7 of the processing apparatus 6 is connected to the rear end portion of the housing 2. The transfer robot 3 transfers the substrate S between the FOUP100 and the load lock chamber 7.

[0023] The plurality of load ports 4 are arranged side by side, for example, in the left-right direction. The plurality of load ports 4 are attached to the front end portion of the housing 2. Each load port 4 is configured such that the FOUP100 can be placed thereon. Each load port 4 is configured to attach and detach a lid 102 (see FIG. 2) to / from a FOUP main body 101 (see FIG. 2) of the FOUP100. Each load port 4 is configured to be able to execute mapping of a plurality of substrates S accommodated in the FOUP main body 101.

[0024] The control device 5 is electrically connected to a control unit (not shown) of the transfer robot 3, an LP (load port) control device 46 (described later) of the load port 4, and a control unit (not shown) of the processing apparatus 6. The control device 5 is configured to communicate with these control units. The control device 5 may be electrically connected to a higher-level host computer HC.

[0025] The processing apparatus 6 is an apparatus that performs predetermined processing such as sputtering and dry etching on the substrate S. The processing apparatus 6 includes, for example, a load lock chamber 7 for temporarily waiting the substrate S, and a processing chamber 8 for performing predetermined processing on the substrate S.

[0026] (Load Port) The configuration of the load port 4 will be described with reference to FIGS. 2 and 3. FIG. 2 is a right side view of the load port 4. FIG. 3 is a diagram schematically showing the positional relationship between the substrate S and a plurality of cameras 61 described later (the positional relationship will be described later).

[0027] The load port 4 is configured to remove the lid 102 of the FOUP 100 from the FOUP main body 101 and execute the mapping of a plurality of substrates S accommodated in the FOUP main body 101. As shown in FIG. 2, the load port 4 includes, for example, a base 41, a door mechanism 42, a support frame 43, a placement portion 44, a scanner portion 45, and an LP control device 46 (see FIG. 1).

[0028] The base 41 is a substantially flat member. The base 41 is substantially rectangular when viewed from the front-rear direction. The base 41 is arranged to extend in the vertical direction. The base 41 is fixed to the EFEM 1. The base 41 is a part of a partition wall that separates the transfer space 9 from the external space. The base 41 has a substantially rectangular opening 41a. The opening 41a is arranged in the upper portion of the base 41. The opening 41a has a size that allows the lid 102 of the FOUP 100 to pass through in the front-rear direction. The opening 41a is opened and closed by a door main body 50 described later.

[0029] The door mechanism 42 is configured to be able to attach and detach the lid 102 to and from the FOUP main body 101. As shown in FIG. 2, the door mechanism 42 includes, for example, a door main body 50, a door support portion 53, a guide rail 54, a lifting block 55, a guide rail 56, a motor 57, and a motor 58.

[0030] The door body 50 is a plate-shaped member. The door body 50 is substantially rectangular when viewed from the front-rear direction. The door body 50 is supported by, for example, a door support portion 53. The door body 50 is provided with, for example, an adsorption holding portion (not shown) and a latch key (not shown). The adsorption holding portion adsorbs and holds the lid 102 on the front surface of the door body 50. The lid 102 can be fixed to the FOUP body 101 by a lock mechanism (not shown). The latch key unlocks and locks the lid 102 of the FOUP 100 by operating the lock mechanism.

[0031] The door support portion 53 is a member that supports the door body 50. The door support portion 53 is supported by a guide rail 54 so as to be movable in the front-rear direction. The door support portion 53 is driven to move in the front-rear direction by a motor 57. By moving the door support portion 53 in the front-rear direction, the door body 50 is moved between a closed position (see FIG. 4(b)) and an open position (see FIG. 5(a)). The closed position is the position of the door body 50 when the door body 50 closes the opening 41a of the base 41. The open position is a position behind the closed position and is the position of the door body 50 when the door body 50 opens the opening 41a. The guide rail 54 is a member that guides the door support portion 53 in the front-rear direction. The guide rail 54 is provided on the lifting block 55. The lifting block 55 is a member for moving the door body 50 in the vertical direction. The lifting block 55 supports the door support portion 53 so as to be movable in the front-rear direction. The lifting block 55 is guided in the vertical direction along the guide rail 56. The lifting block 55 is driven to move in the vertical direction by a motor 58. By moving the lifting block 55 in the vertical direction, the door body 50 is moved between the above-described open position (see FIG. 5(a)) and a retracted position (see FIG. 5(b)) below the open position. The guide rail 56 is a member that guides the lifting block 55 in the vertical direction. The guide rail 56 is attached to, for example, the base 41. The guide rail 56 extends in the vertical direction.

[0032] The motor 57 is configured to drive the door support portion 53 to move in the front-rear direction. The motor 57 is a known stepping motor driven by, for example, a pulse signal. The motor 57 is configured to be able to control the position of the door support portion 53 in the front-rear direction by being controlled by the LP control device 46.

[0033] The motor 58 is configured to drive the lifting block 55 to move in the vertical direction. The motor 58 is a known stepping motor driven by, for example, a pulse signal. The motor 58 is configured to be able to control the position of the door support portion 53 in the vertical direction by being controlled by the LP control device 46.

[0034] The support frame 43 is a member for supporting the placement portion 44. The support frame 43 is fixed to the base 41. The support frame 43 is arranged so as to protrude forward from the middle part of the base 41 in the vertical direction. The placement portion 44 is a pedestal-shaped member on which the FOUP 100 is placed. The placement portion 44 is supported by the support frame 43. The placement portion 44 is configured to be movable in the front-rear direction with respect to the support frame 43. The placement portion 44 is configured to be movable between a predetermined delivery position (see FIG. 4(a)) and a lid opening / closing position (see FIG. 4(b)) behind the delivery position by a driving mechanism (not shown). The delivery position is the position of the placement portion 44 when the FOUP 100 can be delivered to / from a FOUP transfer device (not shown).

[0035] The scanner unit 45 is for detecting a plurality of substrates S in the FOUP 100. The scanner unit 45 is arranged, for example, in the transfer space 9. The scanner unit 45 may be fixed to the door body 50, for example. Thereby, the scanner unit 45 is driven to move integrally with the door body 50 in the vertical direction by the motor 58. As shown in FIG. 3, the scanner unit 45 includes a plurality of cameras 61, an illumination 62 (the light emitting unit of the present invention), a trigger sensor 65, and a controller 66 (the determination unit of the present invention).

[0036] Each of the plurality of cameras 61 is a device for acquiring imaging data (imaging information of the present invention) of the plurality of substrates S. Each camera 61 is configured and arranged, for example, to be able to image a plurality of substrates S at once. The plurality of substrates S here means, for example, some of all the substrates S housed in the FOUP 100. Alternatively, each camera 61 may be able to image the plurality of substrates S one by one. Also, in the present embodiment, "imaging" means recording (i.e., photographing) an image of an object by each camera 61. Each camera 61 is configured and arranged to image a part of the substrate S in the left-right direction. Each camera 61 is configured to image at least a part of the end face SE (more specifically, the rear end face of the substrate S) of the substrate S. The plurality of cameras may be arranged, for example, above the door body 50 and provided side by side in the left-right direction. Each camera 61 is electrically connected to the controller 66. Each camera 61 has, for example, a light-receiving lens 61a (light-receiving part of the present invention) and an imaging element (not shown). The light-receiving lens 61a is a condensing member configured to receive light and focus it on the imaging element. The surface of the light-receiving lens 61a faces, for example, the front side (FOUP side). The imaging element is a known device such as a CCD, for example. The imaging element senses light, converts it into an electrical signal, and transmits the electrical signal to the controller 66. The combination of the plurality of cameras 61 corresponds to the imaging unit of the present invention. That is, in the present embodiment, the imaging unit of the present invention has a plurality of cameras 61.

[0037] The illumination 62 is a device for illuminating, for example, the inside of the FOUP 100 substantially uniformly in the left - right direction. The illumination 62 has, for example, a plurality of LED elements (not shown). The plurality of LED elements (not shown) are arranged, for example, so as to form a substantially linear array extending in the left - right direction. Further, it is preferable that a plurality of such arrays of LED elements are arranged side by side in the up - down direction. Alternatively, the illumination 62 may have one or more LED elements (not shown) and a diffusion plate (not shown) arranged in front of the one or more LED elements (on the FOUP 100 side in the front - rear direction). With the above - described configuration, light (irradiation light) having various directional components in the left - right direction and the front - rear direction is irradiated from the illumination 62 at least toward the inside of the FOUP 100. Although a plurality of illuminations 62 are shown in FIG. 3, the number of the illuminations 62 may be one.

[0038] A part of the irradiation light emitted from the illumination 62 and directed forward is reflected backward (reflected light) by the substrate S or the inner wall surface 113 described later. In particular, the reflected light that is specularly reflected backward (toward the opening side of the present invention) by the end face SE (rear end face) of the substrate S is used for detecting the substrate S. A part of the irradiation light (see the dashed line in FIG. 3) is specularly reflected by the end face SE and then sensed by one of the plurality of cameras 61. The imaging element of each camera 61 can image a part of the rear end face of the substrate S in the left - right direction and its background part by sensing the reflected light, and obtain imaging data. The imaging data obtained by the imaging element is transferred to the controller 66.

[0039] The trigger sensor 65 is a sensor used to determine the timing of starting imaging by a plurality of cameras 61. More specifically, the trigger sensor 65 is configured to be able to detect the movement of the door support portion 53 when, for example, a part of the door support portion 53 moves in the vertical direction. The trigger sensor 65 may be, for example, a known photointerrupter. The photointerrupter has a light emitting portion and a light receiving portion (not shown), and the light (transmitted light) emitted from the light emitting portion is detected by the light receiving portion. As shown in FIG. 2, the trigger sensor 65 is disposed, for example, inside the support frame 43 and immediately in front of the base 41. That is, the trigger sensor 65 is located in the vicinity of the door support portion 53 when the door body 50 is at least in the open position, and is configured to be able to detect the door support portion 53, for example. The door support portion 53 includes, for example, a light shielding portion (not shown) that is movable between a position where the light emitted from the light emitting portion of the trigger sensor 65 is blocked and a position where it is not blocked. The trigger sensor 65 may send a signal (trigger signal) indicating that the door support portion 53 has been detected to the controller 66 when the transmitted light is blocked by the light shielding portion, for example. The trigger sensor 65 may send a signal indicating that the door support portion 53 has not been detected to the controller 66 when it detects the transmitted light that is no longer blocked as the door support portion 53 moves downward, for example.

[0040] Instead of the photointerrupter, the trigger sensor 65 may have, for example, a photoreflector (a reflective optical sensor). Alternatively, the trigger sensor 65 may not be provided. In this case, for example, the imaging start timing may be determined by the LP control device 46 based on the number of pulse signals (number of steps) sent from the LP control device 46 to the motor 58.

[0041] The controller 66 is for executing the mapping process described later. The controller 66 includes a CPU, a ROM, and a RAM (memory) not shown in the figure. The controller 66 performs operations for mapping processing, etc. by the CPU according to a program stored in the ROM. The controller 66 is electrically connected to the LP control device 46, a plurality of cameras 61, and the trigger sensor 65. The controller 66 may have a known internal storage such as a known NAND type flash memory, HDD, or SSD not shown in the figure.

[0042] The LP control device 46 includes a CPU, a ROM, and a RAM (memory) not shown in the figure. The LP control device 46 controls each mechanism of the load port 4 by the CPU according to a program stored in the ROM. Further, the LP control device 46 communicates with the control device 5 of the EFEM1, the host computer HC, etc. Further, the LP control device 46 sends information regarding the mapping process to the controller 66 (described later).

[0043] (FOUP) Next, an example of a more specific configuration of the FOUP100 will be described with reference to FIGS. 2 and 3. The front-back, left-right directions shown in FIG. 3 are directions for convenience of explanation when the opening 114 described later faces the rear side.

[0044] The FOUP100 is a container generally in the shape of a rectangular parallelepiped. The FOUP100 is configured to be able to accommodate a plurality of substrates S arranged in the vertical direction. As shown in FIGS. 2 and 3, the FOUP100 has a FOUP main body 101 and a lid 102. The FOUP main body 101 is a member generally in the shape of a rectangular parallelepiped. The FOUP main body 101 can be supported by the mounting portion 44. The FOUP main body 101 has, for example, a wall portion 111, an opening portion 112, and a plurality of poles P.

[0045] The wall portion 111 is a substantially rectangular parallelepiped-shaped member arranged to surround the space inside the FOUP 100. The wall portion 111 is formed, for example, by fixing substantially flat plate-shaped members such as a plurality of acrylic plates to each other with fixtures (not shown). The wall portion 111 has a plurality of inner wall surfaces 113 (see FIGS. 2 and 3). The opening 112 is arranged, for example, at the rear end portion (side surface) of the FOUP main body 101. The opening 112 has an opening 114 that is substantially rectangular when viewed in the front-rear direction.

[0046] Each of the plurality of inner wall surfaces 113 is arranged to face the inside of the FOUP 100. Each inner wall surface 113 is, for example, substantially rectangular. The plurality of inner wall surfaces 113 include a back surface 113B (the opposing surface of the present invention), an upper surface 113U (see FIG. 2), a lower surface 113D (see FIG. 2), a left side surface 113L (see FIG. 3), and a right side surface 113R (see FIG. 3). The back surface 113B is the inner wall surface 113 arranged at the most front side among the plurality of inner wall surfaces 113. In FIG. 3, the back surface 113B faces the rear side (i.e., the opening 114 side in the front-rear direction). The back surface 113B extends in the vertical direction and the horizontal direction. The back surface 113B is arranged on the side opposite to the opening 114 with the center of the FOUP main body 101 in the front-rear direction interposed therebetween. The upper surface 113U is connected to the upper end of the back surface 113B and extends to the rear end portion of the FOUP main body 101 in the front-rear direction. The upper surface 113U faces downward. The lower surface 113D is connected to the lower end of the back surface 113B and extends to the rear end portion of the FOUP main body 101 in the front-rear direction. The lower surface 113D faces upward. The left side surface 113L is connected to the left end of the back surface 113B, the left end of the upper surface 113U, and the left end of the lower surface 113D, respectively, and extends to the rear end portion of the FOUP main body 101 in the front-rear direction. The left side surface 113L faces the right side. The right side surface 113R is connected to the right end of the back surface 113B, the right end of the upper surface 113U, and the right end of the lower surface 113D, respectively, and extends to the rear end portion of the FOUP main body 101 in the front-rear direction. The right side surface 113R faces the left side.

[0047] The plurality of poles P are for supporting a plurality of substrates S substantially horizontally. The plurality of poles P are arranged within a substantially rectangular parallelepiped-shaped space surrounded by the FOUP body 101. Each of the plurality of poles P is, for example, a substantially rod-shaped member extending along the front-rear direction. Each of the plurality of poles P is fixed to, for example, the rear surface 113B. A part of the substrate S is placed on any one of the poles P. As shown in FIG. 2, the plurality of poles P are arranged side by side in the vertical direction corresponding to the plurality of substrates S. Also, as shown in FIG. 3, the plurality of poles P are arranged side by side in the left-right direction. In other words, the plurality of poles P include a plurality of first poles P1, a plurality of second poles P2, and a plurality of third poles P3. The plurality of first poles P1 are arranged, for example, immediately to the left of the right side surface 113R and are arranged side by side in the vertical direction. The plurality of second poles P2 are arranged, for example, at a substantially central position in the left-right direction of the FOUP body 101 and are arranged side by side in the vertical direction. The plurality of third poles P3 are arranged, for example, in the vicinity of the left side surface 113L and are arranged side by side in the vertical direction. The numbers of the first pole P1, the second pole P2, and the third pole P3 are the same as each other. One first pole P1, one second pole P2, and one third pole P3 are provided corresponding to one substrate S. A set of the first pole P1, the second pole P2, and the third pole P3 are arranged at substantially equal positions in the vertical direction to support one substrate S. The space for supporting one substrate S is called a slot. That is, the FOUP 100 has a plurality of slots arranged side by side in the vertical direction.

[0048] The lid 102 is configured to open and close the opening 114. The lid 102 is attached to and detached from the FOUP body 101 by the load port 4. The lid 102 has a lock mechanism (not shown) capable of changing the state of the lid 102 between a state fixed to the FOUP body 101 and a state in which the fixation to the FOUP body 101 is released. The lock mechanism is unlocked and locked by a latch key (not shown).

[0049] (Basic operation of the load port) The basic operation of the load port 4 will be described with reference to FIGS. 4(a) to 5(b). FIGS. 4(a) to 5(b) are right side views of the load port 4 during operation.

[0050] First, the FOUP 100 is placed on the placement portion 44 (see FIG. 4(a)). The LP control device 46 moves the placement portion 44 from the delivery position (see FIG. 4(a)) to the lid opening / closing position (FIG. 4(b)). Next, the LP control device 46 causes the lid 102 to be adsorbed and held by the adsorption holding portion of the door main body 50, and unlocks the locking mechanism of the lid 102 with the latch key. Further, the LP control device 46 controls the motor 57 to move the door support portion 53 backward (see the rightward arrow in FIG. 5(a)). As a result, the door main body 50 moves from the predetermined closed position (see FIG. 4(b)) to the open position (see FIG. 5(a)). As a result, the lid 102 is removed from the FOUP main body 101.

[0051] Next, the LP control device 46 controls the motor 58 to move the door main body 50 from the open position (see FIG. 5(a)) to the retracted position (see FIG. 5(b)). Along with this, a plurality of cameras 61 etc. of the scanner unit 45 move downward integrally with the door main body 50. The plurality of cameras 61 image a predetermined imaging region 200 (see FIG. 6), which will be described later, at a predetermined position in the vertical direction in response to a command from the controller 66, and acquire imaging data. The controller 66 performs mapping processing based on the imaging data acquired by the plurality of cameras 61. The mapping processing is a process including determination regarding the accommodation state of each of the plurality of substrates S. Details of the mapping processing will be described later.

[0052] After the mapping process is completed, the transfer robot 3 starts to transfer the substrate S between the FOUP 100 and the processing device 6. The processing device 6 sequentially performs predetermined processing on some or all of the substrates S. The processed substrate S is returned into the FOUP 100 by the transfer robot 3. After all the substrates S are returned into the FOUP 100, the LP control device 46 causes the door mechanism 42 etc. to perform an operation reverse to when opening the lid 102, and mounts the lid 102 on the FOUP 101 main body. In this way, a series of processes are performed from when the FOUP 100 is transferred to the load port 4 until it becomes ready for unloading.

[0053] Here, when the reflected light from the inner wall surface 113 of the FOUP 100 is strong and the reflected light is detected by the camera 61, since it is difficult to distinguish the reflected light from the light reflected by the substrate S, there is a possibility of an incorrect determination regarding the accommodation state of the substrate. In particular, the reflected light specularly reflected by the back surface 113B can be a major factor in false detection. More specifically, since the back surface 113B is substantially orthogonal to the front-back direction, the incident angle of the light having a front-back direction component in the irradiation light on the back surface 113B is small. For this reason, the amount of light specularly reflected by the back surface 113B and directed toward the camera 61 is large. Due to this, the reflected light by the back surface 113B is likely to be misrecognized as the reflected light by the substrate S. Therefore, in order to more reliably suppress an incorrect determination regarding the accommodation state of the substrate S by a simple means, the load port 4 has the following configuration. In particular, a plurality of cameras 61 are arranged as follows.

[0054] (Details of camera arrangement etc.) Details of the arrangement etc. of the camera 61 will be described with reference to FIGS. 3 and 6. FIG. 3 shows the positional relationship between the plurality of cameras 61 and the FOUP 100 when the plurality of cameras 61 are imaging the substrate S. FIG. 6 is a diagram showing a plurality of imaging regions 200 (first imaging region 201 and second imaging region 202). As described above, the scanner unit 45 has a plurality of cameras 61 and the illumination 62. As shown in FIG. 3, the plurality of cameras 61 include, for example, a first camera 63 and a second camera 64.

[0055] The first camera 63 is, for example, a low-magnification camera with a large horizontal angle of view. The horizontal angle of view of the first camera 63 is preferably, for example, 100° or more. More specifically, the horizontal angle of view is preferably 100° or more and 150° or less. The resolution of the first camera 63 is, for example, 1.2 million pixels. The imaging axis of the first camera 63 is, for example, substantially parallel to the front-rear direction (in other words, substantially horizontal). The horizontal angle of view, resolution, and the direction of the imaging axis of the first camera 63 are not limited to this. As shown in FIG. 3, the first camera 63 is arranged, for example, between the first pole P1 and the second pole P2 in the left-right direction. The first camera 63 is arranged at an appropriate position such that the reflected light specularly reflected from the end face SE near the first pole P1 and the reflected light specularly reflected from the end face SE near the second pole P2 travel toward the first camera 63. The distance in the left-right direction between the first camera 63 and the first pole P1 is preferably, for example, shorter than the distance in the left-right direction between the first camera 63 and the second pole P2. The first camera 63 is configured and arranged to image a first imaging region 201 (see FIG. 6), which is one of the imaging regions 200. As shown in FIG. 6, in the vertical direction, the first imaging region 201 is, for example, longer than the length obtained by summing the diameter of the pole P and the thickness of the substrate S. In the left-right direction, the first imaging region 201 extends, for example, from a position to the right of the first pole P1 to a position to the left of the second pole P2.

[0056] Data related to a determination region 210 (a first determination region 211 and a second determination region 212), which is a part of the first imaging region 201, is used as determination data for determining the accommodation state of the substrate S. The first determination region 211 is a region near the first pole P1. The second determination region 212 is a region near the second pole P2. Hereinafter, for convenience of explanation, the determination data related to the first determination region 211 is referred to as first determination data. The determination data related to the second determination region 212 is referred to as second determination data. The first determination data and the second determination data correspond to the determination information of the present invention. Also, in the present embodiment, the first determination data and the second determination data are collectively referred to as low-magnification data.

[0057] The second camera 64 is a high-magnification camera with a smaller horizontal angle of view than the first camera 63, for example. The horizontal angle of view of the second camera 64 is preferably, for example, 30° or more and 35° or less. The horizontal angle of view is particularly preferably 34° or more. The resolution of the second camera 64 is, for example, 1.2 million pixels. The imaging axis of the second camera 64 is, for example, substantially parallel to the front-rear direction (in other words, substantially horizontal). The horizontal angle of view, resolution, and the direction of the imaging axis of the second camera 64 are not limited to this. As shown in FIG. 3, the second camera 64 is arranged, for example, between the second pole P2 and the third pole P3 in the left-right direction. The second camera 64 is arranged at an appropriate position so that the reflected light specularly reflected by the end face SE located in the vicinity of the third pole P3 travels toward the second camera 64. The distance in the left-right direction between the second camera 64 and the third pole P3 is preferably shorter than the distance in the left-right direction between the second camera 64 and the second pole P2, for example. The second camera 64 is configured and arranged to image a second imaging region 202 (see FIG. 6), which is one of the imaging regions 200. As shown in FIG. 6, in the vertical direction, the second imaging region 202 is longer than, for example, the length obtained by summing the diameter of the pole P and the thickness of the substrate S. More specifically, in the vertical direction, the second imaging region 202 is longer than, for example, the length obtained by summing the diameter of the pole P and the thickness of two substrates S. The second imaging region 202 extends in the left-right direction from a position on the right side of the third pole P3 to a position on the left side of the third pole P3, for example.

[0058] Data related to a determination region 210 (third determination region 213), which is a part of the second imaging region 202, is used as determination data for determining the accommodation state of the substrate S. The third determination region 213 is a region in the vicinity of the third pole P3. Hereinafter, for convenience of explanation, the determination data related to the third determination region 213 is referred to as third determination data. The third determination data corresponds to the determination information of the present invention, like the first determination data and the second determination data. Also, in the present embodiment, the third determination data is also referred to as high-magnification data.

[0059] For further details on the positions of the respective cameras 61, refer to FIGS. 3 and 6. As shown in FIG. 3, when the camera 61 is imaging the imaging region 200, the receiving lens 61a focuses the reflected light. Generally, depending on the specifications of the lens, the principal points (front principal point and rear principal point), the foci (front focus and rear focus), and the nodal points (front nodal point and rear nodal point) of the lens are determined in advance. Although not shown in the figure, in the present embodiment, for example, the front nodal point of the receiving lens 61a (the center point of the surface on the substrate S side of the receiving lens 61a) is defined as the light-receiving point RP for convenience of explanation. The light-receiving point RP related to the first camera 63 is called the first light-receiving point RP1. The light-receiving point RP related to the second camera 64 is called the second light-receiving point RP2.

[0060] Also, as shown in FIG. 6, a predetermined point included in each determination region 210 and included in the end surface SE is called a detection target point SP (see FIGS. 3 and 6) for convenience of explanation. The positions of the detection target point SP in the left-right direction and the front-rear direction are preset, for example, according to the specifications of the FOUP 100, the specifications of the substrate S, the arrangement of the illumination 62, and the configuration and arrangement of the camera 61. The detection target point SP included in the first determination region 211 is called the first detection target point SP1. As shown in FIG. 3, the first detection target point SP1 may be located, for example, on the left side of the first pole P1 (that is, inside the first pole P1 in the left-right direction). The detection target point SP included in the second determination region 212 is called the second detection target point SP2. As shown in FIG. 3, the second detection target point SP2 may be located, for example, at substantially the same position as the center position of the second pole P2 in the left-right direction. The detection target point SP included in the third determination region 213 is called the third detection target point SP3. As shown in FIG. 3, the third detection target point SP3 may be located, for example, on the right side of the third pole P3 (that is, inside the third pole P3 in the left-right direction). The positions of the respective detection target points SP are not limited to those described above. For example, one or more detection target points SP may be set directly above the corresponding pole P.

[0061] The first camera 63 captures an image of an imaging area 200 (first imaging area 201; see FIG. 6) including the first detection target point SP1 and the second detection target point SP2. The second camera 64 captures an image of an imaging area 200 (second imaging area 202; see FIG. 6) including the third detection target point SP3. In this manner, the multiple (two) cameras 61 capture an image of an area including multiple (three in total) detection target points SP on each substrate S.

[0062] As shown in FIG. 3, for convenience of explanation, a virtual line passing through a predetermined light receiving point RP and a predetermined detection target point SP is called a virtual line VL. More specifically, a virtual line VL passing through a first light receiving point RP1 and a first detection target point SP1 is called a first virtual line VL1. A virtual line VL passing through a first light receiving point RP1 and a second detection target point SP2 is called a second virtual line VL2. A virtual line VL passing through a second light receiving point RP2 and a third detection target point SP3 is called a third virtual line VL3. The first virtual line VL1 intersects with, for example, a right side surface 113R of the FOUP 100. The second virtual line VL2 and the third virtual line VL3 intersect with, for example, a left side surface 113L of the FOUP 100. The right side surface 113R and the left side surface 113L are side surfaces of the inner wall surface 113 that are different from the back surface 113B (opposing surface). For convenience of explanation, the right side surface 113R and the left side surface 113L will hereinafter be referred to as non-opposing surfaces.

[0063] With this arrangement, each camera 61 can capture an image of an area near the detection target point SP (i.e., the determination area 210) with one of the non-opposing surfaces (and the pole P) in the background. In other words, it is possible to minimize the inclusion of imaging data related to the rear surface 113B in imaging data related to each determination area 210. Since the non-opposing surface is approximately parallel to the front-rear direction, the amount of light of the irradiated light reflected backward by the non-opposing surface and heading directly toward the camera 61 is much smaller than the amount of light reflected by the rear surface 113B and heading toward the camera 61. Therefore, it is possible to minimize the inclusion of light that may cause erroneous detection of the substrate S in imaging data related to the determination area 210.

[0064] (Mapping process) Next, an example of the mapping process executed by the load port 4 will be described mainly with reference to FIG. 7. FIG. 7 is a flowchart showing the entire mapping process.

[0065] The initial state is as follows. The FOUP 100 containing a plurality of substrates S is placed on the placement unit 44. The placement unit 44 is located at the lid opening / closing position. The lid 102 of the FOUP 100 is in a state of being opened by the door mechanism 42. The door body 50 is located at the open position (see FIG. 5(a)).

[0066] First, the LP control device 46 transmits information (schedule information) related to the imaging schedule by the camera 61 to the controller 66. The information related to the imaging schedule is, for example, the specifications of the FOUP 100, the number of substrates S that can be stored in the FOUP 100, the position of the uppermost slot among the plurality of slots of the FOUP 100, the set value of the lowering speed of the door body 50, and the like. The schedule information is sent to the LP control device 46 in advance from, for example, the control unit (not shown) of the processing device 6. In addition to the schedule information, for example, the set value of the thickness of the substrate S (information for performing double determination described later) is also sent to the LP control device 46 in advance from the control unit of the processing device 6. The controller 66 receives the schedule information from the LP control device 46 (step S101 shown in FIG. 7). The controller 66 calculates an imaging schedule based on the schedule information (step S102). The imaging schedule is a schedule of the timing at which the camera 61 performs imaging after the controller 66 receives a predetermined trigger signal.

[0067] Next, the LP control device 46 controls the motor 58 of the door mechanism 42 to start lowering the scanner unit 45 integrally with the door main body 50 (and the door support portion 53) (step S103). At this time, the trigger sensor 65 detects the start of movement of the door support portion 53 and sends a detection signal to the controller 66. The controller 66 receives the detection signal as the trigger signal (step S104). Thereafter, the controller 66 causes each camera 61 to perform imaging according to, for example, the following procedure based on the imaging schedule.

[0068] The controller 66 sets a counter for counting (determining) the substrates S accommodated in the FOUP 100 one by one from the top to its initial value. More specifically, the controller 66 inputs 1 to a predetermined variable N, for example (step S105).

[0069] Next, the controller 66 determines whether the timing for imaging the Nth substrate S has arrived based on the imaging schedule (step S106). When the timing for imaging the Nth substrate S has not arrived (step S106: No), the scanner unit 45 is continuously lowered by the LP control device 46. When the timing for imaging the Nth substrate S has arrived (step S106: Yes), the controller 66 controls the plurality of cameras 61 to image the imaging region 200 related to the Nth substrate S and acquires the imaging data related to the substrate S (step S107). More specifically, the controller 66 causes the first camera 63 to image the first imaging region 201 and the second camera 64 to image the second imaging region 202. The controller 66 temporarily stores the imaging data acquired by these cameras 61 in, for example, a memory. The controller 66 may further store the imaging data in, for example, an internal storage (not shown) described above.

[0070] Next, the controller 66 determines the accommodation state of the Nth substrate S based on the determination data included in the imaging data (determination process. Step S108). Details will be described later.

[0071] Next, the controller 66 determines whether the determination process for all the substrates S has been completed (step S109). When the controller 66 determines that there is still a substrate S for which the determination process has not been performed (step S109: No), for example, it adds 1 to the variable N (step S110) and returns to step S106. When the determination process for all the substrates S has been completed (step S109: Yes), the controller 66 ends the mapping process.

[0072] (Determination process) An example of the determination process for the accommodation state of each substrate S will be described with reference to FIGS. 8 to 9(d). FIG. 8 is a flowchart showing the determination process for each substrate S. FIGS. 9(a) to 9(d) are diagrams for explaining the determination of the accommodation state of the substrate S. As an overview, the controller 66 determines whether the accommodation state of the Nth substrate S is a double state or a cross state, whether the Nth substrate S does not exist, or whether the Nth substrate S is normally accommodated.

[0073] In the following determination process, the controller 66 uses the non-opposing surface-containing data (the non-opposing surface-containing information of the present invention) as determination data. The non-opposing surface-containing data is data that does not include data of the region related to the back surface 113B in the imaging region 200 and includes data of regions related to both the non-opposing surface and the detection target point SP. In other words, the controller 66 uses the data related to the determination region 210 in which the back surface 113B is not shown as the background and the left side surface 113L or the right side surface 113R is shown as the background as the determination data.

[0074] First, the controller 66 determines whether the accommodation state of the Nth substrate S is a double state (double determination, step S201 shown in FIG. 8). The double state means that, as shown in FIG. 9(a), two (or more) substrates S are vertically stacked and accommodated in one slot. The controller 66 detects the thickness of the Nth substrate S based on, for example, the third determination data. When the detected thickness exceeds the set value of the thickness of one substrate S, the controller 66 determines that the accommodation state of the Nth substrate S is a double state (that is, a double state is detected). When the detected thickness is approximately the same as the set value of the thickness of one substrate S, the controller 66 determines that the accommodation state of the Nth substrate S is not a double state.

[0075] When a double state is detected (step S202: Yes), the controller 66 stores information indicating that the accommodation state of the Nth substrate S is a double state in the memory (step S203). Then, the controller 66 ends the determination regarding the Nth substrate S.

[0076] When a double state is not detected (step S202: No), the controller 66 determines whether the accommodation state of the Nth substrate S is a cross state (cross determination). The cross state means that, for example, as shown in FIG. 9(b) or FIG. 9(c), a part of the substrate S is placed on one of a pair of poles P arranged in the left - right direction, and another part of the substrate S is located below the pair of poles P.

[0077] As a cross determination procedure, first, the controller 66 determines whether the accommodation state of the Nth substrate S is in a cross state based on, for example, low magnification data (step S204). More specifically, the controller 66 compares the position of the substrate S in the vertical direction detected based on the first determination data (hereinafter, the first substrate position) with the set position of the first pole P1 corresponding to the substrate S in the vertical direction (hereinafter, the first set position). The set position of each pole P in the vertical direction is stored in advance in the memory of the controller 66. Note that since a design tolerance is allowed for the position of each pole P, there may be a difference between the designed position and the actual position of each pole P in the vertical direction. In this case, the controller 66 may detect the actual position of each pole P by, for example, pattern matching. For example, when the first substrate position is below the first set position, the controller 66 determines that the accommodation state of the Nth substrate S is in a cross state (that is, a cross state is detected).

[0078] In addition, the controller 66 compares the position of the substrate S in the vertical direction detected based on the second determination data (hereinafter, the second substrate position) with the set position of the second pole P2 corresponding to the substrate S in the vertical direction (hereinafter, the second set position). The second set position may be set as a common position with the first set position in the vertical direction, for example, or may be set independently of the first set position. For example, when the second substrate position is below the second set position, the controller 66 determines that the accommodation state of the Nth substrate S is in a cross state (that is, a cross state is detected). When a cross state is detected (step S205: Yes), the controller 66 stores information indicating that the accommodation state of the Nth substrate S is in a cross state in the memory (step S206). Then, the controller 66 ends the determination regarding the Nth substrate S.

[0079] When the cross state is not detected based on the low magnification data (step S205: No), the controller 66 performs a cross determination taking into account the high magnification data (step S207). The controller 66 compares the position of the substrate S in the vertical direction detected based on the third determination data (hereinafter, the third substrate position) with the set position in the vertical direction of the third pole P3 corresponding to the substrate S (hereinafter, the third set position). The third set position may be a position common with the first set position and / or the second set position in the vertical direction, or may be set independently of the first set position and the second set position. For example, when the third substrate position is below the third set position, the controller 66 determines that the accommodation state of the Nth substrate S is in a cross state (that is, the cross state is detected). When the cross state is detected (step S208: Yes), the controller 66 executes the above step S206 and ends the determination regarding the Nth substrate S.

[0080] When the cross state is not detected even considering the high magnification data (step S208: No), the controller 66 determines the presence or absence of the substrate S (step S209). More specifically, the controller 66 determines whether the substrate S is detected in any of the first determination region 211, the second determination region 212, and the third determination region 213 based on the determination data. If the substrate S is not detected in any of the determination regions 210 (see FIG. 9(d)), the controller 66 determines that the Nth substrate S does not exist (step S210: No). In this case, the controller 66 causes the memory to store information indicating that the Nth substrate S does not exist (step S211). Then, the controller 66 ends the determination regarding the Nth substrate S. If the substrate S is detected in any of the determination regions 210, the controller 66 determines that the Nth substrate S exists (that is, is correctly stored) (step S211: No). In this case, the controller 66 simply ends the determination regarding the Nth substrate S. In the above manner, the determination process for the Nth substrate S is completed.

[0081] As described above, when each camera 61 is imaging the imaging region 200, it is arranged as follows. That is, the virtual straight line VL passing through each light-receiving point RP and the detection target point SP corresponding to each light-receiving point RP intersects with a non-opposing surface (left side surface 113L or right side surface 113R), which is a surface different from the back surface 113B of the FOUP 100. With such an arrangement of the camera 61, it is possible to avoid, as much as possible, the back surface 113B being imaged as the background in the detection target point SP and the region in its vicinity. For this reason, the influence of the reflected light from the back surface 113B can be suppressed as much as possible. In addition, the reflected light emitted from the illumination 62 and reflected by the non-opposing surface is suppressed from directly reaching the camera 61 as compared with the reflected light from the back surface 113B. Thereby, the occurrence of misjudgment regarding the accommodation state of the substrate S at the detection target point SP can be avoided as much as possible. Therefore, by simple means, misjudgment regarding the accommodation state of the substrate S can be more reliably suppressed.

[0082] Further, the controller 66 uses the non-opposing surface-containing data as determination data. Thereby, the data of the region imaged with the back surface 113B as the background in the imaging region 200 can be excluded from the target of determination by the controller 66. Therefore, misjudgment regarding the accommodation state of the substrate S can be effectively suppressed.

[0083] In addition, the plurality of cameras 61 (imaging units) image a region including a plurality of detection target points SP of each substrate S. In a configuration where determination regarding a plurality of detection target points SP is required for each substrate S, if even one misjudgment occurs, a misjudgment regarding the entire substrate S will occur. Therefore, the scanner unit 45 of the present embodiment, which can more reliably suppress misjudgment, is particularly effective in such a configuration.

[0084] In addition, cross determination can be performed by the first camera 63 (and the second camera 64). Also, double determination can be performed by the second camera 64. Therefore, the accommodation state of the substrate S can be determined in more detail.

[0085] In general, among the light reflected by the substrate S, the light reflected by the end face SE is stronger than the light reflected by the portions other than the end face SE. Therefore, in order to more reliably detect the reflected light from the substrate S, it is preferable that, as in the present embodiment, the imaging unit is configured to image at least the end face of the substrate. In this case, the side face (left side face 113L or right side face 113R) of the inner wall surface 113 of the FOUP 100 can be imaged by the camera 61. The reflected light that is reflected by a side face different from the back face 113B and directly travels toward the camera 61 is significantly weaker than the reflected light that directly travels from the back face 113B to the camera 61. Thereby, the occurrence of an erroneous determination regarding the presence or absence of the substrate S at the detection target point SP can be effectively suppressed.

[0086] Next, a modified example in which the above-described embodiment is modified will be described. However, for those having the same configuration as the above-described embodiment, the same reference numerals will be given and the description thereof will be omitted as appropriate.

[0087] (1) The controller 66 may be further capable of determining a cross state different from the cross state shown in the above-described embodiment (see FIGS. 10(a) to 10(f)). That is, the controller 66 may determine that the housing state of the substrate S is in the cross state even when the substrate S is not detected in a part (any one or two) of the first determination region 211, the second determination region 212, and the third determination region 213. Such a situation is likely to occur, for example, when a substrate S that is easily bent due to reasons such as being very thin is housed in the FOUP 100 and a part of the substrate S is unintentionally disposed below the pole P and the part sags greatly due to gravity.

[0088] (2) In the embodiments described above, the imaging axes of the respective cameras 61 are substantially horizontal, and the respective cameras 61 are arranged to image the end face SE of the substrate S. However, this is not restrictive. The camera 61 may be configured to image the substrate S, for example, from obliquely downward and rearward or obliquely upward and rearward. For example, when the substrate S is a glass epoxy substrate, when viewed from the left-right direction, for example, the vicinity of the end face SE is somewhat rounded. Since such a substrate S can specularly reflect the irradiation light in various directions, there is a high probability that the substrate S can be detected even if the camera 61 is arranged as described above. When the camera 61 is arranged to image the substrate S from obliquely downward and rearward, the upper surface 113U is included in the non-opposing surface of the present invention. When the camera 61 is arranged to image the substrate S from obliquely upward and rearward, the lower surface 113D is included in the non-opposing surface of the present invention.

[0089] (3) In the embodiments described above, the plurality of cameras 61 include a first camera 63 and a second camera 64 having different performances (for example, at least one of resolution, magnification, and viewing angle) from each other. However, this is not restrictive. As the plurality of cameras 61, two cameras (not shown) having the same performance may be provided. Imaging for cross determination may be performed by one of the cameras. Imaging for double determination may be performed by the other camera or both cameras. When double determination is performed based on the imaging data acquired by both cameras, the accuracy of double determination can be further enhanced.

[0090] (4) In the above-described embodiments, the imaging unit is assumed to have two cameras 61. However, this is not restrictive. The imaging unit may have three or more cameras 61. Alternatively, the imaging unit may have only one camera 61. In a configuration where only one camera 61 is provided, the horizontal angle of view of the camera 61 may be larger than, for example, the horizontal angle of view of the first camera 63. Thereby, cross determination may be performed using a small number of cameras 61. Further, even though the horizontal angle of view is large in this way (i.e., at a low magnification), the resolution of the camera 61 may be high enough to perform double determination. Also, in the above-described embodiments, the imaging unit is assumed to image an area including a plurality of detection target points SP. However, this is not restrictive. In a configuration where only one camera 61 is provided, the camera 61 may be configured to image an area including only one detection target point SP. That is, the controller 66 may determine only the presence or absence of the substrate S using the camera 61, for example.

[0091] (5) In the above-described embodiments, the controller 66 is assumed to use the non-opposing surface-containing data as the determination data. However, this is not restrictive. The controller 66 may use, as the determination data, data in which the back surface 113B is slightly included as a background. Even in this case, since the virtual straight line VL intersects the non-opposing surface, the ratio of the data related to the back surface 113B in the determination data can be effectively reduced. Therefore, the influence of the reflected light from the back surface 113B can be effectively suppressed.

[0092] (6) In the above-described embodiments, one detection target point SP is assumed to be set in each determination area 210. However, this is not restrictive. A plurality of detection target points SP may be set in each determination area 210. Alternatively, the controller 66 may be configured to detect, as a part of the end surface SE, all areas where light is specularly reflected in each determination area 210.

[0093] (7) In the embodiments described above, it is assumed that the front nodal point of the light receiving lens 61a of the camera 61 is defined as the light receiving point RP. However, this is not restrictive. The front principal point of the light receiving lens 61a, or a predetermined point on the front surface of the light receiving lens 61a may be defined as the light receiving point RP. Alternatively, for example, when the front focal point of the light receiving lens 61a is located inside the light receiving lens 61a, the front focal point may be defined as the light receiving point RP. Alternatively, the rear principal point or the rear nodal point or the like may be defined as the light receiving point RP.

[0094] (8) The number of poles P supporting each substrate S is not limited to three. The substrate S may be supported by a support member (not shown) different from the pole P. Alternatively, both end portions of the substrate S in the left-right direction may be supported by a support portion (not shown) formed by notching the inner surface of the FOUP main body 101, for example. The type of the container is not limited to the FOUP 100. The present invention can also be applied to a container (not shown) having an opening, an opposing surface, and a non-opposing surface other than the FOUP 100.

[0095] (9) The shape of the substrate S may be a shape other than a substantially rectangular shape when viewed from the vertical direction. The substrate S may be, for example, substantially disc-shaped.

[0096] (10) In the embodiments described above, the scanner unit 45 is fixed to the door body 50, for example (that is, it is driven to move vertically integrally with the door body 50 by the motor 58). However, this is not restrictive. The scanner unit 45 may be configured to be movable in the front-rear direction with respect to the door body 50, for example. Alternatively, the scanner unit 45 may be driven to move vertically independently of the door body 50 by a drive source (not shown) different from the motor 58. Alternatively, the scanner unit 45 may be attached to the transfer robot 3 or other structures within the EFEM 1.

[0097] (11) In the embodiments described above, the controller 66 causes each camera 61 to perform imaging based on an imaging schedule. However, this is not limitative. The controller 66 may cause each camera 61 to perform imaging while determining the position of the scanner unit 45 in the vertical direction, for example. The accommodation setting position of each substrate S in the vertical direction may be stored in advance in the memory (RAM) of the controller 66, for example. The position of the scanner unit 45 in the vertical direction may be determined based on the number of steps of the motor 58, which is a stepping motor, for example. The controller 66 may cause each camera 61 to perform imaging when it determines that the position of the scanner unit 45 in the vertical direction has reached the accommodation setting position of any one of the substrates S in the vertical direction.

[0098] (12) In the embodiments described above, the LP control device 46 and the controller 66 are provided separately. However, this is not limitative. For example, the LP control device 46 may be equipped with the controller 66. Alternatively, the LP control device 46 may have a function of controlling each camera 61 instead of the controller 66. When the LP control device 46 has such a function, the LP control device 46 corresponds to the determination unit of the present invention. Alternatively, for example, the control device 5 of the EFEM1 may control the load port 4. In this case, the control device 5 corresponds to the determination unit of the present invention.

[0099] (13) The load port 4 may be mounted on equipment other than the EFEM1.

[0100] (14) The present invention may be applied to a mapping device other than the load port 4.

Explanation of Reference Numerals

[0101] 4 Load port (mapping device) 61 Camera (imaging unit) 61a Light receiving lens (light receiving unit) 62 Illumination (light emitting unit) 66 Controller (determination unit) 100 FOUP (container) 113 Inner wall surface 113B Back surface (opposite surface) 113L Left side surface (non-opposite surface, side surface) 113R Right side surface (non-opposite surface, side surface) 114 Opening 200 Imaging area 201 First imaging area 202 Second imaging area RP Light receiving point S Substrate SE End face SP Detection target point VL Virtual straight line

Claims

1. A mapping device for detecting the accommodation state of a substrate accommodated in a container having an opening on a side surface, comprising: a light emitting unit that emits light at least toward the inside of the container; an imaging unit that senses at least the reflected light reflected toward the opening side by the substrate among the light emitted from the light emitting unit, and images an imaging region including a predetermined detection target point set in advance for detecting the substrate; The imaging unit is configured such that: when imaging the imaging region, a virtual straight line passing through a predetermined light receiving point determined in advance by a light receiving unit that receives the reflected light of the imaging unit and the detection target point intersects a non-opposing surface, which is a surface different from the opposing surface facing the opening side, among the inner wall surfaces of the container. The mapping device is characterized by this arrangement.

2. A determination unit that determines the accommodation state of the substrate using determination information included in imaging information, which is information obtained by the imaging unit imaging the imaging region, is provided. The determination unit is configured such that: the non-opposing surface-containing information that does not include information on the region related to the opposing surface in the imaging region and includes information on the regions related to both the non-opposing surface and the detection target point in the imaging region is used as the determination information. The mapping device according to claim 1 is characterized by this arrangement.

3. The imaging unit images a region including a plurality of the detection target points related to the substrate. The mapping device according to claim 1 or 2 is characterized by this arrangement.

4. The imaging unit is configured such that: a first camera configured to be able to image a first imaging region including two or more of the plurality of detection target points; a second camera provided separately from the first camera and configured to be able to image a second imaging region including a detection target point different from the two or more detection target points among the plurality of detection target points for detecting the thickness of the substrate. The mapping device according to claim 3 is characterized by having these components.

5. The imaging unit is configured to be able to image at least an end face of the substrate. The non-opposing surface is a side surface different from the opposing surface. The mapping device according to claim 1 or 2 is characterized by this arrangement.

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